Detection platform

Abstract

The utility model belongs to the technical field of chip detection, and discloses a detection platform, which is used for detecting semiconductor test equipment and comprises a machine table and a protective cover. The machine table is provided with a plurality of mounting positions, each mounting position is provided with a to-be-detected module, and the to-be-detected module is provided with a plurality of to-be-detected detection positions; the protection cover is arranged on the machine table and forms a protection space with the machine table in an enclosing mode, part of the detection positions are located in the protection space, and the protection cover is provided with a plurality of movable cover plates which correspond to part of the detection positions and can be opened and closed. When the detection platform is used, the to-be-detected module is installed on the installation position for debugging, the structure with problems can be quickly checked according to the debugging process, and the corresponding structure is correspondingly adjusted, so that the debugging of the to-be-detected module is efficiently completed, and the debugging efficiency of the to-be-detected module is improved. And no-load material trays circulating among part of detection positions can be ensured not to be separated during debugging, so that the safety in the debugging process is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip detection technical field especially relates to detection platform. BACKGROUND

[0002] Chip as the core structure of electronic equipment, it needs to form the conduction with the outside circuit through the metal lead, to realize the transmission of data, and the chip needs to utilize the special material supply module to send a plurality of chips to the sorting machine to carry out the detection when detecting.

[0003] In the prior art, the material supply module is directly installed on the whole machine device after assembly, and needs to be debugged after installation, and each internal component is adjusted according to the actual running state in the debugging process, so that the chip can be accurately moved in the whole detection process.

[0004] But the structure arranged by the whole machine is more, not only makes the adjustable space smaller, other structures also can cause the influence to the operation of the material supply module, leads to the difficulty increase when adjusting the material supply module, the interference factor is more when troubleshooting, the difficulty is bigger, causes the low efficiency of the whole debugging, and the material supply module also drives the tray to move at high speed in the debugging process, very easy to cause the tray to separate from the whole machine, causes the safety accident. UTILITY MODEL CONTENTS

[0005] The utility model discloses detection platform, solve the problem that the difficulty of debugging operation and troubleshooting is bigger when the material supply module in prior art is installed on the whole machine and then debugged, lead to the low efficiency of the whole debugging, also solve the problem that the tray is easy to separate and cause the safety accident.

[0006] In order to achieve this purpose, the utility model adopts the following technical scheme:

[0007] The utility model provides detection platform for the detection of semiconductor test equipment, it includes:

[0008] Machine table, the machine table has a plurality of installation sites, each installation site is installed with a to be measured module, the to be measured module has a plurality of detection sites to be detected;

[0009] Protective cover, set up in the machine table and with the machine table enclose and form the protection space, at least part of the detection site is located in the protection space, the protective cover is equipped with a plurality of movable cover plates that can be opened and closed corresponding to the at least part of detection site.

[0010] Optionally, the protective cover includes:

[0011] The protective side plate is fixed to the machine table and arranged around the periphery of the machine table. The plurality of movable cover plates are located on the top of the protective side plate to form the protection space together with the protective side plate. One side of the movable cover plate is rotationally connected to the protective side plate.

[0012] Optionally, the protective cover further comprises:

[0013] The locking member is connected to the protective side plate and the movable cover plate respectively to lock the movable cover plate.

[0014] Optionally, the locking member comprises a magnetic attraction part and an adsorption part. In the protective side plate and the movable cover plate, any one is provided with the magnetic attraction part, and the other is provided with the adsorption part.

[0015] Optionally, the protective side plate and the movable cover plate are made of transparent material.

[0016] Optionally, the protective cover further comprises:

[0017] A plurality of fixed plates are fixed to the machine table and arranged around the periphery of the machine table. The fixed plate is fixedly connected to the protective side plate.

[0018] And / or, a detection member is arranged on the protective side plate to detect the distance between the movable cover plate and the protective side plate.

[0019] Optionally, the detection platform further comprises:

[0020] A positioning block is arranged on one side of the mounting position and used to abut against the to-be-tested module. A positioning hole is formed on the side of the mounting position away from the positioning block. A positioning pin capable of penetrating the to-be-tested module is inserted into the positioning hole.

[0021] Optionally, the positioning block has a positioning notch. The side walls on both sides of the positioning notch can be attached to the adjacent side walls of the to-be-tested module.

[0022] Optionally, the side of the mounting position away from the protection space has a mounting notch. An adjustable mounting block is arranged in the mounting notch. The mounting block is used to be fixedly connected to the to-be-tested module.

[0023] And / or, a plurality of interfaces are arranged on the top wall of the machine table.

[0024] Optionally, the to-be-tested module comprises:

[0025] A material loading table is detachably connected to the machine table and partially extends into the protection space. The material loading table is used to place a material tray. The material loading table has a plurality of to-be-tested material feeding detection positions, and part of the material feeding detection positions are located in the protection space.

[0026] A pick-and-place mechanism is configured to pick and place the tray on the material loading table, and the pick-and-place mechanism comprises a plurality of pick-and-place detection positions to be detected, and each of the pick-and-place detection positions is located in the protection space.

[0027] The utility model discloses beneficial effects:

[0028] The detected module can be individually operated to be debugged by being individually installed on the installation position of the machine table, and at least part of the detection positions are covered in the protection space by the protective cover during the debugging process, so that the tray does not separate from the machine table during the empty tray transfer, thereby ensuring the safety during the debugging process, and the detection positions are detected to obtain the running state of the detected module, and according to the detection of the plurality of detection positions, the structure that needs to be adjusted in the whole running process of the detected module can be determined, and the movable cover plate is opened, so that the structure of the detected module can be adjusted in a larger space range, and during the adjustment process, only the detected module is arranged on the machine table, and no other structure interferes with the running of the detected module, thereby reducing the troubleshooting difficulty, facilitating the staff to quickly troubleshoot the structure that has problems, and improving the overall debugging efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 It is the structure schematic diagram of the detection platform in the utility model embodiment;

[0030] Figure 2 It is the structure schematic diagram of the detection platform hidden movable cover plate in the utility model embodiment;

[0031] Figure 3 It is the structure schematic diagram of the protective cover of the detection platform in the utility model embodiment;

[0032] Figure 4 It is the internal structure schematic diagram of the protective cover of the detection platform in the utility model embodiment;

[0033] Figure 5 It is the structure schematic diagram of the movable cover plate opening of the protective cover of the detection platform in the utility model embodiment;

[0034] Figure 6 It is the structure schematic diagram of the machine table and the protective cover of the detection platform in the utility model embodiment;

[0035] Figure 7 It is the structure schematic diagram of the detected module of the detection platform in the utility model embodiment.

[0036] Fig.:

[0037] 1, machine table; 11, positioning hole; 12, mounting gap; 13, mounting block; 14, interface; 15, control module;

[0038] 2, protective cover; 21, protection space; 22, protection side plate; 221, fixed support rod; 23, movable cover plate; 231, handle; 232, hinge; 233, lap rod; 24, locking piece; 25, fixed plate; 26, detection piece;

[0039] 3, to be measured module; 31, material loading table; 32, pick-and-place mechanism;

[0040] 4, positioning block;

[0041] 5, tray. DETAILED DESCRIPTION

[0042] The utility model will be described in further detail below in combination with the drawings and examples. It can be understood that the specific examples described herein are only used to explain the utility model, and not to limit the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.

[0043] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0044] In the utility model, unless otherwise explicitly specified and limited, the first feature "on" or "below" the second feature can include that the first and second features are in direct contact, or the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0045] In the description of the embodiments, the terms "upper", "lower", "left", "right", and the like orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second" are only used to distinguish in the description, and have no special meaning.

[0046] The utility model discloses a detection platform.

[0047] Referring to Figure 1 And Figure 2 The detection platform is used for detecting semiconductor test equipment, which comprises a platform 1 and a protective cover 2. The platform 1 has a plurality of mounting positions, and each mounting position is provided with a to-be-tested module 3. The to-be-tested module 3 has a plurality of detection positions to be tested. The protective cover 2 is arranged on the platform 1 and forms a protective space 21 together with the platform 1. At least part of the detection positions are located inside the protective space 21. The protective cover 2 is provided with a plurality of movable cover plates 23 corresponding to the at least part of the detection positions.

[0048] Specifically, the platform 1 is in the shape of a cube, and the bottom wall is fixed to the bottom surface through supporting legs. Casters can also be arranged on the bottom wall of the platform 1 to facilitate the movement of the platform 1 and improve the adaptability of the platform 1 to the environment. A control module 15 is arranged on the side surface of the platform 1 to display the debugging process in real time. A plurality of mounting positions are arranged on the top wall of the platform 1 at intervals, and a clamping structure is arranged on each mounting position to form a quick detachable fixed connection with the to-be-tested module 3. The to-be-tested module 3 can be a feeding module or other module of the semiconductor test equipment. After assembly, it is first installed on the mounting position of the platform 1 to prepare for debugging. A plurality of detection positions are arranged on the to-be-tested module 3, and each detection position can be detected during the debugging process to obtain the running state of the to-be-tested module 3, such as the number of trays 5, the moving direction, the moving distance, the transfer state, etc. According to the detection condition of the detection position, the adjustment of each component structure in the to-be-tested module 3 can be carried out. The detection can be completed by observation of the staff or by snapshot of the camera detection module. The utility model does not limit this, and the specific arrangement of the detection position can be designed according to the actual form and debugging mode of the to-be-tested module 3. The utility model also does not limit the number and arrangement position.

[0049] The protection cover 2 is fixed on the top wall of the machine table 1, and the protection cover 2 is in a shell shape and forms a protection space 21 between the inner wall of the protection cover 2 and the top wall of the machine table 1. The side of the protection cover 2 is open to allow the to-be-tested module 3 to at least partially extend into the protection space 21, so as to cover at least part of the detection position. The movable cover plate 23 is arranged on the protection cover 2, and the movable cover plate 23 can be opened and closed by being flipped or detached, so as to open the protection space 21 and facilitate the adjustment of the structure in the protection space 21.

[0050] The to-be-tested module 3 is first installed on the installation position of the machine table 1, and the to-be-tested module 3 can be individually operated for debugging. During the debugging process, at least part of the detection position is covered in the protection space 21 by the protection cover 2, so that the tray 5 will not be separated from the machine table 1 during the empty tray transfer, thereby ensuring the safety during the debugging process. The detection position is detected to obtain the running state of the to-be-tested module 3. According to the detection of the plurality of detection positions, the structure that needs to be adjusted during the entire running process of the to-be-tested module 3 can be determined, and the movable cover plate 23 is opened. The structure of the to-be-tested module 3 can be adjusted in a larger space range. During the adjustment process, only the to-be-tested module 3 is arranged on the machine table 1, and no other structure interferes with the operation of the to-be-tested module 3, thereby reducing the difficulty of troubleshooting, facilitating the staff to quickly troubleshoot the structure that has problems, and improving the overall debugging efficiency. When the detection platform is used, the to-be-tested module 3 is installed on the installation position for debugging. The structure that has problems can be quickly found and adjusted according to the debugging process, so as to efficiently complete the debugging of the to-be-tested module 3. Moreover, during the debugging process, the empty tray 5 that flows between the detection positions can also be ensured not to be separated, thereby ensuring the safety during the debugging process.

[0051] Reference Figures 3 to 5 Optionally, the protection cover 2 includes a protection side plate 22. The protection side plate 22 is fixed to the machine table 1 and arranged around the circumference of the machine table 1. The plurality of movable cover plates 23 are located on the top of the protection side plate 22 to form the protection space 21 with the protection side plate 22, and one side of the movable cover plate 23 is rotationally connected with the protection side plate 22.

[0052] Specifically, the protection side plate 22 extends along the vertical direction and is arranged along the circumference of the machine table 1. The protection side plate 22 can be formed by sequentially splicing three plate structures or by bending a plate structure twice. The top wall of the protection side plate 22 is provided with a movable cover plate 23. The movable cover plate 23 is in a strip shape. A hinge 232 can be arranged on the long side or the wide side of the movable cover plate 23 to form a rotating connection with the protection side plate 22. A handle 231 can be arranged on the side of the movable cover plate 23 away from the hinge 232 to facilitate lifting the movable cover plate 23. In this embodiment, the movable cover plate 23 is in a strip shape and two movable cover plates 23 are arranged. The number of movable cover plates 23 can also be adjusted according to the detection position requirement of the module 3 to be detected. The hinge 232 is arranged on the long side of the movable cover plate 23. The fixed support rod 221 is fixedly connected to the top wall of the protection side plate 22 and corresponds to the position of each movable cover plate 23. The fixed support rod 221 corresponds to one side of the long side of the movable cover plate 23 and is connected to the fixed support rod 221 through the hinge 232. The lap rod 233 is arranged on the other side of the long side of the movable cover plate 23 and can be lapped on the top wall of the protection side plate 22 to make the force uniform when the movable cover plate 23 is closed.

[0053] The protection side plate 22 is arranged on the machine table 1 to form the protection space 21. The movable cover plate 23 is arranged on the top wall of the protection side plate 22. The movable cover plate 23 is rotatably connected to the protection side plate 22. When the movable cover plate 23 is opened, only the movable cover plate 23 needs to be flipped relative to the protection side plate 22, thereby facilitating the opening and closing of the movable cover plate 23 by the staff.

[0054] Optionally, the protection cover 2 further comprises a locking piece 24. The locking piece 24 is connected to the protection side plate 22 and the movable cover plate 23 to lock the movable cover plate 23.

[0055] Specifically, the locking piece 24 can be arranged inside the protection space 21 or outside the protection side plate 22. A plurality of locking pieces 24 can be arranged on each movable cover plate 23 to lock the movable cover plate 23 when the movable cover plate 23 is closed. The locking can be achieved by clamping, magnetic attraction, etc.

[0056] By arranging the locking piece 24, the movable cover plate 23 and the protection side plate 22 can be fixedly connected together by the locking piece 24 after the movable cover plate 23 is closed, so that the movable cover plate 23 will not be flipped, thereby reducing the risk of accidental touch.

[0057] Optionally, the locking piece 24 comprises a magnetic attraction part and an adsorption part. Either the protection side plate 22 or the movable cover plate 23 is provided with the magnetic attraction part, and the other is provided with the adsorption part.

[0058] Specifically, the magnetic attraction part can be fixed on the inner side wall of the protection side plate 22, and the adsorption part can be arranged on the bottom wall of the movable cover plate 23. The magnetic attraction part can be a magnet or an electromagnet, and the adsorption part can also be a magnet or a metal structure that can be attracted by the magnet, and the utility model does not make a limitation on this. In other embodiments, the magnetic attraction part can also be fixed on the movable cover plate 23, and the adsorption part is fixed on the protection side plate 22. The specific positions of the magnetic attraction part and the adsorption part can be designed according to the actual installation space, and the utility model does not make a limitation on this.

[0059] By arranging the magnetic attraction part and the adsorption part, when the movable cover plate 23 is closed, the magnetic attraction part and the adsorption part are adsorbed and connected to adsorb and fix the movable cover plate 23. When it is needed to open the movable cover plate 23, the movable cover plate 23 is pulled outward by external force to release the adsorption and fixation of the magnetic attraction part and the adsorption part. In this way, when the movable cover plate 23 is opened or closed, only the movable cover plate 23 needs to be operated, and the magnetic attraction part and the adsorption part can automatically complete the locking or unlocking, thereby simplifying the operation process of closing the movable cover plate 23.

[0060] Optionally, the protection side plate 22 and the movable cover plate 23 are made of transparent materials.

[0061] Specifically, the protection side plate 22 and the movable cover plate 23 can be made of transparent glass or transparent plastic, so that the entire protection cover 2 has good light transmittance, and the operator can directly observe the operation of the to-be-tested module 3 in the protection space 21 from the outside.

[0062] Optionally, the protection cover 2 further comprises a plurality of fixed plates 25. The fixed plates 25 are fixed to the machine table 1 and are arranged in a plurality of intervals around the periphery of the machine table 1. The fixed plates 25 are fixedly connected with the protection side plate 22.

[0063] Specifically, the fixed plates 25 extend in the vertical direction, and the lower end of the fixed plate 25 is fixedly connected with the machine table 1. The side surface of the fixed plate 25 is attached to and fixedly connected with the protection side plate 22. The fixed connection can be achieved by bolt connection, clamping, adhesion or welding, and the utility model does not make a limitation on this. The plurality of fixed plates 25 can be distributed in intervals along the extension direction of the protection side plate 22, so that a stable connection can be formed between the protection side plate 22 and the machine table 1.

[0064] Optionally, the protection cover 2 further comprises a detection piece 26. The detection piece 26 is arranged on the protection side plate 22 to detect the distance between the movable cover plate 23 and the protection side plate 22.

[0065] Specifically, the detection piece 26 is arranged on the inner side wall of the protection side plate 22 and close to one side of the movable cover plate 23, and each movable cover plate 23 can be correspondingly provided with one detection piece 26, and the detection piece 26 can be a micro switch or a laser detector, which can detect whether the movable cover plate 23 is completely closed, and the specific type of the detection piece 26 is not limited in the utility model.

[0066] With reference to Figure 6 Optionally, the detection platform further comprises a positioning block 4, the positioning block 4 is arranged on one side of the mounting position and is used for abutting against the to-be-tested module 3, a positioning hole 11 is formed on the side of the mounting position away from the positioning block 4, and a positioning pin capable of penetrating through the to-be-tested module 3 is inserted into the positioning hole 11.

[0067] Specifically, the positioning block 4 can be fixed on one side of the mounting position by means of bolt connection or clamping or the like, the side surface of the positioning block 4 can abut against the to-be-tested module 3, so that the to-be-tested module 3 is fixedly connected with the machine table 1, and the positioning hole 11 is formed on the other side of the mounting position, and the positioning pin penetrating through the to-be-tested module 3 is inserted into the positioning hole 11, so that the to-be-tested module 3 can be quickly fixed on the mounting position, thereby facilitating the disassembly and replacement of the to-be-tested module 3.

[0068] Optionally, the positioning block 4 has a positioning gap, and the two side walls of the positioning gap can abut against the adjacent two side walls of the to-be-tested module 3.

[0069] Specifically, the positioning block 4 is in the shape of a long strip, one end of the positioning block 4 is bent to form the positioning gap, and the positioning block 4 is arranged at one corner of the to-be-tested module 3, so that the adjacent two side walls of the to-be-tested module 3 abut against the two side walls of the positioning gap, thereby limiting the to-be-tested module 3 on two side surfaces, so as to improve the positioning accuracy of the to-be-tested module 3, thereby facilitating the accurate transfer of the tray 5.

[0070] Optionally, the side of the mounting position away from the protection space 21 has a mounting gap 12, the mounting gap 12 is provided with a position-adjustable mounting block 13, and the mounting block 13 is used for fixedly connecting with the to-be-tested module 3.

[0071] Specifically, the mounting gap 12 is arranged between the positioning block 4 and the positioning hole 11, the mounting gap 12 extends along the length direction of the to-be-tested module 3, and the length of the mounting gap 12 is smaller than the length of the to-be-tested module 3, the mounting block 13 is arranged in the mounting gap 12, the mounting block 13 can slide along the length direction of the mounting gap 12, and the mounting block 13 and the mounting gap 12 can be locked at any position by means of a pin, a screw or a magnetic attraction structure. The positioning hole 11 is also formed on the mounting block 13, so that the mounting block 13 can be fixedly connected with the to-be-tested module 3.

[0072] By setting the mounting gap 12 and the mounting block 13, the position of the mounting block 13 can be adjusted according to the different sizes of the to-be-tested module 3, so that different sizes of the to-be-tested module 3 can be installed on the mounting position, thereby improving the compatibility of the detection platform, and various types of to-be-tested modules 3 can be individually installed on the mounting position for debugging.

[0073] Optionally, a plurality of interfaces 14 are arranged on the top wall of the machine table 1.

[0074] Specifically, various electrical appliances for debugging and detecting the to-be-tested module 3 can be arranged in the machine table 1, and the connection cables of the electrical appliances can be extended out through the plurality of interfaces 14 to form a connection with the corresponding to-be-tested module 3, and the line can be quickly disconnected after the detection is completed, so as to effectively shorten the time spent on debugging.

[0075] With reference to Figure 7 Optionally, the to-be-tested module 3 comprises a material loading table 31 and a taking and placing mechanism 32. The material loading table 31 is detachably connected to the machine table 1 and partially extends into the protection space 21, and the material loading table 31 is used for placing the tray 5 and has a plurality of feeding detection positions to be detected, wherein part of the feeding detection positions are located in the protection space 21; the taking and placing mechanism 32 is used for taking and placing the tray 5 on the material loading table 31, and the taking and placing mechanism 32 comprises a plurality of taking and placing detection positions to be detected, and the taking and placing detection positions are all located in the protection space 21.

[0076] Specifically, the material loading table 31 is in a strip shape, the front end of the material loading table 31 extends into the protection space 21, and the rear end of the material loading table 31 can place a plurality of trays 5. A pushing mechanism can be arranged on the material loading table 31 to sequentially push the trays 5 from the rear end to the front end. A plurality of feeding detection positions can be arranged on the material loading table 31, and the plurality of feeding detection positions can be arranged along the moving direction of the tray 5, which can detect the number, moving amplitude and moving direction of the tray 5, so as to ensure that the trays 5 on the material loading table 31 can be pushed in the correct order.

[0077] The taking and placing mechanism 32 can be arranged on the front end of the material loading table 31, and the taking and placing mechanism 32 can be arranged only one, that is, a plurality of material loading tables 31 share one taking and placing mechanism 32, or one taking and placing mechanism 32 can be arranged corresponding to each material loading table 31. In this embodiment, three material loading tables 31 are arranged along the width direction of the machine table 1, and only one taking and placing mechanism 32 is arranged. The taking and placing mechanism 32 can clamp the tray 5 and drive the tray 5 to translate along the width direction, so as to transfer the tray 5 to other material loading tables 31. A plurality of taking and placing detection positions are arranged on the taking and placing mechanism 32, so as to detect the clamping, transferring and placing of the tray 5 multiple times.

[0078] Obviously, the above embodiments of the present application are merely examples for clearly illustrating the present application, and are not intended to limit the implementation modes of the present application. For those skilled in the art, various obvious changes, re-adjustments and replacements can be made without departing from the protection scope of the present application. Here, it is not necessary and also impossible to enumerate all the implementation modes. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application claims.

Claims

1. A test platform for testing of semiconductor test equipment, characterized in that The utility model relates to a kind of detection platform, including: Machine table (1), multiple installation sites are arranged on the machine table (1), each installation site is installed with to be measured module (3), and the to be measured module (3) has multiple detection sites to be detected; Protective cover (2) is arranged on the machine table (1) and is enclosed with the machine table (1) to form protective space (21), at least part of the detection sites are located inside the protective space (21), and the protective cover (2) is provided with several movable cover plates (23) corresponding to the at least part of the detection sites.

2. The detection platform of claim 1, wherein, The protective cover (2) includes: Protective side plate (22) is fixed to the machine table (1) and is arranged around the circumferential ring of the machine table (1), and multiple movable cover plates (23) are located on the top of the protective side plate (22) to form the protective space (21) with the protective side plate (22), and one side of the movable cover plate (23) is rotatably connected with the protective side plate (22).

3. The detection platform of claim 2, wherein, The protective cover (2) further includes: Locking member (24) is connected with the protective side plate (22) and the movable cover plate (23) respectively to lock the movable cover plate (23).

4. The detection platform of claim 3, wherein, The locking member (24) includes a magnetic attraction part and an adsorption part, any one of the protective side plate (22) and the movable cover plate (23) is provided with the magnetic attraction part, and the other is provided with the adsorption part.

5. The detection platform of claim 2, wherein, The protective side plate (22) and the movable cover plate (23) are made of transparent material.

6. The detection platform of claim 2, wherein, The protective cover (2) further includes: Multiple fixed plates (25) are fixed to the machine table (1) and are arranged around the circumferential ring of the machine table (1), and the fixed plate (25) is fixedly connected with the protective side plate (22); And / or, detection member (26) is arranged on the protective side plate (22) to detect the distance between the movable cover plate (23) and the protective side plate (22).

7. The detection platform of any one of claims 1 to 6, wherein, The detection platform further includes: Positioning block (4) is arranged on one side of the installation site and is used for abutting with to be measured module (3), and the installation site is provided with positioning hole (11) on the side away from the positioning block (4), and the positioning hole (11) is inserted with positioning pin capable of penetrating to be measured module (3).

8. The detection platform of claim 7, wherein, The positioning block (4) has a positioning gap, and the sidewalls on both sides of the positioning gap can be attached to the adjacent sidewalls of the to be measured module (3).

9. The detection platform of any one of claims 1 to 6, wherein, The installation site has an installation gap (12) on the side away from the protective space (21), and the installation gap (12) is provided with an installation block (13) with adjustable position, and the installation block (13) is used for fixedly connecting with to be measured module (3); And / or, multiple interfaces (14) are arranged on the top wall of the machine table (1) with a spacing.

10. The detection platform of any one of claims 1 to 6, wherein, The to be measured module (3) includes: Material loading table (31) is detachably connected to the machine table (1) and partially extends into the protective space (21), and the material loading table (31) is used for placing tray (5), and the material loading table (31) has multiple feeding detection sites to be detected, and part of the feeding detection sites are located in the protective space (21). A pick-and-place mechanism (32) is configured to pick and place the tray (5) on the loading table (31), and the pick-and-place mechanism (32) comprises a plurality of pick-and-place detection positions to be detected, and each of the pick-and-place detection positions is located in the protection space (21).

Images