Wafer basket and wafer packaging equipment

Abstract

The utility model discloses a wafer basket and a wafer packaging device, comprising a pillar and a bracket, a far end of the bracket far from the pillar is provided with a first spacing mechanism used for spacing and fixing a material basket with a first specification; the first limiting mechanism is provided with a first rotating arm, a first rotating shaft and a first limiting arm, the first rotating arm is rotatably connected to the bracket through the first rotating shaft, the first rotating arm is provided with a bearing end and a swinging end which are located on the two sides of the first rotating shaft respectively, the bearing end is close to the interior of the bracket, and the first limiting arm extends upwards from the swinging end; and when the bearing end is pressed down by the material basket, the material basket is limited and fixed on the bracket by the first limiting arm. According to the technical scheme of the utility model, one wafer basket can be compatible with material baskets for transporting and loading wafers of various specifications, so that the production efficiency of wafer packaging equipment is improved, the risk that the wafers fall off from the material baskets in the transportation process to cause damage to the wafers is reduced, and the cost of designing special material baskets for adapting to the wafers of various specifications is saved.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer equipment technical field especially, relates to a kind of wafer basket and wafer packaging equipment. BACKGROUND

[0002] Wafer refers to the substrate of manufacturing semiconductor transistor or integrated circuit, it is a kind of crystal material, its shape is circular so it is called wafer.In the automatic wafer processing equipment of semiconductor industry, the basket used for storing wafer is the card slot multilayer structure.

[0003] In wafer packaging process, wafer needs to be transferred by basket.Wafer has multiple specifications, such as 8 inches and 12 inches, special basket is designed for different specifications of wafer, and its structure and size will have certain difference.In transporting wafer, the travelling device in wafer packaging equipment realizes the transportation of wafer by using wafer basket to grab basket.However, different specifications of wafer will be equipped with different size of basket, so designing wafer basket of different size is neither economical nor easy to affect the efficiency of transporting wafer, and using the same wafer basket to carry different specifications of basket is also difficult to avoid the accident of wafer falling from basket during transportation, resulting in damage of wafer. SUMMARY

[0004] One of the purposes of the utility model is to overcome the deficiencies in the prior art, and to provide a wafer basket and wafer packaging equipment for the problems existing in the prior art.

[0005] To achieve the above purpose, the utility model realizes the following technical scheme:

[0006] In the first aspect, the utility model provides a wafer basket, which comprises a support column and a bracket, the support column is fixed with the bracket, the bracket is used for carrying basket, a first limiting mechanism is arranged on the distal end of the bracket away from the support column, and the first limiting mechanism is used for limiting and fixing the basket with the first specification on the bracket.

[0007] The first limiting mechanism has a first rotating arm, a first rotating shaft and a first limiting arm, the first rotating arm is rotatably connected to the bracket through the first rotating shaft, the first rotating arm has a carrying end and a swing end respectively located on both sides of the first rotating shaft, the carrying end is close to the inside of the bracket, and the first limiting arm is arranged upwardly from the swing end, when the carrying end is pressed down by the basket, the first limiting arm limits and fixes the basket on the bracket.

[0008] In one preferred embodiment of the present application, the bottom of the bracket is provided with a plurality of bearing beams, and the bearing beams are provided with storage gaps. A part of the storage gaps are connected to form a first profile identical to the bottom profile of the basket with the first specification, and another part of the storage gaps are connected to form a second profile identical to the bottom profile of the basket with the second specification.

[0009] The first bearing beam of the plurality of bearing beams is provided with the first limiting mechanism. The first bearing beam is provided with a through groove extending horizontally parallel to the support column. The first rotating shaft is arranged in the through groove and located between the first storage gap forming the first profile and the second storage gap forming the second profile. The first rotating arm is rotatably arranged in the through groove through the first rotating shaft.

[0010] In one preferred embodiment of the present application, the first limiting arm is provided with a blocking piece away from the first rotating arm. When the bearing end is pressed down by the basket, the blocking piece is clamped into the basket for limiting. When the bearing end is not stressed, the blocking piece abuts against the bracket to prevent the first rotating arm from further rotating.

[0011] In one preferred embodiment of the present application, the bracket is provided with a second limiting mechanism away from the distal end of the support column. The second limiting mechanism is used for limiting and fixing the basket with the second specification on the bracket. The second limiting mechanism has a second connecting arm and a second stop arm. The second connecting arm extends downward from the bracket. The second stop arm is horizontally bent from the second connecting arm toward the inside of the bracket.

[0012] In one preferred embodiment of the present application, the second connecting arm and the second stop arm are at a right angle.

[0013] In one preferred embodiment of the present application, the first limiting mechanism and the support column have a first distance, and the second limiting mechanism and the support column have a second distance. The first distance is smaller than the second distance.

[0014] In one preferred embodiment of the present application, the bracket is provided with a third limiting mechanism close to the proximal end of the support column. The third limiting mechanism cooperates with the first limiting mechanism to limit and fix the basket with the first specification on the bracket.

[0015] The third limiting mechanism has a third fixed column and a third protruding part. The third fixed column is fixed on the bracket. The third protruding part protrudes from the third fixed column toward the inside of the bracket in the horizontal direction.

[0016] In a preferred embodiment of the present application, a third limiting mechanism is arranged on the support column, and cooperates with the first limiting mechanism to limit and fix the material basket with the first specification on the bracket.

[0017] The third limiting mechanism has a third protruding part protruding from the support column to the inside of the bracket.

[0018] In a preferred embodiment of the present application, the bracket has a bottom support frame fixed to the bottom end of the support column and an upper support frame fixed between the top end and the bottom end of the support column, the third protruding part is provided with a third bearing part away from the third fixed column, the third bearing part extends from the third protruding part to the bottom surface of the bottom support frame to the inside of the bracket, and a curved inclined surface is formed between the third bearing part and the third protruding part.

[0019] In a preferred embodiment of the present application, the third fixed column connects the bottom support frame and the upper support frame, and the third protruding part is located between the bottom support frame and the upper support frame.

[0020] In a preferred embodiment of the present application, a clamping groove is arranged on the support column, and a mounting hole is arranged on the upper support frame, so that the upper support frame is fixedly connected with the support column through the embedding of the mounting hole and the clamping groove.

[0021] In a preferred embodiment of the present application, the bottom support frame and the upper support frame are fixedly connected through a plurality of connecting columns.

[0022] In a preferred embodiment of the present application, the first limiting mechanism is arranged on the bottom support frame.

[0023] In a preferred embodiment of the present application, the support column is arranged on the side of the bracket.

[0024] In a preferred embodiment of the present application, a handle part is further arranged on the support column away from the top end of the bracket.

[0025] In a second aspect, the utility model provides a wafer packaging equipment, including grabbing device and like first aspect described wafer basket, grabbing device passes through grabbing wafer basket and transports material basket.

[0026] The wafer basket and the wafer packaging equipment disclosed by the utility model can be used to transport and load material baskets with multiple specifications of wafers, improve the production efficiency of the wafer packaging equipment, reduce the risk of wafer damage caused by wafer falling from the material basket during transportation, and save the cost of designing special material baskets for multiple specifications of wafers. BRIEF DESCRIPTION OF DRAWINGS

[0027] The utility model is described with the help of the following drawings:

[0028] Figure 1 It is the structure schematic diagram of wafer packaging equipment of embodiment in the utility model;

[0029] Figure 2 It is the first structure schematic diagram of wafer basket in the embodiment of the utility model;

[0030] Figure 3 It is the second structure schematic diagram of wafer basket in the embodiment of the utility model;

[0031] Figure 4 It is the connection schematic diagram of support and bracket in the wafer basket in the embodiment of the utility model;

[0032] Figure 5A It is a structure schematic diagram of first limiting mechanism in the wafer basket in the embodiment of the utility model;

[0033] Figure 5B It is another structure schematic diagram of first limiting mechanism in the wafer basket in the embodiment of the utility model;

[0034] Figure 6 It is the schematic diagram of third limiting mechanism in the wafer basket in the embodiment of the utility model;

[0035] Figure 7 It is the schematic diagram of the first structure of wafer basket carrying the first specification of material basket in the embodiment of the utility model;

[0036] Figure 8 It is the schematic diagram of the first structure of wafer basket carrying the second specification of material basket in the embodiment of the utility model;

[0037] Figure 9 It is the schematic diagram of the second structure of wafer basket carrying the first specification of material basket in the embodiment of the utility model;

[0038] Figure 10 It is the schematic diagram of the second structure of wafer basket carrying the second specification of material basket in the embodiment of the utility model.

[0039] Reference signs:

[0040] 1-wafer basket; 2-grabbing device; 3-material basket; 4-wafer;

[0041] 100 - support; 101 - handle part; 102 - clamping groove; 200 - bracket; 201 - connecting column; 210 - bottom support frame; 220 - upper support frame; 221 - mounting hole; 230 - bearing beam; 231 - storage notch; 232 - first storage notch; 233 - second storage notch; 234 - first bearing beam; 235 - through slot; 300 - first limiting mechanism; 310 - first rotating arm; 311 - bearing end; 312 - swing end; 313 - bearing stick; 320 - first rotating shaft; 330 - first limiting arm; 331 - blocking piece; 400 - second limiting mechanism; 401 - second connecting arm; 402 - second stop arm; 500 - third limiting mechanism; 501 - third fixed column; 502 - third protruding part; 503 - third bearing; 504 - curved slope. DETAILED DESCRIPTION

[0042] In order to better understand the technical solutions of the present application, the embodiments of the present application are described in detail below in conjunction with the drawings.

[0043] It should be clear that the described embodiments are only some of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0044] As shown in Figure 1 An embodiment of the present application provides a wafer packaging equipment, which comprises a wafer basket 1 and a grabbing device 2. The grabbing device 2 transports a feeding basket 3 by grabbing the wafer basket 1.

[0045] As shown in Figure 2 and Figure 3As shown, the wafer basket 1 of the embodiment includes a support column 100 and a bracket 200, the support column 100 is fixed with the bracket 200, and the bracket 200 is used to carry the material basket 3. A first limiting mechanism 300 and a second limiting mechanism 400 are arranged on the distal end of the bracket 200 away from the support column 100, and a third limiting mechanism 500 is arranged on the proximal end of the bracket 200 close to the support column 100. The material basket 3 with the first specification can be fixed and limited on the bracket 200 only through the first limiting mechanism 300, the material basket 3 with the second specification can be fixed and limited on the bracket 200 only through the second limiting mechanism 400, the material basket 3 with the first specification can be fixed and limited on the bracket 200 through the cooperation of the third limiting mechanism 500 and the first limiting mechanism 300, and the material basket 3 with the second specification can be fixed and limited on the bracket 200 through the cooperation of the third limiting mechanism 500 and the second limiting mechanism 400. In the embodiment, the wafer 4 loaded in the material basket 3 with the first specification is larger in size than the wafer 4 loaded in the material basket 3 with the second specification, the first limiting mechanism 300 has a first distance from the support column 100, the second limiting mechanism 400 has a second distance from the support column 100, and the first distance is set to be smaller than the second distance.

[0046] In the wafer basket 1 of the present embodiment, the support posts 100 are linear structures standing on the carrier 200, wherein the materials of the support posts 100 and the carrier 200 can be metal, such as aluminum profiles, steel profiles, iron profiles, etc., or hard plastic with high strength, such as polyformaldehyde (POM), Acrylonitrile Butadiene Styrene plastic (ABS plastic), polypropylene (PP) / Polyvinyl chloride (PVC), Polytetrafluoroethylene (PTFE), polyvinylidene difluoride (PVDF), etc. In the present embodiment, the support posts 100 are arranged at the side edges of the carrier 200, so that the design of the grabbing device 2 is facilitated, i.e. the carrier 200 is on one side of the support posts 100, and the grabbing device 2 is on the other side of the support posts 100, so that more space is available for the design and placement of the grabbing device 2, and the grabbing device 2 can conveniently transport the carrier 200. A handle portion 101 is further arranged on the support post 100, which is located at the top end of the support post 100 away from the carrier 200. When transporting the carrier 200, the grabbing device 2 grabs the handle portion 101 to transport the carrier 200. The carrier 200 has a bottom support frame 210 and an upper support frame 220. The bottom support frame 210 is fixed to the bottom end of the support post 100, and the upper support frame 220 is fixed between the top end and the bottom end of the support post 100. Both the bottom support frame 210 and the upper support frame 220 are semi-rail frame structures with three closed edges and one open edge, and the open direction is away from the support post 100. The number of the upper support frame 220 can be one or multiple. Multiple upper support frames 220 can improve the structural strength of the carrier 200 and the protection effect of the material basket 3, but will also increase the overall weight of the carrier 200 and the burden of the grabbing device 2 for transporting the carrier 200. Therefore, the number of the upper support frame 220 is not the more the better, but should be set according to the actual situation. In the present embodiment, the number of the upper support frame 220 is one.

[0047] As Figure 4As shown, the support column 100 and the bracket 200 are fixedly connected through a mortise and tenon structure and welding. The support column 100 is provided with a clamping groove 102, the upper support frame 220 is provided with a mounting hole 221, and the upper support frame 220 is fixedly connected with the support column 100 through the embedding of the mounting hole 221 and the clamping groove 102. The bottom support frame 210 and the upper support frame 220 are fixedly connected through a plurality of connecting columns 201, which are fixedly connected with the bottom support frame 210 and the upper support frame 220 through a pin and welding method. An interference fit can be used between the mounting hole 221 and the clamping groove 102. The edges of the mounting hole 221 can be supported by the edges of the clamping groove 102 when the mounting hole 221 is embedded in the clamping groove 102, and the self-gravity of the upper support frame 220 can be offset by the support force. The support column 100, the bottom support frame 210 and the upper support frame 220 are fixedly connected through a mortise and tenon structure and welding, so that the upper support frame 220 can remain approximately parallel to the bottom support frame 210, thereby ensuring the structural stability of the bracket 200 and ensuring that the bracket 200 will not deform due to the mass of the material basket 3 and the self-weight of the bracket 200 during transportation.

[0048] As shown in Figure 2 and Figure 3 The bottom of the bracket 200 is provided with a plurality of load-bearing beams 230, which are linear structures horizontally extending from the two side frames of the bottom support frame 210 to the inside of the bracket 200. They can be a section of structure connected to the two side frames, or they can be two load-bearing beams 230 arranged in pairs and extending from the two side frames. The two load-bearing beams 230 arranged in pairs have a certain interval, and the two pairs of adjacent load-bearing beams 230 also have an interval. The load-bearing beam 230 is provided with a storage notch 231, and a part of the plurality of storage notches 231 are connected to form a first profile identical to the bottom profile of the material basket 3 with a first specification. Another part of the plurality of storage notches 231 are connected to form a second profile identical to the bottom profile of the material basket 3 with a second specification. The wafer 4 loaded in the material basket 3 with the first specification and the second specification is different in size. In this embodiment, the wafer 4 loaded in the material basket 3 with the first specification is smaller than the wafer 4 loaded in the material basket 3 with the second specification. For example, the material basket 3 with the first specification is used to load 8-inch wafers 4, and the material basket 3 with the second specification is used to load 12-inch wafers 4. Figure 2In the embodiment, the first storage gap 232 is arranged near the inner part of the bracket 200, the second storage gap 233 is arranged near the edge of the bracket 200, the first storage gaps 232 on the plurality of pairs of the bearing beams 230 form a first contour in the shape of two parallel straight lines, which is the same as and has the same interval as the bottom contour of the first-specification basket 3, the second storage gaps 233 on the plurality of pairs of the bearing beams 230 form a second contour in the shape of two parallel straight lines, which is the same as and has the same interval as the bottom contour of the second-specification basket 3, and the first contour and the second contour are parallel to each other, as shown in Figure 7 and Figure 8 In the embodiment, Figure 3 the first storage gap 232 is arranged near the inner part of the bracket 200, the second storage gap 233 is arranged near the edge of the bracket 200, the first storage gaps 232 on the plurality of pairs of the bearing beams 230 form a first contour in the shape of two parallel straight lines, which is the same as and has the same interval as the bottom contour of the first-specification basket 3, the second storage gaps 233 on the plurality of pairs of the bearing beams 230 form a second contour in the shape of two parallel straight lines, which is the same as and has the same interval as the bottom contour of the second-specification basket 3, and the first contour and the second contour are parallel to each other, as shown in Figure 9 and Figure 10 Of course, the first storage gap 232 and the second storage gap 233 can also be arranged according to other shapes of the first contour and the second contour, and are not limited to the two embodiments shown in the embodiment.

[0049] Referring to Figure 2 , Figure 3 , Figure 5A and Figure 5B In the wafer basket 1 of the embodiment, the first limiting mechanism 300 is arranged on the bottom support frame 210, the first limiting mechanism 300 has a first rotating arm 310, a first rotating shaft 320 and a first limiting arm 330, the first rotating arm 310 is rotatably connected to the bracket 200 through the first rotating shaft 320, the first rotating arm 310 has a bearing end 311 and a swing end 312 located on the two sides of the first rotating shaft 320 respectively, the bearing end 311 is near the inner part of the bracket 200, the first limiting arm 330 is arranged to extend upward from the swing end 312, and when the bearing end 311 is pressed down by the basket 3, the first limiting arm 330 limits and fixes the basket 3 on the bracket 200. Wherein, Figure 5A as shown in FIG. 13 is an embodiment of the first limiting mechanism 300, Figure 5BThis illustrates another embodiment of the first limiting mechanism 300. A blocking member 331 is provided on the first limiting arm 330 away from the first rotating arm 310. Figure 5A In the middle, the blocking member 331 is formed by bending inward from the far end of the first limiting arm 330 away from the first rotating shaft 320 toward the first rotating arm 310. Figure 5B In this structure, the blocking member 331 is a pin structure that axially passes through the far end of the first limiting arm 330 away from the first rotating shaft 320. When the bearing end 311 is pressed down by the material basket 3, the blocking member 331 is engaged in the material basket 3 for limiting. When the bearing end 311 is not under force, the blocking member 331 abuts against the bracket 200 to prevent the first rotating arm 310 from rotating further. Figures 7 to 10 As shown. The angle between the first limiting arm 330 and the first rotating arm 310 can be a right angle, an acute angle, or an obtuse angle, for example... Figure 5A In the middle, due to the inward bending of the blocking member 331, the included angle is an obtuse angle, while Figure 5B In the middle, due to the pinning structure of the blocking member 331, the included angle can be a right angle or an acute angle.

[0050] See Figure 2 and Figure 3 The first limiting mechanism 300 is disposed on some of the multiple supporting beams 230. In this embodiment, the first limiting mechanism 300 is disposed in pairs to better limit and fix the basket 3. The first supporting beams 234 are also disposed in pairs, and the first supporting beams 234 are usually the pair or one of several pairs furthest from the support column 100. The first supporting beam 234 has a through groove 235, which extends horizontally parallel to the support column 100. The first rotating shaft 320 passes through the through groove 235 and is located between the first placement notch 232 forming the first contour and the second placement notch 233 forming the second contour on the first supporting beam 234. The first rotating arm 310 is rotatably disposed in the through groove 235 via the first rotating shaft 320. When the first specification basket 3 is loaded on the bracket 200, such as... Figure 7 and Figure 9 As shown, the material basket 3 is embedded in the first storage notch 232, and at the same time, downward pressure is applied to the bearing end 311 of the first rotating arm 310, driving the first rotating arm 310 to rotate around the first rotating shaft 320. The first limiting arm 330 is driven to swing toward the material basket 3 until the blocking member 331 is engaged in the material basket 3 to achieve limiting. When a second-sized material basket 3 is loaded on the bracket 200, as Figure 8As shown, the material basket 3 is embedded in the second storage gap 233, and the bearing end 311 of the first rotating arm 310 is provided with a bearing rod 313 extending towards the support column 100. The bearing rod 313 is parallel to the first rotating shaft 320 and is spaced apart from the extension beam. The material basket 3 applies a downward pressure on the bearing rod 313, thereby driving the first rotating arm 310 to rotate around the first rotating shaft 320. The first limiting arm 330 is driven to swing towards the material basket 3 until the blocking piece 331 is clamped into the material basket 3 to achieve limiting. In this embodiment, the first limiting mechanism 300 is provided with a force- swingable limiting function, which can achieve the same limiting and fixing effect when loading material baskets 3 of different specifications.

[0051] Referring to Figure 3 In the wafer basket 1 of this embodiment, the second limiting mechanism 400 has a second connecting arm 401 and a second stop arm 402. The second connecting arm 401 extends downward from the bracket 200, and the second stop arm 402 is horizontally bent from the second connecting arm 401 into the bracket 200. Since the second limiting mechanism 400 is located farther from the support column 100 than the first limiting mechanism 300, the second limiting mechanism 400 can limit the movement of the material basket 3 from the opening of the bracket 200. In one embodiment of this embodiment, the second connecting arm 401 and the second stop arm 402 form a right angle.

[0052] Referring to Figure 3 and Figure 6In the wafer basket 1 of the embodiment, the third limiting mechanism 500 is arranged on the bracket 200. The third limiting mechanism 500 has a third fixed column 501 fixed on the bracket 200 and a third protruding part 502 protruding from the third fixed column 501 towards the interior of the bracket 200 in the horizontal direction. When the material basket 3 is loaded on the bracket 200, the third protruding part 502 exerts a supporting force on the material basket 3 from the bottom of the material basket 3, thereby reducing the pressure of the material basket 3 on each bearing beam 230 and improving the durability and stability of the bracket 200. The third fixed column 501 connects the bottom support frame 210 and the upper support frame 220, which can further improve the structural strength of the bracket 200. The third protruding part 502 is located between the bottom support frame 210 and the upper support frame 220. When the number of upper support frames 220 is more than one, the third protruding part 502 is arranged between the bottom support frame 210 and the upper support frame 220 closest to the bottom support frame 210. A third bearing 503 is arranged on the third protruding part 502 away from the third fixed column 501. The third bearing 503 extends from the surface of the third protruding part 502 facing the bottom surface of the bottom support frame towards the interior of the bracket 200. A curved inclined surface 504 is formed between the third bearing 503 and the third protruding part 502. The third bearing 503 still provides a supporting force on the material basket 3. Since the thickness of the third bearing 503 is smaller than that of the third protruding part 502, the third bearing 503 can extend into the gap in the material basket 3 to provide an upward supporting force. Therefore, the position of the third protruding part 502 is not limited and is liberated. The curved inclined surface 504 can cooperate with the first limiting mechanism 300 to clamp and limit the material basket 3, further ensuring the stability of the material basket 3 during transportation and preventing the risk of damage caused by the falling of the wafer 4.

[0053] Of course, in another embodiment of the embodiment, the third limiting mechanism 500 can also be arranged on the support column 100. The third limiting mechanism 500 has a third protruding part 502 protruding from the support column 100 towards the interior of the bracket 200. The structure of the third protruding part 502 is the same as that of the third protruding part 502 in the previous embodiment, which will not be described here.

[0054] The wafer basket and wafer packaging equipment disclosed by the utility model can be used to transport and load material baskets of multiple specifications of wafers, improve the production efficiency of wafer packaging equipment, and reduce the risk of wafer damage caused by the falling of wafers from the material basket during transportation by arranging and cooperating three limiting mechanisms to limit and fix the material basket on the bracket, thereby saving the cost of designing special material baskets for multiple specifications of wafers.

[0055] It should be understood that the above description of the specific embodiments of the present application is only for the purpose of illustrating the technical route and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and to implement it, but the present application is not limited to the above specific implementation. Any changes or modifications made within the scope of the claims of the present application shall be covered within the scope of protection of the present application.

Claims

1. A wafer basket, characterized in that, The support column is fixed with a bracket, the bracket is used to carry a basket, a first limiting mechanism is arranged on the bracket far from the distal end of the support column, and the first limiting mechanism is used to limit and fix a basket with a first specification on the bracket. The first limiting mechanism has a first rotating arm, a first rotating shaft and a first limiting arm, the first rotating arm is rotatably connected to the bracket through the first rotating shaft, the first rotating arm has a bearing end and a swing end located on two sides of the first rotating shaft respectively, the bearing end is close to the inside of the bracket, and the first limiting arm is arranged to extend upward from the swing end.

2. The wafer basket of claim 1, wherein, A plurality of bearing beams are arranged on the bottom of the bracket, the bearing beams are provided with storage notches, a part of the plurality of storage notches are connected to form a first contour same as the bottom contour of the basket with the first specification, and another part of the plurality of storage notches are connected to form a second contour same as the bottom contour of the basket with the second specification. The first bearing beam of the plurality of bearing beams is provided with the first limiting mechanism, the first bearing beam is provided with a through groove, the through groove extends horizontally parallel to the support column, the first rotating shaft is arranged in the through groove and located between the first storage notch forming the first contour and the second storage notch forming the second contour on the first bearing beam, and the first rotating arm is rotatably arranged in the through groove through the first rotating shaft.

3. The wafer basket of claim 1, wherein, The first limiting arm is provided with a blocking piece far from the first rotating arm, when the bearing end is pressed down by the basket, the blocking piece is clamped into the basket for limiting, and when the bearing end is not stressed, the blocking piece abuts against the bracket to prevent the first rotating arm from further rotating.

4. The wafer boat of claim 1, wherein, A second limiting mechanism is arranged on the bracket far from the distal end of the support column, the second limiting mechanism is used to limit and fix a basket with a second specification on the bracket, the second limiting mechanism has a second connecting arm and a second stop arm, the second connecting arm extends downward from the bracket, and the second stop arm is horizontally bent inward from the second connecting arm to the bracket.

5. The wafer basket of claim 4, wherein, The second connecting arm and the second stop arm are at a right angle.

6. The wafer boat of claim 4, wherein, The first limiting mechanism and the support column have a first distance, and the second limiting mechanism and the support column have a second distance, and the first distance is smaller than the second distance.

7. The wafer basket of claim 1, wherein, A third limiting mechanism is arranged on the bracket close to the proximal end of the support column, the third limiting mechanism cooperates with the first limiting mechanism to limit and fix the basket with the first specification on the bracket. The third limiting mechanism has a third fixed column and a third protruding part, the third fixed column is fixed on the bracket, and the third protruding part protrudes horizontally from the third fixed column to the inside of the bracket.

8. The wafer basket of claim 7, wherein, The support column is provided with a third limiting mechanism, and the third limiting mechanism cooperates with the first limiting mechanism to limit and fix the basket with the first specification on the bracket. The third limiting mechanism has a third protruding part protruding from the support column to the inside of the bracket.

9. The wafer basket of claim 7 or 8, wherein, The bracket has a bottom support frame fixed to the bottom end of the support column and an upper support frame fixed between the top end and the bottom end of the support column; the third protruding part has a third bearing part away from the third fixed column, the third bearing part extending from the third protruding part to the inside of the bracket facing the bottom surface of the bottom support frame, and a curved inclined surface is formed between the third bearing part and the third protruding part.

10. The wafer basket of claim 9, wherein, The third fixed column connects the bottom support frame and the upper support frame, and the third protruding part is located between the bottom support frame and the upper support frame.

11. The wafer basket of claim 10, wherein, The support column is provided with a clamping groove, and the upper support frame is provided with a mounting hole, so that the upper support frame and the support column are fixedly connected through the embedding of the mounting hole and the clamping groove.

12. The wafer boat of claim 10, wherein, The bottom support frame and the upper support frame are fixedly connected through a plurality of connecting columns.

13. The wafer boat of claim 10, wherein, The first limiting mechanism is arranged on the bottom support frame.

14. The wafer boat of claim 1, wherein, The support column is arranged on the side edge of the bracket.

15. The wafer boat of claim 1, wherein, A handle part is further included, which is arranged on the support column away from the top end of the bracket.

16. A wafer packaging apparatus, characterized by comprising: The application further includes a grabbing device and the wafer basket as claimed in any one of claims 1-15, and the grabbing device carries the basket by grabbing the wafer basket.

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