Sealing assembly, rotating shaft mechanism and evaporation coating equipment

Abstract

The utility model discloses a sealing assembly, a rotating shaft mechanism and evaporation coating equipment. The sealing assembly comprises a sealing piece and an oil cup, the sealing piece is provided with an oil storage cavity, the oil storage cavity is provided with a first communicating port and a second communicating port, the first communicating port is located above the liquid level in the oil storage cavity, the second communicating port is located below the liquid level in the oil storage cavity, and the sealing piece is suitable for being connected with a rotating shaft in a sleeving mode; the oil cup is suitable for storing oil, the oil cup is provided with a third communication port and a fourth communication port, the third communication port is located above the liquid level in the oil cup, the fourth communication port is located below the liquid level in the oil cup, the third communication port is communicated with the first communication port, and the fourth communication port is communicated with the second communication port; the liquid level in the oil cup is flush with the liquid level in the oil storage cavity, the sealing piece is arranged on the rotating shaft in a sleeving mode and can seal the rotating shaft, the third communication opening and the fourth communication opening of the oil cup communicate with the first communication opening and the second communication opening of the oil storage cavity correspondingly, and therefore oil can be supplemented to the oil storage cavity in real time.

Description

Technical Field

[0001] This utility model relates to the field of evaporation coating equipment technology, and more specifically, to a sealing component, a rotating shaft mechanism, and an evaporation coating equipment. Background Technology

[0002] In related technologies, when a rotating shaft needs to be installed across pressure zones in vacuum equipment—that is, when the pressures at both ends of the rotating shaft are different—a rotary seal structure is generally required on the rotating shaft to prevent vacuum leakage at one end. The rotary seal structure typically includes an oil seal, into which a fixed amount of oil is added. However, during shaft operation, the oil will be lost through evaporation or leakage. Therefore, the rotary seal structure needs to be disassembled periodically for lubrication and maintenance, which wastes a significant amount of time.

[0003] Therefore, a new technical solution is needed to solve the above-mentioned technical problems. Utility Model Content

[0004] One objective of this invention is to provide a new technical solution for a sealing component.

[0005] According to a first aspect of the present invention, a sealing assembly is provided. The sealing assembly includes:

[0006] A sealing element has an oil storage cavity, the oil storage cavity having a first connecting port and a second connecting port, the first connecting port being located above the liquid level in the oil storage cavity, and the second connecting port being located below the liquid level in the oil storage cavity, the sealing element being suitable for fitting a rotating shaft.

[0007] An oil cup is suitable for storing oil. The oil cup has a third connecting port and a fourth connecting port. The third connecting port is located above the liquid surface inside the oil cup, and the fourth connecting port is located below the liquid surface inside the oil cup. The third connecting port is connected to the first connecting port, and the fourth connecting port is connected to the second connecting port.

[0008] The liquid level in the oil cup is flush with the liquid level in the oil storage chamber.

[0009] Optionally, it further includes a first connecting pipe and a second connecting pipe, wherein the third connecting port is connected to the first connecting port through the first connecting pipe, and the fourth connecting port is connected to the second connecting port through the second connecting pipe.

[0010] Optionally, it also includes a protective member adapted to be sleeved on the rotating shaft, the seal being sleeved on the protective member, and the protective member being rotatable relative to the seal with the rotating shaft.

[0011] Optionally, a first sealing ring is provided between the protective component and the rotating shaft.

[0012] Optionally, the sealing element includes an oil seal and a spacer, with the oil seal having two sides of the spacer respectively.

[0013] Optionally, the first and second connecting ports are located on the spacer ring, and the spacer ring is also provided with through holes, which can communicate with the oil seals on both sides respectively.

[0014] Optionally, it also includes a first mounting base, on which the seal is mounted.

[0015] Optionally, one end of the first mounting base is provided with a second sealing ring, which can be wrapped around the rotating shaft.

[0016] Optionally, the oil cup includes a three-way connector, two of the three-way connector's ports being adapted to connect the first connecting pipe and the third connecting port, and the third port of the three-way connector being adapted to input oil.

[0017] Optionally, the oil cup further includes a cup body and a top cover. The cup body is suitable for storing oil. The cup body has a first open end. The top cover is sealed to the first open end. The third communication port is located on the top cover.

[0018] Optionally, the oil cup further includes a lower cover, and the cup body has a second opening end on the side opposite to the first opening end. The lower cover is sealed to the second opening end, and the fourth communication port is provided on the lower cover.

[0019] According to a second aspect of the present invention, a rotating shaft mechanism is provided. This rotating shaft mechanism includes the sealing assembly described in the above embodiments.

[0020] According to a third aspect of this utility model, an evaporation coating apparatus is provided. This evaporation coating apparatus includes the rotating shaft mechanism described in the above embodiments.

[0021] One technical advantage of this application is that the seal has an oil storage cavity, the seal is sleeved on the rotating shaft and can seal the rotating shaft, and the third and fourth connecting ports of the oil cup are respectively connected to the first and second connecting ports of the oil storage cavity, so that the oil storage cavity can be replenished with oil in real time.

[0022] Other features and advantages of the present invention will become clear from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. Attached Figure Description

[0023] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the present invention and, together with their description, serve to explain the principles of the present invention.

[0024] Figure 1 This is a schematic diagram of the structure of a sealing component according to an embodiment of the present invention.

[0025] Figure 2 This is a structural schematic diagram of a sealing assembly according to an embodiment of the present invention from another perspective.

[0026] Figure 3 This is a partial structural schematic diagram of a sealing component according to an embodiment of the present invention.

[0027] Figure 4 yes Figure 3 The cross-sectional view of AA is shown.

[0028] Figure 5 This is a cross-sectional view of an oil cup according to an embodiment of the present invention.

[0029] Figure label:

[0030] 1. Sealing element; 11. Oil reservoir; 12. First connecting port; 13. Second connecting port; 14. Oil seal; 15. Spacer ring; 2. Oil cup; 21. Third connecting port; 22. Fourth connecting port; 23. Cup body; 24. Top cover; 25. Bottom cover; 26. T-connector; 261. Plug; 27. Connecting rod; 28. Second mounting base; 29. ​​First connector; 3. Protective element; 4. First sealing ring; 5. First mounting base; 51. Mounting groove; 6. Second sealing ring; 7. First connecting pipe; 8. Second connecting pipe; 9. Rotating shaft; 10. Second connector; 20. Third connector. Detailed Implementation

[0031] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present invention.

[0032] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0033] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0034] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0035] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0036] According to one embodiment of this application, a sealing assembly is provided. For example... Figures 1 to 5 As shown, the sealing assembly includes a seal 1 and an oil cup 2. The seal 1 has an oil storage cavity 11, which has a first connecting port 12 and a second connecting port 13. The first connecting port 12 is located above the liquid level in the oil storage cavity 11, and the second connecting port 13 is located below the liquid level in the oil storage cavity 11. The seal 1 is suitable for fitting a rotating shaft 9. The oil cup 2 is suitable for storing oil, and has a third connecting port 21 and a fourth connecting port 22. The third connecting port 21 is located above the liquid level in the oil cup 2, and the fourth connecting port 22 is located below the liquid level in the oil cup 2. The third connecting port 21 connects to the first connecting port 12, and the fourth connecting port 22 connects to the second connecting port 13. The liquid level in the oil cup 2 is flush with the liquid level in the oil storage cavity 11.

[0037] In this example, the seal 1 has an oil reservoir 11, which is filled with lubricating oil or sealing oil. The seal 1 is fitted onto the rotating shaft 9 to achieve an oil seal on the rotating shaft 9. The rotating shaft 9 can rotate relative to the seal 1. The third connecting port 21 and the fourth connecting port 22 of the oil cup 2 are connected to the first connecting port 12 and the second connecting port 13 of the oil reservoir 11, respectively, so that the oil reservoir 11 can be replenished with oil in real time to ensure that the oil volume in the oil reservoir 11 is sufficient.

[0038] It should be noted that the oil storage cavity 11 of the sealing component 1 has a first connecting port 12 and a second connecting port 13. After the oil storage cavity 11 is filled with oil, the first connecting port 12 is located above the liquid surface, and the second connecting port 13 is located below the liquid surface. The oil cup 2 has an inner cavity, and the third connecting port 21 and the fourth connecting port 22 communicate with the inner cavity. After the inner cavity is filled with oil, the third connecting port 21 is located above the liquid surface in the oil cup 2, and the fourth connecting port 22 is located below the liquid surface in the oil cup 2. For example, the sealing assembly is vertically arranged, with the first connecting port 12 located at the upper end of the oil storage cavity 11 and the second connecting port 13 located at the lower end of the oil storage cavity 11. The oil cup 2 includes a cup body 23, the inner cavity of which is used to store oil, the upper end of the cup body 23 is provided with the third connecting port 21, and the lower end of the cup body 23 is provided with the fourth connecting port 22.

[0039] It should also be noted that the liquid level in oil cup 2 is flush with the liquid level in oil storage cavity 11, that is, the liquid level in oil cup 2 and the liquid level in oil storage cavity 11 are at the same horizontal plane. Here, "flush with the liquid level in oil cup 2" means that the liquid level in oil cup 2 and the liquid level in oil storage cavity 11 are completely flush, or, due to factors such as air pressure or installation errors, there is a certain difference between the liquid level in oil cup 2 and the liquid level in oil storage cavity 11, and this difference remains within a preset range.

[0040] In this example, the third connecting port 21 is connected to the first connecting port 12, the fourth connecting port 22 is connected to the second connecting port 13, and the liquid level in the oil cup 2 is flush with the liquid level in the oil storage chamber 11, thereby enabling a dynamic balance between the oil in the oil cup 2 and the oil in the oil storage chamber 11. That is, when the rotating shaft 9 rotates, the temperature rises due to friction, causing the oil in the oil storage chamber 11 to evaporate, thus reducing the amount of oil in the oil storage chamber 11. The evaporation of the oil in the oil storage chamber 11, along with the rise in the temperature of the gas in the oil storage chamber 11, causes the gas to expand, increasing the gas pressure and causing the liquid level in the oil cup 2 to drop. This allows the oil in the oil cup 2 to flow through the fourth connecting port 22 to the second connecting port 13, and finally into the oil storage chamber 11, raising the liquid level in the oil storage chamber 11 and thus replenishing the oil in the oil storage chamber 11. Furthermore, the steam and oil mist flowing out of the oil storage chamber 11 enters the oil cup 2 through the first connecting port 12 and the third connecting port 21. After the temperature drops, the steam and oil mist will be released from the air.

[0041] In this example, the oil level in the oil storage chamber 11 can be between one-third and one-half of the overall height of the oil storage chamber 11. Those skilled in the art can determine this according to the actual situation, and no specific limitation is made here. Since the liquid level in the oil cup 2 is flush with the liquid level in the oil storage chamber 11, the remaining oil level in the oil storage chamber 11 can be determined based on the liquid level in the oil cup 2. When the liquid level in the oil cup 2 is too low, oil can be directly added to the oil cup 2 to increase the oil level in the oil storage chamber 11 to the preset value. The operation is simple and saves refueling time.

[0042] In one example, such as Figure 1 and Figure 2 As shown, the sealing assembly also includes a first connecting pipe 7 and a second connecting pipe 8. The third connecting port 21 is connected to the first connecting port 12 through the first connecting pipe 7, and the fourth connecting port 22 is connected to the second connecting port 13 through the second connecting pipe 8.

[0043] like Figure 1 and Figure 2As shown, in this example, the oil cup 2 and the seal 1 can be connected by the first connecting pipe 7 and the second connecting pipe 8, which facilitates the arrangement of the position of the oil cup 2 for the assembly of the sealing assembly.

[0044] In this example, the first connecting pipe 7 and the second connecting pipe 8 can be non-metallic pipes, such as oil-resistant rubber hoses, which are soft and easy to route and assemble. The first connecting pipe 7 and the second connecting pipe 8 can also be metallic pipes, such as ordinary carbon steel pipes, stainless steel pipes, or heat-resistant seamless steel pipes, etc. Those skilled in the art can determine the appropriate type based on the actual situation, and no specific limitation is made here.

[0045] In one example, such as Figure 4 As shown, the sealing assembly also includes a protective member 3, which is adapted to be sleeved on the rotating shaft 9. The sealing member 1 is sleeved on the protective member 3, and the protective member 3 can rotate relative to the sealing member 1 with the rotating shaft 9.

[0046] like Figure 4 As shown, in this example, the protective element 3 is fixedly sleeved on the outer periphery of the rotating shaft 9, and the sealing element 1 is sleeved on the outer periphery of the protective element 3. The rotation of the rotating shaft 9 can drive the protective element 3 to rotate, and the sealing element 1 can contact the protective element 3, so that when the rotating shaft 9 rotates, the protective element 3 and the sealing element 1 come into contact and rub against each other, thereby providing a protective effect for the rotating shaft 9 and reducing the wear of the rotating shaft 9.

[0047] In this example, the protective component 3 can be a wear-resistant collar. The material of the protective component 3 can be a wear-resistant collar made of metal, possessing high hardness and wear resistance. For example, metal materials include stainless steel, copper, and aluminum. Alternatively, the protective component 3 can also be a wear-resistant collar made of non-metallic materials, possessing good self-lubricating and corrosion resistance. For example, plastics and rubber. Of course, the specific material and structure of the protective component 3 can be determined by those skilled in the art based on the actual situation, and no specific limitations are made here.

[0048] In one example, such as Figure 4 As shown, a first sealing ring 4 is provided between the protective component 3 and the rotating shaft 9.

[0049] like Figure 4 As shown, in this example, the sealing assembly further includes a first sealing ring 4, which is sleeved on the rotating shaft 9. For example, the outer periphery of the rotating shaft 9 is provided with a groove in the circumferential direction, and the first sealing ring 4 can be fixedly disposed in the groove, with a portion of the first sealing ring 4 protruding from the groove. The protective member 3 is sleeved on the rotating shaft 9 and can abut against the outer side of the first sealing ring 4, thereby providing a sealing effect between the protective member 3 and the rotating shaft 9. The first sealing ring 4 can be a rubber ring, such as nitrile rubber, silicone rubber, or neoprene rubber, etc., which can be determined by those skilled in the art according to the actual situation, and is not specifically limited here.

[0050] like Figure 4 As shown, in this example, multiple first sealing rings 4 can be provided, and the multiple first sealing rings 4 are spaced apart along the axial direction of the rotating shaft 9 to improve the sealing effect. For example, two, three, or four first sealing rings 4 can be provided at intervals, etc., which can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0051] In one example, such as Figure 4 As shown, the sealing element 1 includes an oil seal 14 and a spacer 15, with the oil seal 14 having two sides of the spacer 15 respectively.

[0052] like Figure 4 As shown, in this example, the sealing element 1 includes two oil seals 14 and a spacer 15. The spacer 15 can be fitted onto the protective element 3, and the two oil seals 14 are located on both sides of the spacer 15. The lips of the two oil seals 14 abut against the protective element 3, thereby forming a seal. The oil seals 14, the protective element 3, and the spacer 15 can surround and form an oil reservoir 11, that is, an oil reservoir 11 is formed on both sides of the spacer 15. Alternatively, when the protective element 3 is not provided, the spacer 15 and the two oil seals 14 can be directly fitted onto the rotating shaft 9. By providing two oil seals 14, the oil sealing effect can be improved.

[0053] In this example, the oil seal is made of materials such as nitrile rubber, fluororubber, silicone rubber, and acrylic rubber, and has a metal skeleton encased inside the rubber to ensure the strength and sealing performance of the oil seal. The spacer 15 can be made of the same material as the oil seal.

[0054] In one example, such as Figure 4 As shown, the first connecting port 12 and the second connecting port 13 are provided on the spacer ring 15. The spacer ring 15 is also provided with a through hole, which can be connected to the oil seals 14 on both sides respectively.

[0055] like Figure 4 As shown, in this example, the outer surface of the spacer 15 is provided with a groove along the circumference. Multiple through holes communicating with the oil seal 14 are respectively provided on the two side walls of the groove, that is, the through holes can communicate with the oil storage chamber 11. The opening end of the groove of the spacer 15 can form a first connecting port 12 and a second connecting port 13. Oil enters the groove from the second connecting port 13, and then enters the oil storage chamber 11 through the through holes on the side walls of the groove. Also, steam and oil mist can enter the groove from the through holes, and then flow out from the first connecting port 12. Multiple through holes can be provided at intervals along the circumference on the side walls of the groove.

[0056] like Figures 1 to 4As shown, in this example, the sealing assembly further includes a first mounting base 5, on which the seal 1 is mounted. The first mounting base 5 can be mounted to a fixed structure such as a bearing housing using fasteners such as screws or bolts.

[0057] like Figure 3 and Figure 4 As shown, in this example, the first mounting base 5 can be sleeved on the seal 1 to fix the seal 1. The first mounting base 5 may have a first channel, one end of which extends to and communicates with a first connecting port 12. The first channel is located at the upper end of the first mounting base 5. For example, the first channel extends to communicate with the upper end of the opening of the groove, and the connection between the first channel and the groove is the first connecting port 12. The end of the first channel away from the first connecting port 12 is suitable for connection with the first connecting pipe 7. For example, as... Figure 1 and Figure 4 As shown, a second connector 10 is installed on the first channel, which can be connected to the first connecting pipe 7 to improve the connection efficiency.

[0058] Furthermore, the first mounting base 5 may be provided with a second channel, one end of which extends to and communicates with the second communication port 13. The second channel is located at the lower end of the first mounting base 5, extending to communicate with the lower end of the opening of the groove. The communication port between the second channel and the groove is the second communication port 13. The end of the second channel away from the second communication port 13 is suitable for connection to the second connecting pipe 8. For example, such as... Figure 2 and Figure 4 As shown, a third connector 20 is installed on the second channel, which can be connected to the second connecting pipe 8 to improve connection efficiency.

[0059] In one example, such as Figure 2 and Figure 4 As shown, one end of the first mounting base 5 is provided with a second sealing ring 6, which can be wrapped around the rotating shaft 9.

[0060] like Figure 2 and Figure 4 As shown, in this example, the first mounting base 5 has a mounting groove 51 at one end along the axial direction, and the second sealing ring 6 is fixedly assembled in the mounting groove 51, with a portion of the second sealing ring 6 protruding from the mounting groove 51. The rotating shaft 9 can pass through the vacuum chamber, the first mounting base 5 is mounted on the bearing seat, and the outer side of the second sealing ring 6 can abut against the bearing seat, thus achieving a sealing function. Alternatively, the first mounting base 5 is assembled on the outer wall of the vacuum chamber, and the outer side of the second sealing ring 6 can abut against the outer wall of the vacuum chamber to achieve a sealing function.

[0061] In this example, the second sealing ring 6 can be a rubber ring, such as nitrile rubber, silicone rubber or neoprene rubber, etc. Those skilled in the art can determine it according to the actual situation, and no specific limitation is made here.

[0062] In this example, multiple second sealing rings 6 can be provided to improve the sealing effect. The multiple second sealing rings 6 can be spaced apart along the radial direction of the rotating shaft 9. For example, two, three, or four second sealing rings 6 can be spaced apart, etc., as can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0063] In one example, such as Figure 1 and Figure 5 As shown, the oil cup 2 includes a three-way connector 26, two of which are adapted to connect the first connecting pipe 7 and the third connecting port 21, and the third port of the three-way connector 26 is adapted to input oil.

[0064] like Figure 1 and Figure 5 As shown, in this example, the tee connector 26 has three interconnected ports. Two of the ports of the tee connector 26 are connected to the first connecting pipe 7 and the third connecting port 21, respectively. An external oiling device can be connected to the third port of the tee connector 26 to add oil to the oil cup 2.

[0065] like Figure 5 As shown, in this example, the third interface is provided with a plug 261, which is used to seal the third interface. When it is necessary to inject oil into the oil cup 2, the plug 261 is removed so that the external oiling device can be connected to the third interface.

[0066] In one example, such as Figure 5 As shown, the oil cup 2 also includes a cup body 23 and a top cover 24. The cup body 23 is suitable for storing oil. The cup body 23 is provided with a first open end. The top cover 24 is sealed to the first open end. The third communication port 21 is provided on the top cover 24.

[0067] like Figure 5 As shown, in this example, the cup body 23 has an inner cavity suitable for storing oil. The upper end of the cup body 23 is a first open end, and the upper cover 24 is capable of being sealed at the first open end. The upper cover 24 has a through hole as a third communication port 21, and a tee connector 26 can be connected to the upper cover 24. The upper cover 24 is detachably and sealingly connected to the cup body 23. When it is necessary to clean the inside of the cup body 23, the upper cover 24 can be removed to facilitate cleaning the inside of the body.

[0068] like Figure 5As shown, in this example, the upper cover 24 can be fitted onto the cup body 23, and a sealing ring is provided between the upper cover 24 and the side wall of the cup body 23 to improve the sealing effect of the upper cover 24 on the cup body 23.

[0069] In one example, such as Figure 5 As shown, the oil cup 2 also includes a lower cover 25, the cup body 23 has a second opening end on the side opposite to the first opening end, the lower cover 25 is sealed to the second opening end, and the fourth communication port 22 is provided on the lower cover 25.

[0070] like Figure 5 As shown, in this example, the first opening end and the second opening end are located on opposite sides of the cup body 23. That is, the first opening end is located at the upper end of the cup body 23, and the second opening end is located at the lower end of the cup body 23. The lower cover 25 is capable of sealingly fitting at the second opening end. The lower cover 25 is provided with a through hole to serve as a fourth communication port 22.

[0071] like Figure 5 As shown, the lower cover 25 can be fitted onto the cup body 23, and a sealing ring is provided between the lower cover 25 and the side wall of the cup body 23 to improve the sealing effect of the lower cover 25 on the cup body 23.

[0072] like Figure 5 As shown, the lower cover 25 is also connected to a first connector 29. One end of the first connector 29 is connected to the fourth connecting port 22, and the other end can be connected to the second connecting pipe 8.

[0073] like Figure 1 and Figure 2 As shown, in this example, the upper cover 24 and the lower cover 25 can be connected by a connecting rod 27. For example, the connecting rod 27 can be a screw, with one end connected to the upper cover 24 and the other end connected to the lower cover 25, so that the upper cover 24 and the lower cover 25 are respectively pressed against the ends of the cup body 23, thereby improving the reliability and sealing of the connection between the upper cover 24 and the lower cover 25.

[0074] like Figure 1 and Figure 2 As shown, in this example, the oil cup 2 also includes a second mounting base 28, which is suitable for fixing the oil cup 2 to other fixed equipment. For example, the second mounting base 28 can be an "L"-shaped plate. One plate of the second mounting base 28 is fixedly connected to the lower cover 25, for example, by means of snap-fit, screw connection or welding, and the other plate is connected to the fixed equipment by means of screws or bolts.

[0075] Of course, the second mounting base 28 can also be other structures, which can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0076] According to another embodiment of the present invention, a rotating shaft mechanism is provided. This rotating shaft mechanism includes the sealing assembly described in the above embodiment. The rotating shaft mechanism includes a rotating shaft 9, which is capable of being installed across air pressures, i.e., the air pressures at both ends of the rotating shaft 9 are different. The sealing assembly is capable of sealing the rotating shaft 9 to prevent leakage of vacuum at one end of the rotating shaft 9.

[0077] According to another embodiment of the present invention, an evaporation coating apparatus is provided. This evaporation coating apparatus includes the rotating shaft mechanism described in the above embodiment.

[0078] In this example, the evaporation coating equipment has a vacuum chamber, and the rotating shaft mechanism can be inserted into the vacuum chamber. That is, the rotating shaft 9 of the rotating shaft mechanism can be inserted into the side wall of the vacuum chamber, one end of the rotating shaft 9 is located outside the vacuum chamber and can be connected to a drive structure such as a drive motor, and the other end is located inside the vacuum chamber and can be connected to a structure such as a drive roller.

[0079] The above embodiments mainly describe the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be elaborated here.

[0080] Although specific embodiments of the present invention have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A sealing assembly, characterized in that, include: A sealing element has an oil storage cavity, the oil storage cavity having a first connecting port and a second connecting port, the first connecting port being located above the liquid level in the oil storage cavity, and the second connecting port being located below the liquid level in the oil storage cavity, the sealing element being suitable for fitting a rotating shaft. An oil cup is suitable for storing oil. The oil cup has a third connecting port and a fourth connecting port. The third connecting port is located above the liquid surface inside the oil cup, and the fourth connecting port is located below the liquid surface inside the oil cup. The third connecting port is connected to the first connecting port, and the fourth connecting port is connected to the second connecting port. The liquid level in the oil cup is flush with the liquid level in the oil storage chamber.

2. The sealing assembly according to claim 1, characterized in that, It also includes a first connecting pipe and a second connecting pipe, the third connecting port being connected to the first connecting port through the first connecting pipe, and the fourth connecting port being connected to the second connecting port through the second connecting pipe.

3. The sealing assembly according to claim 1, characterized in that, It also includes a protective component, which is adapted to be sleeved on the rotating shaft, and a sealing component is sleeved on the protective component, which is capable of rotating relative to the sealing component with the rotating shaft.

4. The sealing assembly according to claim 3, characterized in that, A first sealing ring is provided between the protective component and the rotating shaft.

5. The sealing assembly according to claim 1, characterized in that, The sealing element includes an oil seal and a spacer ring, with the oil seal having two sides of the spacer ring respectively.

6. The sealing assembly according to claim 5, characterized in that, The spacer ring is provided with a first connecting port and a second connecting port, and the spacer ring is also provided with a through hole, which can be connected to the oil seals on both sides respectively.

7. The sealing assembly according to claim 1, characterized in that, It also includes a first mounting base, on which the seal is mounted.

8. The sealing assembly according to claim 7, characterized in that, One end of the first mounting base is provided with a second sealing ring, which can be wrapped around the rotating shaft.

9. The sealing assembly according to claim 2, characterized in that, The oil cup includes a three-way connector, two of which are adapted to connect the first connecting pipe and the third connecting port, and the third port is adapted to input oil.

10. The sealing assembly according to claim 1, characterized in that, The oil cup also includes a cup body and a top cover. The cup body is suitable for storing oil. The cup body has a first open end. The top cover is sealed to the first open end. The third connecting port is located on the top cover.

11. The sealing assembly according to claim 10, characterized in that, The oil cup also includes a lower cover, and the cup body has a second opening end on the side opposite to the first opening end. The lower cover is sealed to the second opening end, and the fourth communication port is provided on the lower cover.

12. A rotating shaft mechanism, characterized in that, Includes the sealing assembly as described in any one of claims 1 to 11.

13. An evaporation coating apparatus, characterized in that, Includes the rotating shaft mechanism as described in claim 12.

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