Heat insulation door device of atomic layer deposition equipment

Abstract

The utility model discloses a heat insulation door device of atomic layer deposition equipment, and relates to the technical field of atomic layer deposition. The atomic layer deposition equipment comprises an atomic layer deposition equipment main body and a reaction cavity on the atomic layer deposition equipment main body, a connecting rod is movably inserted on the atomic layer deposition equipment main body, and a door body is fixedly arranged at the end part of the connecting rod. According to the utility model, the door body is pushed to move on the atomic layer deposition equipment main body through the connecting rod, so that the door body is attached to the atomic layer deposition equipment main body, and the handle and the locking part of the elastic spring bolt assembly are loosened, so that the locking part of the elastic spring bolt assembly is driven to move through the elastic part of the elastic spring bolt assembly; the locking part of the elastic spring bolt assembly is inserted into the locking hole in the surface of the locking plate, then the door body is tightly closed, the closing mode is easy and convenient to operate, it can be ensured that the door body and the reaction cavity are tightly attached, the sealing performance of equipment is effectively improved, and the leakage risk in the reaction cavity is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to atomic layer deposition technical field, concretely relates to a heat insulation door device of atomic layer deposition equipment. BACKGROUND

[0002] Atomic layer deposition (Atomic Layer Deposition, ALD for short) is a kind of thin film deposition technology.The basic principle is that by using multiple monolayer saturated chemical vapor deposition reactions alternately, target material can be accurately deposited on solid surface, and the application of atomic layer deposition equipment is wide, from manufacturing high-performance semiconductor chips to display technology, solar cell, optical film and other fields;

[0003] The Chinese patent with publication number CN218539822U discloses a kind of atomic layer deposition equipment and heat insulation door device of atomic layer deposition equipment, include connecting rod, sealing plate and heat insulation plate;The connecting rod is configured to be able to be slidably arranged in the main body of atomic layer deposition equipment;The sealing plate or the heat insulation plate is arranged in the connecting rod;The sealing plate is configured to be able to seal the reaction cavity of atomic layer deposition equipment.

[0004] For the above-mentioned disclosed technology, when closing the door, the magnetic member is attracted towards the main body, thereby giving the sealing plate an initial force towards the reaction cavity, so that the sealing plate is attached to the surface of the reaction cavity. Since the atomic layer deposition equipment generates high temperature when working, the magnetic performance of the magnetic member will be seriously affected in this high temperature environment, and gradually lose its magnetism. With the gradual loss of magnetism, the attractive force during the closing process will also weaken, which further reduces the attachment between the sealing plate and the surface of the reaction cavity, ultimately affecting the sealing performance of the equipment in use, and increasing the risk of leakage of the reaction cavity.

[0005] Therefore, a kind of heat insulation door device of atomic layer deposition equipment is proposed. UTILITY MODEL CONTENT

[0006] The utility model aims at: to solve the problems raised in the above background art, the utility model provides a kind of heat insulation door device of atomic layer deposition equipment.

[0007] The utility model specifically adopts the following technical solutions to achieve the above-mentioned purposes:

[0008] The utility model provides an insulating door device of atomic layer deposition equipment, including reaction cavity on the atomic layer deposition equipment body and atomic layer deposition equipment body, the connecting rod is movably inserted on the atomic layer deposition equipment body, and the end of connecting rod is fixedly installed with the door body, the door body is fixedly installed with the handle, and is provided with the elastic lock tongue subassembly on the handle, the surface of atomic layer deposition equipment body is fixedly installed with the locking plate, and the locking plate is opened with the lock hole, the elastic lock tongue subassembly includes the guide rod fixed on the handle, and the lock rod is movably inserted on the guide rod, the end of lock rod is fixedly installed with the connecting rod, and the connecting rod and guide rod are movably set, the surface of guide rod is set with spring, and the both ends of spring are fixed with connecting rod and handle respectively, when the door body is closed, the lock rod is correspondingly set with the lock hole of the surface of locking plate.

[0009] Further, the door body is provided with a heat insulation assembly, and the door body is connected with a bearing seat through the heat insulation assembly.

[0010] Further, the heat insulation assembly includes a heat insulation plate fixed to the surface of the door body, and a housing is sleeved on the heat insulation plate.

[0011] Further, the sealing element is composed of a sealing plate and a sealing ring, the surface of the atomic layer deposition equipment body is fixedly attached with the sealing plate, and the end surface of the sealing plate is fixedly provided with the sealing ring.

[0012] The utility model discloses the beneficial effects are as follows:

[0013] By gripping the handle and the locking part of the elastic lock tongue assembly, the elastic part of the elastic lock tongue assembly is compressed, the door body is pushed to move on the atomic layer deposition equipment body through the connecting rod, the door body and the atomic layer deposition equipment body are attached, the handle and the locking part of the elastic lock tongue assembly are released, the elastic part of the elastic lock tongue assembly drives the locking part of the elastic lock tongue assembly to move, the locking part of the elastic lock tongue assembly is inserted into the lock hole on the surface of the locking plate, and the door body is tightly closed, the closing mode is not only simple to operate, but also can ensure the tight attachment between the door body and the reaction cavity, effectively improve the sealing performance of the equipment, and reduce the leakage risk in the reaction cavity. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is the three-dimensional structure schematic diagram of the utility model;

[0015] Figure 2 It is the side view of the utility model;

[0016] Figure 3It is a partial view of the utility model;

[0017] Figure 4 It is an exploded view of the utility model;

[0018] Figure 5 It is an exploded view of the elastic lock tongue assembly of the utility model;

[0019] The drawings show that the utility model discloses an atomic layer deposition equipment, which comprises a main body 1, a reaction cavity 11, a connecting rod 2, a door body 3, a heat insulation assembly 4, a bearing seat 5, a sealing piece 6, a handle 7, an elastic lock tongue assembly 8, a locking plate 9 and a lock hole 91. Specific implementation

[0020] In order to make the purpose, technical scheme and advantage of the utility model embodiment more clear, the technical scheme in the utility model embodiment will be described clearly and completely in combination with the drawings in the utility model embodiment, and obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiment. The components of the utility model embodiment described and shown in the drawings can be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the claimed utility model, but only represents selected embodiments of the utility model. Based on the embodiment in the utility model, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the utility model.

[0022] It should be noted that: similar signs and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. In addition, the terms "first", "second" and the like are only used to distinguish description, and cannot be understood as indicating or implying relative importance.

[0023] In the description of the utility model embodiment, it should be explained that the orientation or position relationship indicated by the terms "inner", "outer", "upper" and the like is based on the orientation or position relationship shown in the drawings, or the orientation or position relationship of the utility model product when it is usually placed, which is only for the convenience of describing the utility model and simplifying the description, and cannot be understood as indicating or implying that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, therefore, it cannot be understood as a limitation on the utility model.

[0024] As Figures 1 to 5As shown, a heat insulation door device of an atomic layer deposition equipment includes an atomic layer deposition equipment body 1, a reaction cavity 11 on the atomic layer deposition equipment body 1, a connecting rod 2 movably connected to the atomic layer deposition equipment body 1, a door body 3 fixedly installed at the end of the connecting rod 2, a handle 7 fixedly installed on the door body 3, an elastic lock tongue assembly 8 provided on the handle 7, a locking plate 9 fixedly installed on the surface of the atomic layer deposition equipment body 1, and a lock hole 91 formed in the locking plate 9. More specifically, by gripping the handle 7 and the locking portion of the elastic lock tongue assembly 8, the elastic portion of the elastic lock tongue assembly 8 is compressed, the door body 3 is pushed to move on the atomic layer deposition equipment body 1 through the connecting rod 2, the door body 3 is attached to the atomic layer deposition equipment body 1, the handle 7 and the locking portion of the elastic lock tongue assembly 8 are released, the elastic portion of the elastic lock tongue assembly 8 is moved to drive the locking portion of the elastic lock tongue assembly 8 to be inserted into the lock hole 91 on the surface of the locking plate 9, and the door body 3 is tightly closed. When the door body 3 is opened, the locking portion of the elastic lock tongue assembly 8 is moved to compress the elastic portion of the elastic lock tongue assembly 8 by gripping the handle 7 and the locking portion of the elastic lock tongue assembly 8, the locking portion of the elastic lock tongue assembly 8 is pulled out of the lock hole 91 on the surface of the locking plate 9, and the door body 3 can be opened.

[0025] The door body 3 is provided with a heat insulation assembly 4, the door body 3 is connected with a bearing seat 5 through the heat insulation assembly 4, and the surface of the door body 3 is provided with a sealing element 6 to seal between the door body 3 and the atomic layer deposition equipment body 1 when the door body 3 is closed. More specifically, the bearing seat 5 and the door body 3 can be heat insulated through the heat insulation assembly 4, and the bearing seat 5 can avoid heat conduction to the door body 3, and the door body 3 and the atomic layer deposition equipment body 1 can be sealed through the sealing element 6 on the door body 3 when the door body 3 is closed.

[0026] The heat insulation assembly 4 includes a heat insulation plate 401 fixed on the surface of the door body 3, a housing 402 sleeved on the heat insulation plate 401, a bolt 403 threadedly inserted into the heat insulation plate 401 and the housing 402, and the bearing seat 5 fixed with the housing 402. More specifically, the bearing seat 5 and the door body 3 are heat insulated through the ceramic fiber of the heat insulation plate 401, and the housing 402 and the heat insulation plate 401 can be disassembled and installed through the bolt 403.

[0027] The sealing member 6 is composed of a sealing plate 61 and a sealing ring 62, the sealing plate 61 is fixedly attached to the surface of the atomic layer deposition device body 1, and the sealing ring 62 is fixedly arranged on the end face of the sealing plate 61, and the sealing plate 61 and the sealing ring 62 are both made of high-temperature-resistant rubber material. More specifically, through the sealing plate 61 fixedly attached to the surface of the door body 3 and the sealing ring 62 on the sealing plate 61, the gap between the door body 3 and the atomic layer deposition device body 1 after closing can be sealed.

[0028] The elastic lock tongue assembly 8 includes a guide rod 801 fixed on the handle 7, and a lock rod 802 movably inserted on the guide rod 801, and a connecting rod 803 fixedly installed at the end of the lock rod 802, and the connecting rod 803 and the guide rod 801 are movably sleeved, and a spring 804 is sleeved on the surface of the guide rod 801, and the two ends of the spring 804 are fixedly arranged with the connecting rod 803 and the handle 7. More specifically, by grasping the handle 7 and the connecting rod 803, the connecting rod 803 is close to the handle 7, the connecting rod 803 and the lock rod 802 move along the surface of the guide rod 801, the spring 804 is compressed, the lock rod 802 is pulled out of the lock hole 91, and the door body 3 is fixed after closing, and when the door body 3 is closed, the spring 804 drives the lock rod 802 and the connecting rod 803 to move along the surface of the guide rod 801, the lock rod 802 is inserted into the lock hole 91 on the surface of the locking plate 9, and the door body 3 is fixed.

[0029] When the door body 3 is closed, the lock rod 802 is correspondingly arranged with the lock hole 91 on the surface of the locking plate 9. More specifically, by corresponding the lock rod 802 and the lock hole 91 on the surface of the locking plate 9, the door body 3 can be closed and fixed by inserting the lock rod 802 into the lock hole 91.

[0030] In summary: by grasping the handle 7 and the locking part of the elastic lock tongue assembly 8, the elastic part of the elastic lock tongue assembly 8 is compressed, the door body 3 is pushed to move on the atomic layer deposition device body 1 through the connecting rod 2, the door body 3 and the atomic layer deposition device body 1 are attached, the handle 7 and the locking part of the elastic lock tongue assembly 8 are released, the locking part of the elastic lock tongue assembly 8 is moved by the elastic part of the elastic lock tongue assembly 8, the locking part of the elastic lock tongue assembly 8 is inserted into the lock hole 91 on the surface of the locking plate 9, and the door body 3 is tightly closed, when the door body 3 is opened, the locking part of the elastic lock tongue assembly 8 is moved by grasping the handle 7 and the locking part of the elastic lock tongue assembly 8, the elastic part of the elastic lock tongue assembly 8 is compressed, the locking part of the elastic lock tongue assembly 8 is pulled out of the lock hole 91 on the surface of the locking plate 9, and the door body 3 can be opened.

[0031] The basic principle, main features and advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above examples, and the above examples and descriptions in the specification are only the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application. The scope of protection required by the present application is defined by the appended claims and their equivalents.

Claims

1. A heat shield door apparatus of an atomic layer deposition apparatus, characterized by, Including atomic layer deposition equipment body (1) and reaction cavity (11) on atomic layer deposition equipment body (1), the connecting rod (2) is movably inserted on the atomic layer deposition equipment body (1), and the end of the connecting rod (2) is fixedly installed with the door body (3), the door body (3) is fixedly installed with the handle (7), and the elastic lock tongue assembly (8) is arranged on the handle (7), the surface of the atomic layer deposition equipment body (1) is fixedly installed with the locking plate (9), and the locking plate (9) is provided with the lock hole (91), the elastic lock tongue assembly (8) includes the guide rod (801) fixed on the handle (7), and the lock rod (802) is movably inserted on the guide rod (801), the end of the lock rod (802) is fixedly installed with the connecting rod (803), the connecting rod (803) and the guide rod (801) are movably sleeved, the surface of the guide rod (801) is sleeved with the spring (804), and the both ends of the spring (804) are respectively fixed with the connecting rod (803) and the handle (7), when the door body (3) is closed, the lock rod (802) is correspondingly arranged with the lock hole (91) on the surface of the locking plate (9).

2. The heat shield door apparatus of claim 1, wherein, The door body (3) is provided with the heat insulation assembly (4), and the door body (3) is connected with the bearing seat (5) through the heat insulation assembly (4), the surface of the door body (3) is provided with the sealing element (6), so as to seal the door body (3) and the atomic layer deposition equipment body (1) when the door body (3) is closed.

3. The heat shield door apparatus of claim 2, wherein the heat shield door is configured to rotate about a vertical axis. The heat insulation assembly (4) includes the heat insulation plate (401) fixed on the surface of the door body (3), and the housing (402) is sleeved on the heat insulation plate (401), the heat insulation plate (401) and the housing (402) are screwed with the bolt (403), and the bearing seat (5) is fixed with the housing (402).

4. The heat shield door apparatus of claim 2, wherein the heat shield door is formed of a material having a thermal conductivity of 0.1 W / mK or less. The sealing element (6) is composed of a sealing plate (61) and a sealing ring (62), the surface of the atomic layer deposition equipment body (1) is fixedly attached with the sealing plate (61), and the end surface of the sealing plate (61) is fixedly provided with the sealing ring (62), the sealing plate (61) and the sealing ring (62) are made of high-temperature-resistant rubber material.

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