Exhaust system with double dust removal tanks for single crystal furnace

Abstract

The utility model discloses a single crystal furnace double dust removal tank exhaust system which comprises a single crystal furnace, a main dust removal tank, an auxiliary dust removal tank and a dry pump, an air inlet of the main dust removal tank is connected with a main dust removal tank air inlet ball valve, and an air inlet of the auxiliary dust removal tank is connected with an auxiliary dust removal tank air inlet ball valve. The main dust removal tank air inlet ball valve and the auxiliary dust removal tank air inlet ball valve are connected with the single crystal furnace through exhaust pipeline metal hoses; the main dust removal tank is connected with a main dust removal tank air outlet ball valve through a main dust removal tank air outlet metal hose, the auxiliary dust removal tank is connected with an auxiliary dust removal tank air outlet ball valve through an auxiliary dust removal tank air outlet metal hose, and the main dust removal tank air outlet ball valve and the auxiliary dust removal tank air outlet ball valve are both connected with the dry pump through a tee joint. According to the utility model, the two dust removal tanks are adopted, so that the problems of furnace pressure rise and single crystal quality reduction caused by air permeability reduction of the dust removal tanks during long-time operation of the single crystal furnace are effectively solved.

Description

Technical Field

[0001] This utility model relates to the technical field of single crystal furnaces, specifically a dual dust removal tank exhaust system for single crystal furnaces. Background Technology

[0002] Currently, the exhaust system of a single crystal furnace consists of a vacuum pipe, a metal hose, a dust collector, and a vacuum pump. During the crystal pulling process, oxide dust is collected in the dust collector. As the single crystal furnace continues to operate, more and more oxide dust is collected in the dust collector, and the air permeability of the dust collector filter bag decreases accordingly. This leads to a continuous increase in the vacuum pump frequency, affecting the evacuation effect and furnace pressure control of the single crystal furnace.

[0003] During the operation of a single crystal furnace, once the vacuum pump frequency rises to its limit, the furnace pressure becomes uncontrollable, causing the furnace pressure to rise continuously and affecting the quality and yield of crystal rods.

[0004] Currently, the main solution in the industry to prevent the furnace pressure from rising due to reduced air permeability of the dust collector during long-term operation of a single crystal furnace is to increase the filtration area of ​​the storage tank. However, due to the limited space in the workshop, the increase in filtration area is limited and cannot effectively solve the problem of reduced air permeability of the dust collector.

[0005] During the crystal pulling process in a single crystal furnace, a large amount of silicon monoxide dust is generated. This dust is eventually collected in a dust collector. As more and more dust accumulates in the dust collector, its permeability gradually decreases. Furthermore, the quality of the single crystal silicon is directly related to the smoothness of the exhaust system during crystal pulling. Therefore, ensuring the smooth operation of the exhaust system is essential for improving the quality of single crystal silicon. Utility Model Content

[0006] The purpose of this invention is to provide a dual dust removal tank exhaust system for a single crystal furnace to solve the problems in the prior art.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a dual dust collector exhaust system for a single crystal furnace, comprising a single crystal furnace, a main dust collector, a secondary dust collector, and a dry pump. The inlet of the main dust collector is connected to a main dust collector inlet valve, and the inlet of the secondary dust collector is connected to a secondary dust collector inlet valve. Both the main dust collector inlet valve and the secondary dust collector inlet valve are connected to the single crystal furnace via exhaust pipe metal hoses. The main dust collector is connected to the main dust collector outlet valve via a main dust collector outlet metal hose, and the secondary dust collector is connected to the secondary dust collector outlet valve via a secondary dust collector outlet metal hose. Both the main dust collector outlet valve and the secondary dust collector outlet valve are connected to the dry pump via tee connections.

[0008] Preferably, a main chamber ball valve is installed at the connection between the single crystal furnace and the exhaust pipe metal hose.

[0009] Preferably, it also includes a main dust collector evacuation valve and a secondary dust collector evacuation valve, both of which are connected to a tee.

[0010] Preferably, the main dust collector evacuation valve is connected to the main dust collector via a main dust collector evacuation metal hose; the auxiliary dust collector evacuation valve is connected to the auxiliary dust collector via an auxiliary dust collector evacuation metal hose.

[0011] Preferably, the main dust collector is equipped with a main dust collector vacuum gauge, which is connected to the main dust collector evacuation valve via a wire; the auxiliary dust collector is equipped with an auxiliary dust collector vacuum gauge, which is connected to the auxiliary dust collector evacuation valve via a wire.

[0012] Preferably, the main dust collector inlet valve is connected to a three-way valve at one end of the exhaust pipe metal hose via the main dust collector inlet metal hose; the auxiliary dust collector inlet valve is connected to a three-way valve at one end of the exhaust pipe metal hose via the auxiliary dust collector inlet metal hose.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. Two dust collectors can be used interchangeably. The offline dust collector can be cleaned and then put back into use. The interchangeable use of two dust collectors can meet the needs of long-term operation of the single crystal furnace, ensuring smooth exhaust and preventing the furnace pressure from becoming unstable due to reduced air permeability of the dust collector, increased vacuum pump speed, and poor exhaust caused by long-term operation of the single crystal furnace. This application can effectively solve the problem of increased furnace pressure and reduced single crystal quality caused by reduced air permeability of the dust collector during long-term operation of the single crystal furnace.

[0015] 2. Two dust collectors are connected in parallel. After the main dust collector has been used for a period of time, the auxiliary dust collector is switched to use. At this time, the main dust collector goes offline and automatically starts oxidation. After oxidation is completed, it is cleaned and then put into standby. After the auxiliary dust collector has been used for a period of time, the main dust collector is switched to use. The auxiliary dust collector goes offline for oxidation and cleaning. Attached Figure Description

[0016] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0017] Figure 1 This is the front view of this utility model;

[0018] Figure 2 This is a top view of the present invention;

[0019] Figure 3 This is a schematic diagram of the present invention.

[0020] In the diagram: 1. Exhaust pipe metal hose; 2. Secondary dust collector inlet metal hose; 3. Main dust collector outlet metal hose; 4. Secondary dust collector outlet metal hose; 5. Main dust collector; 6. Secondary dust collector; 7. Main dust collector inlet valve; 8. Secondary dust collector inlet valve; 9. Main dust collector outlet valve; 10. Secondary dust collector outlet valve; 11. Main dust collector evacuation metal hose; 12. Secondary dust collector evacuation metal hose; 13. Main dust collector vacuum gauge; 14. Secondary dust collector vacuum gauge; 15. Main dust collector evacuation valve; 16. Secondary dust collector evacuation valve; 17. T-junction. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely to represent selected embodiments of this utility model.

[0022] Please see Figure 1-3 In this embodiment of the present invention, a dual dust collector exhaust system for a single crystal furnace includes a single crystal furnace, a main dust collector 5, a secondary dust collector 6, and a dry pump. The air inlet of the main dust collector 5 is connected to a main dust collector inlet ball valve 7, and the air inlet of the secondary dust collector 6 is connected to a secondary dust collector inlet ball valve 8. Both the main dust collector inlet ball valve 7 and the secondary dust collector inlet ball valve 8 are connected to the single crystal furnace through an exhaust pipe metal hose 1. A main chamber ball valve is installed at the connection between the single crystal furnace and the exhaust pipe metal hose 1.

[0023] The main dust collector 5 is connected to the main dust collector outlet valve 9 via the main dust collector outlet metal hose 3, and the auxiliary dust collector 6 is connected to the auxiliary dust collector outlet valve 10 via the auxiliary dust collector outlet metal hose 4. Both the main dust collector outlet valve 9 and the auxiliary dust collector outlet valve 10 are connected to the dry pump via a tee 17.

[0024] Two dust collectors are used alternately. The offline dust collector can be cleaned and then put into standby mode. Switching between the two dust collectors ensures smooth exhaust flow for long-term operation of the single crystal furnace. An additional dust collector is added to the original exhaust system, and the two dust collectors are connected in parallel. After the main dust collector has been in use for a period of time, the auxiliary dust collector is switched to. At this time, the main dust collector goes offline and automatically begins oxidation. After oxidation is complete, it is cleaned and then put into standby mode. After the auxiliary dust collector has been in use for a period of time, the main dust collector is switched to, and the auxiliary dust collector undergoes offline oxidation and cleaning.

[0025] The main dust collector inlet valve 7 is connected to a three-way valve at one end of the exhaust pipe metal hose 1 via the main dust collector 5 inlet metal hose; the auxiliary dust collector inlet valve 8 is connected to a three-way valve at one end of the exhaust pipe metal hose 1 via the auxiliary dust collector inlet metal hose 2.

[0026] It also includes a main dust collector evacuation valve 15 and a secondary dust collector evacuation valve 16, both of which are connected to a tee 17. The main dust collector evacuation valve 15 is connected to the main dust collector 5 via a main dust collector evacuation metal hose 11. The secondary dust collector evacuation valve 16 is connected to the secondary dust collector 6 via a secondary dust collector evacuation metal hose 12. The main dust collector 5 is equipped with a main dust collector vacuum gauge 13, which is connected to the main dust collector evacuation valve 15 via a wire. The secondary dust collector 6 is equipped with a secondary dust collector vacuum gauge 14, which is connected to the secondary dust collector evacuation valve 16 via a wire.

[0027] Each of the two dust collectors is equipped with a vacuum gauge. Switching is only permitted when the standby dust collector is pre-evacuated to a vacuum level close to that of the online dust collector. Each dust collector is also equipped with a KF25 vacuum valve for pre-evacuating the standby dust collector, preventing airflow impact and ash backflow due to excessive pressure difference during dust collector switching. This dual-dust-collector exhaust system for single-crystal furnaces maintains smooth exhaust during furnace operation, preventing furnace pressure increases caused by reduced permeability of the dust collectors; it also allows for automatic switching between the two dust collectors during furnace operation.

[0028] The working principle of this utility model is as follows: The exhaust system of the single crystal furnace is equipped with a main dust collector 5 and a secondary dust collector 6. When the single crystal furnace is initially running, the main dust collector 5 is used to filter dust. After running for a period of time, the air permeability of the main dust collector 5 will decrease and the exhaust resistance will increase, making the exhaust system unsmooth. At this time, the system can be switched to the secondary dust collector 6 to filter dust. At the same time, the main dust collector 5 is switched to offline state for oxidation and dust removal, waiting for the next switch-out.

[0029] The main dust collector 5 and the auxiliary dust collector 6 are respectively equipped with a main dust collector evacuation valve 15 and an auxiliary dust collector evacuation valve 16. When switching, the evacuation valve is opened first to pre-evacuate the offline dust collector, so that the pressure in the offline dust collector is consistent with the pressure in the online dust collector, thereby avoiding back dust during the switching of dust collectors.

[0030] The main dust collector 5 and the auxiliary dust collector 6 are equipped with a main dust collector vacuum gauge 13 and an auxiliary dust collector vacuum gauge 14, respectively. When the dust collector is pre-emptively evacuated, the pressure inside the dust collector can be accurately measured. The pressure difference inside the dust collector displayed by the two vacuum gauges is used as a logical condition to determine whether the dust collector can be switched.

[0031] The main dust collector 5 and the auxiliary dust collector 6 are respectively equipped with a main dust collector inlet valve 7 and a main dust collector outlet valve 9, an auxiliary dust collector inlet valve 8 and an auxiliary dust collector outlet valve 10, which are used to isolate the offline dust collectors.

[0032] This single-crystal furnace dual dust collector exhaust system can effectively prevent the problems of poor air permeability and increased resistance caused by long-term operation of the dust collector during the crystal pulling process, and prevent the furnace pressure from rising due to the reduced air permeability of the dust collector.

[0033] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A dual dust collector exhaust system for a single crystal furnace, characterized in that: It includes a single crystal furnace, a main dust collector (5), a secondary dust collector (6) and a dry pump. The air inlet of the main dust collector (5) is connected to a main dust collector air inlet valve (7), and the air inlet of the secondary dust collector (6) is connected to a secondary dust collector air inlet valve (8). Both the main dust collector air inlet valve (7) and the secondary dust collector air inlet valve (8) are connected to the single crystal furnace through an exhaust pipe metal hose (1). The main dust collector (5) is connected to the main dust collector outlet valve (9) via the main dust collector outlet metal hose (3), and the auxiliary dust collector (6) is connected to the auxiliary dust collector outlet valve (10) via the auxiliary dust collector outlet metal hose (4). Both the main dust collector outlet valve (9) and the auxiliary dust collector outlet valve (10) are connected to the dry pump via a tee (17).

2. The exhaust system for a single crystal furnace with dual dust collectors according to claim 1, characterized in that: A main chamber ball valve is installed at the connection between the single crystal furnace and the exhaust pipe metal hose (1).

3. The exhaust system for a single crystal furnace with dual dust collectors according to claim 1, characterized in that: It also includes a main dust collector evacuation valve (15) and a secondary dust collector evacuation valve (16), both of which are connected to a tee (17).

4. The exhaust system for a single crystal furnace with dual dust collectors according to claim 3, characterized in that: The main dust collector evacuation valve (15) is connected to the main dust collector (5) via the main dust collector evacuation metal hose (11); the auxiliary dust collector evacuation valve (16) is connected to the auxiliary dust collector (6) via the auxiliary dust collector evacuation metal hose (12).

5. The exhaust system for a single crystal furnace with dual dust collectors according to claim 3 or 4, characterized in that: The main dust collector (5) is equipped with a main dust collector vacuum gauge (13), which is connected to the main dust collector evacuation valve (15) via a wire; the auxiliary dust collector (6) is equipped with an auxiliary dust collector vacuum gauge (14), which is connected to the auxiliary dust collector evacuation valve (16) via a wire.

6. The exhaust system for a single crystal furnace with dual dust collectors according to claim 1, characterized in that: The main dust collector inlet valve (7) is connected to the three-way valve at one end of the exhaust pipe metal hose (1) via the main dust collector (5) inlet metal hose; the auxiliary dust collector inlet valve (8) is connected to the three-way valve at one end of the exhaust pipe metal hose (1) via the auxiliary dust collector inlet metal hose (2).

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