PH detection device and wet etching system

Abstract

The utility model relates to a pH detection device and a wet etching system. The pH detection device comprises a mounting assembly used for being mounted in a target detection pipeline, the mounting assembly is provided with a containing cavity, and the mounting assembly comprises a liquid inlet and a liquid outlet which are communicated with the containing cavity; the pH detection module is supported in the accommodating cavity through the filler; and the monitoring module is in communication connection with the pH detection module and is used for acquiring the pH data detected by the pH detection module. Through the mode, the pH detection device can detect the concentration of hydrogen ions in the acid solution and further judge whether water enters the acid solution or not, so that the chamber with water leakage can be determined without shutdown and chamber disassembly.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor equipment technical field especially pH detection device and wet etching system. BACKGROUND

[0002] WET LAM machine table (Wet Lamination machine table, wet layering equipment) in the operation process acid and moisture layer recovery, because of the recovery speed is different, water can enter the circulation flow channel of acid, lead to the concentration of acid reduces, causes machine table downtime or product yield reduction.

[0003] In the traditional technology, machine table FDC (Fault Detection and Classification, fault detection and classification) card control discovers that the concentration of acid is abnormally low, needs to remove the chamber after downtime, and carries out test specifically which chamber occurs water leakage, leads to production suspension, and the workload is larger. UTILITY MODEL CONTENTS

[0004] Therefore, it is necessary to provide a pH detection device and a wet etching system to solve the problem that it is difficult to determine the chamber of water leakage for a WET LAM machine table.

[0005] In a first aspect, the present application provides a pH detection device, which comprises:

[0006] An installation assembly is used to be installed in a target detection pipeline, and the installation assembly has a containing cavity.

[0007] A pH detection module is supported in the containing cavity by a filler.

[0008] A monitoring module is in communication connection with the pH detection module, and is used to acquire pH data measured by the pH detection module.

[0009] In one embodiment, the installation assembly comprises a first end and a second end, and the first end and the second end are both provided with threads, so that the installation assembly can be screwed into the target detection pipeline.

[0010] In one embodiment, the diameter of the middle position of the installation assembly is greater than the diameter of the first end and the second end position, and the containing cavity is located at the middle position of the installation assembly.

[0011] In one embodiment, the filler is a filament structure, and the pH detection module can be arranged between the filament structures, so that the liquid in the target detection pipeline can contact the pH detection module.

[0012] In one embodiment, the filler is plastic glass filaments.

[0013] In one embodiment, the pH detection module comprises at least one of a hydrogen ion concentration detector, a pH value conversion controller, or a pH value monitoring controller.

[0014] In one embodiment, the pH detection device further comprises an alarm module connected to the monitoring module, for sending warning information.

[0015] In a second aspect, the present application further provides a wet etching system, comprising:

[0016] An etching machine, comprising a first pipeline and a second pipeline;

[0017] A water delivery assembly for delivering cleaning water to the etching machine and discharging the cleaning water from the first pipeline;

[0018] An acid delivery assembly comprising an acid solution container for storing an acid solution, the acid delivery assembly being configured to deliver the acid solution to the etching machine and collect the acid solution discharged from the second pipeline by the acid solution container, the second pipeline comprising a target etching pipeline; and

[0019] The pH detection device is arranged in the target detection pipeline.

[0020] In one embodiment, the acid delivery assembly further comprises:

[0021] An acid solution pump configured to drive the acid solution to flow from the acid solution container to the etching machine;

[0022] A filter arranged between the acid solution pump and the etching machine, for filtering the acid solution.

[0023] In one embodiment, the acid delivery assembly further comprises:

[0024] A cooler and a heater, which are arranged between the acid solution container and the etching machine in sequence.

[0025] The pH detection device and the wet etching system include a mounting assembly, a pH detection module and a monitoring module. The mounting assembly is installed in a target detection pipeline. The pH detection module is supported in the mounting assembly by a filler and communicates with the monitoring module. When liquid in the target detection pipeline flows through the mounting assembly and contacts the pH detection module, the pH detection module detects the pH value of the liquid and sends the pH value data to the monitoring module for observation by a worker. In this way, the pH detection device can be installed in any pipeline. When the pH detection device is installed in the outlet of the acid solution of any chamber of the WET LAM machine, the concentration of hydrogen ions in the acid solution can be determined according to the change of the pH value, and then it can be determined whether water enters the acid solution. In this way, the chamber in which water leakage occurs can be determined without stopping and disassembling the chamber. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 FIG. 1 is a schematic view of a pH detection device installed in a target detection pipeline according to an embodiment of the present application;

[0027] Figure 2 FIG. 2 is a structural schematic view of a pH detection device according to an embodiment of the present application;

[0028] Figure 3 FIG. 3 is a structural block diagram of a wet etching system according to an embodiment of the present application.

[0029] BRIEF DESCRIPTION OF DRAWINGS

[0030] 11, mounting assembly; 12, pH detection module; 13, filler; 14, monitoring module; 15, alarm module; 20, target detection pipeline; 21, chamber; 22, water delivery assembly; 221, water container; 222, water collection tank; 23, acid delivery assembly; 231, acid solution container; 232, acid solution pump; 233, cooler; 234, heater; 235, filter. DETAILED DESCRIPTION

[0031] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings. In the following description, many specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the spirit of the present application, so the present application is not limited to the specific embodiments disclosed below.

[0032] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like is the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model.

[0033] In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first" and "second" can explicitly or implicitly include at least one of the features. In the description of the utility model, the meaning of "multiple" is at least two, for example, two, three, etc., unless otherwise specifically limited.

[0034] In the utility model, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrated; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, it can be the communication or interaction relationship between two elements, unless otherwise specifically limited. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0035] In the utility model, unless otherwise specifically defined and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0036] It is to be understood that when an element as a preamble is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements can also be present. When an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements can also be present. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions as used herein are for illustrative purposes only and do not indicate the only orientation of the embodiments.

[0037] Referring to the drawings Figure 1 and Figure 2 , Figure 1 Fig. 1 shows a schematic diagram of a pH detection device installed in a target detection pipeline 20 in an embodiment of the present application, Figure 2 Fig. 1 shows a schematic diagram of a pH detection device in an embodiment, and the pH detection device provided in an embodiment of the present application comprises a mounting assembly 11, a pH detection module 12 and a monitoring module 14, which are used to be connected to the target detection pipeline 20 to detect the pH in the target detection pipeline 20. The mounting assembly 11 is installed in the target detection pipeline 20, the pH detection module 12 is arranged in the mounting assembly 11, and when the liquid in the target detection pipeline 20 flows through the mounting assembly 11, it contacts the pH detection module 12, so that the pH detection module 12 can detect the pH value of the liquid in the target detection pipeline 20. The pH detection module 12 is in communication connection with the monitoring module 14, and when the pH detection module 12 detects the pH value data, it can be sent to the monitoring module 14, so as to facilitate the staff to obtain the pH value data.

[0038] Specifically, the mounting assembly 11 is used to be installed in the target detection pipeline 20, and the mounting assembly 11 has a containing cavity, and the pH detection module 12 is supported in the containing cavity through the filler 13. The mounting assembly 11 comprises a liquid inlet and a liquid outlet in communication with the containing cavity. When the mounting assembly 11 is installed in the target detection pipeline 20, the liquid in the target detection pipeline 20 enters the containing cavity in the mounting assembly 11 from the liquid inlet and contacts the pH detection module 12 in the containing cavity, so that the pH detection module 12 can detect the pH value of the liquid.

[0039] The monitoring module 14 is in communication connection with the pH detection module 12, and is used to obtain the pH data measured by the pH detection module 12. The pH detection module 12 and the monitoring module 14 can realize data communication, and when the pH detection module 12 tests the pH data, the pH data can be sent to the monitoring module 14, and the staff can judge the pH value of the detection liquid according to the data value obtained by the monitoring module 14.

[0040] When the water in the water layer of the WET LAM machine leaks into the acid layer, it will cause the acid concentration in the acid layer to decrease and the pH value to decrease. When the pH detection device is installed in the acid pipeline, it can detect the change in the pH value of the acid solution, so that the pH detection device can determine whether water in the water layer has flowed into the acid layer. Specifically, if the pH value of the acid solution does not change or the change is within an allowable range, it is considered that water has not entered the acid layer. If the pH value of the acid solution increases, it is considered that the concentration of hydrogen ions decreases, i.e., water has entered the acid layer.

[0041] The pH detection device described above includes a mounting assembly 11, a pH detection module 12, and a monitoring module 14. The mounting assembly 11 is installed in the target detection pipeline 20. The pH detection module 12 is supported in the mounting assembly 11 by a filler 13 and is in communication with the monitoring module 14. When the liquid in the target detection pipeline 20 flows through, it enters the mounting assembly 11 and comes into contact with the pH detection module 12, causing the pH detection module 12 to detect the pH value of the liquid and then send the pH value data to the monitoring module 14 for observation by the staff. In this way, the pH detection device can be installed in any pipeline. When it is installed in the acid solution outlet of any chamber 21 of the WET LAM machine, it can determine the concentration of hydrogen ions in the acid solution according to the change in the pH value, and then determine whether water has entered the acid solution. In this way, without stopping the machine and disassembling the chamber 21, the chamber 21 in which water leakage occurs can be determined.

[0042] In some embodiments, the mounting assembly 11 includes a first end and a second end, both of which are provided with threads, so that the mounting assembly 11 can be screwed into the target detection pipeline 20. Specifically, the target detection pipeline 20 can be two sections connected by the mounting assembly 11, so that the first end and the second end of the mounting assembly 11 are connected to the two sections of the target detection pipeline 20, respectively.

[0043] When the mounting assembly 11 is connected between the two sections of the target detection pipeline 20, the flowing liquid in the previous section of the target detection pipeline 20 will flow to the next section of the target detection pipeline 20 after passing through the receiving cavity of the mounting assembly 11. When the flowing liquid passes through the receiving cavity of the mounting assembly 11, it will come into contact with the pH detection module 12 located in the receiving cavity, so that the pH detection module 12 can detect the pH value of the flowing liquid.

[0044] Through this screwing method, a firm and stable connection between the mounting assembly 11 and the pipeline can be ensured, and maintenance and replacement are also facilitated. This design can also effectively prevent leakage and looseness, ensuring the safety and reliability of the pipeline system during use. In some specific applications, the threads of the mounting assembly 11 can be customized according to different pipe sizes and interface standards to adapt to various pipe configuration requirements, thereby improving its versatility and applicability.

[0045] With continued reference to Figure 1 In some embodiments, the diameter of the middle portion of the mounting assembly 11 is larger than the diameter of the first and second ends, and the receiving cavity is located at the middle portion of the mounting assembly 11. In this embodiment, the first and second ends of the mounting assembly 11 are configured to connect with the target detection pipeline 20, and the diameter of the middle portion of the mounting assembly 11 is significantly larger than the diameter of the first and second ends.

[0046] Specifically, the first and second ends of the mounting assembly 11 are generally configured to connect with the pipeline system, and their diameters are relatively small to achieve a tight connection through threads or other means. In contrast, the middle portion of the mounting assembly 11 has a larger diameter design to form a receiving cavity. This receiving cavity is located in the central region of the mounting assembly 11 and has sufficient space to accommodate various internal components or liquid fluids, such as the pH detection module 12, to serve as a carrier, isolation, or flow regulation.

[0047] In addition, the larger diameter of the middle portion not only provides sufficient space inside the mounting assembly 11, but also effectively enhances the structural stability of the entire assembly, preventing deformation or damage of the assembly due to high pressure or large flow fluids.

[0048] In some embodiments, the filler 13 is a filament structure, and the pH detection module 12 can be configured between the filament structures to allow the liquid in the target detection pipeline 20 to contact the pH detection module 12. The filament structure has good mechanical strength and flexibility, which can effectively support and position other components.

[0049] For example, the filament structure can be an elongated fiber, silk, or similar material, which can form a mesh or porous filler layer. In this way, the pH detection module 12 can be configured between the filament structures, using the gaps or pores of the filament structure to fix the pH detection module 12 in place. In some possible implementations, the filler 13 is a plastic glass filament. The plastic glass filament has high mechanical strength and good corrosion resistance, can resist the corrosion of acid solution, has a longer service life, and can effectively prevent the filler 13 from being corroded or damaged.

[0050] In this embodiment, the design of the filament structure allows the liquid in the target detection pipeline 20 to flow through the gaps in the filament structure and directly contact the pH detection module 12, ensuring the contact area and flow contact efficiency of the pH detection module 12 with the liquid, thereby improving the detection accuracy and response speed.

[0051] Meanwhile, the voids of the filamentous structure can effectively prevent the liquid from flowing too fast or too slow, avoiding interference with the pH detection module 12. When the liquid flows through the filamentous structure, it will be evenly distributed around the sensor, ensuring that the pH detection module 12 is always in the right position of the liquid flow, so as to obtain stable measurement results.

[0052] In some embodiments, the pH detection module 12 includes at least one of a hydrogen ion concentration detector, a pH value conversion controller, or a pH value monitoring controller. Exemplarily, the hydrogen ion concentration detector is used to detect the concentration change of hydrogen ions in the sample, usually adopting electrochemical principle, by measuring the activity of hydrogen ions in the sample to obtain the corresponding concentration value. The pH value conversion controller converts the data obtained by the hydrogen ion concentration detector into the corresponding pH value. The pH value monitoring controller monitors and controls the entire pH detection process in real time.

[0053] In some embodiments, the pH detection device further includes an alarm module 15 connected with the monitoring module 14, for issuing warning information. Specifically, the alarm module 15 can timely issue a warning signal when the pH value in the system exceeds the predetermined range during the pH value detection process.

[0054] Exemplarily, the alarm module 15 can include an audible and visual alarm, a vibration alarm, or various forms such as remote notification through network connection, to ensure that the operating personnel can timely realize the potential abnormal situation.

[0055] The connection of the alarm module 15 and the monitoring module 14 enables the entire pH detection system to be monitored in real time and comprehensively. When the pH value received by the monitoring module 14 deviates from the preset standard range, the information will be transmitted to the alarm module 15, which judges whether the warning needs to be triggered according to the set threshold standard.

[0056] The specific warning information can include audible alarm (such as buzzer sound), flashing indicator light, or displaying abnormal prompt text on the display screen, etc. Meanwhile, the alarm module 15 can also send the warning information to the remote monitoring center or the mobile device of the relevant operating personnel through wireless communication technology (such as Wi-Fi, Bluetooth, or wired connection), facilitating remote management and intervention.

[0057] As shown in FIG. 1, the pH detection device 1 includes a pH detection module 12, a monitoring module 14, and an alarm module 15. Figure 3 The pH detection module 12 is used to detect the pH value of the sample. The monitoring module 14 is used to monitor the pH value detection process in real time. The alarm module 15 is used to issue warning information when the pH value deviates from the preset standard range. Figure 3A structural block diagram of a wet etching system in some embodiments is shown. In some embodiments, the wet etching system comprises an etching machine, a water delivery assembly 22, an acid delivery assembly 23, and the pH detection device in any of the above embodiments. The etching machine comprises a plurality of chambers 21, each chamber 21 comprising a water layer and an acid layer, each chamber 21 comprising a first pipe and a second pipe, the water layer being connected to the first pipe through which water is discharged, and the acid layer being connected to the second pipe through which acid is discharged.

[0058] In some embodiments, the second pipe comprises a target detection pipe 20, and the pH detection device is installed on the target detection pipe 20 of the second pipe. In this way, the pH detection device can detect the pH value of the liquid in the second pipe, and when water in the water layer leaks into the acid layer, the concentration of the acid solution decreases, and the pH detection device detects the change in the pH value, thereby determining which specific chamber 21 has water leakage.

[0059] Specifically, the water delivery assembly 22 is used to deliver cleaning water to the etching machine and discharge the cleaning water from the first pipe. Referring to Figure 3 , the water delivery assembly 22 can comprise a water container 221 and a water collection tank 222, water is delivered to the chamber 21 through the water container 221 and discharged to the water collection tank 222 after passing through the water layer for recycling.

[0060] The acid delivery assembly 23 is used to deliver an acid solution to the etching machine, and the acid delivery assembly 23 comprises an acid solution container 231 for storing the acid solution, and the acid solution is discharged from the second pipe and collected by the acid solution container 231. Referring to Figure 3 , the acid solution container 231 delivers the acid solution to the chamber 21, discharges from the second pipe after passing through the acid layer, and is recycled into the acid solution container 231.

[0061] In some embodiments, the acid delivery assembly 23 further comprises an acid solution pump 232 for driving the acid solution to flow from the acid solution container 231 to the etching machine. The main function of the acid solution pump 232 is to deliver the acid solution from the acid solution container 231 to the etching machine. The acid solution pump 232 is usually made of corrosion-resistant materials, which can resist the corrosion of the pump body and accessories by the acid liquid, and also has a flow regulating function to adjust the delivery amount according to different working requirements.

[0062] For example, the acid solution pump 232 can be provided with a pressure valve for adjusting the delivery pressure of the acid solution to ensure that the liquid flow and pressure during etching are maintained within the ideal range. Too high or too low pressure can affect the etching effect, and even cause damage to the equipment.

[0063] The acid delivery assembly 23 further comprises a filter 235 arranged between the acid solution pump 232 and the etching machine, for filtering the acid solution. The filter 235 can remove impurities, particles or sediments that may exist in the acid solution, so as to prevent the impurities from causing blockage, wear or contamination to the etching machine during the etching process. The filter 235 can adopt a high-precision filter screen or filter element, and a suitable filter rating can be selected according to the properties of the acid solution and the particle size of the impurities.

[0064] In some embodiments, the acid delivery assembly 23 further comprises a cooler 233 and a heater 234 arranged between the acid solution pump 232 and the filter 235 in sequence. The cooler 233 and the heater 234 serve the function of temperature control, so as to ensure that the acid solution is maintained within an optimal working temperature range during the transmission process, so as to improve the etching effect and protect the equipment from overheating or overcooling.

[0065] The main function of the cooler 233 is to lower the temperature of the acid solution, so as to prevent the chemical reaction from being too fast due to long-time contact with high temperature during the etching process, or to prevent the system from being affected by the high temperature. The acid solution pump 232 delivers the acid solution from the acid container to the etching machine, and in this process, the acid solution may be heated due to the pumping speed, pipe friction and other factors. The cooler 233 is arranged between the pump and the filter 235, and can effectively absorb and dissipate the heat generated by the acid solution during the transmission process, so as to ensure that the acid solution is maintained within a set temperature range.

[0066] The function of the heater 234 is to heat the acid solution to a suitable temperature, so as to optimize the etching efficiency. In some cases, the temperature of the acid solution may decrease due to the low external environment temperature or other factors during the transmission process, which affects the pickling effect. The heater 234 can effectively increase the temperature of the acid solution by heating the acid solution, so as to make the acid solution reach the optimal reaction rate.

[0067] The technical features of the above embodiments can be combined in any manner. In order to make the description concise, not all possible combinations of the technical features in the above embodiments are described, but as long as the combinations of the technical features do not exist, they should be considered as the scope of the present application.

[0068] The above embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the scope of the present application. It should be noted that for ordinary skilled persons in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A pH detecting device, characterized by, The pH detection device comprises: a mounting assembly configured to be mounted in a target detection pipeline, the mounting assembly having a receiving cavity, the mounting assembly comprising a liquid inlet and a liquid outlet in communication with the receiving cavity; a pH detection module supported in the receiving cavity by a filler; a monitoring module in communication with the pH detection module, configured to acquire pH data measured by the pH detection module.

2. The pH detecting device according to claim 1, characterized by The mounting assembly comprises a first end and a second end, and the first end and the second end are provided with threads, so that the mounting assembly can be screwed into the target detection pipeline.

3. The pH detecting device according to claim 2, characterized in that, The diameter of the middle part of the mounting assembly is greater than the diameter of the first end and the second end, and the receiving cavity is located at the middle part of the mounting assembly.

4. The pH detecting device according to claim 1, characterized by The filler is a filament structure, and the pH detection module can be arranged between the filament structures, so that the liquid in the target detection pipeline can contact the pH detection module.

5. The pH detecting device according to claim 4, characterized in that, The filler is a plastic glass filament.

6. The pH detecting device according to claim 1, characterized by The pH detection module comprises at least one of a hydrogen ion concentration detector, a pH value conversion controller or a pH value monitoring controller.

7. The pH detecting device according to claim 1, characterized by The pH detection device further comprises an alarm module connected with the monitoring module, configured to issue warning information.

8. A wet etching system, characterized by, The wet etching system comprises: an etching machine comprising a first pipeline and a second pipeline; a water delivery assembly configured to deliver cleaning water to the etching machine and discharge the cleaning water from the first pipeline; an acid delivery assembly comprising an acid solution container configured to store an acid solution, the acid delivery assembly being configured to deliver the acid solution to the etching machine and collect the acid solution discharged from the second pipeline by the acid solution container, the second pipeline comprising a target etching pipeline; and The pH detection device of any one of claims 1-7 is arranged in the target detection pipeline.

9. The wet etch system of claim 8, wherein, The acid delivery assembly further comprises: an acid solution pump configured to drive the acid solution to flow from the acid solution container to the etching machine; a filter arranged between the acid solution pump and the etching machine, configured to filter the acid solution.

10. The wet etch system of claim 8, wherein, The acid delivery assembly further comprises: a cooler and a heater, the cooler and the heater being arranged between the acid solution container and the etching machine in sequence.

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