Semiconductor wafer conveying and fixing device

Abstract

The utility model relates to the technical field of semiconductor wafers, in particular to a semiconductor wafer conveying and fixing device which comprises a bottom plate, a connecting column is fixedly connected to the top end of the bottom plate, a sliding rail is fixedly connected to the top end of the connecting column, a pulley is arranged on the inner wall of the sliding rail, and a fixing plate is arranged on the surface of the pulley. An electric push rod is fixedly connected to one side of the fixing plate, a long plate is fixedly connected to one side of the electric push rod, a clamping plate is fixedly connected to one side of the long plate, and a placing plate is fixedly connected to the middle of the top end of the fixing plate. According to the semiconductor wafer conveying and fixing device, through the arrangement of the connecting columns, the sliding rails, the sliding wheels and the fixing plate, when the semiconductor wafer conveying and fixing device is used, the sliding rails are fixed through the connecting columns, the sliding rails are connected with the sliding wheels, the fixing plate can be driven to move when the fixing plate is pushed, and because the sliding wheels slide in the sliding rails according to a set track, wafers on the surface of the fixing plate are stably conveyed; therefore, the effect of stably conveying the wafers is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor wafer technical field, concretely is a kind of semiconductor wafer conveying fixing device. BACKGROUND

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuit, and its raw material is silicon. After high-purity polysilicon is dissolved and incorporated into silicon crystal seed, it is slowly pulled out to form cylindrical monocrystalline silicon. After silicon crystal bar is ground, polished and sliced, silicon wafer is formed, which is wafer. Domestic wafer production line mainly uses 8-inch and 12-inch wafers. The wafer in the prior art needs to be transported and fixed during manufacturing.

[0003] However, the existing semiconductor wafer conveying fixing device has the following disadvantages:

[0004] (1) The existing semiconductor wafer conveying fixing device has weak clamping and fixing function. When in use, the wafer is usually fixed by suction cup. Since the wafer is not easy to take when suctioned by the suction cup, the wafer may be broken if the manual taking force is too large.

[0005] (2) The existing semiconductor wafer conveying fixing device has weak stable conveying function. When in use, the wafer may shake and fall during conveying because the conveying belt is unstable due to the adsorption of the suction cup. UTILITY MODEL CONTENTS

[0006] The utility model aims to provide a semiconductor wafer conveying fixing device to solve the problems in the background art.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a semiconductor wafer conveying fixing device, comprising a bottom plate, the bottom plate top end is fixedly connected with connecting column, the connecting column top end is fixedly connected with slide rail, the slide rail inner wall is provided with pulley, the pulley surface is provided with fixed plate, the fixed plate one side is fixedly connected with electric push rod, the electric push rod one side is fixedly connected with long plate, the long plate one side is fixedly connected with clamping plate, the fixed plate top end middle part is fixedly connected with placing plate.

[0008] Optionally, the bottom plate top end is fixedly connected with fixed seat on one side close to connecting column, the fixed seat one side is rotatably connected with rotating wheel, the rotating wheel surface is provided with conveying belt. The rotating wheel is fixed by the fixed seat, and the rotating wheel can be driven to rotate by the external power source. The rotating wheel can drive the conveying belt to rotate.

[0009] Optionally, the bottom plate bottom end is fixedly connected with supporting column, and the supporting column bottom end is fixedly connected with anti-skid pad. The supporting column is used for supporting the stabilizing device, and the anti-skid pad is used for preventing the device from deviating.

[0010] Optionally, the bottom end of the fixed plate is provided with a fixed groove, and the inner wall of the fixed groove is fixedly connected with a clamping plate.

[0011] Optionally, the top end of the conveying belt is provided with a plurality of connecting grooves, and the inner wall of the connecting groove is fixedly connected with a push plate.

[0012] Optionally, the inner wall of the clamping plate is provided with a clamping groove.

[0013] Compared with the prior art, the semiconductor wafer conveying and fixing device has the advantages that:

[0014] 1. The semiconductor wafer conveying and fixing device, through the setting of the connecting column, the slide rail, the pulley and the fixed plate, when in use, the slide rail is fixed through the connecting column, the pulley is connected with the slide rail, and the fixed plate can be driven to move when the fixed plate is pushed. Since the pulley slides in the slide rail according to the set track, the wafers on the surface of the fixed plate are stably conveyed and cannot shake, so that the effect of stably conveying the wafers is achieved.

[0015] 2. The semiconductor wafer conveying and fixing device, through the setting of the electric push rod, the elongated plate, the clamping plate and the placing plate, when in use, the wafers are placed in the placing plate, and then the elongated plate is driven to move towards the center of the placing plate through the electric push rod connected with the power supply. The inner diameter of the clamping plate is smaller than the inner diameter of the placing plate, so that the wafers at the center can be clamped from both sides of the placing plate. When the wafers need to be taken out, the clamping plate is driven to move to both sides through the electric push rod, so that the wafers can be taken out, thereby achieving the effect of conveniently and stably clamping the wafers for taking. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a whole appearance schematic view of the utility model;

[0017] Figure 2 It is a conveying belt enlarged schematic view of the utility model;

[0018] Figure 3 It is an electric push rod disassembled schematic view of the utility model;

[0019] Figure 4 It is a slide rail enlarged schematic view of the utility model.

[0020] In the drawing: 1, bottom plate; 2, connecting column; 3, slide rail; 4, pulley; 5, fixed plate; 6, electric push rod; 7, elongated plate; 8, clamping plate; 9, placing plate; 10, fixed seat; 11, rotating wheel; 12, conveying belt; 13, supporting column; 14, non-slip pad; 16, push plate; 17, clamping groove. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0022] Please refer to Figures 1-4 The utility model provides a kind of technical scheme: a kind of semiconductor wafer conveying fixing device, including bottom plate 1, bottom plate 1 top end fixedly connected with connecting column 2, connecting column 2 top end fixedly connected with slide rail 3, slide rail 3 inner wall is provided with pulley 4, pulley 4 surface is provided with fixed plate 5, fixed plate 5 one side fixedly connected with electric push rod 6, electric push rod 6 one side fixedly connected with long plate 7, long plate 7 one side fixedly connected with clamping plate 8, fixed plate 5 top end middle part is fixedly connected with placing plate 9, fixed slide rail 3 by connecting column 2, slide rail 3 connects pulley 4, can be driven fixed plate 5 to move when being pushed by fixed plate 5, since pulley 4 is in slide rail 3 inside according to set track sliding, wafer on the surface of fixed plate 5 is stably transported, and it will not shake, to reach the effect of stably transporting wafer, by placing wafer in placing plate 9 inside, then by electric push rod 6 external power supply pushes long plate 7 to move to the center of placing plate 9, the inner diameter of clamping plate 8 is smaller than the inner diameter of placing plate 9, and wafer in the center of placing plate 9 can be clamped from both sides, when needing to take wafer, by electric push rod 6 drives clamping plate 8 to move to both sides, wafer can be taken out, to reach the effect of being convenient for stably fixed clamping wafer and being convenient for taking;

[0023] Bottom plate 1 top end is fixedly connected with fixed seat 10 on the side close to connecting column 2, rotatingly connected with rotating wheel 11 on the side of fixed seat 10, rotating wheel 11 surface is provided with conveyor belt 12, rotating wheel 11 is fixed by fixed seat 10, and the power source connected with rotating wheel 11 can drive rotating wheel 11 to rotate, and rotating wheel 11 can drive conveyor belt 12 to rotate by rotating;

[0024] Bottom plate 1 bottom end is fixedly connected with support column 13, and antiskid pad 14 is fixedly connected with support column 13 bottom end, and support column 13 is used to support stabilizing device, and antiskid pad 14 is used to prevent skidding and prevent device from deviating;

[0025] Fixed groove is set in the bottom end of fixed plate 5, and clamping plate is fixedly connected with the inner wall of fixed groove, and the clamping plate on the surface of conveyor belt 12 pushes push plate 16 to move, and push plate 16 can drive the structure at the top to move to one side, to be used for transporting wafer;

[0026] The top of the conveying belt 12 is provided with a plurality of connecting grooves, and the inner wall of the connecting grooves is fixedly connected with a push plate 16, which is used for contacting with the clamping plate and driving the wafer to move.

[0027] The inner wall of the clamping plate 8 is provided with a clamping groove 17, and the clamping groove 17 is used for fixing and limiting the wafer.

[0028] In the utility model, the working steps of the device are as follows:

[0029] The first step is that the slide rail 3 is fixed through the connecting column 2, the slide rail 3 is connected with the pulley 4, the fixed plate 5 can be driven to move when the fixed plate 5 is pushed, the wafer on the surface of the fixed plate 5 is stably conveyed and cannot shake, so that the wafer is stably conveyed;

[0030] The second step is that the wafer is placed in the placing plate 9, the long plate 7 is moved to the center of the placing plate 9 through the power supply connected to the electric push rod 6, the inner diameter of the clamping plate 8 is smaller than the inner diameter of the placing plate 9, the wafer at the center can be clamped from the both sides of the placing plate 9, when the wafer needs to be taken, the clamping plate 8 is moved to the both sides through the electric push rod 6, and the wafer can be taken out, so that the wafer is conveniently and stably clamped and taken.

[0031] The third step is that the rotating wheel 11 is fixed through the fixing seat 10, the rotating wheel 11 is driven to rotate through the power source connected to the rotating wheel 11, the rotating wheel 11 is driven to rotate, the conveying belt 12 is driven to rotate, the clamping plate on the surface of the conveying belt 12 drives the push plate 16 to move, the push plate 16 drives the structure at the top to move to one side, the wafer is conveyed, the supporting column 13 is used for supporting the stabilizing device, the anti-skid pad 14 is used for preventing the device from deviating, and the clamping groove 17 is used for fixing and limiting the wafer.

[0032] The basic principle, main features and advantages of the utility model are shown and described. It should be understood by those skilled in the art that the utility model is not limited by the above examples, and the above examples and the description in the specification are only preferred examples of the utility model and are not used to limit the utility model, various changes and improvements of the utility model can be made without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model. The protection scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A semiconductor wafer conveying fixture comprising a base plate (1), characterized in that: The bottom plate (1) top end fixedly connected with connecting column (2), the connecting column (2) top end fixedly connected with slide rail (3), the slide rail (3) inner wall is provided with pulley (4), the pulley (4) surface is provided with fixed plate (5), the fixed plate (5) one side fixedly connected with electric push rod (6), the electric push rod (6) one side fixedly connected with long board (7), the long board (7) one side fixedly connected with clamping plate (8), the fixed plate (5) top end middle part fixedly connected with placing plate (9).

2. The semiconductor wafer conveying fixture of claim 1, wherein: The bottom plate (1) top end is close to the side of connecting column (2) fixedly connected with fixed seat (10), the fixed seat (10) one side is rotatably connected with rotating wheel (11), the rotating wheel (11) surface is provided with conveyor belt (12).

3. The semiconductor wafer conveying fixture of claim 1, wherein: The bottom plate (1) bottom end fixedly connected with support column (13), the support column (13) bottom end fixedly connected with antiskid pad (14).

4. The semiconductor wafer conveying fixture of claim 1, wherein: The fixed plate (5) bottom end is opened with fixed slot, and the fixed slot inner wall is fixedly connected with clamping plate.

5. The semiconductor wafer transport fixture of claim 2, wherein: The conveyor belt (12) top end is opened with a plurality of connecting grooves, and the connecting groove inner wall is fixedly connected with push plate (16).

6. The semiconductor wafer transport fixture of claim 1, wherein: The clamping plate (8) inner wall is opened with clamping groove (17).

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