Pressure applying device for seed crystal bonding

Abstract

The utility model discloses a pressure applying device for seed crystal bonding. The pressure applying device comprises a mounting seat, a lifting rod, a driving mechanism and a pressing mechanism, the pressing mechanism comprises a mounting plate used for being connected with the lifting rod, an elastic plate in sealing connection with the mounting plate in the circumferential direction of the elastic plate, a pressure reducing valve arranged on the mounting plate and an air source communicated with the pressure reducing valve, the pressure reducing valve comprises a valve body, an air inlet, an air outlet and an air outlet, and the air inlet, the air outlet and the air outlet are formed in the valve body; the gas outlet is communicated with a gap between the mounting plate and the elastic plate, the exhaust port is communicated with external atmospheric pressure, and the pressure reducing valve is used for stabilizing gas pressure; and the driving mechanism comprises a servo motor arranged on the mounting seat, a planetary reducer in transmission connection with the servo motor, and a worm gear reducer in transmission connection with the planetary reducer. According to the pressure applying device for seed crystal bonding, the air pressure fluctuation in the elastic plate can be greatly reduced, so that the pressure applying stability of the elastic plate is controlled, and the bonding quality of seed crystals is further ensured.

Description

Technical Field

[0001] This utility model relates to a pressure application device for bonding seed crystals. Background Technology

[0002] In the silicon carbide single crystal growth process, the bonding quality between the silicon carbide seed crystal and the seed crystal seat directly affects the growth quality of the silicon carbide single crystal. The uniformity and density of the bonding are the key factors affecting the bonding quality.

[0003] In the existing technology, there are devices that use a flexible pressure head to apply pressure and bond silicon carbide seed crystals to the seed crystal seat. However, during the pressure application process, the air pressure in the flexible pressure head is difficult to control, resulting in large fluctuations in the pressure applied to the silicon carbide seed crystal. This still leads to problems such as bubbles forming in the center of the seed crystal or the seed crystal being crushed. Utility Model Content

[0004] The purpose of this invention is to provide a pressure application device for seed crystal bonding, which can significantly reduce air pressure fluctuations in the elastic plate, thereby controlling the stability of the pressure applied to the elastic plate and ensuring the bonding quality of the seed crystal.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] A pressure application device for seed crystal bonding includes a mounting base, a lifting rod that is vertically and elliptically disposed in the mounting base, a drive mechanism disposed on the mounting base for driving the lifting rod to perform a lifting movement, and a pressing mechanism connected to the lower end of the lifting rod.

[0007] The pressure-reducing mechanism includes a mounting plate for connecting the lifting rod, an elastic plate that is sealed to the mounting plate along its circumference, a pressure-reducing valve disposed on the mounting plate, and an air source connected to the pressure-reducing valve. The elastic plate is convexly disposed below the mounting plate. The pressure-reducing valve includes a valve body, an air inlet, an air outlet, and an exhaust outlet respectively opened on the valve body. The air inlet is connected to the air source, the air outlet is connected to the gap between the mounting plate and the elastic plate, and the exhaust outlet is connected to the external atmospheric pressure. The pressure-reducing valve is used to stabilize the gas pressure in the elastic plate between a first set value and a second set value through the air inlet and the exhaust outlet.

[0008] The drive mechanism includes a servo motor mounted on the mounting base and a transmission assembly disposed between the servo motor and the lifting rod. The transmission assembly includes a planetary reducer that is driven by the servo motor and a worm gear reducer that is driven by the planetary reducer.

[0009] Preferably, during the pressure application process of the elastic plate, the pressure reducing valve has a replenishment state and a discharge state:

[0010] When the gas pressure in the elastic plate is less than the first set value, the pressure reducing valve is used to replenish gas through the air inlet, and the pressure reducing valve is in the replenishment state.

[0011] When the gas pressure in the elastic plate is greater than the second set value, the pressure reducing valve is used to exhaust gas through the exhaust port, and the pressure reducing valve is in the exhaust state.

[0012] Preferably, the worm gear reducer includes a worm wheel and a worm that mesh with each other. The worm wheel meshes with the output end of the planetary reducer. The centerlines of the worm wheel, the worm, and the output end of the planetary reducer are parallel to each other and parallel to the lifting rod.

[0013] More preferably, the drive mechanism further includes a lead screw assembly disposed between the worm and the lifting rod, the lead screw assembly including a lead screw and a nut threaded onto the lead screw, wherein one of the lead screw and the nut is connected to the worm and the other is connected to the lifting rod.

[0014] Preferably, the mounting base is provided with a guide rail, and the lifting rod is movably mounted on the guide rail.

[0015] Preferably, the drive mechanism further includes a handwheel for driving the worm gear reducer to rotate.

[0016] More preferably, the handwheel and the servo motor are respectively located on opposite sides of the worm gear reducer.

[0017] Preferably, the lower surface of the mounting plate is provided with an annular mounting groove, and the elastic plate is embedded in the mounting groove along its circumference.

[0018] Preferably, the elastic plate is made of silicone.

[0019] Preferably, the air source is located on the mounting base and is connected to the air inlet via a hose.

[0020] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art: The pressure application device for seed crystal bonding of this utility model, by setting a pressure reducing valve on the mounting plate, stabilizes the gas pressure in the elastic plate between a first set value and a second set value through the air inlet and outlet, thereby controlling the stability of the pressure applied to the elastic plate; by setting a servo motor in conjunction with a planetary reducer and a worm gear reducer to drive the lifting rod to perform lifting and lowering movements, the accuracy of applying initial pressure and adjusting the applied pressure can be improved. The combination of the two can avoid the problem of air bubbles being generated in the center of the seed crystal or the seed crystal being crushed, thereby ensuring the bonding stability and bonding quality of the seed crystal. Attached Figure Description

[0021] Appendix Figure 1 This is a schematic diagram of the pressure application device according to a specific embodiment of the present invention;

[0022] Appendix Figure 2 This is an enlarged structural diagram of the elastic plate when it is not deformed.

[0023] Appendix Figure 3 This is an enlarged structural diagram of an elastic plate under deformation.

[0024] Appendix Figure 4 This is an enlarged schematic diagram of the pressure reducing valve.

[0025] Among them: 1. Mounting base; 2. Lifting rod;

[0026] 3. Drive mechanism; 31. Servo motor; 32. Planetary reducer; 33. Worm gear reducer; 34. Handwheel;

[0027] 4. Pressure-reducing mechanism; 41. Mounting plate; 411. Mounting groove; 42. Elastic plate; 43. Pressure-reducing valve; 431. Valve body; 432. Air inlet; 433. Air outlet; 434. Exhaust port. Detailed Implementation

[0028] The technical solution of this utility model will be further described below with reference to specific embodiments and accompanying drawings.

[0029] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0030] In the description of the embodiments of this utility model, it should be understood that the terms "length", "inner", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the embodiments of this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the embodiments of this utility model.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0032] In this embodiment of the invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this embodiment of the invention according to the specific circumstances.

[0033] In this embodiment of the invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0034] The following disclosure provides many different implementations or examples for different structures of the embodiments of the present invention. To simplify the disclosure of the embodiments of the present invention, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the embodiments of the present invention. Furthermore, reference numerals and / or reference letters may be repeated in different examples of the embodiments of the present invention; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various implementations and / or arrangements discussed.

[0035] See Figure 1 As shown, this embodiment provides a pressure application device for seed crystal bonding, including a mounting base 1, a lifting rod 2 movably disposed in the mounting base 1, a drive mechanism 3 disposed on the mounting base 1 for driving the lifting rod 2 to move up and down, and a pressing mechanism 4 connected to the lower end of the lifting rod 2. The pressing mechanism 4 is used to press the seed crystal firmly onto the seed crystal seat. In this embodiment, the mounting base 1 is provided with a guide rail (not shown in the figure), and the lifting rod 2 is movably disposed on the guide rail.

[0036] See Figure 2-3As shown, the aforementioned pressure-reducing mechanism 4 includes a mounting plate 41 for connecting the bottom end of the lifting rod 2, an elastic plate 42 that is sealed to the mounting plate 41 along its circumference, a pressure-reducing valve 43 disposed on the mounting plate 41, and an air source (not shown in the figure) connected to the pressure-reducing valve 43. The elastic plate 42 is convexly disposed below the mounting plate 41. In this embodiment, the mounting plate 41 and the elastic plate 42 are both circular. The lower surface of the mounting plate 41 is provided with an annular mounting groove 411. The elastic plate 42 is embedded in the mounting groove 411 along its circumference. The elastic plate 42 is made of silicone. When air is injected into the gap between the two, the elastic plate 42 can bulge downwards. In this embodiment, the air source is disposed on the mounting base 1 and is connected to the air inlet 432 through a hose to avoid affecting the sealing of the connection when the pressure-reducing valve 43 moves up and down.

[0037] See Figure 4 As shown, the pressure reducing valve 43 includes a valve body 431, an air inlet 432, an air outlet 433, and an exhaust port 434 respectively opened on the valve body 431. The air inlet 432 and the exhaust port 434 can be connected to the air outlet 433 respectively. In this embodiment, the pressure reducing valve 43 is a precision pressure reducing valve of model IR1000-01 BG-A manufactured by SMC Corporation of Japan.

[0038] In the pressure reducing valve 43, the air inlet 432 is connected to the air source, the air outlet 433 is connected to the gap between the mounting plate 41 and the elastic plate 42, and the exhaust port 434 is connected to the external atmospheric pressure. The pressure reducing valve 43 is used to stabilize the gas pressure in the elastic plate 42 between a first set value and a second set value through the air inlet 432 and the exhaust port 434.

[0039] During the pressurization process of the elastic plate 42, the pressure reducing valve 43 has both a replenishment state and a discharge state:

[0040] When the gas pressure in the elastic plate 42 is less than the first set value, the outlet 433 and the inlet 432 are connected, and the pressure reducing valve 43 is used to replenish gas through the inlet 432. The pressure reducing valve 43 is in the replenishment state.

[0041] When the gas pressure in the elastic plate 42 is greater than the second set value, the outlet 433 and the exhaust port 434 are connected, and the pressure reducing valve 43 is used to exhaust gas through the exhaust port 434. The pressure reducing valve 43 is in the exhaust state.

[0042] In actual operation, a pressure sensor can be set on the seed crystal seat. The initial applied pressure can be obtained from the feedback of the pressure sensor. When it is necessary to change the applied pressure, the lifting rod 2 is driven to rise and fall by the drive mechanism 3.

[0043] The aforementioned drive mechanism 3 includes a servo motor 31 mounted on the mounting base 1, a transmission assembly between the servo motor 31 and the lifting rod 2, and the transmission assembly includes a planetary reducer 32 that is connected to the servo motor 31, a worm gear reducer 33 that is connected to the planetary reducer 32, and a lead screw assembly (not shown in the figure) located between the worm and the lifting rod 2.

[0044] The worm gear reducer 33 includes a meshing worm wheel and a worm. The worm wheel meshes with the output end of the planetary reducer 32. The centerlines of the worm wheel, worm, and the output end of the planetary reducer 32 are parallel to each other and parallel to the lifting rod 2. Through the cooperation of the planetary reducer 32 and the worm gear reducer 33, the stability and accuracy of the servo motor 31 output can be improved, and the pressure error can be controlled within ±0.2kg.

[0045] The lead screw assembly includes a lead screw and a nut threaded onto the lead screw. One of the lead screw and the nut is connected to a worm gear, and the other is connected to a lifting rod 2. In this embodiment, the lead screw is coaxially connected to the worm gear and rotates synchronously. The rotation of the lead screw drives the nut and the lifting rod 2 to perform lifting and lowering movements.

[0046] The aforementioned drive mechanism 3 also includes a handwheel 34 for driving the worm gear reducer 33 to rotate. The handwheel 34 and the servo motor 31 are respectively located on opposite sides of the worm gear reducer 33. The handwheel 34 is used to manually adjust the height of the lifting rod 2.

[0047] The working process of this embodiment is described in detail below:

[0048] First, inflate the gas supply to bring the gas pressure between the elastic plate 42 and the mounting plate 41 to a first set value and a second set value.

[0049] Next, the drive mechanism 3 drives the lifting rod 2 to descend, causing the elastic plate 42 to apply pressure to the seed crystal to expel the air between the seed crystal and the seed crystal seat. When the gas pressure in the elastic plate 42 is less than the first set value, the air outlet 433 and the air inlet 432 are connected, and air is replenished through the air inlet 432 until the gas pressure is greater than the first set value. When the gas pressure in the elastic plate 42 is greater than the second set value, the air outlet 433 and the exhaust port 434 are connected, and air is exhausted through the exhaust port 434 until the gas pressure is less than the second set value.

[0050] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A pressure application device for seed crystal bonding, characterized in that: It includes a mounting base, a lifting rod that is vertically mounted in the mounting base, a drive mechanism mounted on the mounting base for driving the lifting rod to move up and down, and a pressing mechanism connected to the lower end of the lifting rod; The pressure-reducing mechanism includes a mounting plate for connecting the lifting rod, an elastic plate that is sealed to the mounting plate along its circumference, a pressure-reducing valve disposed on the mounting plate, and an air source connected to the pressure-reducing valve. The elastic plate is convexly disposed below the mounting plate. The pressure-reducing valve includes a valve body, an air inlet, an air outlet, and an exhaust outlet respectively opened on the valve body. The air inlet is connected to the air source, the air outlet is connected to the gap between the mounting plate and the elastic plate, and the exhaust outlet is connected to the external atmospheric pressure. The pressure-reducing valve is used to stabilize the gas pressure in the elastic plate between a first set value and a second set value through the air inlet and the exhaust outlet. The drive mechanism includes a servo motor mounted on the mounting base and a transmission assembly disposed between the servo motor and the lifting rod. The transmission assembly includes a planetary reducer that is driven by the servo motor and a worm gear reducer that is driven by the planetary reducer.

2. The pressure application device for seed crystal bonding according to claim 1, characterized in that: During the pressure application process of the elastic plate, the pressure reducing valve has a replenishment state and a discharge state: When the gas pressure in the elastic plate is less than the first set value, the pressure reducing valve is used to replenish gas through the air inlet, and the pressure reducing valve is in the replenishment state. When the gas pressure in the elastic plate is greater than the second set value, the pressure reducing valve is used to exhaust gas through the exhaust port, and the pressure reducing valve is in the exhaust state.

3. The pressure application device for seed crystal bonding according to claim 1, characterized in that: The worm gear reducer includes a worm wheel and a worm that mesh with each other. The worm wheel meshes with the output end of the planetary reducer. The centerlines of the worm wheel, the worm, and the output end of the planetary reducer are parallel to each other and parallel to the lifting rod.

4. The pressure application device for seed crystal bonding according to claim 3, characterized in that: The drive mechanism further includes a lead screw assembly disposed between the worm and the lifting rod. The lead screw assembly includes a lead screw and a nut threaded onto the lead screw. Of the lead screw and the nut, one is connected to the worm, and the other is connected to the lifting rod.

5. The pressure application device for seed crystal bonding according to claim 1, characterized in that: The mounting base is provided with a guide rail, and the lifting rod is mounted on the guide rail in a height-reducible manner.

6. The pressure application device for seed crystal bonding according to claim 1, characterized in that: The drive mechanism also includes a handwheel for driving the worm gear reducer to rotate.

7. The pressure application device for seed crystal bonding according to claim 6, characterized in that: The handwheel and the servo motor are respectively located on opposite sides of the worm gear reducer.

8. The pressure application device for seed crystal bonding according to claim 1, characterized in that: The lower surface of the mounting plate is provided with an annular mounting groove, and the elastic plate is embedded in the mounting groove along its circumference.

9. The pressure application device for seed crystal bonding according to claim 1, characterized in that: The elastic plate is made of silicone.

10. The pressure application device for seed crystal bonding according to claim 1, characterized in that: The air source is located on the mounting base and is connected to the air inlet via a hose.

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