Semiconductor laser stack array light field homogenization structure

Abstract

The utility model discloses a semiconductor laser stack array light field homogenization structure, which comprises a semiconductor laser stack array, a light beam converter, a first micro convex lens array, a second micro convex lens array and a light field homogenizer, the semiconductor laser stack array is formed by stacking a plurality of semiconductor laser arrays, each semiconductor laser array is provided with a plurality of light emitting points, and the light field homogenizer is arranged on the semiconductor laser stack array. Each semiconductor laser array corresponds to one light beam converter, the focal points of the first micro convex lens array and the second micro convex lens array coincide, and the focal length of the first micro convex lens array is smaller than that of the second micro convex lens array. A light beam emitted by the semiconductor laser array is collimated by the light beam converter, is rotated by 90 degrees, then enters the first micro-convex lens array, is focused by the first micro-convex lens array and then enters the second micro-convex lens array, and nearly parallel light beams emitted from the second micro-convex lens array are homogenized by the light field homogenizer. And each homogenized parallel light beam is obtained, and the homogenizing effect is good.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor laser, specifically relates to a semiconductor laser array light field homogenization structure.

[0002] The utility model belongs to strategic new type industry directory 1 new generation information technology industry 1.3 electronic core industry key direction 1.3.3 new type component semiconductor laser device. BACKGROUND

[0003] In the laser treatment or laser cosmetic process, if needing large area light spot, often utilize semiconductor laser array. This array is formed by multiple column arrays, each column array has dozens of light emitting points, so that each array has multiple light emitting points, each light emitting point emits a laser beam, and these light emitting points are two-dimensionally and uniformly distributed on a plane, and the exit light spot forms a large light spot. Due to the special structure of the semiconductor laser, the emitted laser spot is elliptical, and each beam emitted by the multiple light emitting points of the array is an elliptical spot, which is superimposed on a certain area, forming a large spot. However, the power of the large spot is unevenly distributed in the area, and the uneven light spot leads to unsatisfactory results in the process of laser treatment or laser cosmetic. SUMMARY

[0004] In view of the above problems existing in the prior art, the utility model provides a semiconductor laser array light field homogenization structure.

[0005] The utility model discloses a semiconductor laser array light field homogenization structure, including semiconductor laser array, light beam converter, first micro convex lens array, second micro convex lens array and light field homogenizer, semiconductor laser array is formed by multiple semiconductor laser column arrays, each semiconductor laser column array has multiple light emitting points, each semiconductor laser column array corresponds a light beam converter, the focal point of first micro convex lens array and second micro convex lens array coincides, and the focal length of first micro convex lens array is less than the focal length of second micro convex lens array, the light beam that semiconductor laser column array emits is collimated and rotates 90 after entering first micro convex lens array through light beam converter, and is incident to second micro convex lens array after focusing through first micro convex lens array, and the light beam that nearly parallel is shot from second micro convex lens array is homogenized through light field homogenizer, and the parallel light beam that each light is homogenized is obtained.

[0006] First micro convex lens array is formed by multiple two-dimensionally distributed micro convex lenses, and the number of micro convex lenses is same with the number of light emitting points of semiconductor laser array.

[0007] The second micro convex lens array is composed of a plurality of micro convex lenses distributed in two dimensions, and the number of the micro convex lenses is the same as the number of light emitting points of the semiconductor laser stack array.

[0008] The light field homogenizer is a homogenization plane composed of a plurality of homogenization units distributed in two dimensions.

[0009] The light beam converter comprises a fast-axis collimating mirror, a 45° angle inclined cylindrical lens array and a base, the fast-axis collimating mirror and the 45° angle inclined cylindrical lens array are fixed on the base, the fast-axis collimating lens is used for compressing a fast-axis direction divergence angle, so that a size of a collimated fast-axis direction light spot is smaller than a light emitting unit period, and a focal length is generally 0.1mm-1mm; the 45° angle inclined cylindrical lens array rotates a light beam of each light emitting unit by 90°.

[0010] Compared with the prior art, the semiconductor laser stack array emits a plurality of light beams, which are respectively converted into light spots close to a circle by the plurality of light beam converters, and then the light beams are converted into nearly parallel light beams by the two micro convex lens arrays, and finally each light beam of the semiconductor laser stack array is converted into parallel light by the light field homogenizer, so that each light beam can be homogenized, and the homogenization effect is good. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 is a structural schematic diagram of the utility model.

[0012] Figure 2 is a schematic diagram of the light beam converter.

[0013] Figure 3 is a 45° angle inclined cylindrical lens light beam conversion schematic diagram.

[0014] Figure 4 is a 45° angle inclined cylindrical lens structure schematic diagram.

[0015] Figure 5 is a light beam change schematic diagram after the light beam converter. DETAILED DESCRIPTION

[0016] The utility model will be further explained in combination with the drawings and specific embodiments. It should be understood that these embodiments are only used for explaining the utility model, and are not used for limiting the scope of the utility model, and after reading the content of the utility model, those skilled in the art can make various changes or modifications to the utility model, and these equivalent forms also fall within the scope defined by the utility model.

[0017] The semiconductor laser array is stacked by a plurality of semiconductor laser arrays, each semiconductor laser array is stacked by a plurality of light emitting points, each light emitting point is defined as a light beam, assuming that a semiconductor laser array has 70 light emitting points, and an array is stacked by five arrays, then the number of light emitting points of the array is 5*70, the energy distribution of the 5*70 light beams is uneven, so the light beam homogenization is needed. For the convenience of description, the array is taken as an example for description, wherein each semiconductor laser array has 70 light emitting points, and the array is stacked by five same arrays. Meanwhile, the 5*70 light beams are homogenized, the first micro convex lens array 3 and the second micro convex lens array 4 are both 5*70 micro lens arrays, and the light field homogenizer 5 is a homogenization plane of 5*70 homogenization units.

[0018] As shown in Figures 1-5 A semiconductor laser array light field homogenization structure, including a semiconductor laser array 1, a light beam converter 2, a first micro convex lens array 3, a second micro convex lens array 4 and a light field homogenizer 5, the semiconductor laser array 1 is stacked by a plurality of semiconductor laser arrays, each semiconductor laser array corresponds to a light beam converter 2, in this example, the array is stacked by five arrays, so five light beam converters 2 are needed, and the like. Each light beam converted by the light beam converter 2 becomes a light spot close to a circle, and the light propagation direction is close to parallel. The focal points of the first micro convex lens array 3 and the second micro convex lens array 4 coincide, the focal length of the first micro convex lens array 3 is smaller than the focal length of the second micro convex lens array 4, and the distance between the light field homogenizer and the second micro convex lens array can be adjusted according to the inclination degree of the light beam, and is generally 0.5mm-50mm. The 70 light beams emitted by each semiconductor laser array all or most of them enter the fast axis collimating mirror of the light beam converter, the incident light beam is collimated and compressed after the fast axis collimating mirror, and then the collimated light beam is incident to the 45° angle inclined column lens array, the light beam rotates around the optical axis by 90°, the fast and slow axis light parameter products are exchanged, the light beam rotated by 90° is incident to the first micro convex lens array 3, and then the light beam is incident to the second micro convex lens array 4 after being focused by the first micro convex lens array 3, and the light beam close to parallel emitted from the second micro convex lens array 4 is homogenized by the light field homogenizer 5, and the parallel light beam of each homogenized light beam is obtained.

[0019] The light beam converter 2 (Beam transform system, BTS) is a commonly used light beam shaping element, as shown in Figure 2As shown, the light beam converter includes three parts, a fast axis collimating mirror (FAC), a 45° angle inclined cylindrical lens array, and a base. The FAC compresses the fast axis divergence angle. To ensure that the size of the collimated fast axis spot is smaller than the period of the light emitting unit, the focal length of the FAC is generally 0.1 mm-1 mm. The 45° angle inclined cylindrical lens array is actually a thick biconvex cylindrical lens with an infinite focal length. The function of the 45° angle inclined cylindrical lens array is to rotate the light beam of each light emitting unit by 90°, and to exchange the fast and slow axis light parameters of each light emitting unit. The base is used to fix the FAC and the 45° angle inclined cylindrical lens array, and is also the part that bonds the light beam converter to the laser.

[0020] The first microlens array 3 is a two-dimensional lens array composed of a plurality of two-dimensionally distributed microlenses. In this example, there are 5x70 microlenses, and each light beam corresponds to a microlens. The second microlens array 4 is also a two-dimensional lens array composed of a plurality of two-dimensionally distributed microlenses. In this example, there are also 5x70 microlenses, and each light beam corresponds to a microlens. The first microlens array 3 is a group of short focal length lenses with the same focal length. The focal length of the first microlens array 3 is much smaller than the distance from the beam waist of the light beam to the lens. After the light beam passes through the first microlens array 3, a very small spot is obtained. The spot falls on the focal point of the second microlens array 4. The second microlens array 4 is a group of long focal length lenses with the same focal length. After the light beam passes through the second microlens array 4, the light beam becomes a nearly parallel light beam.

[0021] The focal length of the first microlens array 3 is F1, and the focal length of the second microlens array 4 is F2. The focal length of the first microlens array 3 satisfies the following relationship: F1≪l, where l is the distance from the beam waist of the incident light spot to the first microlens array 3. The spot after passing through the lens 3 falls on the focal length F2 of the second microlens array 4. The focal lengths of the first microlens array 3 and the second microlens array 4 satisfy the following relationship: M=F2 / F1. M is the collimation ratio of the lens system formed by the first microlens array 3 and the second microlens array 4. Adjusting the collimation ratio can change the homogenization effect of the light beam.

[0022] The light field homogenizer 5 is a homogenization plane composed of a plurality of two-dimensionally distributed homogenization units. In this example, there are 5x70 homogenization units. Each light beam of the semiconductor laser array corresponds to a homogenization unit in the light field homogenizer, so that each light beam can be homogenized. The parallel light beam emitted by the second microlens array 4 passes through the light field homogenizer 5, and the light field is homogenized and can be converted into a square spot. In this way, each light beam can be converted into a square spot. These square spots are seamlessly connected to form a large uniform square spot.

[0023] The light beam converter, the first microlens array, the second microlens array, and the light field homogenizer are all mature products in the field.

[0024] The above merely describes preferred embodiments of the present application, and it should be noted that, for those skilled in the art, without departing from the overall concept of the present application, a number of changes and improvements can be made, and these should also be considered as falling within the scope of protection of the present application.

Claims

1. A semiconductor laser array optical field homogenization structure, characterized in that: The application relates to a semiconductor laser array, which comprises a semiconductor laser array (1), a beam converter (2), a first micro-lens array (3), a second micro-lens array (4) and a light field homogenizer (5). The semiconductor laser array (1) is formed by stacking a plurality of semiconductor laser arrays, each semiconductor laser array has a plurality of light emitting points, each semiconductor laser array corresponds to a beam converter (2), the focal points of the first micro-lens array (3) and the second micro-lens array (4) coincide, the focal length of the first micro-lens array (3) is smaller than that of the second micro-lens array (4), the light beams emitted by the semiconductor laser array are collimated and rotated by 90 degrees by the beam converter (2), then enter the first micro-lens array (3), are focused by the first micro-lens array (3), then enter the second micro-lens array (4), and the nearly parallel light beams emitted by the second micro-lens array (4) are homogenized by the light field homogenizer (5), thereby obtaining parallel light beams with homogenized light.

2. The uniformizing structure of light field of the semiconductor laser array as claimed in claim 1, characterized in that: The first micro-lens array (3) is composed of a plurality of two-dimensionally distributed micro-lenses, and the number of the micro-lenses is the same as the number of the light emitting points of the semiconductor laser array.

3. The uniformizing structure of light field of the semiconductor laser array as claimed in claim 1, characterized in that: The second micro-lens array (4) is composed of a plurality of two-dimensionally distributed micro-lenses, and the number of the micro-lenses is the same as the number of the light emitting points of the semiconductor laser array.

4. The uniformizing structure of light field of the semiconductor laser array as claimed in claim 1, characterized in that: The light field homogenizer (5) is a homogenization plane composed of a plurality of two-dimensionally distributed homogenization units.

5. The uniformizing structure of light field of the semiconductor laser array as claimed in claim 1, characterized in that: The beam converter (2) comprises a fast-axis collimating mirror, a 45-degree inclined cylindrical lens array and a base, the fast-axis collimating mirror and the 45-degree inclined cylindrical lens array are fixed on the base, the fast-axis collimating lens is used for compressing the fast-axis direction divergence angle, so that the size of the collimated fast-axis direction light spot is smaller than the light emitting unit period, and the focal length is generally 0.1mm-1mm; the 45-degree inclined cylindrical lens array rotates the light beam of each light emitting unit by 90 degrees.

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