Slicing machine and storage device thereof

Abstract

The utility model relates to the technical field of linear cutting, and particularly provides a slicing machine and a storage device thereof. A storage part provided in the frame and having a storage space formed therein; and the movable part is arranged on the frame in a movable mode, so that the workpieces can freely enter the containing space through movement of the movable part, and / or the workpieces can be continuously located in the containing space after entering the containing space. By means of the structure, the storage work of the workpieces can be guaranteed through cooperation of the movable part and the storage part after discharging.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of wire cutting, and specifically provides a slicing machine and its storage device. BACKGROUND

[0002] Taking a hard and brittle material as a silicon rod as an example, a device for processing the same usually includes a cutting-off machine for cutting a rod material (a round rod) according to length specifications, a square rod cutting machine for cutting the round rod of a certain length into a square rod, a grinding machine for grinding the square rod, and a slicing machine for slicing the square rod after grinding to reach the precision standard. The working principle of the slicing machine is that after the square rod is bonded to a crystal holder, the square rod is sliced by a wire saw cutting method by a diamond wire net of the slicing machine (the silicon rod is fed along its radial direction, and the wire net reciprocates between adjacent cutting main rollers) to produce a silicon wafer. For example, each complete slicing operation of the wire net is referred to as one cutting operation of the slicing machine.

[0003] After the slicing operation of the square rod is completed, a discharging operation needs to be completed. Specifically, the silicon wafer mounted on the crystal holder is removed from the cutting chamber and subjected to subsequent processes such as degreasing treatment and cleaning. How to reliably realize the discharging operation of the slicing machine still has certain room for improvement. SUMMARY

[0004] The utility model aims to at least solve the above technical problems and / or at least part of the above technical problems, specifically, to provide a storage device of a slicing machine, which aims to improve the storage reliability of a workpiece (such as a silicon wafer usually bonded to a crystal holder) after discharging.

[0005] Therefore, the utility model provides a storage device of a slicing machine, which comprises a frame, a storage part provided on the frame and formed with an accommodation space, and a movable part movably provided on the frame, so that the workpiece can freely enter the accommodation space and / or continuously stay in the accommodation space after entering the accommodation space through the movement of the movable part.

[0006] Through the cooperation of the movable part and the storage part, the storage operation of the workpiece can be ensured.

[0007] For the above-mentioned storage device of the slicing machine, in one possible embodiment, the frame comprises a first side part and a second side part oppositely arranged along the length direction of the workpiece, the storage part is arranged between the first side part and the second side part, and the first side part and / or the second side part is provided with the movable part.

[0008] Through such a structure, a possible structure of the frame is given.

[0009] For the above-mentioned storage device of the slicing machine, in a possible implementation, the storage part comprises: a bottom supporting assembly capable of supporting the workpiece to be stored from the bottom; and a side clamping assembly capable of being in a first state allowing the workpiece to enter the accommodation space and a second state keeping the workpiece in the accommodation space under the driving of the movable part.

[0010] Through such a configuration, reliable accommodation of the workpiece can be ensured by bottom support and side clamping.

[0011] For the above-mentioned storage device of the slicing machine, in a possible implementation, the bottom supporting assembly comprises a plurality of supporting rods extending along the length direction of the workpiece.

[0012] Through such a configuration, possible structural forms of the bottom supporting assembly are given.

[0013] For the above-mentioned storage device of the slicing machine, in a possible implementation, the first side and / or the second side is provided with a supporting mounting part, wherein the supporting mounting part comprises a plurality of supporting mounting positions of different positions and / or specifications.

[0014] Through such a configuration, it is possible to ensure that the bottom supporting assembly can support silicon rods of different specifications.

[0015] For the above-mentioned storage device of the slicing machine, in a possible implementation, the side clamping assembly comprises a first clamping component and a second clamping component, wherein under the driving of the movable part, the first clamping component and the second clamping component can move in a synchronous approaching / away-from-each-other manner along the width direction of the workpiece.

[0016] Through such a configuration, it is possible to realize clamping / entering of the workpiece in the accommodation space through the opening / closing movement of approaching / away-from-each-other. The first / second clamping component corresponds to the two clamping rods arranged along the width direction of the workpiece in the embodiment.

[0017] For the above-mentioned storage device of the slicing machine, in a possible implementation, the storage device comprises a connecting arm, the movable part comprises a base body, the base body is provided with a strip-shaped hole,

[0018] The first end of the connecting arm is pivotally arranged (rotatably arranged) on the first side or the second side, the second end of the connecting arm is slidably arranged in the strip-shaped hole, and the first clamping component or the second clamping component is connected with the connecting arm at a corresponding position.

[0019] With such a configuration, the opening and closing movement between the first clamping component and the second clamping component can be achieved by the combination of rotation and sliding.

[0020] In a possible implementation of the above-mentioned storage device of the slicing machine, the base body is capable of moving in the vertical direction under the action of an external force; and / or the storage device comprises a reset assembly connected with the base body and the frame respectively.

[0021] With such a configuration, the opening and closing movement between the first clamping component and the second clamping component can be achieved by the combination of the action of the base body under the external force and the pre-tightening force of the reset assembly. The movement of the base body in the vertical direction can be achieved by manually applying an external force or by configuring a driving transmission mechanism.

[0022] In a possible implementation of the above-mentioned storage device of the slicing machine, a handheld end is arranged on the base body.

[0023] With such a configuration, the movement of the base body in the vertical direction can be achieved by manual operation.

[0024] In a possible implementation of the above-mentioned storage device of the slicing machine, the base body comprises a horizontal portion and a vertical portion, the horizontal portion is provided with the strip-shaped hole at positions close to both ends thereof respectively, and the reset assembly is connected with the vertical portion.

[0025] With such a configuration, a possible structural form of the base body is given.

[0026] In a possible implementation of the above-mentioned storage device of the slicing machine, the first clamping component and / or the second clamping component has a buffer structure or is provided with a buffer layer.

[0027] With such a configuration, it is possible to prevent the workpiece from being damaged in the clamped state.

[0028] In a possible implementation of the above-mentioned storage device of the slicing machine, the storage portion comprises a top positioning assembly, and the top positioning assembly comprises a top component having a cooperation feature capable of cooperating with the workpiece.

[0029] With such a configuration, after the workpiece is stored, the reliability of storage can be further ensured by restraining the top portion. The top component corresponds to the top rod in the embodiment.

[0030] In a possible implementation of the above-mentioned storage device of the slicing machine, the workpiece is arranged on a wafer carrier in a bonded manner, and the cooperation feature is capable of cooperating with the top or side of the wafer carrier.

[0031] By such a configuration, a possible way of realizing positioning by matching features is given.

[0032] In a second aspect, the utility model provides a slicing machine, the slicing machine includes the storage device of any preceding slicing machine.

[0033] It can be understood that the slicing machine has all the technical effects of the storage device of any preceding slicing machine, which will not be repeated here. BRIEF DESCRIPTION OF DRAWINGS

[0034] The preferred embodiments of the utility model will be described below with the workpiece being a silicon rod (hereinafter referred to as a silicon rod, and the form of the finished workpiece is usually a silicon wafer bonded to a crystal holder) as an example, and with reference to the accompanying drawings, in which:

[0035] Figure 1 Fig. 6 shows a structure schematic diagram of the storage device of the slicing machine of an embodiment of the utility model when containing a workpiece;

[0036] Figure 2 Fig. 7 shows a structure schematic diagram of the storage device of the slicing machine of an embodiment of the utility model when not containing a workpiece;

[0037] Figure 3 Fig. 8 shows a structure schematic of the movable part in the storage device of the slicing machine of an embodiment of the utility model Figure 1 ;

[0038] Figure 4 Fig. 9 shows a structure schematic of the movable part in the storage device of the slicing machine of an embodiment of the utility model Figure 2 ; and

[0039] Figure 5 Fig. 10 shows a structure schematic of the movable part in the storage device of the slicing machine of an embodiment of the utility model Figure 3 .

[0040] LIST OF REFERENCE NUMERALS:

[0041] 100, storage device;

[0042] 1, frame; 11, first side; 12, second side;

[0043] 2, storage part:

[0044] 21, bottom support assembly; 211, support rod;

[0045] 22, side clamping assembly; 221, clamping rod; 222, buffer layer;

[0046] 23, top positioning assembly; 231, top rod; 232, positioning pin;

[0047] 3, accommodating space;

[0048] 4, movable part;

[0049] 41, base body;

[0050] 411, transverse part; 4111, bar-shaped hole;

[0051] 412, vertical part;

[0052] 42, hand-held end (such as a handle, etc.);

[0053] 5, connecting arm;

[0054] 6, reset assembly;

[0055] 61, spring; 62, bracket;

[0056] 7, supporting mounting part; 71, first mounting hole; 72, second mounting hole; 73, reserved hole;

[0057] 81, first avoiding hole; 82, second avoiding hole;

[0058] 200, silicon rod; 201, crystal holder. DETAILED DESCRIPTION

[0059] The preferred embodiments of the present application will be described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present application, and are not intended to limit the protection scope of the present application.

[0060] It should be noted that in the description of the present application, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and other terms indicating the direction or positional relationship are based on the direction or positional relationship shown in the drawings, which is only for the convenience of description, and does not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0061] In addition, it should also be noted that in the description of the present application, unless otherwise explicitly specified and limited, the terms "mounting", "setting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrally connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication between the two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0062] In addition, in order to better illustrate the utility model, numerous specific details are given in the specific embodiments below, and those skilled in the art should understand that the utility model can also be implemented without certain specific details. In some examples, the principles of a slicing machine and the like are not described in detail, so as to highlight the main idea of the utility model. The utility model will be described below with reference to all or part of the drawings in Figures 1 to 5

[0063] The main frame of the slicing machine forms a cutting chamber, the cutting mechanism (the cutting mechanism is removed in the drawing) wound with a wire net is arranged in the cutting chamber, and the feeding mechanism can approach or move away from the upper surface of the cutting mechanism in the vertical direction. Exemplarily, the cutting mechanism capable of performing slicing operation on a silicon rod (square rod) usually includes at least two cutting main rollers (such as two in the same plane, three in an inverted triangular distribution, etc.). In general, the operation mode of the slicing operation is as follows: after the rod bonding is completed in the bonding workshop (such as fixing the silicon rod to be sliced 200 on the bottom of the crystal holder 201 to form a crystal rod by bonding in the bonding workshop), the crystal holder is fixed on the feeding mechanism, and the wire net is reciprocated between the cutting main rollers of the cutting mechanism. By driving the feeding mechanism to approach the wire net (such as vertically downward), the silicon rod can be cut by the wire saw to perform slicing operation on the square rod. In general, the feeding and discharging device can be arranged on the front side or the rear side of the slicing machine, and the silicon rod carried on the crystal holder can be manually or automatically conveyed to the corresponding position in the cutting chamber by the corresponding feeding and discharging device. After the slicing operation of the silicon rod by the slicing machine is completed, the silicon rod (the actual form should be a silicon wafer bonded to the crystal holder) can be placed in the storage device of the utility model, and then, the storage device with the silicon rod can be transported to the specified position by the walking device such as AGV, and then the storage device with the silicon rod is lifted from the AGV by the device such as a mechanical hand and carried to the associated position of the subsequent process such as a degreasing tank.

[0064] In one possible implementation, the storage device 100 mainly includes a frame 1, a storage part 2, and a movable part 4, wherein the storage part 2 is arranged on the frame 1 and forms a storage space 3 capable of accommodating the silicon rod 200 bonded to the crystal holder 201, and the movable part 4 is movably arranged on the frame 1. By the movement of the movable part 4, the silicon rod can freely enter the storage space when it needs to be stored, and after entering the storage space, the silicon rod 200 bonded to the crystal holder 201 can be stably arranged in the storage space.

[0065] ​In a possible implementation, the frame 1 includes a first side 11 and a second side 12 arranged opposite to each other along the length direction of the silicon rod. In the example, the two sides are substantially plate-shaped structures, and the two sides are connected by connecting rods. The connecting rods include two groups of transverse connecting rods, and longitudinal reinforcing rods are arranged between the two groups of transverse connecting rods. Obviously, a person skilled in the art can determine the specific structure of the frame according to actual needs, for example, the first / second side is arranged as a wider rod-shaped structure, the connecting rod is replaced by a plate-shaped structure, and the like.

[0066] In a possible implementation, the receiving part 2 mainly includes a bottom supporting assembly 21 and a side clamping assembly 22. The bottom supporting assembly 21 is mainly used to prevent the silicon wafer or the like in the accommodation space from falling to the ground or the sink to cause loss. The side clamping assembly 22 is movable under the driving of the movable part 4, and is mainly used to allow the silicon rod to freely enter before being received and to ensure that the silicon rod can be reliably in the accommodation space after being received.

[0067] In the example, the bottom supporting assembly 21 includes two supporting rods 211 extending along the length direction of the silicon rod. In order to ensure the reliability of the support, the distance between the two supporting rods should be less than the width of the silicon rod. Obviously, a pair of supporting rods is only an exemplary description of the bottom supporting assembly. A person skilled in the art can flexibly select the structure of the bottom supporting assembly according to actual needs, for example, the supporting plate, the supporting rod of the fold line type, the supporting rod including three or more, and the like.

[0068] Still taking the bottom supporting assembly 21 including two supporting rods 211 as an example, since the specifications of the silicon rod include multiple specifications, in order to ensure that the bottom supporting assembly 21 can support silicon rods of multiple specifications, a supporting mounting part 7 is arranged on the first / second side at a position corresponding to the two ends of each supporting rod 211. The supporting mounting part 7 includes supporting mounting positions of multiple positions and / or specifications (shapes, sizes, and the like). In the example, the supporting mounting part 7 includes a first mounting hole 71, a second mounting hole 72, and an uppermost reserved hole 73 which are communicated with each other. After the supporting rod enters the supporting mounting part 7 through the uppermost reserved hole 73, the supporting rod can be arranged in the first mounting hole 71 or the second mounting hole 72 through the communicated structure. In the example, the specifications (diameters) of the (first, second) mounting holes are substantially the same, the positions along the width direction are substantially the same, and the positions along the height direction are different. The hole diameter of the reserved hole is larger, and the end of the supporting rod can freely enter the supporting mounting position through the reserved hole. When the supporting rod enters the supporting mounting position and is in the first / second mounting hole, since the radial dimension of the end of the supporting rod is larger than the hole diameter of the first / second mounting hole, the supporting rod can be prevented from being separated from the first / second mounting hole.

[0069] In one possible implementation, the side clamping assembly 22 includes two clamping rods 221 extending along the length direction of the silicon rod, and the two clamping rods 221 are capable of moving or relatively moving towards or away from each other under the driving of the moving part. In this way, when the silicon rod needs to be put in, the two clamping rods are moved or relatively moved away from each other, and after the silicon rod is put in the accommodating space, the two clamping rods are moved or relatively moved towards each other. The clamping rod as a whole or at least the region facing the silicon rod has a cushion structure or is provided with a cushion layer 222. In order to prevent damage to the silicon wafer in the centered clamping state, the outer surface of the clamping rod is covered with a flexible layer.

[0070] The moving or relatively moving of the two clamping rods towards or away from each other can be generated by the movement of one of the clamping rods, or can be generated by the movement of the two clamping rods, and for the latter, the movement forms and driving transmission modes of the two clamping rods can be the same or different. Preferably, the two clamping rods are capable of moving towards or away from each other in a synchronous manner under the driving of the moving part, and for example, in the case of moving towards each other, the clamping of the silicon rod is realized while the centering effect is also achieved. In addition, in order to ensure the reliability of the support, the height of the clamping rod should be between the height dimensions of the silicon rod, such as being close to the position above the silicon rod and the highest position not being higher than the upper surface of the silicon rod. The distance therebetween should be less than the width of the silicon rod.

[0071] Obviously, the pair of clamping rods is only an exemplary description of the side clamping assembly, and those skilled in the art can flexibly select the structure form of the side clamping assembly according to actual needs, such as the side clamping assembly being similar to the bottom support assembly as described above, the side clamping assembly can be a clamping plate, a clamping rod of a fold line type, including three or more clamping rods, etc.

[0072] In one possible implementation, the accommodating part 2 further includes a top positioning assembly 23, which is mainly used to ensure the reliability of the accommodation by restraining at the top after the silicon rod is accommodated. In this example, the top positioning assembly includes two top rods 231 arranged along the width direction of the silicon rod, the two ends of the top rod are arranged on two connecting rods above the frame, and the top rod is provided with a positioning pin 232, and correspondingly, the crystal holder to which the silicon rod is bonded is provided with a positioning groove 2011 capable of cooperating with the positioning pin. Obviously, the positioning pin and the positioning groove are only a specific structure form of the cooperation feature, and those skilled in the art can flexibly adjust them according to actual needs, such as replacing the vertical positioning pin with a protrusion extending along the length direction of the silicon rod, arranging the cooperation feature at a position capable of cooperating with the outer edge of the crystal holder, and the cooperation feature can include one or more, etc.

[0073] In addition, in order to adapt to silicon rods of different lengths, the top rods can be movably arranged on the frame, such as being provided with a strip-shaped hole or a plurality of mounting holes on the frame, and the top rods can be mounted in different positions of the strip-shaped hole or any one of the mounting holes. In addition, the combination of the two top rods is only an exemplary description of the top positioning assembly, and similar to the bottom supporting assembly described above, the top positioning assembly can be a top side plate / top plate, a top rod in the shape of a broken line, a top rod including three or more top rods (such as a top rod arranged on each of the three sides of the crystal holder), and the like.

[0074] In one possible implementation, the movable part 4 includes a base body 41, and a strip-shaped hole 4111 extending in the width direction of the silicon rod (transversely) is arranged on the base body. In this example, the base body is substantially in the shape of a T and includes a transverse portion 411 and a vertical portion 412, and the transverse portion 411 is provided with a strip-shaped hole 4111 at a position close to each end thereof. The receiving device further includes a connecting arm 5, a first end of the connecting arm is pivotally arranged on the first / second side of the frame (the connecting arm can rotate about the first end relative to the first / second side of the frame), and a second end of the connecting arm can slide in the strip-shaped hole 4111 at the corresponding position (the other end of the connecting arm is slidably connected with the transverse portion), and the clamping rod 221 is connected with the connecting arm at the corresponding position, such as being connected at a position corresponding to the second end or a position close to the second end. Exemplarily, the first end is located outside the second end. In this way, when the base body moves upward, the two clamping rods move away from each other to open the accommodation space so that the silicon rod can freely enter. When the base body moves downward, the two clamping rods move close to each other to clamp the silicon rod in the accommodation space.

[0075] Obviously, the combination of the connecting arm and the strip-shaped hole is only an exemplary description of achieving the movement of the two clamping rods away from / close to each other, and those skilled in the art can flexibly select other structures according to actual needs, such as a telescopic mechanism in the horizontal direction. In addition, obviously, the T-shaped structure is only an exemplary structure of the base body, and those skilled in the art can flexibly adjust the structure thereof according to actual needs, such as a U-shaped structure, a plate-shaped structure, and the like.

[0076] In a possible implementation, the upward movement of the base body 41 is achieved by human force, and the downward movement of the base body 41 is achieved by the reset assembly 6. In the example, a hand-held end 42 is arranged on the base body 41, for example, the hand-held end is a handle arranged on the transverse portion 411 near the middle position. Obviously, the structure form and number of the handle can be flexibly selected, for example, two hand-held ends are arranged to facilitate double-hand operation. In this way, when the operator lifts the base body 41 upward, the two clamping rods are opened away from each other. When the external force of the operator is removed, the base body moves downward under the action of the reset assembly, and the two clamping rods are closed to each other. Obviously, the upward movement by human force and the downward movement by the reset assembly are only specific movement forms of the movable part. Those skilled in the art can flexibly adjust it according to actual needs, for example, a telescopic mechanism such as a pneumatic cylinder or a linear module is arranged on the base body to move in the vertical direction in the forward and / or reverse direction.

[0077] In a possible implementation, the reset assembly 6 includes a spring 61, the lower end of the spring is connected to the vertical portion 412 of the base body near the bottom end, and the upper end of the spring is arranged on the frame. In the example, a bracket 62 is arranged on the inner side of the first / second side portion of the frame, and the upper end of the spring is arranged on the bracket. In the state without external force, the base body is in the low position under the pre-tightening force of the spring. In the case that the upward external force acts on the base body, the base body moves upward to overcome the pre-tightening force of the spring, thereby driving the two clamping rods to move away from each other. Obviously, one spring and its connection mode are only a possible structure form of the reset assembly. Those skilled in the art can flexibly adjust it according to actual needs, for example, the spring includes multiple springs, and the two ends of the spring are respectively provided with a connection bracket. For example, the first / second side portion of the frame is provided with a first avoiding hole 81 (generally a square hole) allowing the connection arm to freely move and a second avoiding hole 82 (generally a vertical hole) allowing the base body to freely move.

[0078] In the example, one movable part is arranged on the first side portion and the second side portion of the frame respectively, and the two movable parts are symmetrically arranged on the frame. For each movable part, a strip hole is arranged on the transverse portion of the base body near the two ends, and each strip hole is provided with a connection arm. The two connection arms are provided with a pair of clamping rods. A spring is arranged between the vertical portion of the base body and the inner wall of the frame. Obviously, those skilled in the art can determine the structure form and number of the movable part according to actual needs, for example, only one base body is arranged on one side portion (the other side is a driven side), and the movable parts on the two side portions can be the same or different.

[0079] It can be seen that, in the preferred embodiment of the present application, the accommodating space capable of accommodating the silicon rod is constructed through the setting of the frame part. Through the cooperation of the movable part and the frame part, the silicon rod can freely enter the accommodating space and reliably be in the accommodating space. In addition, the combination of manual lifting and spring makes the opening and closing movement between the two clamping rods flexible, and since the driving mechanism is not required, the cost of the device is reduced.

[0080] So far, the technical scheme of the present application has been described in combination with the preferred embodiments shown in the drawings, but it is easy for those skilled in the art to understand that the protection scope of the present application is obviously not limited to these specific embodiments. Those skilled in the art can make equivalent changes or replacements to the related technical features without deviating from the principles of the present application, and the technical schemes after these changes or replacements will all fall within the protection scope of the present application.

Claims

1. A storage device for a microtome, characterized in that The receiving device comprises: a frame; a receiving part provided on the frame and formed with a receiving space; and a movable part provided on the frame in a movable manner, so as to: by the movement of the movable part, by the movement of the movable part, the workpiece can freely enter the receiving space, and / or so that the workpiece can continuously be in the receiving space after entering the receiving space.

2. The storage device of claim 1, wherein The frame comprises a first side part and a second side part oppositely arranged along the length direction of the workpiece, the receiving part is arranged between the first side part and the second side part, and the first side part and / or the second side part is provided with the movable part.

3. The storage device of claim 2, wherein The receiving part comprises: a bottom supporting assembly capable of supporting the workpiece to be received from the bottom; and a side clamping assembly capable of being in a first state allowing the workpiece to enter the receiving space and a second state continuously keeping the workpiece in the receiving space under the driving of the movable part.

4. The storage device of claim 3, wherein The bottom supporting assembly comprises a plurality of supporting rods extending along the length direction of the workpiece.

5. The storage device of claim 4, wherein The first side part and / or the second side part is provided with a supporting mounting part, wherein the supporting mounting part comprises a plurality of supporting mounting positions with different positions and / or specifications.

6. The storage device of claim 3, wherein The side clamping assembly comprises a first clamping part and a second clamping part, wherein under the driving of the movable part, the first clamping part and the second clamping part can move in a synchronous manner of approaching / away from each other along the width direction of the workpiece.

7. The storage device of claim 6, wherein The receiving device comprises a connecting arm, the movable part comprises a base body provided with a strip-shaped hole, the first end of the connecting arm is pivotally arranged on the first side part or the second side part, the second end of the connecting arm is slidably arranged in the strip-shaped hole, and the first clamping part or the second clamping part is connected with the connecting arm at a corresponding position.

8. The storage device of claim 7, wherein The base body can move in a vertical direction under the action of an external force; and / or The receiving device comprises a reset assembly connected with the base body and the frame respectively.

9. The storage device of claim 8, wherein The base body is provided with a hand-held end.

10. The storage device of claim 8, wherein The base body comprises a horizontal part and a vertical part, the horizontal part is provided with the strip-shaped hole at positions close to both ends thereof respectively, and the reset assembly is connected with the vertical part.

11. The storage device of claim 6, wherein The first clamping part and / or the second clamping part has a buffer structure or is provided with a buffer layer.

12. The storage device of claim 3, wherein The receiving part comprises a top positioning assembly, the top positioning assembly comprises a top part provided with a cooperation feature capable of cooperating with the workpiece.

13. The storage device of claim 12, wherein, The workpiece is arranged on a wafer holder in a bonded manner, and the cooperation feature can be connected with the top or side of the wafer holder.

14. A microtome, characterized by The slicing machine is configured with the receiving device of the slicing machine according to any one of claims 1 to 13.

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