Vacuum chamber door moving device

Abstract

The utility model belongs to the technical field of vacuum equipment, and particularly relates to a vacuum chamber door moving device which comprises an I-shaped steel beam and a vacuum chamber door, a sliding groove is formed in the I-shaped steel beam, an electric driving assembly is connected to the I-shaped steel beam in a sliding mode, oil storage cotton is arranged in the electric driving assembly, and the vacuum chamber door is arranged in the oil storage cotton. A ball is rotationally connected into the electric driving assembly, one side of the ball is located outside the electric driving assembly, and the ball is slidably connected into the sliding groove; the electric driving assembly moves to drive the balls to move synchronously, certain friction force is generated between the balls and the sliding grooves when the balls move, so that the balls are driven to rotate, the balls pass through the oil storage cotton during rotation, lubricating oil is attached to the surfaces of the balls, and therefore loss generated between the electric driving assembly and the I-shaped steel beam is reduced; and the smoothness of the electric driving assembly during movement is improved, so that the phenomenon that the vacuum chamber door is blocked during movement is avoided.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum equipment technology, specifically a vacuum chamber door moving device. Background Technology

[0002] A vacuum chamber door is a door structure used in vacuum chambers. Its main function is to provide a convenient passage for entry and exit while maintaining a high vacuum environment inside the vacuum chamber. A vacuum chamber door moving device is a device used to move a vacuum chamber door. It mainly consists of an I-beam, a ground column, a top column of the first chamber, an electric drive device, and a suspension hinge.

[0003] A Chinese patent with authorization announcement number CN218293314U discloses a vacuum chamber door moving device, comprising: an I-beam (10), a ground column (20), a first chamber top column (30), at least two electric drive devices (40), and at least two suspension hinges (50); wherein, the two ends of the I-beam (10) are fixed on the ground column (20) and the first chamber top column (30); the ground column (20) is supported and fixed on the ground foundation, and the first chamber top column (30) is supported and fixed on the top of the vacuum chamber; the electric drive device (40) is movably mounted on the I-beam (10) via rollers; the suspension hinges (50) are fixedly mounted below the electric drive device (40) for connecting the vacuum chamber door (70).

[0004] However, the above solution still has some problems. When the electric drive device moves on the I-beam, it rubs against the I-beam during use, resulting in significant wear and tear, which in turn reduces the smoothness of the electric drive device's movement. Therefore, a vacuum chamber door moving device is proposed to address the above problems. Utility Model Content

[0005] To overcome the shortcomings of existing technologies and address the problems of existing equipment, this utility model proposes a vacuum chamber door moving device.

[0006] The technical solution adopted by this utility model to solve its technical problem is a vacuum chamber door moving device, including: an I-beam and a vacuum chamber door. A sliding groove is provided on the I-beam, and an electric drive assembly is slidably connected to the I-beam. An oil-retaining cotton is provided inside the electric drive assembly, and a ball bearing is rotatably connected inside the electric drive assembly, with one side of the ball bearing located outside the electric drive assembly. The ball bearing is slidably connected inside the sliding groove. A sealing cover is hinged to the electric drive assembly, and a sealing ring is fixedly connected to the bottom of the sealing cover. The sealing ring is movably connected inside the electric drive assembly. A connecting frame is installed at the bottom of the electric drive assembly, and symmetrical support grooves are provided inside the connecting frame. A support rod is rotatably connected inside one set of the support grooves. The sealing ring increases the friction between the sealing cover and the electric drive assembly, thereby preventing the evaporation of lubricating oil in the oil-retaining cotton.

[0007] Preferably, the other end of the support rod is rotatably connected to the inside of another set of support grooves. Both sets of support grooves are fixedly connected with torsion springs. One end of each set of torsion springs is fixedly connected to both ends of the support rod. When the support rod shakes, it applies an external force to the torsion springs. Under the action of the torsion springs' own elastic force, the support rod is driven to rotate, thereby reducing the impact force.

[0008] Preferably, a connecting block is fixedly connected to the support rod, buffer pads are symmetrically fixedly connected to the inner wall of the connecting frame, a connecting rod is fixedly connected to the bottom of the connecting block, and one end of the connecting rod is fixedly connected to the vacuum chamber door. When the connecting block collides with the buffer pads, the impact force can be reduced, thereby improving the stability of the vacuum chamber door.

[0009] Preferably, the I-beam is provided with two sets of stops, which are located at both ends of the slide groove. The I-beam is also provided with two sets of cavity top columns, and the two sets of stops are located at both ends of the slide groove. This can limit the movement range of the electric drive assembly and prevent the electric drive assembly from falling off the I-beam.

[0010] Preferably, both sets of cavity top columns are connected to the top of the vacuum chamber, and ground columns are installed on the lower surface of the I-beam. The bottom of the ground columns is fixedly connected to the mounting bracket. The cavity top columns are connected to the I-beam and the top of the vacuum chamber respectively, thereby ensuring the stability of the I-beam.

[0011] Preferably, the mounting frame has a counterweight inside and a threaded hole on it. A fixing bolt is threaded into the threaded hole. The counterweight can increase the weight of the mounting frame, thereby lowering the center of gravity of the moving device and thus improving the stability of the vacuum chamber door movement time.

[0012] The advantages of this invention are: it improves the smoothness of the moving component's operation. The electric drive component moves, causing the ball bearings to move synchronously. When the ball bearings move, they generate a certain friction with the slide groove, thereby causing the ball bearings to rotate. During rotation, they pass through the oil storage cotton, so that the surface of the ball bearings is covered with lubricating oil, thereby reducing the wear between the electric drive component and the I-beam, improving the smoothness of the electric drive component's movement, and thus avoiding the phenomenon of jamming when the vacuum chamber door moves.

[0013] When the vacuum chamber door collides with the door frame, it causes shaking. The impact force is transmitted to the connecting block and support rod through the connecting rod, thereby causing the connecting block and support rod to shake. This applies an external force to the torsion spring, and the connecting block collides with the buffer pad. At the same time, with the cooperation of the torsion spring's own elasticity, the impact force can be reduced, thereby improving the stability of the vacuum chamber door, reducing the impact force between the vacuum chamber door and the door frame, and extending the service life of the vacuum chamber door. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the overall structure;

[0016] Figure 2 This is a schematic diagram of an I-beam.

[0017] Figure 3 This is a schematic cross-sectional view of the electric drive assembly;

[0018] Figure 4 This is a cross-sectional view of the connecting components;

[0019] Figure 5 This is a cross-sectional schematic diagram of the fixed component.

[0020] In the diagram: 1. I-beam; 2. Vacuum chamber door; 3. Slide rail; 4. Electric drive assembly; 5. Oil storage cotton; 6. Ball bearing; 7. Sealing cap; 8. Sealing ring; 9. Connecting frame; 10. Support groove; 11. Support rod; 12. Torsion spring; 13. Connecting rod; 14. Buffer pad; 15. Stop; 16. Top column of the chamber; 17. Ground column; 18. Mounting frame; 19. Counterweight; 20. Threaded hole; 21. Fixing bolt; 22. Connecting block. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0022] Please see Figure 1-5 As shown, a vacuum chamber door moving device includes: an I-beam 1 and a vacuum chamber door 2. A groove 3 is provided on the I-beam 1. An electric drive assembly 4 is slidably connected to the I-beam 1. An oil-retaining cotton 5 is disposed inside the electric drive assembly 4. A ball bearing 6 is rotatably connected inside the electric drive assembly 4, with one side of the ball bearing 6 located outside the electric drive assembly 4. The ball bearing 6 is slidably connected inside the groove 3. A sealing cover 7 is hinged to the electric drive assembly 4. A sealing ring 8 is fixedly connected to the bottom of the sealing cover 7 and movably connected inside the electric drive assembly 4. The bottom of the electric drive assembly 4 is equipped with... There is a connecting frame 9, and the connecting frame 9 has symmetrically opened support grooves 10 inside. A support rod 11 is rotatably connected inside one set of support grooves 10. The other end of the support rod 11 is rotatably connected inside another set of support grooves 10. Torsion springs 12 are fixedly connected inside both sets of support grooves 10. One end of the two sets of torsion springs 12 is fixedly connected to both ends of the support rod 11 respectively. A connecting block 22 is fixedly connected to the support rod 11. Buffer pads 14 are symmetrically fixedly connected to the inner wall of the connecting frame 9. A connecting rod 13 is fixedly connected to the bottom of the connecting block 22. One end of the connecting rod 13 is fixedly connected to the vacuum chamber door 2.

[0023] The vacuum chamber door moving device is a piece of equipment used to move the vacuum chamber door. It mainly consists of an I-beam, ground columns, a top column of the first chamber, an electric drive unit, and suspension hinges. In actual use, the electric drive assembly 4 moves the vacuum chamber door 2. As the electric drive assembly 4 moves, it also drives the ball bearings 6 to move synchronously. The ball bearings 6 generate friction with the sliding groove 3, causing them to rotate. During rotation, they pass over the oil-retaining cotton 5, ensuring that the surface of the ball bearings 6 is covered with lubricating oil, thus reducing friction between the electric drive assembly 4 and the I-beam. The loss generated between beams 1 improves the smoothness of the electric drive assembly 4 during movement and avoids jamming when the vacuum chamber door 2 moves. After the moving device has been used for a long time, the sealing cover 7 is rotated around the hinge to expose the hollow part at the top of the electric drive assembly 4, so that lubricating oil can be added to the inside of the oil storage cotton 5 to ensure that the lubricating oil content in the oil storage cotton 5 is sufficient. Then the sealing cover 7 is rotated in the opposite direction so that the sealing cover 7 and the sealing ring 8 enter the inside of the electric drive assembly 4, thereby preventing the lubricating oil in the oil storage cotton 5 from evaporating outward.

[0024] After the electric drive assembly 4 moves the vacuum chamber door 2 to a certain position, the electric drive assembly 4 is turned off, and the vacuum chamber door 2 stops moving. The vacuum chamber door 2 collides with the door frame and shakes. The impact force is transmitted to the connecting block 22 and the support rod 11 through the connecting rod 13, thereby causing the connecting block 22 and the support rod 11 to shake. This applies an external force to the torsion spring 12, and the connecting block 22 collides with the buffer pad 14. At the same time, with the cooperation of the elasticity of the torsion spring 12 itself, the impact force can be reduced, thereby improving the stability of the vacuum chamber door 2, reducing the impact force between the vacuum chamber door 2 and the door frame, and extending the service life of the vacuum chamber door 2.

[0025] Please see Figure 1-5 As shown, two sets of stops 15 are provided on the I-beam 1, and the two sets of stops 15 are located at both ends of the slide 3. Two sets of cavity top columns 16 are provided on the I-beam 1, and the two sets of cavity top columns 16 are connected to the top of the vacuum chamber. Ground columns 17 are installed on the lower surface of the I-beam 1. The bottom of the ground columns 17 is fixedly connected to the mounting frame 18. The mounting frame 18 is provided with a counterweight 19. The mounting frame 18 is provided with a threaded hole 20, and the threaded hole 20 is connected to a fixing bolt 21.

[0026] Two sets of stops 15 are located at both ends of the slide 3, which can limit the movement range of the electric drive assembly 4 and prevent the electric drive assembly 4 from falling off the I-beam 1, thereby improving the safety of the vacuum chamber door 2. When installing the moving device, the bottom of the mounting bracket 18 and the ground column 17 are in contact with the ground. Then, the fixing bolts 21 are screwed into the threaded holes 20 and the ground. The counterweight 19 can increase the weight of the mounting bracket 18, thereby lowering the center of gravity of the moving device and thus improving the stability of the vacuum chamber door 2 during movement.

[0027] Working principle: During installation of the mobile device, the bottoms of the mounting frame 18 and the ground column 17 are in contact with the ground. Then, the fixing bolts 21 are screwed into the threaded holes 20 and the ground. The counterweight 19 increases the weight of the mounting frame 18, thereby lowering the center of gravity of the mobile device and improving the stability of the vacuum chamber door 2's movement. The electric drive assembly 4 drives the vacuum chamber door 2 to move. When the electric drive assembly 4 moves, it drives the ball bearings 6 to move synchronously. The ball bearings 6 generate friction with the sliding groove 3, causing them to rotate. During rotation, they pass through the oil-retaining cotton 5, ensuring that the surface of the ball bearings 6 is covered with lubricating oil. This reduces the wear between the electric drive assembly 4 and the I-beam 1, thereby improving the smoothness of the electric drive assembly 4's movement. To prevent jamming during the movement of the vacuum chamber door 2, the electric drive assembly 4 is turned off, and the vacuum chamber door 2 stops moving. The vacuum chamber door 2 collides with the door frame, causing it to shake. The impact force is transmitted to the connecting block 22 and the support rod 11 through the connecting rod 13, thereby causing the connecting block 22 and the support rod 11 to shake. This applies an external force to the torsion spring 12, causing the connecting block 22 to collide with the buffer pad 14. Simultaneously, the impact force is reduced by the elasticity of the torsion spring 12 itself, thereby improving the stability of the vacuum chamber door 2. After prolonged use, the sealing cover 7 is rotated around the hinge, thereby exposing the perforated area at the top of the electric drive assembly 4 to the outside. This allows lubricating oil to be added to the inside of the oil storage cotton 5, ensuring sufficient lubricating oil content in the oil storage cotton 5.

[0028] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0029] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A vacuum chamber door moving device, characterized in that: include: An I-beam (1) and a vacuum chamber door (2) are provided. A sliding groove (3) is provided on the I-beam (1). An electric drive assembly (4) is slidably connected to the I-beam (1). An oil storage cotton (5) is provided inside the electric drive assembly (4). A ball bearing (6) is rotatably connected inside the electric drive assembly (4), and one side of the ball bearing (6) is located outside the electric drive assembly (4). The ball bearing (6) is slidably connected inside the sliding groove (3). A sealing cover (7) is hinged on the electric drive assembly (4). A sealing ring (8) is fixedly connected to the bottom of the sealing cover (7). The sealing ring (8) is movably connected inside the electric drive assembly (4). A connecting frame (9) is installed at the bottom of the electric drive assembly (4). A support groove (10) is symmetrically provided inside the connecting frame (9). A support rod (11) is rotatably connected inside a set of the support grooves (10).

2. The vacuum chamber door moving device according to claim 1, characterized in that: The other end of the support rod (11) is rotatably connected to the inside of another set of support grooves (10). Both sets of support grooves (10) are fixedly connected with torsion springs (12), and one end of each set of torsion springs (12) is fixedly connected to both ends of the support rod (11).

3. The vacuum chamber door moving device according to claim 2, characterized in that: A connecting block (22) is fixedly connected to the support rod (11), and a buffer pad (14) is symmetrically fixedly connected to the inner wall of the connecting frame (9). A connecting rod (13) is fixedly connected to the bottom of the connecting block (22), and one end of the connecting rod (13) is fixedly connected to the vacuum chamber door (2).

4. The vacuum chamber door moving device according to claim 1, characterized in that: The I-beam (1) is provided with two sets of stops (15), which are located at both ends of the slide groove (3). The I-beam (1) is provided with two sets of cavity top columns (16).

5. A vacuum chamber door moving device according to claim 4, characterized in that: Both sets of cavity top columns (16) are connected to the top of the vacuum chamber. Ground columns (17) are installed on the lower surface of the I-beam (1). A mounting bracket (18) is fixedly connected to the bottom of the ground column (17).

6. A vacuum chamber door moving device according to claim 5, characterized in that: The mounting bracket (18) is provided with a counterweight (19) inside, and the mounting bracket (18) is provided with a threaded hole (20), and a fixing bolt (21) is threaded inside the threaded hole (20).

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