Honeycomb chemical filter screen with area adsorption

Abstract

The utility model relates to a honeycomb-shaped chemical filter screen with area adsorption, which mainly comprises a combined design of at least one adsorption material and at least two adsorbents, and the honeycomb structure of the adsorption material takes any one of a plurality of glass fibers and a plurality of carbon fibers or a combination of the glass fibers and the carbon fibers as a base material. The porosity of the sectional area of the adsorption material in the vertical airflow direction is larger than or equal to 58% and smaller than or equal to 90%, the at least two adsorbents respectively penetrate through at least one solution to grow crystals in the inner diameter of any one of the glass fibers and the carbon fibers or the inner diameter of the combination of the glass fibers and the carbon fibers, and a first area and a second area are arranged in the inner diameter of the at least two adsorbents. The first area is located at the upstream of the vertical air flow and is used for growing the first zeolite adsorbent, and the second area is located at the downstream of the vertical air flow and is used for growing the second zeolite adsorbent, so that the service life of the adsorption material can be prolonged, and the adsorption capacity of the adsorbent is improved, so that the adsorption efficiency is improved.

Description

Technical Field

[0001] This utility model relates to a honeycomb chemical filter with regional adsorption, particularly to one that increases the adsorption capacity of the adsorbent to enhance adsorption efficiency, and is suitable for clean rooms, dust-free rooms or similar indoor spaces in the semiconductor industry, optoelectronic industry or chemical-related industries, as well as an adsorption wheel or similar device for volatile organic compounds (VOCs). Background Technology

[0002] Currently, volatile organic compounds (VOCs) are generated during the manufacturing processes of the semiconductor and optoelectronic industries. These VOCs contain nitrogen oxides (NOx). x ), sulfur oxides (SO) x Compounds such as ) and nitrogen oxides (NO) x ), sulfur oxides (SO) x Compounds such as α are one of the important causes of photochemical smog, acid rain, and human respiratory diseases.

[0003] The process can easily generate suspended particulate matter such as carbon dioxide and carbon monoxide, as well as volatile organic compounds (VOCs) that drift into the indoor space, especially in clean rooms or dust-free rooms. Therefore, air ventilation and circulation in clean rooms or dust-free rooms become very important. However, the air in clean rooms or dust-free rooms cannot be directly discharged into the atmosphere; it must first be filtered through a chemical filter before it can be discharged.

[0004] Therefore, the filtration efficiency of chemical filters needs to be improved, especially in the semiconductor or optoelectronic industries, which require chemical filters to achieve a filtration efficiency of 3ppb or 1ppb and to extend their service life so that they can be regenerated and reused.

[0005] Therefore, in view of the above-mentioned deficiencies, the creator aims to propose a honeycomb chemical filter with regional adsorption that can improve service life and increase the adsorption capacity of the adsorbent to enhance adsorption efficiency. This filter is easy for users to operate and assemble. The creator's motivation for development is to provide convenience to users through careful research, design and construction. Utility Model Content

[0006] The main objective of this invention is to provide a honeycomb-shaped chemical filter with regional adsorption, primarily comprising a combination design of at least one adsorbent material and at least two adsorbents. The honeycomb structure of the adsorbent material uses any one or a combination of multiple glass fibers and multiple carbon fibers as the substrate. The porosity of the cross-sectional area of ​​the adsorbent material in the vertical airflow direction is greater than or equal to 58% and less than or equal to 90%. The at least two adsorbents are crystallized in the inner diameter of any one or a combination of multiple glass fibers and multiple carbon fibers through at least one solution. The inner diameter is divided into a first region and a second region. The first region is located upstream of the vertical airflow and crystallizes the first zeolite adsorbent, while the second region is located downstream of the vertical airflow and crystallizes the second zeolite adsorbent. Therefore, the service life of the adsorbent material is improved, and the adsorption capacity of the adsorbent is increased, thereby increasing the adsorption efficiency and the overall practicality.

[0007] Another objective of this invention is to provide a honeycomb-shaped chemical filter with regional adsorption. The first zeolite adsorbent is Y-type zeolite, which has an effective adsorption micropore size of less than 7 Å (angstroms) to adsorb low-boiling-point, low-molecular-weight organic compounds. The first zeolite adsorbent is grown as crystals in the inner diameter of any one or a combination of multiple glass fibers or multiple carbon fibers through at least one solution. The solution contains at least one Y-type zeolite seed crystal, and the at least one Y-type zeolite seed crystal is combined with magnesium oxide (MgO), aluminum oxide (Al2O3), silicon dioxide (SiO2), and quaternary ammonium salt (R4N). + The solution is mixed with a solution of water (H2O), and the at least one adsorbent is immersed in the solution, allowing Y-type zeolite to crystallize through the solution in the inner diameter of any one or a combination of the plurality of glass fibers and the plurality of carbon fibers. The second zeolite adsorbent is ZSM-5 type zeolite, which has an effective adsorption micropore size greater than or equal to 7 Å (angstroms) to adsorb high-boiling-point high-molecular-weight organic compounds. The solution contains at least one ZSM-5 type zeolite seed crystal, and the at least one ZSM-5 type zeolite seed crystal is mixed with a solution of tetrapropylamine bromide (TPA-Br), sodium oxide (Na2O), potassium oxide (K2O), aluminum oxide (Al2O3), silicon dioxide (SiO2), and water (H2O). The at least one adsorbent is immersed in the solution, allowing ZSM-5 type zeolite to crystallize through the solution in the inner diameter of any one or a combination of the plurality of glass fibers and the plurality of carbon fibers. Therefore, it has the ability to simultaneously adsorb high-boiling-point high-molecular-weight organic compounds and low-boiling-point low-molecular-weight organic compounds, thereby increasing the overall efficiency.

[0008] Another objective of this invention is to provide a honeycomb-shaped chemical filter with regional adsorption. The adsorbent material has a honeycomb structure, wherein the honeycomb structure is composed of any one or a combination of multiple glass fibers and multiple carbon fibers as the base material, and at least two layers of zeolite particles are stacked around any one or a combination of glass fibers and multiple carbon fibers. The layers can be wavy, serrated, triangular, or flat. The adsorbent material can be any one of rectangular, square, circular, elliptical, triangular, or polygonal shapes. When the adsorbent material is rectangular, the corners of the rectangle can be chamfered to form a polygon, or the corners of the rectangle can be cut into rounded or arc shapes. This allows the adsorbent material to be modified to meet actual needs, thus having a variety of shape variations and increasing overall usability.

[0009] To further understand the features, characteristics, and technical contents of this utility model, please refer to the following detailed description and accompanying drawings. The drawings are provided for reference and illustration only and are not intended to limit this utility model. Attached Figure Description

[0010] Figure 1 A schematic diagram of the appearance of a honeycomb-shaped chemical filter screen;

[0011] Figure 2 This is a microscopic magnified schematic diagram of glass fiber and zeolite particles.

[0012] Figure 3 This is a schematic diagram showing the appearance of the first and second regions.

[0013] Figure 4 This is a schematic cross-sectional view of the first region containing the first adsorbent;

[0014] Figure 5 This is a schematic cross-sectional view of the second region containing the second adsorbent.

[0015] Figure 6 A schematic diagram showing the appearance of the adsorbent material, which is a rectangular body with rounded corners.

[0016] Figure 7 A schematic diagram showing the appearance of a rectangular absorbent material with chamfered corners.

[0017] In the above figures, the meanings of the reference numerals are as follows:

[0018] 10. Adsorbent material;

[0019] 11. Fiberglass;

[0020] 111. First area;

[0021] 112. Second area;

[0022] 12. Zeolite particles;

[0023] 20. Adsorbent;

[0024] 21. First zeolite adsorbent;

[0025] 22. Second zeolite adsorbent;

[0026] 30. Shelves;

[0027] 40. Frame. Detailed Implementation

[0028] Please refer to Figures 1-7, which are schematic diagrams of embodiments of the present invention. The preferred embodiment of the honeycomb chemical filter with regional adsorption of the present invention is applied to clean rooms, dust-free rooms or similar indoor spaces in the semiconductor industry, optoelectronic industry or chemical-related industries, as well as to adsorption wheels or similar devices for volatile organic compounds (VOCs), so as to increase the adsorption capacity of the adsorbent and thereby increase the adsorption efficiency.

[0029] The honeycomb chemical filter with regional adsorption of this utility model mainly includes a combination design of at least one adsorbent material 10 and at least two adsorbents 20 (as shown in Figure 3). The adsorbent material 10 has a honeycomb structure (as shown in Figure 1). The honeycomb structure of the adsorbent material 10 uses any one or a combination of multiple glass fibers 11 and multiple carbon fibers (not shown) as the base material. Multiple zeolite particles 12 are arranged around any one or a combination of multiple glass fibers 11 and multiple carbon fibers (not shown) (as shown in Figure 2). The multiple glass fibers 11 and multiple carbon fibers (not shown) are arranged in any one of the following ways: staggered, arranged, or stacked. The multiple zeolite particles 12 are arranged around the glass fibers 11 and multiple carbon fibers (not shown). The multiple zeolite particles 12 are mainly used to fill or lay the multiple glass fibers 11 and multiple carbon fibers (not shown) around or around the edges of the multiple glass fibers 11 and multiple carbon fibers (not shown). The aforementioned glass fiber (11) is a material composed of many extremely fine fibers drawn from molten glass, generally exceeding 3 micrometers in diameter (ranging from a few micrometers to tens of micrometers). It is brittle and easily broken, but possesses high tensile strength, high temperature resistance, acid and alkali corrosion resistance, and good insulation properties, making it the most widely used inorganic fiber material currently. The aforementioned carbon fiber (not shown in the figure) is a high-strength and high-modulus high-temperature resistant fiber, representing a high-end variety of chemical fiber. It is primarily composed of carbon atoms, with a diameter of approximately 5-10 micrometers. To produce carbon fibers, carbon atoms are bonded together within the crystal, and the parallel arrangement of the fiber's long axes gives the carbon fiber a remarkably high strength-to-volume ratio.

[0030] The honeycomb structure referred to in this utility model may be formed by stacking at least two layers of plates 30 composed of any one or a combination of the plurality of glass fibers 11 and the plurality of carbon fibers, or a combination thereof, and arranging a plurality of zeolite 12 particles around the plurality of glass fibers 11 and the plurality of carbon fibers, or a combination thereof (as shown in Figure 3), or by bending at least two layers of cloth (not shown in the figure). The zeolite particles 12 may be a widely distributed, highly mined, natural, and inexpensive ion exchange material, and there are many types of naturally occurring zeolite particles (such as clinoptilolite and Mordenite as the main types). The zeolite particles 12 can also be a porous aluminosilicate mineral with a hydrous framework structure. The most basic structure constituting the zeolite framework is a silicon-oxygen (SiO4) tetrahedron and an aluminum-oxygen (AlO4) tetrahedron. The zeolite particles 12 are not limited to the above and can also be formed from other types or substances. The layer 30 can be any of the following shapes: wavy, serrated, triangular, or flat. The at least two layers 30 can be any of the above shapes or combinations thereof. The at least two layers 30 can also be a layered structure (not shown in the figure). Furthermore, the honeycomb structure in the figures of this utility model is an example of at least one flat layer 30 and at least one wavy layer 30 stacked together (as shown in Figure 1), but it is not limited to the above.

[0031] Furthermore, the absorbent material 10 of this utility model can be any of the following shapes: rectangular, square, circular, elliptical, triangular, or polygonal. It is primarily designed to meet the needs of the environment and equipment (not shown in the figures), but is not limited to these shapes and can also be other shapes. In addition to the shapes mentioned above, when the absorbent material 10 is rectangular, its corners can be chamfered (as shown in Figure 7) to form a polygon. Alternatively, when the absorbent material 10 is rectangular, its corners can be cut into rounded shapes (as shown in Figure 6) or arc shapes (not shown in the figures), allowing the absorbent material 10 to change its shape to meet actual needs, thus achieving a variety of shape variations and increasing overall usability.

[0032] Furthermore, the adsorbent material 10 of this invention has a honeycomb structure, and the adsorbent material 10 can be placed inside a frame 40 (as shown in Figure 1) to form a honeycomb-shaped chemical filter. The frame 40 can be any shape of a rectangle, square, circle, ellipse, triangle, or polygon. The size of the frame 40 and the adsorbent material 10 is designed to match the adsorption equipment to be installed (not shown) so that it has various performance variations.

[0033] Furthermore, the porosity of the adsorbent material 10 of this invention, in the cross-sectional area perpendicular to the airflow direction, is greater than or equal to 58% and less than or equal to 90%. The cross-sectional area refers to the area of ​​the cross section perpendicular to the axial direction, also known as the cross-sectional area. Porosity is the ratio of pore volume to the total material volume, always between 0 and 1, and expressed as a percentage between 0 and 100%. Gas can only enter through the pores. Moreover, the depth of the adsorbent material 10 is between 100 mm and 350 mm, and this depth is also referred to as thickness or width. Increasing the depth of the adsorbent material 10 increases its adsorption area, enabling its absorption rate to reach 98% to 99% or higher.

[0034] Furthermore, the present invention provides at least two adsorbents 20, namely a first zeolite adsorbent 21 and a second zeolite adsorbent 22 (as shown in Figures 4 and 5). The first zeolite adsorbent 21 is a Y-type zeolite with an effective adsorption micropore size of less than 7 Å (angstroms) to adsorb low-boiling-point, low-molecular-weight organic compounds. The second zeolite adsorbent 22 is a ZSM-5 type zeolite with an effective adsorption micropore size of greater than or equal to 7 Å (angstroms) to adsorb high-boiling-point, high-molecular-weight organic compounds. Zeolite is preferred as an adsorbent 20 for air filtration or adsorption of volatile organic compounds (VOCs). Zeolite has better heat resistance than activated carbon, a wider applicable concentration range, and good removal efficiency for both low-boiling-point, low-molecular-weight and high-boiling-point, high-molecular-weight volatile organic compounds (VOCs). Furthermore, the aforementioned first zeolite adsorbent 21 and second zeolite adsorbent 22 are hydrophobic zeolites with a SiO2 / Al2O3 molar ratio (SiO2 / Al2O3) greater than or equal to 40. A higher SiO2 / Al2O3 molar ratio indicates stronger hydrophobicity. Besides the SiO2 / Al2O3 molar ratio and effective adsorption micropore size, the surface area also affects the adsorption capacity and behavior of zeolites. The specific surface area of ​​the first zeolite adsorbent 21 and the second zeolite adsorbent 22 is between 500 and 3600 m². 2 / m 3 Between these, the specific surface area refers to the surface area per unit mass of porous solid material, and the so-called surface area refers to the internal surface area, so as to have better adsorption and filtration effects.

[0035] Furthermore, the aforementioned at least two adsorbents 20 respectively grow crystals in the inner diameter of any one or a combination of the plurality of glass fibers 11 and the plurality of carbon fibers through at least one solution (not shown in the figure), while the first zeolite adsorbent 21 grows crystals in the inner diameter of any one or a combination of the plurality of glass fibers 11 and the plurality of carbon fibers through at least one solution, wherein the solution contains at least one Y-type zeolite seed crystal (not shown in the figure), and the at least one Y-type zeolite seed crystal is mixed with magnesium oxide (MgO), aluminum oxide (Al2O3), silicon dioxide (SiO2), and quaternary ammonium salt (R4N). + The solution is mixed with water (H2O) and the at least one adsorbent 10 is immersed in the solution, so that the Y-type zeolite (not shown) can grow through the solution in the inner diameter of any one or combination of the plurality of glass fibers 11 and the plurality of carbon fibers. The Y-type zeolite is an artificial zeolite with a structure mainly composed of 12 rings. The second zeolite adsorbent 22 grows crystals in the inner diameter of any one or a combination of the plurality of glass fibers 11 and the plurality of carbon fibers through at least one solution (not shown). The solution contains at least one ZSM-5 type zeolite seed crystal (not shown), and the at least one ZSM-5 type zeolite seed crystal is mixed with a solution of tetrapropylamine bromide (TPA-Br), sodium oxide (Na2O), potassium oxide (K2O), aluminum oxide (Al2O3), silicon dioxide (SiO2), and water (H2O). The at least one adsorbent 10 is immersed in the above solution, so that the ZSM-5 type zeolite (not shown) can grow crystals in the inner diameter of any one or a combination of the plurality of glass fibers 11 and the plurality of carbon fibers through the above solution. The ZSM-5 type zeolite is a high silicon content zeolite with high thermal stability and hydrothermal stability.

[0036] Furthermore, each of the plurality of glass fibers 11 and the plurality of carbon fibers, or a combination thereof, has a first region 111 and a second region 112 within its inner diameter (as shown in Figures 3 to 5). The first region 111 is located upstream of the vertical airflow and grows the first zeolite adsorbent 21 (as shown in Figure 4). When the first zeolite adsorbent 21 is the Y-type zeolite, its effective adsorption micropore size is less than 7 Å, so as to adsorb low-boiling-point low-molecular-weight organic compounds, mainly sulfides such as dimethyl sulfide (DMS), dimethyl disulfide (DMDS), and hydrogen sulfide (H2S), as well as hydrocarbons such as formaldehyde and acetone acetate. The second region 112 is located downstream of the vertical airflow and grows the second zeolite adsorbent 22 (as shown in Figure 5). When the second zeolite adsorbent 22 is ZSM-5 type zeolite, its effective adsorption micropore size is greater than or equal to 7 Å, so as to adsorb high-boiling-point high molecular weight organic compounds, mainly hydrocarbons such as isopropanol (IPA). Therefore, it has the ability to simultaneously adsorb high-boiling-point high molecular weight organic compounds and low-boiling-point low molecular weight organic compounds, thereby increasing the overall efficiency.

[0037] Therefore, the present invention mainly includes a combination design of at least one adsorbent material 10 and at least two adsorbents 20. The honeycomb structure of the adsorbent material 10 uses any one or a combination of multiple glass fibers 11 and multiple carbon fibers as the substrate. The porosity of the cross-sectional area of ​​the adsorbent material 10 in the vertical airflow direction is greater than or equal to 58% and less than or equal to 90%. The at least two adsorbents 20 are crystallized in the inner diameter of any one or a combination of multiple glass fibers 11 and multiple carbon fibers through at least one solution. The inner diameter is divided into a first region 111 and a second region 112. The first region 111 is located upstream of the vertical airflow and crystallizes the first zeolite adsorbent 21. The second region 112 is located downstream of the vertical airflow and crystallizes the second zeolite adsorbent 22. Therefore, the service life of the adsorbent material 10 is improved, and the adsorption capacity of the adsorbent 20 is increased, thereby increasing the adsorption efficiency and the overall practicality.

[0038] The above detailed description enables those skilled in the art to understand that this utility model can indeed achieve the aforementioned objectives and complies with the provisions of the Patent Law, thus leading to the filing of a utility model patent application.

[0039] The specific embodiments described above are merely preferred embodiments of this utility model and should not be construed as limiting the scope of implementation of this utility model. Therefore, any simple equivalent changes and modifications made in accordance with the claims and description of this utility model should still fall within the scope of this utility model patent.

Claims

1. A honeycomb-shaped chemical filter with regional adsorption, characterized in that, include: At least one adsorbent material having a honeycomb structure, the honeycomb structure of which is based on any one or a combination of multiple glass fibers and multiple carbon fibers, and multiple zeolite particles are arranged around any one or a combination of the multiple glass fibers and multiple carbon fibers, wherein the porosity of the adsorbent material in the cross-sectional area perpendicular to the airflow direction is greater than or equal to 58% and less than or equal to 90%; and At least two adsorbents, namely a first zeolite adsorbent and a second zeolite adsorbent, are provided. The at least two adsorbents are crystallized in the inner diameter of any one or a combination of the plurality of glass fibers and the plurality of carbon fibers through at least one solution. The inner diameter is provided with a first region and a second region. The first region is located upstream of the vertical airflow and crystallizes the first zeolite adsorbent. The second region is located downstream of the vertical airflow and crystallizes the second zeolite adsorbent.

2. The honeycomb chemical filter with regional adsorption according to claim 1, characterized in that, The absorbent material is further found to be between 100 mm and 350 mm deep.

3. The honeycomb chemical filter with regional adsorption according to claim 1, characterized in that, The first zeolite adsorbent is further classified as Y-type zeolite, with an effective adsorption micropore size of less than 7 Å.

4. The honeycomb chemical filter with regional adsorption according to claim 1, characterized in that, The solution further contains at least one Y-type zeolite seed crystal.

5. The honeycomb chemical filter with regional adsorption according to claim 1, characterized in that, The first zeolite adsorbent further has a specific surface area of ​​500 to 3600 m². 2 / m 3 between.

6. The honeycomb chemical filter with regional adsorption according to claim 1, characterized in that, The second zeolite adsorbent is further classified as ZSM-5 type zeolite, with an effective adsorption micropore size greater than or equal to 7 Å.

7. The honeycomb chemical filter with regional adsorption according to claim 1, characterized in that, The solution further contains at least one ZSM-5 type zeolite seed crystal.

8. The honeycomb chemical filter with regional adsorption according to claim 1, characterized in that, The second zeolite adsorbent further has a specific surface area of ​​500 to 3600 m². 2 / m 3 between.

9. The honeycomb chemical filter with regional adsorption according to claim 1, characterized in that, The absorbent material can be any one of the following: rectangular, square, circular, elliptical, triangular, or polygonal.

10. The honeycomb chemical filter with regional adsorption according to claim 1, characterized in that, The absorbent material is further shaped into a rectangle, and the corners of the rectangle are chamfered.

11. The honeycomb chemical filter with regional adsorption according to claim 1, characterized in that, The absorbent material is further shaped into a rectangle, and the corners of the rectangle are cut into either a rounded shape or an arc shape.

12. The honeycomb chemical filter with regional adsorption according to claim 1, characterized in that, The honeycomb structure is further composed of any one or a combination of the plurality of glass fibers and the plurality of carbon fibers as the substrate, and is formed by stacking at least two layers of zeolite particles arranged around any one or a combination of the plurality of glass fibers and the plurality of carbon fibers, and the layers are further in any one of the following shapes: wavy, serrated, triangular or flat.

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