Piezoelectric pump

By connecting the first and second pump chambers in series and controlling the flow of the medium using the deformation displacement of the check valve and vibrator, the backflow problem of the piezoelectric pump is solved, achieving higher discharge pressure and discharge efficiency.

CN223608757UActive Publication Date: 2025-11-28DONGGUAN HUANGJIANG RUIMING ELECTRONIC FACTORY
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Patent Information

Application Number
CN202520064888.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-01-10
Publication Date
2025-11-28
Estimated Expiration
2035-01-10

AI Technical Summary

Technical Problem

Existing pneumatic electric pumps generate significant backflow when the vibrator sends gas from the pump chamber into the external discharge channel, resulting in insufficient charging pressure and low discharge efficiency.

Method used

A piezoelectric pump was designed. By connecting the first pump chamber and the second pump chamber in series, the first check valve and the second check valve are used to prevent the backflow of the medium. The flow of the medium is controlled by the deformation displacement of the vibrator. Combined with the cooperation of the convex post of the pump body and the diaphragm valve plate, the efficient discharge of the medium is achieved.

Benefits of technology

It increased the external discharge pressure and improved the discharge efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a piezoelectric pump which comprises a vibrator, a first check valve, a diaphragm valve plate, a pump body, a first partition plate, a second partition plate and a second check valve. The first check valve, the first partition plate, the second check valve, the vibrator, the second partition plate and the diaphragm valve block divide an inner cavity of the pump body into a communicating chamber, a first pump chamber, a second pump chamber and an entering chamber. A partition plate through hole is formed in the first partition plate, and the first check valve is provided with a first check part; a diaphragm through hole is formed in the diaphragm valve plate; a convex column is arranged on the pump body; a communicating hole is formed in the vibrator; the second check valve is provided with a second check part; in the process that the vibrator deforms and displaces in the direction close to the external charging channel, the first non-return part opens the partition plate through hole, the second non-return part closes the communicating hole, and the convex column retreats from the diaphragm through hole; in the process that the vibrator deforms and displaces in the direction close to the convex column, the first non-return part closes the partition plate through hole, the second non-return part opens the communicating hole, and the convex column enters the diaphragm through hole; therefore, the purposes of increasing the discharge pressure and improving the discharge efficiency are achieved.
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Description

TECHNICAL FIELD

[0001] The utility model relates to a pump applied to microelectronic, medical treatment, health care and the industry, especially to a piezoelectric pump. BACKGROUND

[0002] It is known that hypertension has gradually risen to the top of the list of human disease hazards, how to conveniently and effectively measure and monitor hypertension, so as to effectively prevent and treat hypertension, has become an important problem for people to resist hypertension.

[0003] At present, the measurement of blood pressure cannot be separated from the use of sphygmomanometer, which is a very common instrument for measuring blood pressure.

[0004] Among them, for the sphygmomanometer, it is inseparable from the use of air pump, through the inflation of the air pump to the air bag, to meet the needs of sphygmomanometer for blood pressure test. Because the piezoelectric air pump has the advantages of small noise, small size, small airflow ripple and stable flow compared with the traditional motor air pump, it has obvious performance advantages in the application of sphygmomanometer.

[0005] However, for the existing piezoelectric air pump, due to its unreasonable design, the vibrator produces a large backflow when sending the gas in the pump chamber into the exhaust channel, thereby causing the piezoelectric air pump to have the defects of insufficient inflation pressure and low exhaust efficiency.

[0006] Therefore, a piezoelectric pump is needed to overcome one or more of the above defects. UTILITY MODEL CONTENT

[0007] The utility model aims at providing a piezoelectric pump which increases the exhaust pressure and improves the exhaust efficiency.

[0008] In order to realize the above-mentioned purpose, the piezoelectric pump comprises a vibrator, a first check valve, a diaphragm valve piece, a pump body, a first partition plate, a second partition plate and a second check valve. The pump body is provided with an inner cavity, an outer filling channel and an outer inlet channel. The first check valve, the first partition plate, the second check valve, the vibrator, the second partition plate and the diaphragm valve piece are arranged in the inner cavity in a first direction and are sequentially arranged in a horizontal direction, and the ends of the first check valve, the first partition plate, the second check valve, the vibrator, the second partition plate and the diaphragm valve piece are fixedly arranged in the horizontal direction, so as to correspondingly divide the inner cavity into a communication chamber, a first pump chamber, a second pump chamber and an inlet chamber. The communication chamber is communicated with the outer filling channel, the inlet chamber is communicated with the outer inlet channel, the first pump chamber is defined by the first partition plate, the second check valve and the vibrator, and the second pump chamber is defined by the vibrator, the second partition plate and the diaphragm valve piece. The first partition plate is provided with a partition plate through hole which is communicated with the first pump chamber and the communication chamber, and the first check valve is provided with a first check portion which is located in the communication chamber and is used for opening and closing the partition plate through hole. The diaphragm valve piece is provided with a diaphragm through hole which is communicated with the second pump chamber and the inlet chamber, and the pump body is provided with a convex column which is used for gap cooperation with the diaphragm through hole. The vibrator is provided with a communication hole which is communicated with the first pump chamber and the second pump chamber, and the second check valve is provided with a second check portion which is located in the first pump chamber and is used for opening and closing the communication hole. In the process of deformation displacement of the vibrator towards the outer filling channel, the first check portion opens the partition plate through hole, the second check portion closes the communication hole, and the convex column exits the diaphragm through hole. In the process of deformation displacement of the vibrator towards the convex column, the first check portion closes the partition plate through hole, the second check portion opens the communication hole, and the convex column enters the diaphragm through hole.

[0009] Compared with the prior art, the first pump chamber and the second pump chamber are connected in series through the communication hole, the medium (such as gas or liquid) in the communication chamber is prevented from flowing back to the first pump chamber through the first check portion, the medium in the first pump chamber is prevented from flowing back to the second pump chamber through the second check portion, and the medium in the second pump chamber is prevented from flowing back to the inlet chamber through the cooperation of the convex column of the pump body and the partition plate through hole of the diaphragm valve piece. Therefore, in the cooperation process, in the process of deformation displacement of the vibrator towards the outer filling channel, the first check portion opens the partition plate through hole, the second check portion closes the communication hole, and the convex column exits the diaphragm through hole, so that the backflow of the first pump chamber is small and the discharge efficiency is high. In the process of deformation displacement of the vibrator towards the convex column, the first check portion closes the partition plate through hole, the second check portion opens the communication hole, and the convex column enters the diaphragm through hole, so that the medium in the second pump chamber is pressed into the first pump chamber, the medium entering efficiency of the first pump chamber is improved, and the pressure of the first pump chamber is increased. Therefore, the purpose of increasing the discharge pressure and improving the discharge efficiency is achieved.

[0010] Preferably, the vibrator comprises a vibrating plate and a piezoelectric ceramic piece assembled on the vibrating plate, the communicating holes are opened on the vibrating plate and located beside the outer side of the piezoelectric ceramic piece; the communicating holes are multiple and arranged around the piezoelectric ceramic piece.

[0011] Preferably, the vibrating plate comprises a flat center part, an outer connecting part on the outer side and a deformation part connected between the outer connecting part and the flat center part, and the piezoelectric ceramic piece is assembled on the flat center part.

[0012] Preferably, each of the communicating holes is opened on the deformation part and comprises a first annular long hole, a second annular long hole and an intermediate annular long hole connecting the first and second annular long holes, the first and second annular long holes are staggered in the direction from the flat center part to the outer connecting part; two adjacent communicating holes separate the elastic suspension edge of the deformation part for connecting the flat center part and the outer connecting part.

[0013] Preferably, the communicating holes are opened on the outer connecting part or the flat center part, and the deformation part is a corrugated structure.

[0014] Preferably, the first partition plate further comprises an outer protruding structure protruding into the communicating chamber in the direction close to the outer filling channel, the outer protruding structure is opposite to the outer filling channel in the first direction; the first check part correspondingly closes or opens the partition plate hole through engagement or disengagement with the outer protruding structure.

[0015] Preferably, the pump body further comprises a protruding ring structure protruding into the communicating chamber in the direction close to the first partition plate and arranged around the outer filling channel, the protruding ring structure is staggered with the outer protruding structure in the transverse direction of the first partition plate, and the protruding ring structure is selectively engaged or disengaged with the first check part.

[0016] Preferably, the pump body further comprises an emptying hole communicated with the communicating chamber, the emptying hole is located beside the outer side of the protruding ring structure; the first check part correspondingly closes or opens the communication between the emptying hole and the communicating chamber through engagement or disengagement with the protruding ring structure; the vibrator or the second check part comprises a leakage channel communicated with the first pump chamber.

[0017] Preferably, the first check valve is a hollow structure, and the first check part is formed at the position away from the outer side of the first check valve.

[0018] Preferably, the second check valve is a hollow structure, and the second check part is formed at the position away from the outer side of the second check valve, or the second check part is suspended in the hollow of the second check valve.

[0019] Preferably, the second partition is a hollow structure.

[0020] Preferably, the outer charging passage and the outer inlet passage are each arranged extending along the first direction. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a plan view of the piezoelectric pump of the first embodiment of the present application as viewed in the first direction.

[0022] Figure 2 is a perspective view of the piezoelectric pump. Figure 1

[0023] Figure 3 is an internal view taken along the line A-A in Figure 1 Fig. 2, with the vibrator in the initial position.

[0024] Figure 4 is a state diagram showing the vibrator deformed and displaced in the direction of approaching the outer charging passage to the first limit position, based on Figure 3

[0025] Figure 5 is a state diagram showing the vibrator deformed and displaced in the direction of approaching the protrusion to the second limit position, based on Figure 3

[0026] Figure 6 is an internal view taken along the line B-B in Figure 1 Fig. 6, with the vibrator in the initial position.

[0027] Figure 7 is a plan view of the piezoelectric pump of the second embodiment of the present application as viewed in the first direction.

[0028] Figure 8 is a perspective view of the piezoelectric pump. Figure 7

[0029] Figure 9 Figure 7 is an internal view taken along the line D-D in Fig. 12, with the vibrator in the initial position.

[0030] Figure 10 Figure 9 is a state diagram showing the vibrator deformed and displaced in the direction of approaching the outer charging passage to the first limit position, based on

[0031] Figure 11 is a state diagram showing the vibrator deformed and displaced in the direction of approaching the protrusion to the second limit position, based on Figure 9

[0032] Figure 12 Figure 7 ​​​​​​​Internal view of the section E-E with the vibrator in the initial position.

[0033] Figure 13 is Figure 8 A perspective view of the diaphragm in the piezoelectric pump shown in

[0034] Figure 14 is the internal view of the deformation. Figure 12 DETAILED DESCRIPTION

[0035] In order to explain the technical content and structural features of the present application, the following further description is made in conjunction with the embodiments and the accompanying drawings.

[0036] Please refer to Figures 1 to 3 The piezoelectric pump 100 of the first embodiment includes a vibrator 10, a first check valve 20, a diaphragm valve 30, a pump body 40, a first partition 50, a second partition 60, and a second check valve 70.

[0037] Further in combination with Figures 4 to 6 The pump body 40 has an inner cavity 41, an outer charging passage 42, and an outer inlet passage 43, so as to meet the needs of pumping the medium (for example, but not limited to, gas or liquid) into the pump body 40 along the outer inlet passage 43 and out of the pump body 40 along the outer charging passage 42 for the target object (for example, but not limited to, an air bag); alternatively, as an example, the pump body 40 includes an upper half 40a and a lower half 40b, and the lower half 40b is fixed to the upper half 40a, for example, by screws, by adhesion, or by ultrasonic welding, so as to facilitate the assembly of the vibrator 10, the first check valve 20, the diaphragm valve 30, the pump body 40, the first partition 50, the second partition 60, and the second check valve 70 at the pump body 40; obviously, according to actual needs, the pump body 40 can also have a structure known in the art, which is not described here again; in addition, the outer charging passage 42 and the outer inlet passage 43 each extend in a first direction (see the direction indicated by arrow C) so as to facilitate the manufacture and processing of the outer charging passage 42 and the outer inlet passage 43 on the pump body 40; obviously, according to actual needs, the outer charging passage 42 and the outer inlet passage 43 can also extend in other directions, which are not limited by Figures 3 to 6 the drawings.

[0038] As Figures 3 to 6 ​As shown, the first check valve 20, the first partition plate 50, the second check valve 70, the vibrator 10, the second partition plate 60 and the diaphragm valve piece 30 are each horizontally arranged in the inner cavity 41, and the first check valve 20, the first partition plate 50, the second check valve 70, the vibrator 10, the second partition plate 60 and the diaphragm valve piece 30 are also sequentially stacked along the first direction, i.e., in the first direction, the first partition plate 50 is stacked on the first check valve 20, the second check valve 70 is sleeved on the first partition plate 50, the vibrator 10 is stacked on the second check valve 70, the second partition plate 60 is stacked on the vibrator 10, and the diaphragm valve piece 30 is stacked on the second partition plate 60, so as to achieve the purpose of stacking the first check valve 20, the first partition plate 50, the second check valve 70, the vibrator 10, the second partition plate 60 and the diaphragm valve piece 30. Moreover, the end 22 of the first check valve 20 spaced apart in the horizontal direction, the end 52 of the first partition plate 50 spaced apart in the horizontal direction, the end 72 of the second check valve 70 spaced apart in the horizontal direction, the end (i.e., the outer connecting part 122 described below) of the vibrator 10 spaced apart in the horizontal direction, the end 61 of the second partition plate 60 spaced apart in the horizontal direction and the end 32 of the diaphragm valve piece 30 spaced apart in the horizontal direction are fixedly arranged, so that the end 22 of the first check valve 20, the end 52 of the first partition plate 50, the end 72 of the second check valve 70, the end of the vibrator 10, the end 61 of the second partition plate 60 and the end 32 of the diaphragm valve piece 30 are each fixed relative to the pump body 40. In addition, the first check valve 20, the first partition plate 50, the second check valve 70, the vibrator 10, the second partition plate 60 and the diaphragm valve piece 30 correspondingly divide the inner cavity 41 into the communication chamber 411, the first pump chamber 412, the second pump chamber 413 and the inlet chamber 414, the inlet chamber 414 is in communication with the outer inlet passage 43, the communication chamber 411 is in communication with the outer filling passage 42, the first pump chamber 412 is defined by the first partition plate 50, the second check valve 70 and the vibrator 10, and the second pump chamber 413 is defined by the vibrator 10, the second partition plate 60 and the diaphragm valve piece 30, as shown in Figures 3 to 6 In addition, the first check valve 20 has the first check part 21 located in the communication chamber 411 and used for opening and closing the partition plate through hole 51 described below.

[0039] As shown in Figures 2 to 6 The first partition plate 50 is provided with the partition plate through hole 51 in communication with the first pump chamber 412 and the communication chamber 411. Optionally, as an example, the partition plate through hole 51 is a circular hole, so as to facilitate the manufacturing and processing of the partition plate through hole 51. Obviously, according to actual needs, the partition plate through hole 51 can also be a rectangular hole, an elliptical hole or a regular polygonal hole, so it is not limited to Figure 2 Figure 2 ​The number of partition through holes 51 is limited to four spaced apart from each other. All partition through holes 51 are arranged around the convex structure 52 described below to increase the communication position between the connecting chamber 411 and the first pump chamber 412. Obviously, the number of partition through holes 51 can be other than that required by actual needs, so it is not limited to these numbers. Figure 2 As shown, when there are four through holes 51 in the partition plate, the first check valve 20 can be a hollow structure, and the first check part 21 is formed at the position of the first check valve 20 away from its outer side 22 (that is, the end of the first check valve 20 separated in the horizontal direction). This design can simplify the number of first check parts 21, thereby facilitating the manufacturing and processing of the first check valve 20.

[0040] like Figures 2 to 6 As shown, the diaphragm valve plate 30 has a diaphragm through hole 31 connecting the second pump chamber 413 and the inlet chamber 414. The pump body 40 has a protrusion 44 for clearance fitting with the diaphragm through hole 31. Optionally, in Figure 2 In this example, the diaphragm through-hole 31 is a circular hole, and correspondingly, the protrusion 44 is a cylinder to ensure the consistency of the gap size between the diaphragm through-hole 31 and the protrusion 44. Obviously, depending on actual needs, the diaphragm through-hole 31 can also be an elliptical hole, a rectangular hole, or a regular polygonal hole, and correspondingly, the protrusion 44 can be an elliptical cylinder, a rectangular prism, or a regular polygonal prism. Therefore, it is not necessary to specify the type of hole. Figure 2 The above is the limit.

[0041] like Figures 2 to 6 As shown, the vibrator 10 has a connecting hole 11 that connects the first pump chamber 412 and the second pump chamber 413. Optionally, in Figure 2 In the example shown, the connecting hole 11 is a circular hole. Obviously, depending on the actual needs, the connecting hole 11 can also be an elliptical hole, a rectangular hole, or a regular polygonal hole. Therefore, it is not considered as such. Figure 2 The number shown is for illustrative purposes only; furthermore, the six connecting holes 11 are arranged circumferentially spaced apart. Obviously, the number of connecting holes 11 can be other than those shown, depending on actual needs, so it is not limited to this. Figure 2 The above is the limit.

[0042] like Figures 2 to 6 As shown, the second check valve 70 has a second check portion 71 located in the first pump chamber 412 and used for opening and closing the communication port 11. Optionally, in Figure 2 As an example, the second check valve 70 can be a hollow structure, with the second check part 71 suspended in the hollow part of the second check valve 70 to ensure the smooth, reliable, and sensitive opening and closing of the connecting hole 11 by the second check part 71. Alternatively, when there are multiple connecting holes 11, each connecting hole 11 can correspond to one second check part 71, as shown in the diagram. Figure 2As shown, obviously, according to actual needs, the second check portion 71 can also be designed as a ring structure, which can reduce the number of the second check portion 71 and facilitate the manufacturing and processing of the second check valve 70.

[0043] Therefore, in the process of the vibrator 10 deforming and displacing towards the direction close to the outer filling channel 42, the first check portion 21 opens the diaphragm through hole 51, the second check portion 71 closes the communication hole 11, and the convex column 44 exits the diaphragm through hole 31, as shown in FIG. 5. Figure 4 As shown, because the first pump chamber 412 is compressed and the second pump chamber 413 is expanded, the medium in the first pump chamber 412 enters the communication chamber 411 through the diaphragm through hole 51, and then flows into the outer filling channel 42 from the communication chamber 411; at the same time, the medium from the outside flows into the entry chamber 414 through the outer entry channel 43, and then flows into the second pump chamber 413 through the diaphragm through hole 31; the flow direction of the medium is shown by the dotted arrows in FIG. 6. Figure 4 As shown, because the first pump chamber 412 is compressed and the second pump chamber 413 is expanded, the medium in the first pump chamber 412 enters the communication chamber 411 through the diaphragm through hole 51, and then flows into the outer filling channel 42 from the communication chamber 411; at the same time, the medium from the outside flows into the entry chamber 414 through the outer entry channel 43, and then flows into the second pump chamber 413 through the diaphragm through hole 31; the flow direction of the medium is shown by the dotted arrows in FIG. 6.

[0044] Therefore, in the process of the vibrator 10 deforming and displacing towards the direction close to the direction close to the convex column 44, the first check portion 21 closes the diaphragm through hole 31, the second check portion 71 opens the communication hole 11, and the convex column 44 enters the diaphragm through hole 31, as shown in FIG. 8. Figure 5 As shown, because the first pump chamber 412 is compressed and the second pump chamber 413 is expanded, the medium in the first pump chamber 412 enters the communication chamber 411 through the diaphragm through hole 51, and then flows into the outer filling channel 42 from the communication chamber 411; at the same time, the medium from the outside flows into the entry chamber 414 through the outer entry channel 43, and then flows into the second pump chamber 413 through the diaphragm through hole 31; the flow direction of the medium is shown by the dotted arrows in FIG. 6. Figure 5 As shown, because the first pump chamber 412 is compressed and the second pump chamber 413 is expanded, the medium in the first pump chamber 412 enters the communication chamber 411 through the diaphragm through hole 51, and then flows into the outer filling channel 42 from the communication chamber 411; at the same time, the medium from the outside flows into the entry chamber 414 through the outer entry channel 43, and then flows into the second pump chamber 413 through the diaphragm through hole 31; the flow direction of the medium is shown by the dotted arrows in FIG. 6.

[0045] As shown, because the first pump chamber 412 is compressed and the second pump chamber 413 is expanded, the medium in the first pump chamber 412 enters the communication chamber 411 through the diaphragm through hole 51, and then flows into the outer filling channel 42 from the communication chamber 411; at the same time, the medium from the outside flows into the entry chamber 414 through the outer entry channel 43, and then flows into the second pump chamber 413 through the diaphragm through hole 31; the flow direction of the medium is shown by the dotted arrows in FIG. 6. Figures 2 to 6 As shown, because the first pump chamber 412 is compressed and the second pump chamber 413 is expanded, the medium in the first pump chamber 412 enters the communication chamber 411 through the diaphragm through hole 51, and then flows into the outer filling channel 42 from the communication chamber 411; at the same time, the medium from the outside flows into the entry chamber 414 through the outer entry channel 43, and then flows into the second pump chamber 413 through the diaphragm through hole 31; the flow direction of the medium is shown by the dotted arrows in FIG. 6. Figure 3 , Figure 5 and Figure 6 As shown, because the first pump chamber 412 is compressed and the second pump chamber 413 is expanded, the medium in the first pump chamber 412 enters the communication chamber 411 through the diaphragm through hole 51, and then flows into the outer filling channel 42 from the communication chamber 411; at the same time, the medium from the outside flows into the entry chamber 414 through the outer entry channel 43, and then flows into the second pump chamber 413 through the diaphragm through hole 31; the flow direction of the medium is shown by the dotted arrows in FIG. 6. Figure 4 As shown, because the first pump chamber 412 is compressed and the second pump chamber 413 is expanded, the medium in the first pump chamber 412 enters the communication chamber 411 through the diaphragm through hole 51, and then flows into the outer filling channel 42 from the communication chamber 411; at the same time, the medium from the outside flows into the entry chamber 414 through the outer entry channel 43, and then flows into the second pump chamber 413 through the diaphragm through hole 31; the flow direction of the medium is shown by the dotted arrows in FIG. 6. Figures 2 to 6As an example, the pump body 40 has a convex ring structure 45 that protrudes into the communicating chamber 411 towards the direction of the first partition 50 and is arranged around the external charging channel 42. The convex ring structure 45 is also offset from the external convex structure 52 in the transverse direction of the first partition 50. The convex ring structure 45 can selectively engage or disengage with the first check valve 21. In addition, the pump body 40 also has a vent hole 46 communicating with the communicating chamber 411. The vent hole 46 is located next to the outside of the convex ring structure 45. The first check valve 21 correspondingly closes or opens the communication between the vent hole 46 and the communicating chamber 411 by engaging or disengaging with the convex ring structure 45. The vibrator 10 (specifically the external connection 122) has a leakage channel 14 for communicating with the first pump chamber 412. Optionally, in Figure 2 In this example, leakage channel 14 is a through hole, but it is not a limitation. Therefore... Figure 6 In the first embodiment, when the piezoelectric pump 100 stops working, the first pump chamber 412 is depressurized through the leakage channel 14, causing the pressure in the external filling channel 42, which pressurizes the target object (e.g., but not limited to a capsule), to be greater than the pressure in the first pump chamber 412. This causes the first check valve 21 to close the diaphragm through-hole 51 and also causes the convex ring structure 45 to separate from the first check valve 21. Consequently, the medium in the external filling channel 42 is discharged through the connecting chamber 411 and the drain hole 46, wherein the flow direction of the medium is shown in the figure. Figure 6 As indicated by the dashed arrow.

[0046] like Figures 2 to 6 As shown, as an example, the second diaphragm 60 is a hollow structure to better meet the needs of the second pump chamber 413 defined by the vibrator 10, the second diaphragm 60 and the diaphragm valve plate 30.

[0047] like Figures 2 to 6 As shown, as an example, the vibrator 10 includes a vibrating plate 12 and a piezoelectric ceramic plate 13 mounted on the vibrating plate 12. A connecting hole 11 is formed in the vibrating plate 12 and located beside the outer side of the piezoelectric ceramic plate 13. Specifically, in Figure 2 In this example, when the connecting holes 11 are multiple and spaced apart, all the connecting holes 11 are arranged around the piezoelectric ceramic sheet 13. Furthermore, the vibrating plate 12 includes a central flat portion 121, an outer connecting portion 122, and a deformable portion 123 connecting the outer connecting portion 122 and the flat portion 121. The piezoelectric ceramic sheet 13 is mounted on the flat portion 121. More specifically, in... Figures 2 to 6 In this example, the connecting hole 11 is located in the external connecting portion 122, and the deformable portion 123 has a corrugated structure to effectively improve the flexibility, smoothness, and sensitivity of the deformation displacement of the vibrator 10. Obviously, depending on actual needs, the connecting hole 11 can also be located in the flat portion 122, so it is not necessary to specify the location. Figures 2 to 6 The above is the limit.

[0048] Please refer to Figures 7 to 13 The piezoelectric pump 100' of the second embodiment is basically the same as the piezoelectric pump 100 of the first embodiment in structure, and the difference is as follows:

[0049] First, in the piezoelectric pump 100' of the second embodiment, each communication hole 11' is formed on the deformation portion 123', and each communication hole 11' includes a first annular long hole 111, a second annular long hole 112, and an intermediate annular long hole 113 connecting the first annular long hole 111 and the second annular long hole 112, and the first annular long hole 111 and the second annular long hole 112 are staggered in the direction from the flat portion 121 to the outer connecting portion 122; the adjacent two communication holes 11' separate the elastic suspension edge 1231 for connecting the flat portion 121 and the outer connecting portion 122 from the deformation portion 123', which design more effectively improves the softness, smoothness and sensitivity of the vibrator 10 deformation displacement.

[0050] In the piezoelectric pump 100 of the first embodiment, each communication hole 11 is formed on the outer connecting portion 122, and each communication hole 11 is circular; in addition, the deformation portion 123 is a corrugated structure.

[0051] Second, in the piezoelectric pump 100' of the second embodiment, since each communication hole 11' includes a first annular long hole 111, a second annular long hole 112, and an intermediate annular long hole 113, correspondingly, the second check portion 71' is formed away from the outer side of the second check valve 70' to simplify the structure of the second check valve 70'.

[0052] In the piezoelectric pump 100 of the first embodiment, since each communication hole 11 is a circular hole, correspondingly, the second check portion 71 is suspended in the hollow of the second check valve 70, and the number of the second check portion 71 corresponds to the number of the communication hole 11.

[0053] Third, in the piezoelectric pump 100' of the second embodiment, a leakage passage 73 is formed from the second check portion 71, which can be selected as an example, the leakage passage 73 is a notch, but not limited thereto. Figure 8

[0054] In the piezoelectric pump 100 of the first embodiment, the leakage passage 14 is formed from the vibrator 10.

[0055] In addition to the above differences, the other two are the same, so here is not described.

[0056] Please refer to Figure 13 , which is a deformation of Figure 12 In Figure 13 , the pump body 40 is not provided with a vent hole 46; and in Figure 12 , the pump body 40 is provided with a vent hole 46.

[0057] ​Except for the above-mentioned differences, the other two are the same, so hereinafter will not be elaborated.

[0058] Compared with the prior art, by means of the communication hole 11 (11 ') to connect the first pump chamber 412 and the second pump chamber 413 in series; by means of the first check portion 21 to prevent the medium (such as gas or liquid) in the communication chamber 411 from flowing back to the first pump chamber 412; by means of the second check portion 71 (71 ') to prevent the medium in the first pump chamber 412 from flowing back to the second pump chamber 413; by means of the cooperation of the protruding column 44 of the pump body 40 and the diaphragm hole 31 of the diaphragm valve piece 30 to prevent the medium in the second pump chamber 413 from flowing back to the inlet chamber 414; therefore, in their cooperation, the vibrator 10 makes the first check portion 21 open the diaphragm hole 51, the second check portion 71 (71 ') closes the communication hole 11 (11 ') and the protruding column 44 exits the diaphragm hole 51 when it is displaced towards the protruding column 44, so that the backflow is less when the first pump chamber 412 is discharged, and the discharge efficiency is high; the vibrator 10 makes the first check portion 21 close the diaphragm hole 51, the second check portion 71 (71 ') opens the communication hole 11 (11 ') and the protruding column 44 enters the diaphragm hole 51 when it is displaced towards the protruding column 44, which pressurizes the medium in the second pump chamber 413 into the first pump chamber 412, improves the medium inflow efficiency of the first pump chamber 412 and increases the pressure of the first pump chamber 412; thus, the purpose of increasing the discharge pressure and improving the discharge efficiency is achieved.

[0059] It is further explained that, in the Figure 2 horizontal direction includes the left-right direction and the front-rear direction, that is, the horizontal direction is a two-dimensional direction perpendicular to the first direction. In addition, although the drawings show that the pump body 40 fixes the ends 22 of the first check valve 20, the ends 52 of the first diaphragm 50, the ends 72 of the second check valve 70, the end of the vibrator 10, the end 61 of the second diaphragm 60 and the end 32 of the diaphragm valve piece 30 in a fixed arrangement by clamping, obviously, according to actual needs, the ends 22 of the first check valve 20, the ends 52 of the first diaphragm 50, the ends 72 of the second check valve 70, the end of the vibrator 10, the end 61 of the second diaphragm 60 and the end 32 of the diaphragm valve piece 30 can also be fixed in a fixed arrangement by means of gluing, but this is well known in the art, so hereinafter will not be elaborated.

[0060] It is worth noting that the aforementioned leakage channel 14 (73) is a micro-leakage channel, so that the amount of medium leaked by the leakage channel 14 (73) in the process of working of the piezoelectric pump 100 (100 ') is much smaller than the amount of medium pumped out of the first pump chamber 412, thereby ensuring that it does not affect the normal pumping work of the piezoelectric pump 100 (100 ').

[0061] The above disclosed is only a preferred embodiment of the present application, and cannot be used to limit the scope of the present application, therefore equivalent changes made according to the present application claims are all within the scope of the present application.

Claims

1. A piezoelectric pump comprising a vibrator, a first check valve, a diaphragm valve piece, and a pump body having an inner cavity, an outer charge passage, and an outer intake passage, characterized by, The piezoelectric pump further comprises a first partition plate, a second partition plate and a second check valve, the first check valve, the first partition plate, the second check valve, the vibrator, the second partition plate and the diaphragm valve piece are arranged in the inner cavity in the first direction and are sequentially stacked, and the ends of the first check valve, the first partition plate, the second check valve, the vibrator, the second partition plate and the diaphragm valve piece are fixedly arranged in the transverse direction, so as to correspondingly divide the inner cavity into a communication chamber, a first pump chamber, a second pump chamber and an inlet chamber, the communication chamber is communicated with the outer charging channel, the inlet chamber is communicated with the outer inlet channel, the first pump chamber is defined by the first partition plate, the second check valve and the vibrator, and the second pump chamber is defined by the vibrator, the second partition plate and the diaphragm valve piece; the first partition plate is provided with a partition plate through hole communicating the first pump chamber and the communication chamber, and the first check valve is provided with a first check portion located in the communication chamber and used for opening and closing the partition plate through hole; the diaphragm valve piece is provided with a diaphragm through hole communicating the second pump chamber and the inlet chamber, and the pump body is provided with a convex column used for gap cooperation with the diaphragm through hole; the vibrator is provided with a communication hole communicating the first pump chamber and the second pump chamber, and the second check valve is provided with a second check portion located in the first pump chamber and used for opening and closing the communication hole; in the process that the vibrator is deformed and displaced towards the direction close to the outer charging channel, the first check portion opens the partition plate through hole, the second check portion closes the communication hole, and the convex column exits the diaphragm through hole; in the process that the vibrator is deformed and displaced towards the direction close to the convex column, the first check portion closes the partition plate through hole, the second check portion opens the communication hole, and the convex column enters the diaphragm through hole.

2. The piezoelectric pump according to claim 1, characterized by The vibrator comprises a vibrating plate and a piezoelectric ceramic piece assembled on the vibrating plate, the communication holes are arranged on the vibrating plate and located beside the outer side of the piezoelectric ceramic piece; the communication holes are a plurality of holes spaced from each other and are arranged around the piezoelectric ceramic piece.

3. The piezoelectric pump according to claim 2, wherein The vibrating plate comprises a central flat portion, an outer connecting portion located on the outer side and a deformation portion connected between the outer connecting portion and the flat portion, and the piezoelectric ceramic piece is assembled on the flat portion.

4. The piezoelectric pump according to claim 3, characterized by Each of the communication holes is arranged on the deformation portion and comprises a first annular long hole, a second annular long hole and an intermediate annular long hole communicating the first annular long hole and the second annular long hole, the first annular long hole and the second annular long hole are staggered in the direction from the flat portion to the outer connecting portion; adjacent two communication holes separate the deformation portion into an elastic suspension edge used for connecting the flat portion and the outer connecting portion.

5. The piezoelectric pump according to claim 3, wherein The communication holes are arranged on the outer connecting portion or the flat portion, and the deformation portion is a corrugated structure.

6. The piezoelectric pump of claim 1, wherein, The first partition plate is further provided with an outer convex structure protruding into the communication chamber in the direction close to the outer charging channel, and the outer convex structure is opposite to the outer charging channel in the first direction; the first check portion closes or opens the partition plate through hole by engaging or separating with the outer convex structure.

7. The piezoelectric pump according to claim 6, characterized by The pump body is provided with a convex ring structure protruding into the communication chamber in a direction close to the first partition plate and arranged around the outer filling passage, the convex ring structure is also dislocated with the outer convex structure in the transverse direction of the first partition plate, and the convex ring structure is selectively engaged with or separated from the first check portion.

8. The piezoelectric pump according to claim 7, characterized by The pump body is further provided with an emptying hole in communication with the communication chamber, the emptying hole is located outside the convex ring structure; the first check portion correspondingly closes or opens the communication between the emptying hole and the communication chamber through engagement or separation with the convex ring structure; the vibrator or the second check portion is provided with a leakage passage for communication with the first pump chamber.

9. The piezoelectric pump of claim 1, wherein, The first check valve, the second check valve and the second partition plate are each hollow structures; the first check valve forms the first check portion at a position away from the outer side thereof; the second check valve forms the second check portion at a position away from the outer side thereof, or the second check portion is suspended in the hollow of the second check valve.

10. The piezoelectric pump of claim 1, wherein, The outer filling passage and the outer inlet passage are each arranged in extension in the first direction.