LOADLOCK anti-backflushing air path structure

Abstract

The utility model relates to the technical field of etching machines, in particular to a LOADLOCK anti-backflushing gas circuit structure which comprises two pipelines connected with two cavities, and a pump part is jointly connected between the ends of the two pipelines. Wherein a negative pressure path of the pipeline is sequentially communicated with a one-way assembly and a valve, and the valve is close to one side of the cavity; the one-way assembly comprises a shell and a valve assembly arranged in the shell, the bottom of the shell is detachably connected with a bottom cover used for installing the valve assembly, the design that the one-way assembly is additionally arranged on the pipeline is adopted, airflow cannot be backflushed into a high-vacuum LOADLOCK cavity due to the effect of the one-way assembly in the working process, and therefore the valve assembly is not prone to backflushing. And meanwhile, the vacuumizing operation of each cavity is not influenced, so that products in the LOADLOCK are not influenced, the product defects are improved, and the product yield is improved.

Description

Technical Field

[0001] This utility model relates to the field of etching machine technology, and in particular to a LOADLOCK anti-backflow air path structure. Background Technology

[0002] In semiconductor manufacturing, etching machines are one of the key pieces of equipment used to precisely remove layers of material from silicon wafers. Etching machines typically include one or more loading chambers for transferring the silicon wafer between the processing chamber and the external environment. These loading chambers are evacuated by dry pumps and connected to the processing chamber to ensure that the silicon wafer is handled in a cleanroom environment.

[0003] Currently, most etching platforms on the market use a design where two loading chambers share a single dry pump. Each loading chamber is controlled by an isolation valve (ISO valve) to maintain vacuum. The drawback of this design is that when there is a pressure difference between the two loading chambers, if the isolation valves of both chambers open simultaneously, the airflow in the pipeline will backflow from the low-pressure area to the high-pressure area. This can cause particles or contaminants in the airflow to deposit on the silicon wafer, resulting in product defects and affecting product yield.

[0004] To address this issue, current temporary methods rely on operator observation and judgment to avoid loading when a pressure difference exists between the two loading chambers. This method is not only inefficient but also dependent on operator experience and attention, making it prone to human error. Furthermore, this method cannot completely prevent backflow caused by pressure differences, thus failing to fundamentally solve the product defect problem. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies, such as low efficiency of manual judgment and operation, by proposing a LOADLOCK anti-backflow air path structure.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] Design a LOADLOCK anti-backflow air path structure, including:

[0008] A pipe connecting the two chambers, with a pump connected between the ends of the two pipes;

[0009] A one-way component and a valve are sequentially connected along the negative pressure path of the pipeline, with the valve located on the side closest to the chamber.

[0010] The one-way component includes a housing and a valve assembly built into the housing, with a bottom cover detachably connected to the bottom of the housing for mounting the valve assembly.

[0011] Further, the middle part of the pipeline has a broken part, and the two ends of the shell are connected with the two ends of the broken part through flanges and fasteners.

[0012] Further, the shell comprises an air inlet end, an air outlet end and a mounting end, the air inlet end is communicated with the air outlet end, and a bent step is formed at the communication position;

[0013] The bottom cover is mounted at the mounting end.

[0014] Further, the valve assembly comprises a fixed rod connected with the bottom cover, and a sleeve arranged outside the fixed rod;

[0015] A valve plug is fixedly connected at the end of the sleeve, and the valve plug is stopped at the bent step.

[0016] Further, a spring is arranged outside the sleeve;

[0017] An adjusting nut is also threadedly connected outside the sleeve, and the two ends of the spring abut against the adjusting nut and the upper end face of the bottom cover respectively.

[0018] Further, a sleeve part is arranged on the end face of the bottom cover, the bottom end of the fixed rod is inserted into the sleeve part, and a locking structure is arranged between the fixed rod and the sleeve part.

[0019] Further, the locking structure comprises a positioning glass bead embedded in the bottom of the fixed rod, and a hole is formed outside the sleeve part and matched with the telescopic end of the positioning glass bead.

[0020] Further, the end of the mounting end has an inner retracted opening, the end face of the bottom cover has a protruding part, the protruding part is embedded into the inner retracted opening, and the bottom cover is fixed with the mounting end through fasteners.

[0021] Further, a sealing ring is arranged on the end face of the inner retracted opening.

[0022] Further, the end parts of the two pipelines are bent and communicated, and the pump is connected with the communication position of the two pipelines through a main pipeline.

[0023] The LOADLOCK anti-backlash gas path structure has the advantages that: in the utility model, the one-way assembly is arranged in the pipeline, the gas flow will not backwash into the high-vacuum LOADLOCK chamber due to the effect of the one-way assembly during work, and the vacuumizing operation of the respective chambers will not be affected, so that the product in the LOADLOCK is not affected, product defects are improved, and product yield is improved. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is a perspective view of the utility model;

[0025] Figure 2 It is a shell structure schematic view of the utility model;

[0026] Figure 3 It is a sectional view of the utility model's one-way assembly;

[0027] Figure 4 It is an explosion view of the utility model's one-way assembly.

[0028] In the drawing: 1, pipeline; 2, pump; 21, main pipe; 3, one-way assembly; 31, shell; 311, air inlet end; 312, air outlet end; 313, mounting end; 314, bending step; 315, inner necking; 316, sealing ring; 32, valve assembly; 321, fixed rod; 322, sleeve; 323, valve plug; 324, spring; 325, adjusting nut; 326, positioning glass bead; 33, bottom cover; 331, sleeve part; 332, protruding part; 4, valve. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments.

[0030] Referring to Figures 1-4 For an embodiment of the utility model, it discloses a LOADLOCK anti-backlash gas path structure, specifically the gas path structure includes pipeline 1 connected with two chambers, pump 2 is connected between the end of two pipeline 1, the pump 2 in the embodiment is set as dry pump;

[0031] Wherein one-way assembly 3 and valve 4 are sequentially communicated on the negative pressure path of the pipeline 1, the valve 4 is close to the side of chamber, of course, the valve 4 in the embodiment is set as electric valve;

[0032] The one-way assembly 3 includes shell 31 and valve assembly 32 built-in the shell 31, the bottom cover 33 for installing valve assembly 32 is detachably connected at the bottom of the shell 31.

[0033] In some embodiments, the utility model has a disconnected part in the middle of the pipeline 1, the both ends of the shell 31 and the both ends of the disconnected part are connected through flange and fastener, specifically, the fastener in the embodiment is preferably set as bolt, the convenient disassembly of the whole one-way assembly 3 can be realized through the flange connection mode, to improve the convenience of assembly.

[0034] Specifically, the shell 31 comprises an air inlet end 311, an air outlet end 312 and a mounting end 313, which are roughly in T-shaped structure, and the mounting end 313 is arranged obliquely, the air inlet end 311 is communicated with the air outlet end 312, and a bent step 314 is formed at the communication position;

[0035] The bottom cover 33 is mounted at the mounting end 313.

[0036] The valve assembly 32 comprises a fixed rod 321 connected with the bottom cover 33, and a sleeve 322 sleeved outside the fixed rod 321.

[0037] A valve plug 323 is fixedly connected at the end of the sleeve 322, and the valve plug 323 is stopped at the bent step 314, so that the one-way communication between the air inlet end 311 and the air outlet end 312 is realized.

[0038] On the basis of the above embodiment, the sleeve 322 is sleeved with a spring 324 outside.

[0039] An adjusting nut 325 is also threadedly connected outside the sleeve 322, and the two ends of the spring 324 abut against the adjusting nut 325 and the upper end surface of the bottom cover 33, respectively.

[0040] That is, the adjusting nut 325 is used to adjust the compression length of the spring 324 in the embodiment, and according to Hooke's law, when the length of the spring 324 is compressed, the elastic force increases, so that the position of the adjusting nut 325 can be adjusted to adjust the elastic force of the spring 324, so that the problem of poor sealing caused by the decrease of the elastic force after reciprocating elastic expansion can be avoided.

[0041] Further, the bottom cover 33 has a sleeve part 331 on the end surface, and the bottom end of the fixed rod 321 is inserted into the sleeve part 331, wherein a locking structure is arranged between the fixed rod 321 and the sleeve part 331.

[0042] The locking structure comprises a positioning glass bead 326 embedded in the bottom of the fixed rod 321, and a hole is formed outside the sleeve part 331 and matched with the telescopic end of the positioning glass bead 326, that is, the positioning glass bead 326 is used to clamp the hole on the sleeve part 331 to fix the whole fixed rod 321, and when disassembling, the telescopic end of the positioning glass bead 326 is only pressed to be retracted from the hole, so that the whole fixed rod 321 can be disassembled, and the convenience of assembly is improved.

[0043] In a preferred embodiment, the end of the mounting end 313 has an inner recess 315, the end face of the bottom cover 33 has a protruding part 332, the protruding part 332 is embedded in the inner recess 315, wherein the bottom cover 33 is fixed with the mounting end 313 by fasteners, of course, the fasteners in the embodiment can also be bolts, the bottom cover 33 is connected and fixed by the bolts, so as to realize the detachability of the bottom cover 33, so as to facilitate the maintenance of the internal components.

[0044] Of course, in order to improve the connection and sealing of the bottom cover 33, the utility model also places a sealing ring 316 on the end face of the inner recess 315.

[0045] It should be noted that the end of the two pipes 1 is bent and communicated in the embodiment of the utility model, and the pump 2 is communicated with the communication of the two pipes 1 through the main pipe 21.

[0046] In summary, by adding the one-way assembly 3 to the pipe 1, the airflow will not be backflooded to the LOADLOCK chamber with high vacuum, and the vacuum operation of each chamber will not be affected, so that the product in the LOADLOCK is not affected, thereby improving the product defects and improving the product yield.

[0047] The above is only a preferred specific embodiment of the utility model, but the protection scope of the utility model is not limited to this, any skilled person in the art can make equivalent replacement or change according to the technical scheme and the utility model concept of the utility model within the technical range disclosed by the utility model, which should be covered in the protection scope of the utility model.

Claims

1. A loadlock anti-purging gas path structure, characterized by, The utility model relates to a kind of vacuum pump, including: Two chambers are connected with pipeline (1), and the end of two described pipeline (1) is jointly connected with pump (2); Wherein the negative pressure path of described pipeline (1) is sequentially communicated with one-way component (3) and valve (4), and the side of valve (4) is close to chamber; Described one-way component (3) includes shell (31) and valve component (32) built-in in the shell (31), and bottom cover (33) for installing valve component (32) is detachably connected in the bottom of the shell (31).

2. The loadlock anti-purging gas path structure of claim 1, wherein: The middle part of described pipeline (1) has broken part, and the both ends of the shell (31) are connected with the both ends of the broken part by flange and fastener.

3. The loadlock anti-purging gas path structure of claim 1, wherein: Described shell (31) includes air inlet end (311), air outlet end (312) and installation end (313), and the air inlet end (311) is communicated with the air outlet end (312), and a bending step (314) is formed at the communication place; Described bottom cover (33) is installed at the installation end (313).

4. The anti-purging gas path structure of a load lock according to claim 3, wherein: Described valve component (32) includes fixed rod (321) connected with the bottom cover (33) and sleeve (322) sleeved outside the fixed rod (321); Valve plug (323) is fixedly connected at the end of described sleeve (322), and the valve plug (323) is stopped at the bending step (314).

5. The anti-purging gas path structure of a load lock according to claim 4, wherein: Spring (324) is sleeved outside the sleeve (322); Adjusting nut (325) is also screwed on the outside of the sleeve (322), and the both ends of the spring (324) respectively abut against the adjusting nut (325) and the upper end surface of the bottom cover (33).

6. The anti-purging gas path structure of a load lock according to claim 4, wherein: There is a sleeve part (331) on the end surface of the bottom cover (33), and the bottom end of the fixed rod (321) is inserted into the sleeve part (331), wherein locking structure is arranged between the fixed rod (321) and the sleeve part (331).

7. The anti-purging gas path structure of a loadlock according to claim 6, wherein: The locking structure includes positioning glass bead (326) embedded in the bottom of the fixed rod (321), and a hole is formed on the outside of the sleeve part (331) and matched with the telescopic end of the positioning glass bead (326).

8. The anti-purging gas path structure of a loadlock according to claim 3, wherein: The end of the installation end (313) has an inner reentrant mouth (315), and the end surface of the bottom cover (33) has a protruding part (332), which is embedded in the inner reentrant mouth (315), wherein the bottom cover (33) is fixed with the installation end (313) by fastener.

9. The anti-purging gas path structure of a loadlock as claimed in claim 8, wherein: Sealing ring (316) is also placed on the end surface of the inner reentrant mouth (315).

10. The anti-purging gas path structure of a load lock chamber according to any one of claims 1-9, wherein: The end of two described pipeline (1) is bent and communicated, and the pump (2) is communicated with the communication place of two described pipeline (1) by main pipe (21).

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