Inner guide cylinder and single crystal furnace thermal field
By setting an air bubble layer on the outside of the inner guide tube and attaching it to the outer guide tube, the problem of the fragility of the quartz guide tube is solved, and a solution is achieved that improves the strength and thermal insulation effect of the quartz guide tube. This improves the strength of the inner guide tube, reduces the loss rate, saves costs, and enhances the thermal insulation effect.
Patent Information
- Application Number
- CN202422857725.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-22
- Publication Date
- 2025-12-02
- Estimated Expiration
- 2034-11-22
AI Technical Summary
Existing quartz flow guide tubes are prone to breakage when subjected to pressure or slight impact, resulting in a high loss rate and the need for additional insulation carbon felt, which increases the workflow and cost.
Design an inner guide tube, including an inner tube and a bubble layer surrounding its outer side. The bubble layer is attached to the outer guide tube to enhance the wall thickness of the inner guide tube. The bubble layer fills the gap between the inner and outer guide tubes, eliminating the need for thermal insulation carbon felt and improving strength and thermal insulation effect.
The strength of the inner guide tube was improved, the loss rate was reduced, the workflow of filling the thermal insulation carbon felt was simplified, costs were saved, and the thermal insulation effect and space utilization were enhanced.
Smart Images
Figure CN223620537U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of monocrystalline silicon production technology, and more specifically, to an internal flow guide tube and a hot zone for a monocrystalline furnace. Background Technology
[0002] The internal flow guide tubes used in single crystal furnaces come in several types, including graphite flow guide tubes, carbon-carbon flow guide tubes, ceramic flow guide tubes, and quartz flow guide tubes. Among them, quartz flow guide tubes are low in cost and widely applicable, so they are currently the most widely used internal flow guide tubes.
[0003] To ensure effective temperature insulation, a heat-insulating carbon felt needs to be installed between the quartz flow guide tube and the outer flow guide tube, and the thickness of the heat-insulating carbon felt must be guaranteed. However, this requires a thin-walled quartz flow guide tube, which makes it prone to breakage under pressure or minor impacts, resulting in damage to the quartz flow guide tube.
[0004] In summary, how to improve the strength of the inner guide tube in order to reduce its loss rate is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content
[0005] In view of this, the purpose of this application is to provide an inner guide tube and a single crystal furnace thermal field to improve the strength of the inner guide tube and reduce the loss rate of the inner guide tube.
[0006] To achieve the above objectives, this application provides the following technical solution:
[0007] An inner guide tube includes an inner cylinder and a bubble layer; wherein the bubble layer surrounds the outer side of the inner cylinder and is capable of adhering to the inner wall of the outer guide tube.
[0008] In some embodiments, the bubble layer covers the circumferential sidewall of the inner cylinder.
[0009] In some embodiments, the inner cylinder includes a variable diameter section, the diameter of which gradually decreases along a first direction; the first direction is the axial direction of the inner cylinder and extends from the top end of the inner cylinder to the bottom end of the inner cylinder; the bubble layer includes a first bubble layer and a second bubble layer, both located outside the variable diameter section, and both the first bubble layer and the second bubble layer are able to conform to the outer guide cylinder; the thickness of the first bubble layer gradually increases along the first direction, and the thickness of the second bubble layer gradually decreases along the first direction.
[0010] In some embodiments, the inner cylinder further includes a constant diameter section, which is an integral structure with the variable diameter section, and the constant diameter section and the variable diameter section are distributed sequentially along a first direction.
[0011] In some embodiments, the bubble layer further includes a third bubble layer located outside the equal diameter section, the third bubble layer being able to conform to the outer guide tube.
[0012] In some embodiments, the inner guide tube is provided with a pick-and-place structure, which is used to remove the inner guide tube from the outer guide tube and place it into the interior of the outer guide tube.
[0013] In some embodiments, the pick-and-place structure is located on the inner wall of the inner cylinder; or, the pick-and-place structure is located on the top surface of the inner guide cylinder.
[0014] In some embodiments, the pick-and-place structure includes at least two sets, with an included angle between adjacent pick-and-place structures, and each set of pick-and-place structures includes at least one connecting hole.
[0015] In some embodiments, the pick-and-place structure further includes a sealing block, which is used to seal the connection hole, and after the sealing block seals the connection hole, the sealing block is flush with the inner wall of the inner cylinder.
[0016] In some embodiments, the inner wall of the inner cylinder is a smooth layer.
[0017] A single crystal furnace thermal field includes: a single crystal furnace, an outer guide tube, and an inner guide tube as described above; wherein the outer guide tube is located at the upper part of the single crystal furnace, the inner guide tube is located inside the outer guide tube, and the bubble layer of the inner guide tube is in contact with the outer guide tube.
[0018] The inner guide tube provided in this application includes an inner cylinder and a bubble layer. The bubble layer surrounds the outer layer of the inner cylinder. By increasing the bubble layer, the wall thickness of the inner guide tube is increased, thereby improving its strength and reducing its wear under pressure or minor impact, thus lowering the wear rate. Furthermore, the bubble layer can adhere to the inner wall of the outer guide tube, allowing it to fill the gap between the inner and outer guide tubes without the need for additional insulation carbon felt. This reduces the workflow and saves costs. The bubble layer also insulates the temperature between the inner and outer guide tubes, improving the space utilization between them, enhancing the insulation effect, and further increasing the wall thickness and strength of the inner guide tube. Attached Figure Description
[0019] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.
[0020] Figure 1 This is a schematic diagram of the internal guide tube in the prior art;
[0021] Figure 2 This is a schematic diagram of the structure of the inner guide tube provided in the embodiment of this application;
[0022] Figure 3 This is a schematic diagram of the loading and unloading structure in the inner guide tube provided in an embodiment of this application;
[0023] Figure 4 This is a schematic diagram of the overall structure of the hot zone of a single crystal furnace provided in an embodiment of this application.
[0024] Explanation of reference numerals in the attached figures:
[0025] 10-Inner guide tube, 11-Inner tube, 111-Equal diameter section, 112-Variable diameter section, 12-Bubble layer, 121-First bubble layer, 122-Second bubble layer, 123-Third bubble layer, 101-Connecting hole;
[0026] 20 - External guide tube, 30 - Heater, 40 - Ring felt, 100 - Single crystal furnace. Detailed Implementation
[0027] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. The terminology used in the following embodiments is for the purpose of describing specific embodiments only and is not intended to be a limitation of this application. As used in the specification and appended claims of this application, the singular expressions "a," "an," "the," "the," "the," and "this" are intended to also include expressions such as "one or more," unless the context clearly indicates otherwise.
[0029] References to "one embodiment" or "some embodiments" as described in this specification mean that one or more embodiments of this application include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized.
[0030] The "multiple" mentioned in the embodiments of this application refers to two or more. It should be noted that in the description of the embodiments of this application, terms such as "first" and "second" are used only for the purpose of distinguishing descriptions and should not be construed as indicating or implying relative importance, nor should they be construed as indicating or implying order.
[0031] like Figures 2-4 As shown, the inner guide tube 10 provided in this embodiment includes an inner tube 11 and a bubble layer 12. The bubble layer 12 surrounds the outer layer of the inner tube 11. By increasing the bubble layer 12, the wall thickness of the inner guide tube 10 is increased, which improves the strength of the inner guide tube 10, reduces the loss of the inner guide tube 10 under compression or slight impact, and lowers the loss rate of the inner guide tube 10. Furthermore, the bubble layer 12 can fit against the inner wall of the outer guide tube 20, so that the bubble layer 12 can fill the gap between the inner guide tube 10 and the outer guide tube 20, eliminating the need to fill with thermal insulation carbon felt, reducing the workflow, saving costs, and isolating the temperature between the inner guide tube 10 and the outer guide tube 20 by the bubble layer 12, improving the space utilization between the inner guide tube 10 and the outer guide tube 20, enhancing the thermal insulation effect, and further increasing the wall thickness of the inner guide tube 10, which further improves the strength of the inner guide tube 10.
[0032] It should be noted that the inner wall of the inner cylinder 11 is a smooth layer. During the crystal pulling process, the inert gas flows in from the top inlet of the inner cylinder 11 and flows out from the bottom outlet after passing through the inner wall of the inner cylinder 11. In this way, when the inert gas flows from top to bottom through the inner wall of the inner cylinder 11, the smooth layer can ensure the stable flow of the inert gas, thereby reducing the impact of inert gas disturbance on the surface of the monocrystalline silicon, ensuring the quality of the monocrystalline silicon, and ensuring the working effect of the inner guide cylinder 10.
[0033] like Figure 4As shown, in practice, the height of the outer guide tube 20 along its axial direction is smaller than the height of the inner guide tube 10, and the bottom end of the inner guide tube 10 is flush with the bottom end of the outer guide tube 20. Therefore, a ring felt 40 is usually placed on the top surface of the outer guide tube 20 to provide insulation for the part of the inner guide tube 10 near its top.
[0034] In some embodiments, such as Figure 4 As shown, the height of the bubble layer 12 along the axial direction of the inner guide cylinder 10 is the same as the height of the outer guide cylinder 20 along its axial direction, so that there is space between the top surface of the bubble layer 12 and the top surface of the inner cylinder 11 for the ring felt 40 to be placed. In this way, the original ring felt 40 can be retained, reducing the need for adaptation and modification of other components, thereby reducing the number of processing steps.
[0035] In some other embodiments, such as Figure 2 As shown, the bubble layer 12 covers the circumferential sidewall of the inner cylinder 11, and the top surface of the bubble layer 12 is flush with the top surface of the inner cylinder 11. In this way, there is no need to place the ring felt 40, which further reduces the workflow and saves costs.
[0036] Since the bottom end of the inner guide tube 10 is close to the single crystal furnace 100, a larger gap is required between the inner guide tube 10 and the outer guide tube 20 in the portion near the bottom end of the inner guide tube 10 to ensure the thermal insulation effect between the inner guide tube 10 and the outer guide tube 20. The inner tube 11 includes a variable diameter section 112, the diameter of which gradually decreases along a first direction, which is the axial direction of the inner tube 11 and points from the top end of the inner tube 11 to the bottom end of the inner tube 11. This allows for a larger gap between the inner tube 11 and the outer guide tube 20 in the portion near its bottom end, ensuring that the bubble layer 12 has sufficient thickness to provide thermal insulation.
[0037] The bubble layer 12 includes a first bubble layer 121 and a second bubble layer 122, both located on the outside of the variable diameter section 112. Both the first bubble layer 121 and the second bubble layer 122 can fit against the inner wall of the outer guide tube 20. The thickness of the first bubble layer 121 gradually increases along the first direction, and the thickness of the second bubble layer 122 gradually decreases along the first direction. This ensures that the portion of the inner tube 11 near the bottom has a bubble layer 12 of sufficient thickness, which can guarantee the heat insulation effect of the bubble layer 12.
[0038] In some embodiments, such as Figure 2 As shown (the dashed lines in the figure are for distinguishing purposes and are not actual settings), the inner cylinder 11 also includes a constant diameter section 111. The constant diameter section 111 and the variable diameter section 112 are an integral structure. The constant diameter section 111 and the variable diameter section 112 are distributed sequentially along the first direction. In this way, the constant diameter section 111 forms a cylindrical shape, and the variable diameter section 112 forms a frustum shape. The constant diameter section 111 and the variable diameter section 112 have a smooth transition.
[0039] The bubble layer 12 also includes a third bubble layer 123, which is located outside the equal-diameter section 111 and can adhere to the inner wall of the outer guide tube 20. Thus, by forming the first bubble layer 121, the second bubble layer 122, and the third bubble layer 123, the bubble layer 12 can adhere to the inner wall of the outer guide tube 20, ensuring the adhesion area and adhesion effect between the bubble layer 12 and the outer guide tube 20, improving the space utilization between the inner guide tube 10 and the outer guide tube 20, and improving the thermal insulation effect between the inner guide tube 10 and the outer guide tube 20.
[0040] In this embodiment of the application, since the inner guide tube 10 and the outer guide tube 20 are fitted together, in order to operate the inner guide tube 10, the inner guide tube 10 is provided with a pick-and-place structure. The pick-and-place structure is used to remove the inner guide tube 10 from the outer guide tube 20 and to put the inner guide tube 10 into the outer guide tube 20.
[0041] In some embodiments, the pick-and-place structure is located on the inner wall of the inner cylinder 11 and near the top of the inner cylinder 11. This allows the operator to take out the inner guide cylinder 10 or put it into the outer guide cylinder 20 through the pick-and-place structure, improving the convenience of operation.
[0042] In some other embodiments, the pick-and-place structure is located on the top surface of the inner guide tube 10, which ensures the integrity of the inner surface of the inner tube 11 and the operational effectiveness of the inner guide tube 10.
[0043] To ensure the stability of the pick-and-place structure during the movement of the inner guide tube 10, the pick-and-place structure includes at least two sets, with an included angle between adjacent pick-and-place structures, and each set of pick-and-place structures includes at least one connecting hole 101, ensuring that the force on each set of connecting holes 101 is balanced, thus ensuring the stability of the pick-and-place structure during the movement of the inner guide tube 10.
[0044] In some embodiments, such as Figures 2-3 As shown, it includes four sets of pick-up and place structures, with an included angle of 90° between adjacent pick-up and place structures. Each set of pick-up and place structures includes four connecting holes 101, and the connecting holes 101 are circular holes. This provides multiple points of force, making the force among the multiple connecting holes 101 balanced, and further improving the stability of the inner guide tube 10 during the movement driven by the connecting holes 101.
[0045] In some other embodiments, each set of pick-up and drop-off structures can be a connecting hole 101, and the connecting hole 101 is a strip-shaped hole, which increases the force-bearing area of the connecting hole 101 and further ensures the stability of the inner guide tube 10 during the movement driven by the connecting hole 101.
[0046] To ensure the working effect of the inner guide tube 10, the connecting hole 101 is a blind hole, which can prevent the residue of the outer guide tube 20 from entering the interior of the inner guide tube 10. The loading and unloading structure also includes a sealing block. When the inner guide tube 10 is in operation, the sealing block can seal the connecting hole 101. After the sealing block seals the connecting hole 101, the sealing block is flush with the inner wall of the inner tube 11, thus ensuring the working effect of the inner guide tube 10.
[0047] like Figure 4 As shown in the figure, this application embodiment also provides a single crystal furnace hot zone, including: a single crystal furnace 100, an outer guide tube 20, and an inner guide tube 10 as described in the above embodiment. The outer guide tube 20 is located at the upper part of the single crystal furnace 100, and the inner guide tube 10 is located inside the outer guide tube 20, with the bubble layer 12 of the inner guide tube 10 adhering to the outer guide tube 20.
[0048] Since the inner guide tube 10 has the aforementioned technical effects, and the hot zone of the single crystal furnace includes the inner guide tube 10, the hot zone of the single crystal furnace also has corresponding technical effects, which will not be elaborated here.
[0049] like Figure 4 As shown, a heater 30 is also provided at the bottom of the single crystal furnace 100, which can heat the single crystal furnace 100. In actual practice, the inner cylinder 11 is also equipped with cooling devices such as water cooling screens, and the hot zone of the single crystal furnace also includes other components to ensure normal operation, which will not be described in detail here.
[0050] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. An inner guide tube, characterized in that, include: Inner cylinder (11) and bubble layer (12); The bubble layer (12) surrounds the outer side of the inner cylinder (11), and the bubble layer (12) can adhere to the inner wall of the outer guide cylinder (20); The bubble layer (12) covers the circumferential sidewall of the inner cylinder (11); The inner cylinder (11) includes a variable diameter section (112), the diameter of which gradually decreases along a first direction; the first direction is the axial direction of the inner cylinder (11) and extends from the top end of the inner cylinder (11) to the bottom end of the inner cylinder (11). The bubble layer (12) includes a first bubble layer (121) and a second bubble layer (122) both located outside the variable diameter section (112), and both the first bubble layer (121) and the second bubble layer (122) can fit into the outer guide tube (20). The thickness of the first bubble layer (121) gradually increases along the first direction, and the thickness of the second bubble layer (122) gradually decreases along the first direction.
2. The inner guide tube according to claim 1, characterized in that, The inner cylinder (11) also includes a constant diameter section (111), which is an integral structure with the variable diameter section (112). The constant diameter section (111) and the variable diameter section (112) are distributed sequentially along the first direction.
3. The inner guide tube according to claim 2, characterized in that, The bubble layer (12) further includes a third bubble layer (123), which is located outside the equal diameter section (111) and can fit into the outer guide tube.
4. The inner guide tube according to claim 1, characterized in that, The inner guide tube (10) is provided with a pick-and-place structure, which is used to remove the inner guide tube (10) from the outer guide tube (20) and place it into the interior of the outer guide tube (20).
5. The inner guide tube according to claim 4, characterized in that, The pick-and-place structure is located on the inner wall of the inner cylinder (11); Alternatively, the pick-and-place structure is located on the top surface of the inner guide tube (10).
6. The inner guide tube according to claim 4, characterized in that, The pick-and-place structure includes at least two sets, with an included angle between adjacent pick-and-place structures, and each set of pick-and-place structures includes at least one connecting hole (101).
7. The inner guide tube according to claim 6, characterized in that, The pick-and-place structure also includes a sealing block, which is used to seal the connection hole (101). After the sealing block seals the connection hole (101), the sealing block is flush with the inner wall of the inner cylinder (11).
8. The inner guide tube according to any one of claims 1-7, characterized in that, The inner wall of the inner cylinder (11) is a smooth layer.
9. A hot zone for a single crystal furnace, characterized in that, include: A single crystal furnace (100), an outer guide tube (20), and an inner guide tube (10) as described in any one of claims 1-8; The outer guide tube (20) is located at the top of the single crystal furnace (100), the inner guide tube (10) is located inside the outer guide tube (20), and the bubble layer (12) of the inner guide tube (10) is attached to the outer guide tube (20).