Circulating activation system for silane preparation

Abstract

The utility model discloses a cyclic activation system for silane preparation, and belongs to the technical field of silane production. The system comprises a reactive distillation tower, a reactive distillation tower overhead condenser, a reboiler, a cracking reaction kettle and a storage tank, a first inlet in the middle of the reactive distillation tower is connected into a liquid catalyst and / or trichlorosilane and / or dichlorosilane supply pipeline; a reboiler is arranged at the bottom of the reactive distillation column for heat supply; a condenser is arranged at the top of the reactive distillation tower and is used for discharging silane gas or / and dichlorosilane; an outlet of the tower kettle is connected to a first inlet of the cracking reaction kettle through a pump I; a second inlet of the cracking reaction kettle is connected into an HCl supply pipeline through a second pump and is used for carrying out cracking reaction with a material output by the tower kettle; the first outlet of the cracking reaction kettle is communicated with the inlet of the storage tank through a pipeline. According to the device, silane preparation and a high-boiling cracking process are creatively combined, so that the problem of chlorosilane polymerization caused by high catalytic capacity of a liquid catalyst is effectively solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of silane preparation circulation activation systems, belong to silane production technical field. BACKGROUND

[0002] High-purity polysilicon material is a key raw material for semiconductor and photovoltaic industry, and its preparation process is crucial. Currently, the modified Siemens method and silane fluidized bed method are the mainstream polysilicon preparation methods. The silane fluidized bed method has become an important process improvement direction for polysilicon production due to its low production cost, low comprehensive energy consumption, and low carbon emissions. Silane, as the core raw material of the silane fluidized bed method, its preparation process is also crucial.

[0003] The disproportionation method is currently the mainstream silane preparation process, which converts trichlorosilane into silane through a two-step disproportionation. The traditional disproportionation process has the problem of high energy consumption, while the introduction of reaction rectification technology effectively reduces the energy consumption of silane preparation. In addition, the existing disproportionation method for preparing silane mainly relies on organic amine resin catalysts, but in actual application, organic amine resin catalysts have problems such as aging and deactivation to some extent, and it is difficult and expensive to replace them. Specifically, as disclosed in CN117717795A, the organic amine resin catalyst is wrapped in a composite structure of catalyst and filler formed by plate corrugated packing and wire mesh packing, but the organic amine resin catalyst has problems such as catalyst aging and deactivation, as disclosed in CN105037409A, the reaction device has high difficulty and cost in unloading and replacing the catalyst. In view of this, patent CN117602628A discloses a method for preparing silane by continuous reaction rectification in a backpack, the reactor is independently set, the catalyst installation and replacement can be operated online in a closed manner, the process is safer, the reactor can be independently temperature-controlled, the rectification tower operating pressure is improved, the silane pressurization process is cancelled, and potential leakage points of moving equipment are avoided. However, this is similar to the two-step disproportionation method, separating the reaction and separation can be considered as a compromise between the two-step disproportionation method and the reaction rectification method, or it can also be considered as a variant of the two-step disproportionation method.

[0004] To solve the above problems, the industry has proposed a liquid catalyst catalysis scheme. As patent CN105037409A discloses a method for preparing and purifying silane by reaction rectification, which comprises the steps of: carrying out disproportionation reaction of raw material trichlorosilane in the first reaction rectification tower, and carrying out rectification in the first rectification tower, preparing dichlorodisilane, discharging from the top of the tower and feeding into the second reaction rectification tower, and carrying out disproportionation reaction again in the second rectification tower to generate silane product and carrying out rectification separation in the second rectification tower to discharge from the top of the tower, characterized in that the reaction and separation are coupled, and silane is obtained by two-step catalytic disproportionation, and the catalyst is an ionic liquid catalyst. The method for preparing and purifying silane by reaction rectification can simply and efficiently prepare silane, and the whole process is closed-loop material recycling, without pollution emission and environmental friendly. However, due to the high catalytic activity of the liquid catalyst, the chlorosilane is prone to polymerization, forming high-boiling substances, increasing the viscosity of the tower bottom liquid, reducing the activity of the catalyst, and making the reaction difficult to proceed, thereby hindering the industrial application of the liquid catalyst.

[0005] Therefore, in view of the above technical defects, it is urgent to provide a new and effective silane preparation and circulation activation system to effectively solve the problems that the liquid catalyst is prone to polymerization of chlorosilane during silane preparation, forming high-boiling substances and affecting the reaction. Practical new type content

[0006] The purpose of the present application is to provide a silane preparation and circulation activation system, which combines silane preparation with high-boiling cracking technology, solves the problem of easy polymerization of chlorosilane caused by high activity of liquid catalyst during catalysis, and realizes efficient and stable application of liquid catalyst in silane preparation.

[0007] To solve the above technical problems, the present application adopts the following technical scheme:

[0008] The present application provides a silane preparation and circulation activation system, which comprises: a reaction rectification tower, a reaction rectification tower top condenser, a reboiler, a cracking reactor and a storage tank.

[0009] The first inlet in the middle of the reaction rectification tower is connected with pipeline eleven for supplying liquid catalyst and / or trichlorosilane and / or dichlorodisilane into the tower; the reboiler is arranged at the bottom of the reaction rectification tower and is used for providing heat source; the top of the reaction rectification tower is provided with a reaction rectification tower top condenser, which is used for discharging silane gas or / and dichlorodisilane through pipeline thirteen;

[0010] The outlet of the column of the reaction rectification tower is communicated with the first inlet of the cracking reaction kettle through pipeline fifteen; the second inlet of the cracking reaction kettle is communicated with pipeline forty-three, for feeding HCl into the cracking reaction kettle to react with the material output from the column; wherein, pump one is arranged on the pipeline fifteen, and pump two is arranged on the pipeline forty-three; the first outlet of the cracking reaction kettle is communicated with the inlet of the storage tank through pipeline forty-two.

[0011] Optionally, the pipeline eleven, pipeline thirteen, pipeline fifteen, pipeline forty-two and pipeline forty-three are all provided with corresponding valves.

[0012] Optionally, the silane preparation circulating activation system further comprises a cracking reaction kettle condenser and pipeline forty-one.

[0013] The second outlet of the cracking reaction kettle is communicated with the inlet of the cracking reaction kettle condenser through the pipeline forty-one, for conveying the excessive HCl and chlorosilane gas in the cracking reaction kettle into the cracking reaction kettle condenser through the pipeline forty-one to be condensed.

[0014] Optionally, the pipeline forty-one is provided with a corresponding valve.

[0015] Optionally, the silane preparation circulating activation system further comprises a pipeline twelve, which is communicated with the top of the reaction rectification tower, for discharging the non-condensable gas in the tower.

[0016] Optionally, one end of the pipeline twelve is communicated with the top outlet of the reaction rectification tower, and the other end is communicated with the tower top condenser of the reaction rectification tower, for cryogenic separation and recovery of silane gas.

[0017] Optionally, the silane preparation circulating activation system further comprises a pipeline fifty-one; the first outlet of the storage tank is communicated with the inlet of the cracking reaction kettle condenser through the pipeline fifty-one, for conveying the residual HCl in the storage tank into the cracking reaction kettle condenser through the pipeline fifty-one to be condensed.

[0018] Optionally, the pipeline twelve and the pipeline fifty-one are both provided with corresponding valves.

[0019] Optionally, the first outlet of the cracking reaction kettle condenser is communicated with pipeline sixty-four, for conveying the condensed silicon tetrachloride, trichlorosilane and liquid catalyst in the cracking reaction kettle condenser into the corresponding separation system to be separated.

[0020] Optionally, the pipeline sixty-four is provided with a corresponding valve.

[0021] Optionally, the second outlet of the cracking reactor condenser is in communication with the second inlet of the cracking reactor through pipeline sixty-one, pipeline sixty-three and pipeline forty-three in sequence, for conveying the non-condensable gas HCl in the cracking reactor condenser back to the cracking reactor.

[0022] Optionally, the pipeline sixty-one, the pipeline sixty-three and the pipeline forty-three are respectively provided with valves.

[0023] Optionally, the second outlet of the cracking reactor condenser is in communication with the pipeline sixty-two through the pipeline sixty-one, for recycling or processing the non-condensable gas HCl in the cracking reactor condenser through the pipeline sixty-two.

[0024] Optionally, the pipeline sixty-two is provided with a valve.

[0025] Optionally, the pipeline forty-three is also in communication with pipeline seventy-one, for supplementing HCl required by the cracking reaction through the pipeline seventy-one.

[0026] Optionally, the pipeline seventy-one is provided with a valve.

[0027] Optionally, the silane preparation and circulation activation system further comprises a membrane separator, a pipeline fourteen, a pipeline ninety-one and a pipeline ninety-two.

[0028] The second outlet of the storage tank is in communication with the inlet of the membrane separator through the pipeline ninety-two, for conveying the chlorosilane containing liquid catalyst after removing HCl to the membrane separator through the pipeline ninety-two for separation of chlorosilane and liquid catalyst.

[0029] The first outlet of the membrane separator is in communication with the second inlet of the reaction rectifying tower through the pipeline fourteen, for conveying the liquid catalyst after separation and treatment back to the reaction rectifying tower through the pipeline fourteen.

[0030] The second outlet of the membrane separator is in communication with the pipeline ninety-one, for conveying the chlorosilane after separation and treatment to the corresponding separation system through the pipeline ninety-one for separation of silicon tetrachloride and trichlorosilane.

[0031] Optionally, the pipeline fourteen, the pipeline ninety-one and the pipeline ninety-two are respectively provided with valves.

[0032] Optionally, the silane preparation and circulation activation system further comprises a pipeline fifty-two in communication with the second outlet of the storage tank, for conveying the chlorosilane containing liquid catalyst after removing HCl to the corresponding separation system through the pipeline fifty-two for separation of liquid catalyst and chlorosilane.

[0033] Optionally, the pipeline fifty-two is provided with a valve.

[0034] Compared with the prior art, the utility model has the advantages of:

[0035] (1) the utility model discloses a combination of chlorosilane polymer cracking and reaction rectification to prepare silane, effectively solves the problem of chlorosilane polymerization caused by the excessive catalytic ability of liquid catalyst, avoids the increase of liquid catalyst system viscosity, thereby prolonging the service life of liquid catalyst and reducing the consumption of catalyst;

[0036] (2) the system provided by the utility model is provided with multiple valves and pipelines, so that the flow direction of supplementary HCl and non-condensable gas HCl recovery treatment can be flexibly adjusted according to actual needs, and the adaptability and operability of the system are enhanced;

[0037] (3) the utility model also uses the combination of the cracking reactor condenser and the membrane separator, not only condenses the excess HCl and chlorosilane gas, but also effectively separates part of the chlorosilane by using membrane separation technology, eliminates the influence of liquid catalyst in the separation process, and improves the separation efficiency and purity;

[0038] (4) the utility model optimizes the circulation activation process, reduces the waste of raw materials and catalyst, improves the quality and yield of products, thereby reducing the production cost and improving the economic benefit. BRIEF DESCRIPTION OF DRAWINGS

[0039] Figure 1 Fig. 1 is a structural schematic diagram of one embodiment of the silane preparation circulation activation system of the utility model;

[0040] Figure 2 Fig. 2 is a structural schematic diagram of another embodiment of the silane preparation circulation activation system of the utility model;

[0041] In the drawing: 1-reaction rectification tower;11-pipeline eleven;12-pipeline twelve;13-pipeline thirteen;14-pipeline fourteen;15-pipeline fifteen;2-reboiler;3-pump one;4-cracking reactor;41-pipeline forty-one;42-pipeline forty-two;43-pipeline forty-three;5-tank;51-pipeline fifty-one;52-pipeline fifty-two;6-cracking reactor condenser;61-pipeline sixty-one;62-pipeline sixty-two;63-pipeline sixty-three;64-pipeline sixty-four;7-pump two;71-pipeline seventy-one;8-reaction rectification tower overhead condenser;9-membrane separator;91-pipeline ninety-one;92-pipeline ninety-two. DETAILED DESCRIPTION

[0042] The utility model will be described further below with reference to the drawings. The following examples are only used to make the technical scheme of the utility model more clear, and cannot limit the protection scope of the utility model.

[0043] Example 1

[0044] This embodiment introduces a kind of silane preparation cyclic activation system, it includes: reaction rectifying column 1, reaction rectifying column overhead condenser 8, reboiler 2, cracking reactor 4 and storage tank 5;

[0045] The first inlet of the middle part of the reaction rectifying column 1 is communicated with pipeline eleven 11 for feeding liquid catalyst and / or trichlorosilane and / or dichlorodisilane into the column;The reboiler 2 is arranged at the bottom of the reaction rectifying column 1 for providing heat source;The top of the reaction rectifying column 1 is provided with reaction rectifying column overhead condenser 8 for discharging silane gas or / and dichlorodisilane through pipeline thirteen 13;

[0046] The outlet of the column kettle of the reaction rectifying column 1 is communicated with the first inlet of the cracking reactor 4 through pipeline fifteen 15;The second inlet of the cracking reactor 4 is communicated with pipeline forty-three 43 for feeding HCl into the cracking reactor 4 to react with the material output from the column kettle;Wherein, pump one 3 is arranged on the pipeline fifteen 15, and pump two 7 is arranged on the pipeline forty-three 43;The first outlet of the cracking reactor 4 is communicated with the inlet of the storage tank 5 through pipeline forty-two 42.

[0047] In the actual application process of the embodiment, liquid catalyst and / or trichlorosilane and / or dichlorodisilane raw materials are fed into the first inlet of the middle part of the reaction rectifying column 1 through pipeline eleven 11. The reboiler 2 is arranged at the bottom of the reaction rectifying column 1 to provide necessary heat source to maintain the reaction temperature in the column. In the reaction rectifying column 1, the raw materials react with the catalyst to generate silane and other by-products. Among them, the silane gas generated by reaction and / or the unreacted dichlorodisilane is condensed by the reaction rectifying column overhead condenser 8 at the top of the reaction rectifying column 1, and the condensed product is discharged through pipeline thirteen 13 for subsequent use or treatment.

[0048] Further, the outlet of the column kettle of the reaction rectifying column 1 sends the unreacted material (mainly including high polymer) into the first inlet of the cracking reactor 4 through pipeline fifteen 15 (equipped with pump one 3). HCl is fed into the second inlet of the cracking reactor 4 through pipeline forty-three 43 (equipped with pump two 7) to react with the material output from the column kettle to further decompose the high polymer and generate valuable products. Finally, the first outlet of the cracking reactor 4 sends the cracked product into the storage tank 5 through pipeline forty-two 42 for storage for subsequent further treatment.

[0049] Example 2

[0050] Reference Figure 1 On the basis of Example 1, this embodiment will introduce the related structure composition and function realization process of the silane preparation circulation activation system, which is described as follows.

[0051] In the actual application process of this embodiment, the liquid catalyst and / or trichlorosilane and / or dichlorodisilane enter the reaction rectification tower 1 from the pipeline eleven 11, and the disproportionation reaction is carried out in the reaction rectification tower 1 to prepare silane or / and dichlorodisilane. Among them, the corresponding valve is arranged on the pipeline eleven 11; the bottom of the reaction rectification tower 1 is equipped with a reboiler 2 for providing a heat source.

[0052] In the disproportionation reaction process, silane gas or / and dichlorodisilane is extracted from the pipeline thirteen 13, and non-condensable gas is discharged from the pipeline twelve 12 for recovery or treatment. In addition, it is worth mentioning that in addition to being directly treated as non-condensable gas, the pipeline twelve 12 can be in communication with the top outlet of the reaction rectification tower 1 at one end and in communication with the reaction rectification tower overhead condenser 8 at the other end, which is used for further cryogenic separation and recovery of silane gas therein. Among them, the corresponding valves are arranged on the pipeline twelve 12 and the pipeline thirteen 13. The material in the tower kettle of the reaction rectification tower 1 enters the cracking reaction kettle 4 through the pump one 3 and the pipeline fifteen 15 for further cracking treatment. Among them, the corresponding valve is also arranged on the pipeline fifteen 15.

[0053] HCl enters the cracking reaction kettle 4 through the pipeline forty-three 43 to carry out the cracking reaction with the above-mentioned material in the tower kettle of the reaction rectification tower 1. Among them, the corresponding valve is arranged on the pipeline forty-three 43.

[0054] The excess HCl and chlorosilane gas in the cracking reaction kettle 4 enter the cracking reaction kettle condenser 6 through the pipeline forty-one 41 for condensation, and the condensed silicon tetrachloride, trichlorosilane and a small amount of catalyst are separated through the pipeline sixty-five 65 to the trichlorosilane and silicon tetrachloride separation system. Among them, the corresponding valves are arranged on the pipeline forty-one 41 and the pipeline sixty-five 65.

[0055] In the cracking reaction kettle condenser 6, the non-condensable gas is mainly HCl, which can be returned to the cracking reaction kettle 4 through the pipeline sixty-one 61 and the pipeline sixty-three 63 in turn after being pressurized by the pump two 7 through the pipeline forty-three 43, or can be directly treated through the pipeline sixty-two 62. Among them, the corresponding valves are arranged on the pipeline sixty-one 61 and the pipeline sixty-three 63. In addition, the required HCl for cracking can also be supplemented through the pipeline seventy-one 71 and the valve arranged thereon.

[0056] After the polysilane in the cracking reactor 4 is cracked, it enters the storage tank 5 through the pipeline forty-two 42. In the storage tank 5, the residual HCl is further removed, and the residual HCl enters the cracking reactor condenser 6 through the pipeline fifty-one 51 for further condensation and separation.

[0057] Example 3

[0058] Reference Figure 2 On the basis of Example 1, this embodiment will introduce another related structure and function realization process of the silane preparation cycle activation system, as follows.

[0059] The liquid catalyst and / or trichlorosilane and / or dichlorodisilane enters the reaction rectifying tower 1 from the pipeline eleven 11, and the silane or / and dichlorodisilane is prepared by the disproportionation reaction in the reaction rectifying tower 1. The pipeline eleven 11 is provided with a corresponding valve; and the bottom of the reaction rectifying tower 1 is provided with a reboiler 2 for providing a heat source.

[0060] During the disproportionation reaction process, the silane gas or / and dichlorodisilane is taken out from the pipeline thirteen 13, and the non-condensable gas is discharged from the pipeline twelve 12 for recovery or treatment. Similarly, in addition to being directly treated as non-condensable gas, the pipeline twelve 12 can be in communication with the top outlet of the reaction rectifying tower 1 at one end and in communication with the reaction rectifying tower overhead condenser 8 at the other end, for further cryogenic separation and recovery of the silane gas therein. The material in the tower kettle of the reaction rectifying tower 1 enters the cracking reactor 4 through the pump one 3 and the pipeline fifteen 15 for cracking treatment, wherein the pipeline twelve, the pipeline thirteen and the pipeline fifteen are all provided with corresponding valves.

[0061] In the cracking reactor 4, HCl is added through the pipeline forty-three 43 for cracking, and the excess HCl and chlorosilane gas in the cracking reactor 4 enter the cracking reactor condenser 6 for condensation. The condensed silicon tetrachloride, trichlorosilane and a small amount of catalyst enter the trichlorosilane and silicon tetrachloride separation system through the pipeline sixty-four 64 for separation. The pipeline forty-one 41, the pipeline forty-three 43 and the pipeline sixty-four 64 are all provided with corresponding valves.

[0062] In the cracking reactor condenser 6, the non-condensable gas is mainly HCl, which can be returned to the cracking reactor 4 through the pipeline sixty-one 61 and the pipeline sixty-three 63 after being pressurized by the pump two 7 through the pipeline forty-three 43, or can be directly treated through the pipeline sixty-two 62. The pipeline sixty-one 61 and the pipeline sixty-three 63 are also provided with corresponding valves. In addition, the HCl can be supplemented through the pipeline seventy-one 71 and the valve provided on the pipeline.

[0063] After the polysilane in the cracking reactor 4 is cracked, the chlorosilane containing liquid catalyst is removed by pipeline forty-two 42 into the storage tank 5, and the residual HCl is further removed in the storage tank 5, and the residual HCl is further condensed and separated by pipeline fifty-one 51 into the cracking reactor condenser 6. Among them, the pipeline forty-two 42 and the pipeline fifty-one 51 are also provided with corresponding valves.

[0064] After the HCl is removed, the chlorosilane containing liquid catalyst is separated by pipeline ninety-two 92 through the membrane separator 9. Among them, the separated liquid catalyst is returned to the reaction rectification tower 1 through pipeline fourteen 14, and the separated chlorosilane is further separated into silicon tetrachloride and trichlorosilane through pipeline ninety-one 91.

[0065] In addition, the chlorosilane containing liquid catalyst after the HCl is removed can also be directly separated by pipeline fifty-two 52. Among them, the pipeline fifty-two 52, the pipeline ninety-one 91 and the pipeline ninety-two 92 are all provided with corresponding valves.

[0066] In the description of the utility model disclosure / the present application, it is understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only used to explain the relative position relationship, movement condition and the like between the components in a certain specific posture. If the specific posture changes, the directional indication also changes accordingly. It is only for the convenience of describing the utility model disclosure / the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the utility model disclosure / the present application.

[0067] In the description of the utility model disclosure / the present application, it should be explained that unless otherwise specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, or the communication between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model disclosure / the present application can be understood according to the specific circumstances. In addition, in the description of the embodiment, unless otherwise stated, the meaning of "a plurality of" is two or more.

[0068] The above is only the preferred embodiment of the utility model, and it should be pointed out that for ordinary skilled in the art, without departing from the technical principle of the utility model, a number of improvements and deformations can be made, which should also be regarded as the protection scope of the utility model.

Claims

1. A silane production cycle activation system characterized by, The application relates to a reaction distillation column (1), a reaction distillation column overhead condenser (8), a reboiler (2), a cracking reactor (4) and a storage tank (5). A first inlet in the middle of the reaction distillation column (1) is communicated with a pipeline XI (11) for feeding liquid catalyst and / or trichlorosilane and / or dichlorodisilane into the column; the reboiler (2) is arranged at the bottom of the reaction distillation column (1) and is used for providing a heat source; and a reaction distillation column overhead condenser (8) is arranged at the top of the reaction distillation column (1) and is used for discharging silane gas or / and dichlorodisilane through a pipeline XIII (13). An outlet of a column still of the reaction distillation column (1) is communicated with a first inlet of the cracking reactor (4) through a pipeline XV (15); a second inlet of the cracking reactor (4) is communicated with a pipeline XLIII (43) and is used for feeding HCl into the cracking reactor (4) to carry out a cracking reaction with materials output from the column still; wherein a pump I (3) is arranged on the pipeline XV (15) and a pump II (7) is arranged on the pipeline XLIII (43); and a first outlet of the cracking reactor (4) is communicated with an inlet of the storage tank (5) through a pipeline XLII (42). Valves are arranged on the pipeline XI (11), the pipeline XIII (13), the pipeline XV (15), the pipeline XLII (42) and the pipeline XLIII (43).

2. The silane production cycle activation system of claim 1, wherein, The application further comprises a cracking reactor condenser (6) and a pipeline XLI (41).

3. The silane production cycle activation system according to claim 1 or 2, characterized in that, A second outlet of the cracking reactor (4) is communicated with an inlet of the cracking reactor condenser (6) through the pipeline XLI (41) and is used for conveying excessive HCl and chlorosilane gas in the cracking reactor (4) into the cracking reactor condenser (6) to carry out condensation; wherein a valve is arranged on the pipeline XLI (41). The application further comprises a pipeline XII (12) and a pipeline LI (51).

4. The silane production cycle activation system of claim 3, wherein, The pipeline XII (12) is communicated with the top of the reaction distillation column and is used for discharging non-condensable gas in the column; or one end of the pipeline XII (12) is communicated with the top outlet of the reaction distillation column and the other end is communicated with the reaction distillation column overhead condenser (8) and is used for deep cooling separation and recovery of silane gas; A first outlet of the storage tank (5) is communicated with an inlet of the cracking reactor condenser (6) through the pipeline LI (51) and is used for conveying residual HCl in the storage tank (5) into the cracking reactor condenser (6) to carry out condensation; Valves are arranged on the pipeline XII (12) and the pipeline LI (51). A first outlet of the cracking reactor condenser (6) is communicated with a pipeline LXIV (64) and is used for conveying silicon tetrachloride, trichlorosilane and liquid catalyst condensed in the cracking reactor condenser (6) into a corresponding separation system to carry out separation; wherein a valve is arranged on the pipeline LXIV (64).

5. The silane production cycle activation system of claim 4, wherein, ​ 6. The silane production cycle activation system of claim 5, wherein, The second outlet of the cracking reactor condenser (6) is communicated with the second inlet of the cracking reactor (4) through pipeline sixty-one (61), pipeline sixty-three (63) and pipeline forty-three (43) in sequence, for conveying the non-condensable gas HCl in the cracking reactor condenser (6) back to the cracking reactor (4); Wherein, the pipeline sixty-one (61), pipeline sixty-three (63) and pipeline forty-three (43) are all provided with corresponding valves.

7. The silane production cycle activation system of claim 5, wherein, The second outlet of the cracking reactor condenser (6) is communicated with pipeline sixty-two (62) through pipeline sixty-one (61), for recycling or processing the non-condensable gas HCl in the cracking reactor condenser (6) through pipeline sixty-two (62); wherein, the pipeline sixty-two (62) is provided with a corresponding valve.

8. The silane production cycle activation system according to claim 6 or 7, characterized in that The pipeline forty-three (43) is also communicated with pipeline seventy-one (71), for supplementing HCl required for cracking reaction through the pipeline seventy-one (71); wherein, the pipeline seventy-one (71) is provided with a valve.

9. The silane production cycle activation system of claim 8, wherein, Further comprising a membrane separator (9), pipeline fourteen (14), pipeline ninety-one (91) and pipeline ninety-two (92); The second outlet of the storage tank (5) is communicated with the inlet of the membrane separator (9) through pipeline ninety-two (92), for conveying the chlorosilane containing liquid catalyst after removing HCl to the membrane separator (9) through pipeline ninety-two (92) for separation of chlorosilane and liquid catalyst; The first outlet of the membrane separator (9) is communicated with the second inlet of the reaction rectifying tower (1) through pipeline fourteen (14), for conveying the separated liquid catalyst back to the reaction rectifying tower (1) through pipeline fourteen (14); the second outlet of the membrane separator (9) is communicated with the pipeline ninety-one (91), for conveying the separated chlorosilane to the corresponding separation system through the pipeline ninety-one (91) for separation of silicon tetrachloride and trichlorosilane; Wherein, the pipeline fourteen (14), pipeline ninety-one (91) and pipeline ninety-two (92) are all provided with corresponding valves.

10. The silane production cycle activation system of claim 8, wherein, Further comprising pipeline fifty-two (52); The pipeline fifty-two (52) is communicated with the second outlet of the storage tank (5), for conveying the chlorosilane containing liquid catalyst after removing HCl to the corresponding separation system through the pipeline fifty-two (52) for separation of liquid catalyst and chlorosilane; wherein, the pipeline fifty-two (52) is provided with a corresponding valve.

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