Ultrasonic water bath throwing cleaning device
By designing an ultrasonic water bath agitation cleaning device, the vertical movement of silicon wafers is achieved using drive components and horizontal support components, solving the problems of dead corners in silicon wafer cleaning and cumbersome loading and unloading, thus improving cleaning efficiency and convenience.
Patent Information
- Application Number
- CN202422914206.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-28
- Publication Date
- 2025-12-02
- Estimated Expiration
- 2034-11-28
AI Technical Summary
In existing silicon wafer cleaning devices, silicon wafers cannot be effectively cleaned when they are stationary in the liquid, resulting in cleaning dead zones. Furthermore, the basket and drive structure are integrated, making the loading and unloading of silicon wafers cumbersome and affecting cleaning efficiency.
An ultrasonic water bath agitation cleaning device was designed. The device uses a drive component to move the cleaning basket vertically up and down, and a horizontal support component to ensure the stability and horizontality of the lifting rod, thereby enabling the overall disassembly of the basket and stable loading and unloading of materials.
The entire process of disassembling the silicon wafer and the basket facilitates the loading and unloading of the silicon wafer, improves cleaning efficiency and effect, avoids cleaning dead corners, and enhances the ease of use of the cleaning device.
Smart Images
Figure CN223616369U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of ultrasonic cleaning, specifically relating to an ultrasonic water bath agitation cleaning device. Background Technology
[0002] During the silicon wafer cutting process, a large amount of silicon powder and impurities are generated and adsorbed and deposited on the surface of the silicon wafer. Therefore, it is necessary to carry out centralized and batch cleaning of the cut silicon wafers. In the current silicon wafer cleaning process, a basket with silicon wafers inserted is placed in a silicon wafer cleaning tank, a certain concentration of chemical reagent is mixed in the cleaning tank, and a circulating pump is used to make the chemical reagent continuously flow through the surface of the silicon wafer to achieve the cleaning purpose. In addition, ultrasonic vibration is used to enhance the above cleaning effect. However, the silicon wafer is still in a static state in the liquid, which cannot produce a washing effect, and there are cleaning dead corners, which cannot improve the cleaning effect of silicon wafers.
[0003] To solve the above technical problems, the current method is to connect the flower basket to the drive structure that drives the flower basket to move vertically up and down. To ensure the stability of the connection between the flower basket and the drive structure, the drive structure is usually fixedly connected to the bottom of the flower basket to achieve direct drive to move vertically up and down. Therefore, the drive structure and the flower basket are an integrated structure, and the entire flower basket cannot be disassembled. The loading and unloading of silicon wafers is somewhat cumbersome, which affects the cleaning efficiency of silicon wafers. Utility Model Content
[0004] The purpose of this invention is to overcome the above-mentioned shortcomings and provide an ultrasonic water bath agitation cleaning device, which facilitates the overall disassembly of silicon wafers and baskets and improves the cleaning efficiency of silicon wafers.
[0005] The purpose of this utility model is achieved through the following technical solution: an ultrasonic water bath agitation cleaning device, including an outer tank and an inner tank placed inside the outer tank, the inner tank having a cleaning basket for placing workpieces, and the outer side of the outer tank having a drive component for driving the cleaning basket to move up and down reciprocally.
[0006] The drive assembly includes a fixed frame mounted on one side of the outer tank and a drive motor mounted on the fixed frame. The fixed frame has a vertical rail, and a sliding block that slides up and down on the vertical rail. The end face of the sliding block away from the vertical rail has a transverse fixed plate. The extension direction of the transverse fixed plate is perpendicular to the extension direction of the vertical rail. Two hanging rods extend horizontally from both ends of the transverse fixed plate toward the cleaning basket. The two hanging rods are respectively in contact with the two ends of the cleaning basket. A connecting plate is located at the center of the end face of the transverse fixed plate near the drive motor. A lifting drive assembly is located between the connecting plate and the drive end of the drive motor. As the drive motor rotates, the lifting drive assembly drives the transverse fixed plate, hanging rods, and sliding block to move vertically up and down along the vertical rail, thereby causing the workpiece in the cleaning basket to move vertically up and down in the inner tank.
[0007] A further improvement of this utility model is that: the lifting drive group includes a disc disposed at the drive end of the drive motor and a lower shaft disposed eccentrically on the outer end face of the disc, an upper shaft is provided on the connecting plate, the upper shaft and the lower shaft are arranged vertically correspondingly, an upper shaft sleeve is movably sleeved on the upper shaft, a lower shaft sleeve is movably sleeved on the lower shaft, and a connecting rod is provided between the upper shaft sleeve and the lower shaft sleeve.
[0008] A further improvement of this utility model is that the cleaning basket includes two side plates and a bottom plate placed between the two side plates. The two side plates and the bottom plate are connected to form a U-shaped structure. A support plate extends vertically outward from the upper end of the side plate, and the hanging rod is placed between the corresponding side plate and the support plate.
[0009] A further improvement of this utility model is that: the outer tank has horizontal support components on both sides to facilitate the horizontal passage of the two lifting rods, and the horizontal support components provide horizontal support for the two lifting rods that are lifted and thrown up and down.
[0010] A further improvement of this utility model is that: the horizontal support assembly includes support seats located on both sides of the outer groove along the axial direction of the boom, the support seats have vertical limiting holes to facilitate the horizontal passage of the boom, and telescopic rods are fixedly connected to the upper and lower ends of the vertical limiting holes, and a support arc plate is fixedly connected to the end of the telescopic rod away from the upper and lower ends of the vertical limiting holes, the inner wall of the support arc plate cooperates with the outer wall of the boom, and a spring is sleeved on the telescopic rod, one end of the spring is fixedly connected to the upper and lower ends corresponding to the vertical limiting holes, and the other end of the spring is fixedly connected to the corresponding support arc plate.
[0011] This utility model has the following advantages compared with the prior art:
[0012] 1. The lifting drive assembly in this utility model drives the two booms to move vertically up and down, thereby achieving full contact between the workpiece in the cleaning basket and the cleaning fluid in the inner tank. The booms are in direct contact with the upper end of the cleaning basket. By limiting the cleaning basket laterally through the inner tank and the booms vertically through the booms, the connection between the cleaning basket and the booms is made simple while ensuring the stability of the connection between the cleaning basket and the booms during vertical movement.
[0013] 2. In this utility model, the upper two sides of the cleaning basket are directly supported on two hanging rods, which facilitates the overall loading and unloading of the cleaning basket and the workpiece, thereby improving the cleaning efficiency of the workpiece.
[0014] 3. The horizontal support components installed on the outer tank provide a certain buffer and support for the two vertically moving booms, ensuring that the booms remain horizontal during the vertical tossing process. This prevents the booms from tilting due to unbalanced forces, and thus prevents the cleaning basket from tilting and causing the workpiece to slip into the inner tank. Attached Figure Description
[0015] Figure 1 This is a schematic diagram of the structure of Embodiment 1 of this utility model.
[0016] Figure 2 for Figure 1 Enlarged schematic diagram of the lifting drive unit.
[0017] Figure 3 for Figure 1 A schematic diagram of the structure of the cleaning basket.
[0018] Figure 4 This is a structural schematic diagram of Embodiment 2 of the present invention.
[0019] Figure 5 for Figure 4 A schematic diagram of the structure of the horizontal support component.
[0020] Numbering on the map:
[0021] 1-Outer tank, 2-Inner tank, 3-Cleaning basket, 4-Horizontal support assembly, 5-Drive assembly;
[0022] 31-Side plate, 32-Bottom plate, 33-Support plate;
[0023] 41-Support base, 42-Vertical limiting hole, 43-Telescopic rod, 44-Support arc plate, 45-Spring;
[0024] 51-Fixed frame, 52-Drive motor, 53-Vertical rail, 54-Sliding block, 55-Horizontal fixed plate, 56-Hanging rod, 57-Connecting plate, 58-Lifting drive group; 581-Disc, 582-Lower shaft, 583-Upper shaft, 584-Upper shaft sleeve, 585-Lower shaft sleeve, 586-Connecting rod body. Detailed Implementation
[0025] To enhance understanding of this utility model, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings. These embodiments are only used to explain the present utility model and do not constitute a limitation on the scope of protection of the present utility model.
[0026] In the description of this utility model, it should be understood that the terms indicating orientation or positional relationship, such as those based on the orientation or positional relationship shown in the drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the structure or unit referred to must have a specific orientation, and therefore should not be construed as a limitation of this utility model.
[0027] In this utility model, unless otherwise explicitly specified and limited, terms such as “connection,” “provided with,” and “have” should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection. They can be described as a mechanical connection, a direct connection, or a connection through an intermediate medium. Those skilled in the art can understand the basic meaning of the above terms in this utility model according to the specific circumstances. Example 1
[0028] An ultrasonic water bath agitation cleaning device, as described in the reference Figure 1 , Figure 2 It includes an outer tank 1 and an inner tank 2 placed inside the outer tank 1. The inner tank 2 has a cleaning basket 3 for placing workpieces, and the outer tank 1 has a drive assembly 5 on the outside for driving the cleaning basket 3 to move up and down as a whole.
[0029] The drive assembly 5 includes a fixed frame 51 disposed on one side of the outer tank 1 and a drive motor 52 disposed on the fixed frame 51. The fixed frame 51 has a vertical rail 53, and the vertical rail 53 has a sliding block 54 that slides up and down. The end face of the sliding block 54 away from the vertical rail 53 has a transverse fixed plate 55. The extension direction of the transverse fixed plate 55 is perpendicular to the extension direction of the vertical rail 53. The two ends of the transverse fixed plate 55 have horizontally extending rods 56 towards the cleaning basket 3. The two rods 56 are respectively in contact with the two ends of the cleaning basket 3. The center position of the end face of the transverse fixed plate 55 near the drive motor 52 has a connecting plate 57. The connecting plate 57 and the drive end of the drive motor 52 have a lifting drive group 58. The lifting drive group 58 drives the transverse fixed plate 55, the rods 56 and the sliding block 54 to move vertically up and down along the direction of the vertical rail 53 as the drive motor 52 rotates, thereby driving the workpiece in the cleaning basket 3 to move vertically up and down in the inner tank 2.
[0030] In this invention, the lifting drive assembly 58 drives the two lifting rods 56 to move vertically up and down, thereby achieving full contact between the workpiece in the cleaning basket 3 and the cleaning fluid in the inner tank 2. The lifting rods 56 are in direct contact with the upper end of the cleaning basket 3. Through the lateral limiting of the cleaning basket 3 by the inner tank 2 and the vertical limiting of the cleaning basket 3 by the lifting rods 56, the connection between the cleaning basket 3 and the lifting rods 56 is made simple while ensuring the connection stability between the cleaning basket 3 and the lifting rods 56 during vertical movement.
[0031] Based on this embodiment, the lifting drive group 58 includes a disc 581 disposed at the drive end of the drive motor 52 and a lower shaft 582 eccentrically disposed on the outer end face of the disc 581. The connecting plate 57 has an upper shaft 583, and the upper shaft 583 and the lower shaft 582 are arranged vertically in correspondence. An upper shaft sleeve 584 is movably sleeved on the upper shaft 583, and a lower shaft sleeve 585 is movably sleeved on the lower shaft 582. A connecting rod 586 is provided between the upper shaft sleeve 584 and the lower shaft sleeve 585.
[0032] In this application, the lifting drive group 58 uses a drive motor 52 to drive the lower shaft 582 on the disc 581 to rotate eccentrically, thereby causing the connecting rod 586 to drive the transverse fixed plate 55 and the hanging rod 56 to move vertically up and down. The lifting drive group 58 converts the circular motion of the drive motor 52 into the vertical movement of the hanging rod 56, changing the traditional drive method of direct lifting and lowering through the drive cylinder, making the vertical movement of the hanging rod 56 and the cleaning basket 3 more stable, and preventing the workpieces on the cleaning basket 3 from falling into the inner tank 2.
[0033] Based on this embodiment, refer to Figure 3 The cleaning basket 3 includes two side plates 31 and a bottom plate 32 placed between the two side plates 31. The two side plates 31 and the bottom plate 32 are connected to form a U-shaped structure. The upper end of the side plate 31 extends vertically outward with a support plate 33. The hanging rod 56 is placed between the corresponding side plate 31 and the support plate 33.
[0034] In this invention, the upper sides of the cleaning basket 3 are directly supported on two hanging rods 56, which facilitates the overall loading and unloading of the cleaning basket 3 and the workpiece, thereby improving the cleaning efficiency of the workpiece. Example 2
[0035] Reference Figure 4 , Figure 5 Based on embodiment 1, the outer tank 1 has horizontal support components 6 on both sides to facilitate the horizontal passage of the two lifting rods 56. The horizontal support components 6 provide horizontal support for the two lifting rods 56 that are lifted and thrown up and down.
[0036] Specifically, the horizontal support assembly 6 includes support seats 41 located on both sides of the outer groove 1 along the axial direction of the rod 56. The support seats 41 have vertical limiting holes 42 to facilitate the horizontal passage of the rod 56. Telescopic rods 43 are fixedly connected to the upper and lower ends of the vertical limiting holes 42. A support arc plate 44 is fixedly connected to one end of the telescopic rod 43 away from the upper and lower ends of the vertical limiting holes 42. The inner wall of the support arc plate 44 cooperates with the outer wall of the rod 56. A spring 45 is sleeved on the telescopic rod 43. One end of the spring 45 is fixedly connected to the upper and lower ends corresponding to the vertical limiting holes 42, and the other end of the spring 45 is fixedly connected to the corresponding support arc plate 44.
[0037] The horizontal support component 4 installed on the outer tank 1 provides a certain buffer support for the two vertically moving lifting rods 56, ensuring that the lifting rods 56 remain horizontal during the vertical throwing process, and preventing the lifting rods 56 from tilting due to unbalanced force, thereby preventing the cleaning basket 3 from tilting and causing the workpiece to slip into the inner tank 2.
[0038] Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.
Claims
1. An ultrasonic water bath agitation cleaning device, characterized in that: It includes an outer tank (1) and an inner tank (2) placed inside the outer tank (1). The inner tank (2) has a cleaning basket (3) for placing workpieces. The outer side of the outer tank (1) has a drive assembly (5) for driving the cleaning basket (3) to move up and down as a whole. The drive assembly (5) includes a fixed frame (51) disposed on one side of the outer tank (1) and a drive motor (52) disposed on the fixed frame (51). The fixed frame (51) has a vertical rail (53), and the vertical rail (53) has a sliding block (54) that slides up and down. The end face of the sliding block (54) away from the vertical rail (53) has a transverse fixing plate (55). The extension direction of the transverse fixing plate (55) is perpendicular to the extension direction of the vertical rail (53). The two ends of the transverse fixing plate (55) extend horizontally towards the cleaning basket (3) with hanging rods (56). Two booms (56) are respectively connected to the two ends of the cleaning basket (3). The horizontal fixing plate (55) has a connecting plate (57) at the center of the end face near the drive motor (52). The connecting plate (57) and the drive end of the drive motor (52) have a lifting drive group (58). The lifting drive group (58) drives the horizontal fixing plate (55), booms (56) and sliding block (54) to move vertically up and down along the direction of the vertical track (53) as the drive motor (52) rotates. This causes the workpiece in the cleaning basket (3) to move vertically up and down in the inner tank (2).
2. The ultrasonic water bath agitation cleaning device according to claim 1, characterized in that: The lifting drive assembly (58) includes a disc (581) disposed at the drive end of the drive motor (52) and a lower shaft (582) eccentrically disposed on the outer end face of the disc (581). The connecting plate (57) has an upper shaft (583). The upper shaft (583) and the lower shaft (582) are arranged vertically in correspondence. An upper shaft sleeve (584) is movably sleeved on the upper shaft (583), and a lower shaft sleeve (585) is movably sleeved on the lower shaft (582). A connecting rod (586) is provided between the upper shaft sleeve (584) and the lower shaft sleeve (585).
3. The ultrasonic water bath agitation cleaning device according to claim 2, characterized in that: The cleaning basket (3) includes two side plates (31) and a bottom plate (32) placed between the two side plates (31). The two side plates (31) and the bottom plate (32) are connected to form a U-shaped structure. A support plate (33) extends vertically outward from the upper end of the side plate (31). The hanging rod (56) is placed between the corresponding side plate (31) and the support plate (33).
4. The ultrasonic water bath agitation cleaning device according to claim 3, characterized in that: The outer tank (1) has horizontal support components (6) on both sides to facilitate the horizontal passage of two booms (56), and the horizontal support components (6) provide horizontal support for the two booms (56) that move up and down.
5. The ultrasonic water bath agitation cleaning device according to claim 4, characterized in that: The horizontal support assembly (6) includes support seats (41) located on both sides of the outer groove (1) along the axial direction of the rod (56). The support seats (41) have vertical limiting holes (42) to facilitate the horizontal passage of the rod (56). The upper and lower ends of the vertical limiting holes (42) are fixedly connected to telescopic rods (43). The end of the telescopic rod (43) away from the upper and lower ends of the vertical limiting holes (42) is fixedly connected to a support arc plate (44). The inner wall of the support arc plate (44) cooperates with the outer wall of the rod (56). A spring (45) is sleeved on the telescopic rod (43). One end of the spring (45) is fixedly connected to the upper and lower ends corresponding to the vertical limiting holes (42), and the other end of the spring (45) is fixedly connected to the corresponding support arc plate (44).