Part spraying hanger

Abstract

The utility model relates to a part spraying hanging tool which comprises a rack and a material hanging disc arranged on the rack, at least two material hanging rods are arranged on the side edge of the material hanging disc, the material hanging rods are evenly arranged in the circumferential direction of the material hanging disc, a part is annularly arranged, and an L-shaped assembling groove matched with the material hanging rods is formed in the side edge of the part. Compared with the prior art, the part spraying hanger has the advantages that the hanging disc is matched with the hanging rod, so that the annular part is effectively fixed, an operator can further complete spraying or evaporation operation on the part conveniently, and the part spraying hanger is simple and reliable in structure, good in part fixing effect and beneficial to improving the spraying or evaporation efficiency.

Description

Technical Field

[0001] This application relates to the field of semiconductor component processing technology, and in particular to a component spraying fixture. Background Technology

[0002] In the semiconductor industry, special coating treatments are often required on the surfaces of various semiconductor components to ensure product performance stability and extend service life. Due to usage requirements, some parts are arranged in a ring shape. However, most existing fixtures are designed for rectangular parts and cannot quickly and effectively clamp and support ring-shaped parts. In such cases, only a robotic arm can be used to clamp the ring-shaped parts for vapor deposition, which is not only inconvenient but also results in uneven coating, seriously affecting product quality and consistency. Utility Model Content

[0003] To improve the coating effect of parts, this application provides a parts coating hanger.

[0004] The technical solution for a parts spraying fixture provided in this application is as follows:

[0005] A parts spraying fixture includes a frame and a material tray mounted on the frame. The material tray has at least two material hanging rods on its side, and each material hanging rod is evenly arranged along the circumference of the material tray. The parts are arranged in a ring and have an "L"-shaped assembly groove on the side that matches the material hanging rod.

[0006] By adopting the above technical solution, the operator holds the part and aligns each assembly slot with each hanging rod. Then, the part is lifted and rotated to insert the hanging rod into the assembly slot. The part can be hung using the hanging rod and hanging tray. Since the assembly slot is L-shaped and extends further at the end, the assembly slot that enters the hanging rod will not fall off, thus effectively fixing the part and facilitating the operator to further perform spraying or vapor deposition operations on the part.

[0007] Optionally, an auxiliary plate is also included, wherein the material hanging plate is disposed on the auxiliary plate and connected to the auxiliary plate.

[0008] By adopting the above technical solution, the auxiliary plate can serve as a transfer component to connect the material hanging tray and the frame, providing an installation position for the material hanging tray. Operators can choose to set the material hanging tray at different positions on the auxiliary plate according to the spraying conditions.

[0009] Optionally, there are several hanging trays, and each hanging tray is arranged sequentially along the circumference of the auxiliary tray.

[0010] By adopting the above technical solution, operators can select to set up the hanging tray at different positions on the auxiliary plate according to the actual spraying situation, so as to realize the simultaneous processing of multiple parts and improve processing efficiency.

[0011] Optionally, the auxiliary disk is provided with a first driving device, and the material hanging disk is located on the output shaft of the first driving device and can rotate around its own axis under the drive of the first driving device.

[0012] By adopting the above technical solution, when in use, the first drive device is activated, which drives the material tray to rotate around its own axis, thereby realizing the rotation of the parts. At this time, the spraying equipment is fixed next to the material tray, and the rotating material tray can be used in conjunction with the spraying equipment to spray the parts and obtain a better spraying effect.

[0013] Optionally, the frame is provided with a second drive device, and the auxiliary disk is located on the output shaft of the second drive device and can rotate around its own axis under the drive of the second drive device.

[0014] By adopting the above technical solution, when the second drive device is activated, the auxiliary plate can rotate around its own axis under the drive of the second drive device, thereby changing the position of the first drive device and the material hanging plate, realizing the position adjustment of the material hanging plate. In this way, the material hanging plate can be sent to the next process station, and the distance between the material hanging plate and the spraying equipment can be adjusted to improve the spraying position and improve the spraying effect.

[0015] Optionally, the side of the hanging tray is provided with an installation hole, and the hanging rod passes through the installation hole and is detachably connected to the hanging tray.

[0016] By adopting the above technical solution, the hanging rod and the hanging tray can be detachably connected, which can effectively improve the practicality and flexibility of the hanging tray. Operators can increase or decrease the installation of the hanging rod according to the number of assembly slots of the parts, thereby ensuring the correspondence between the hanging rod and the assembly slot.

[0017] Optionally, one end of the hanging rod inserted into the mounting hole is provided with an external thread, and the mounting hole is provided with an internal thread that matches the external thread, and the hanging rod is threadedly connected to the hanging disc.

[0018] By adopting the above technical solution, the material hanging rod and the material hanging plate are connected by a thread, which is simple, reliable, easy to process and promote.

[0019] Optionally, a fastening nut is provided at the end of the hanging rod away from the hanging disc.

[0020] By adopting the above technical solution, after the part is hung on the hanging rod, the fastening nut is turned. The fastening nut approaches and abuts against the part, and together with the hanging plate and the hanging rod, the part is fixed and prevented from falling off.

[0021] Optionally, the hanging tray is provided with ventilation holes that connect the top and bottom surfaces of the hanging tray, and the ventilation holes are provided in multiple quantities and evenly arranged along the circumference of the hanging tray.

[0022] By adopting the above technical solution, the setting of the vent hole can reduce the weight of the hanging tray and reduce the load on the first drive device. At the same time, due to the setting of the vent hole, the air flow around the entire hanging tray is smoother, which is beneficial to the cooling operation after spraying.

[0023] Optionally, the auxiliary disk is provided with a second vent hole connecting the top and bottom surfaces of the auxiliary disk.

[0024] By adopting the above technical solution, the second vent can work in conjunction with the vent to improve gas flow and facilitate cooling operations after spraying.

[0025] Optionally, the auxiliary disk includes several disk bodies and connecting blocks, and any two adjacent disk bodies are fixedly connected by the connecting blocks.

[0026] By adopting the above technical solution, the structure of the auxiliary plate can be adjusted according to the number of hanging plates to be assembled, thereby improving the flexibility of the auxiliary plate.

[0027] In summary, this application includes at least one of the following beneficial technical effects:

[0028] 1. This application achieves effective assembly of the ring-shaped part by setting a hanging tray to fit the ring-shaped part and setting a hanging rod to snap into the assembly slot based on the assembly slot of the part. The structure of the hanging tray and the hanging rod is simple, and the fixing effect of the part is excellent, which improves the user experience.

[0029] 2. This application is equipped with multiple hanging trays, which can hang multiple parts at one time to complete the spraying or vapor deposition operation, further improving processing efficiency;

[0030] 3. This application achieves rapid transfer of parts by setting an auxiliary disk in conjunction with the first and second driving devices to move the hanging disk, thereby improving the processing technology and increasing processing efficiency. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the bottom structure of this application;

[0032] Figure 2 This is a schematic diagram of the top structure of this application;

[0033] Figure 3This is a schematic diagram of the top structure of the hanging tray;

[0034] Figure 4 for Figure 3 Detailed drawing at point A in the diagram;

[0035] Figure 5 This is a schematic diagram of the bottom structure of the hanging tray;

[0036] Figure 6 This is a schematic diagram of the assembly of the material tray and the parts;

[0037] Figure 7 This is a schematic diagram of the auxiliary disk.

[0038] Explanation of reference numerals in the attached drawings: 1. Hanging tray; 11. Mounting hole; 12. Vent hole; 13. Connecting bolt; 14. Connecting column; 2. Auxiliary tray; 21. Tray body; 22. Connecting block; 3. Hanging rod; 4. Fastening nut; 5. Part; 51. Assembly slot. Detailed Implementation

[0039] The following is in conjunction with the appendix Figure 1-7 This application will be described in further detail.

[0040] This application discloses a parts spraying fixture.

[0041] Reference Figure 1 and Figure 2 A part spraying fixture is designed for difficult-to-handle annular parts. The part spraying fixture includes a frame (not shown), a material hanging tray 1 and an auxiliary tray 2. The auxiliary tray 2 is connected to the frame, and the material hanging tray 1 is located below the auxiliary tray 2 and connected to the auxiliary tray 2. At least two material hanging rods 3 are provided on the side of the material hanging tray 1. Corresponding to the material hanging rods 3, the side of the annular part 5 is provided with an assembly groove 51 arranged in an "L" shape.

[0042] Based on the above structure, during use, the operator holds the ring-shaped part 5, aligning each hanging rod 3 with the opening of each assembly slot 51. Then, the operator lifts the part 5 upwards, and the hanging rod 3 moves along the vertical part of the assembly slot 51 until it touches the part 5. The operator then stops lifting and rotates the part 5, at which point the hanging rod 3 moves along the horizontal part of the assembly slot 51 until it touches the part 5, successfully engaging the hanging rod 3 in the assembly slot 51. At this point, each hanging rod 3 is positioned in its respective hanging slot, providing support for the part 5. Furthermore, the vertically extending end of the "L"-shaped assembly slot 51 forms an anti-slip groove (not shown in the figure), into which the hanging rod 3 falls, preventing it from falling off. Thus, with the cooperation of the hanging rods 3, the part 5 is fixed on the hanging tray 1. The ring-shaped part 5 is clamped and supported by the hanging rods, facilitating the operator to continue spraying or vapor deposition operations on the part 5.

[0043] Optionally, the part spraying fixture of this application further includes a first driving device (not shown) and a second driving device (not shown). The first driving device is mounted on the auxiliary plate 2 and connected to the material hanging plate 1. The material hanging plate 1 can rotate around its own axis under the drive of the first driving device. The second driving device is mounted on the frame and connected to the auxiliary plate 2. The auxiliary plate 2 can rotate around its own axis under the drive of the second driving device. The arrangement of the first and second driving devices allows the material hanging plate 1 and the auxiliary plate 2 to have a static state and a moving state. In the static state, it can ensure the stability of the part 5. In the moving state, it can drive the part 5 to adjust its position, transfer the part 5 to the next process station, or change the contact position between the part 5 and the spraying equipment to achieve all-round spraying of the part 5.

[0044] Of course, please refer to Figure 3 and Figure 5 The hanging tray 1 can also be fixed on the auxiliary tray 2. In this application, the hanging tray 1 is fixedly connected to the auxiliary tray 2 by connecting bolts 13 and connecting columns 14.

[0045] Please refer to Figure 1 and Figure 2 The present application provides several hanging trays 1, each arranged sequentially along the circumference of the auxiliary tray 2. The number of first driving devices is equal to the number of hanging trays 1 and corresponds one-to-one with each hanging tray 1. In this way, the operator can set the parts 5 separately through multiple hanging trays 1, realize the synchronous processing of multiple parts 5, and improve processing efficiency.

[0046] Please refer to Figure 3 The hanging tray 1 has a mounting hole 11 on its side, and the hanging rod 3 passes through the mounting hole 11 and is detachably connected to the hanging tray 1. The detachable connection between the hanging rod 3 and the hanging tray 1 effectively improves the practicality and flexibility of the hanging tray 1. Operators can increase or decrease the number of hanging rods 3 installed according to the number of assembly slots 51 on the part 5, thereby ensuring the correspondence between the hanging rod 3 and the assembly slots 51. Specifically, in some embodiments of this application, the mounting hole 11 has an internal thread, and the hanging rod 3 has a matching external thread. The hanging rod 3 is threadedly connected to the hanging tray 1, a simple, reliable, easy-to-process, and widely applicable connection method.

[0047] Of course, in order to improve structural strength, the hanging rod 3 can also be welded to the hanging plate 1 or integrally formed. There are various ways to connect the two, which will not be elaborated here.

[0048] Please refer to Figure 3 and Figure 4 A fastening nut 4 is provided at the end of the hanging rod 3 away from the hanging tray 1. In this way, after the part 5 is hung on the hanging rod 3, the operator can continue to rotate the fastening nut 4. As the fastening nut 4 rotates continuously, it abuts against the part 5 and works with the hanging tray 1 to fix the part 5, preventing the part 5 from falling off.

[0049] Please refer to Figure 3 , Figure 5 and Figure 6 The material hanging tray 1 has ventilation holes 12 connecting its top and bottom surfaces. Multiple ventilation holes 12 are evenly arranged along the circumference of the material hanging tray 1. The ventilation holes 12 reduce the weight of the material hanging tray 1 and decrease the load on the first drive device. Furthermore, the ventilation holes 12 facilitate smoother gas flow around the entire material hanging tray 1, which is beneficial for cooling operations after spraying or vapor deposition.

[0050] Please refer to Figure 7 The auxiliary disk 2 of this application includes several disk bodies 21 and connecting blocks 22, with any two adjacent disk bodies 21 being fixedly connected by the connecting blocks 22. In this way, the disk bodies 21 of the auxiliary disk 2 can be adjusted according to the number of hanging disks 1 to be assembled, which can improve the flexibility of the auxiliary disk 2 in use.

[0051] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A part spraying fixture, wherein the parts are arranged in a ring, characterized in that, The part (5) includes a frame and a hanging tray (1) on the frame. The hanging tray (1) has at least two hanging rods (3) on its side. Each hanging rod (3) is evenly arranged along the circumference of the hanging tray (1). The surface of the part (5) is provided with an "L"-shaped assembly groove (51) that matches the hanging rod (3).

2. The parts spraying fixture according to claim 1, characterized in that, It also includes an auxiliary plate (2), wherein the hanging plate (1) is disposed on the auxiliary plate (2) and connected to the auxiliary plate (2).

3. The parts spraying fixture according to claim 2, characterized in that, The material hanging tray (1) is provided in several parts, and each material hanging tray (1) is arranged sequentially along the circumference of the auxiliary tray (2).

4. The parts spraying fixture according to claim 3, characterized in that, The auxiliary disk (2) is provided with a first driving device, and the hanging disk (1) is located on the output shaft of the first driving device and can rotate around its own axis under the drive of the first driving device.

5. The parts spraying fixture according to claim 4, characterized in that, The frame is provided with a second drive device, and the auxiliary disk (2) is located on the output shaft of the second drive device and can rotate around its own axis under the drive of the second drive device.

6. The parts spraying fixture according to claim 1, characterized in that, The hanging tray (1) has an installation hole (11) on its side, and the hanging rod (3) passes through the installation hole (11) and is detachably connected to the hanging tray (1).

7. The parts spraying fixture according to claim 6, characterized in that, The end of the hanging rod (3) inserted into the mounting hole (11) is provided with an external thread, and the mounting hole (11) is provided with an internal thread that matches the external thread. The hanging rod (3) is threadedly connected to the hanging plate (1).

8. The parts spraying fixture according to claim 7, characterized in that, The end of the hanging rod (3) away from the hanging plate (1) is provided with a fastening nut (4).

9. The parts spraying fixture according to claim 1, characterized in that, The hanging tray (1) has ventilation holes (12) that connect the top and bottom surfaces of the hanging tray (1). The ventilation holes (12) are multiple and are evenly arranged around the circumference of the hanging tray (1).

10. The parts spraying fixture according to claim 2, characterized in that, The auxiliary disk (2) includes several disk bodies (21) and connecting blocks (22), and any two adjacent disk bodies (21) are fixedly connected by the connecting blocks (22).

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