Pneumatic constant-pressure diaphragm valve for conveying chemical liquid medicine in semiconductor manufacturing

Abstract

The utility model relates to a pneumatic constant-pressure diaphragm valve for conveying chemical liquid medicine in semiconductor manufacturing. The pneumatic constant-pressure diaphragm valve sequentially comprises a mechanism main body and a mounting bottom plate from top to bottom, an inlet end runner and an outlet end runner are sequentially arranged on the mechanism main body from left to right, an outlet end waist groove communicated with the outlet end runner is formed in the right side of the top of the upper second-stage step, and an inlet end waist groove communicated with the inlet end runner is formed in the left side of the bottom of the lower second-stage step; the device further comprises an executing mechanism assembly and a sealing assembly. The pressure of input fluid can be dynamically adjusted, so that the pressure of the output fluid is stably output, and the influence of pressure fluctuation of the external input fluid on the pressure of the output fluid of the valve is reduced.

Description

Technical Field

[0001] This utility model relates to the technical field of chemical liquid valves, and in particular to a pneumatic constant pressure diaphragm valve for conveying chemical liquids in semiconductor manufacturing. Background Technology

[0002] Currently, pressure regulating valves are mostly used in the gas medium field, primarily as pressure reducing valves, and some as exhaust safety valves. The structure of these valves can be standardized so that when the inlet pressure is less than the valve core opening pressure, the fluid flows out normally; when the inlet pressure is greater than the valve core opening pressure, the valve core opens, and the fluid flows out. However, in reality, these pressure regulating valves, or gas pressure stabilizing valves, do not actually stabilize the pressure of the inflowing fluid while simultaneously stabilizing the output pressure. Furthermore, the current structural design of pressure regulating valves is mostly only suitable for gas media, not for fluid media, especially liquids with high viscosity coefficients.

[0003] Extensive research revealed Chinese Patent Publication No. CN106352124B, which discloses a pressure regulating valve. This valve provides a mechanism for switching between intake, cut-off, and reverse exhaust based on intake pressure. It comprises several components, including a sealed main pressure regulating seat, valve body, valve seat, main valve core, auxiliary valve core, main pressure regulating shaft, main pressure regulating cap, main pressure regulating spring, auxiliary pressure regulating spring, auxiliary valve cover, auxiliary valve body, and diaphragm. The valve body has a front port and a rear port. Its main working principle is as follows: when the pressure at the front port is greater than the opening pressure of the main valve core, airflow flows from the front port to the rear port, achieving intake. When the pressure at the front port decreases from the opening pressure, airflow flows from the rear port to the front port, achieving reverse exhaust. When the pressure at the front port is between the opening pressures of the main valve core and the auxiliary valve core, the air path is cut off. In the relevant patent, because the spring assembly is assembled inside the valve cavity, the reciprocating motion of the spring and the contact friction surface between the spring and the valve body pose a risk of particle shedding. Secondly, the spring assembly is completely exposed to the fluid medium, posing a risk of corrosion by the fluid medium. This operating condition does not meet the cleanliness requirements of the semiconductor field. Furthermore, this patent uses the difference between the inlet pressure and the valve seat closing force to determine the flow direction of the gas medium, which does not achieve the effect of stabilizing the fluid medium pressure; therefore, it is not suitable for fluid medium pressure stabilization conditions.

[0004] Extensive research revealed Chinese patent publication number CN115962326A, which discloses a pressure regulating valve. This valve provides a method for adjusting the opening pressure as needed to improve the accuracy of pressure regulating valve operation. It presents a pressure regulating valve with a piston-like structure. This valve determines the flow direction of the medium by the relationship between the fluid medium and the valve core opening pressure. Secondly, it adjusts the opening pressure by regulating the spring pressure to control the valve core opening pressure. In related technologies, the adjusting screw is an external drive component, and the valve core opening is adjusted by regulating the spring pressure. This operation is "externally driven," a common concept in pressure regulating valves, and this method cannot precisely regulate pressure. Furthermore, in related technologies, if the inlet pressure is limited, the valve structure cannot achieve medium discharge. Additionally, the connection between the conical plug and the sliding plate relies entirely on the support spring, whose axial movement cannot be guaranteed to be linear. Moreover, since the spring is horizontally positioned, the linear reciprocating motion of the spring cannot be guaranteed. Therefore, the sealing performance of this valve needs further investigation.

[0005] Extensive searching revealed Chinese patent publication number CN203823224U, which discloses a gas pressure regulating valve that reduces vibration and noise, extending its service life. This related technology employs an "external drive" method, adjusting spring pressure to stabilize the medium pressure; therefore, this structure cannot adjust pressure in real time. Furthermore, to reduce wear, this structure incorporates PEEK plastic between the valve stem and body. However, PEEK plastic is susceptible to damage from strong oxidizing acids (concentrated sulfuric acid), making this solution unsuitable for use in semiconductor valves.

[0006] In summary, existing pressure regulating valves mainly have the following problems:

[0007] 1. The flow channel structure of the valve is only suitable for gaseous media, not for liquid media, especially fluids with a high viscosity coefficient.

[0008] 2. Most pressure regulating valves currently function primarily as pressure relief and venting valves, and cannot dynamically balance fluid pressure.

[0009] 3. Currently, most pressure regulating valves adopt an "external drive" approach as a pressure regulation method.

[0010] 4. The structure of most pressure regulating valves currently available does not meet the cleanliness requirements of the semiconductor industry and is therefore unsuitable for use in the semiconductor field.

[0011] In view of the above-mentioned shortcomings, the designer actively researched and innovated in order to create a pneumatic constant pressure diaphragm valve for conveying chemical liquids in semiconductor manufacturing, so as to make it more industrially valuable. Utility Model Content

[0012] To solve any of the above-mentioned technical problems, the purpose of this utility model is to provide a pneumatic constant pressure diaphragm valve for conveying chemical liquids in semiconductor manufacturing.

[0013] To achieve the above objectives, the present invention adopts the following technical solution:

[0014] A pneumatic constant pressure diaphragm valve for conveying chemical liquids in semiconductor manufacturing, comprising, from top to bottom, a main body and a mounting base plate;

[0015] An inlet flow channel and an outlet flow channel are arranged sequentially from left to right on the main body of the mechanism. An upper first step and an upper second step are arranged sequentially from the outside to the inside on the top inner side of the main body of the mechanism. A lower first step and a lower second step are arranged sequentially from the outside to the inside on the bottom inner side of the main body of the mechanism. A central through hole is opened in the middle of the inner side of the upper second step. An outlet waist groove connected to the outlet flow channel is opened on the top right side of the upper second step. An inlet waist groove connected to the inlet flow channel is opened on the bottom left side of the lower second step.

[0016] It also includes actuator components and sealing components;

[0017] The actuator assembly includes, from top to bottom, an actuator top part and an actuator bottom part. The actuator top part is installed on the top of the main body of the mechanism, and the actuator bottom part is installed on the bottom of the main body of the mechanism. A mounting base plate is installed on the bottom of the actuator bottom part. An actuator shaft is installed inside the actuator bottom part, and an air inlet is provided at the top of the actuator top part.

[0018] The sealing assembly, from top to bottom, includes an upper diaphragm, a diaphragm connecting post, and a lower double-ended diaphragm. The diaphragm connecting post is located inside the central through hole. The upper diaphragm, installed at the top of the diaphragm connecting post, is located between the top of the actuator and the main body of the actuator. The lower double-ended diaphragm, installed at the bottom of the diaphragm connecting post, is connected to the actuator shaft below.

[0019] As a further improvement of this utility model, it also includes a spring assembly located on the inner side of the bottom end of the actuator, and the actuator shaft is in contact with the spring assembly below.

[0020] As a further improvement of this utility model, the spring assembly includes an inner spring and an outer spring from the inside to the outside. The working stroke of the inner spring is greater than that of the outer spring, and the spring stiffness of the outer spring is greater than that of the inner spring.

[0021] As a further improvement of this utility model, the top part of the actuator, the main body of the actuator, the bottom part of the actuator and the mounting base are connected together by a number of bolts.

[0022] As a further improvement of this utility model, the head of the bolt is located in the first mounting hole at the top of the actuator, and an open washer and a flat washer are installed from top to bottom between the head of the bolt and the first mounting hole. The tail of the bolt is installed in the second mounting hole in the mounting base plate by a nut.

[0023] As a further improvement of this utility model, rubber plugs are installed on the outer sides of both the first mounting hole and the second mounting hole.

[0024] As a further improvement of this utility model, a positioning groove is provided on the top outer side of the main body of the mechanism, and a positioning block adapted to the positioning groove is provided on the bottom outer side of the top part of the actuator directly above the positioning groove. A sealing groove is provided on the inner side of the positioning block, and an O-ring is installed in the sealing groove.

[0025] As a further improvement of this utility model, sealing ribs are provided on the inner middle of the upper first step and the inner middle of the lower first step.

[0026] By means of the above solution, this utility model has at least the following advantages:

[0027] This invention can dynamically adjust the pressure of the input fluid to ensure a stable output fluid pressure and reduce the impact of external input fluid pressure fluctuations on the valve's output fluid pressure.

[0028] This invention can solve the problem of particle precipitation in traditional pressure regulating valves during use.

[0029] This invention solves the inaccuracy of external adjustment mechanisms through pneumatic autonomous adjustment.

[0030] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the following are the preferred embodiments of this utility model and are described in detail with reference to the accompanying drawings. Attached Figure Description

[0031] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is an exploded structural diagram of a pneumatic constant pressure diaphragm valve for conveying chemical liquids in semiconductor manufacturing, according to this utility model.

[0033] Figure 2 yes Figure 1A schematic diagram of the internal structure on one side;

[0034] Figure 3 yes Figure 1 A schematic diagram of the internal structure on the other side;

[0035] Figure 4 yes Figure 2 A top view of the main body of the central structure;

[0036] Figure 5 yes Figure 2 A bottom view of the main body of the organization;

[0037] Figure 6 yes Figure 2 A partially enlarged schematic diagram of the top part of the actuator;

[0038] Figure 7 yes Figure 2 A partially enlarged structural diagram of the central sealing assembly.

[0039] The meanings of the labels in the figures are as follows.

[0040] 1. Inner spring; 2. Outer spring; 3. Rubber plug; 4. Mounting base plate; 5. Nut; 6. Bottom end of actuator; 7. Actuator shaft; 8. Lower double-headed diaphragm; 9. Mechanism body; 10. O-ring; 11. Diaphragm connecting column; 12. Upper diaphragm; 13. Top end of actuator; 14. Flat washer; 15. Open washer; 16. Bolt.

[0041] Positioning groove 100, upper first step 101, sealing rib 102, lower first step 103, upper second step 104, central through hole 105, lower second step 106, inlet end flow channel 107, inlet end waist groove 108, outlet end waist groove 109, outlet end flow channel 110, positioning block 111, sealing groove 112, air inlet hole 113. Detailed Implementation

[0042] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0043] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0044] Example

[0045] like Figures 1 to 7 As shown,

[0046] A pneumatic constant pressure diaphragm valve for conveying chemical liquids in semiconductor manufacturing includes, from top to bottom, a main body 9 and a mounting base 4, as well as an actuator assembly and a sealing assembly.

[0047] 1. An inlet flow channel 107 and an outlet flow channel 110 are arranged sequentially from left to right on the main body 9 of the mechanism. An upper first step 101 and an upper second step 104 are arranged sequentially from the outside to the inside on the top inner side of the main body 9 of the mechanism. A lower first step 103 and a lower second step 106 are arranged sequentially from the outside to the inside on the bottom inner side of the main body 9 of the mechanism. A central through hole 105 is opened in the middle of the inner side of the upper second step 104. An outlet waist groove 109 connected to the outlet flow channel 110 is opened on the top right side of the upper second step 104. An inlet waist groove 108 connected to the inlet flow channel 107 is opened on the bottom left side of the lower second step 106.

[0048] A positioning groove 100 is provided on the top outer side of the main body 9 of the mechanism. A positioning block 111 adapted to the positioning groove 100 is provided on the bottom outer side of the top part 13 of the actuator directly above the positioning groove 100. A sealing groove 112 is provided on the inner side of the positioning block 111. An O-ring 10 is installed in the sealing groove 112.

[0049] In addition, sealing ribs 102 are provided on the inner middle of the upper first step 101 and on the inner middle of the lower first step 103.

[0050] 2. The actuator assembly includes, from top to bottom, an actuator top part 13 and an actuator bottom part 6. The actuator top part 13 is installed on the top of the actuator body 9, the actuator bottom part 6 is installed on the bottom of the actuator body 9, the mounting base plate 4 is installed on the bottom of the actuator bottom part 6, the actuator shaft 7 is installed inside the actuator bottom part 6, and an air inlet 113 is provided on the top of the actuator top part 13.

[0051] 3. The sealing assembly includes, from top to bottom, an upper diaphragm 12, a diaphragm connecting post 11, and a lower double-headed diaphragm 8. The diaphragm connecting post 11 is located inside the central through hole 105. The upper diaphragm 12, which is installed at the top of the diaphragm connecting post 11, is located between the top part 13 of the actuator and the main body 9 of the actuator. The lower double-headed diaphragm 8, which is installed at the bottom of the diaphragm connecting post 11, is connected to the actuator shaft 7 below.

[0052] 4. It also includes a spring assembly located on the inner side of the bottom of the actuator end 6, and the actuator shaft 7 is in contact with the spring assembly below. The spring assembly includes an inner spring 1 and an outer spring 2 from the inside to the outside. The working stroke of the inner spring 1 is greater than that of the outer spring 2, and the spring stiffness of the outer spring 2 is greater than that of the inner spring 1.

[0053] 5. The top part 13 of the actuator, the main body 9, the bottom part 6 of the actuator, and the mounting base plate 4 are connected together by a number of bolts 16. The head of the bolt 16 is located in the first mounting hole in the top part 13 of the actuator, and an open washer 15 and a flat washer 14 are installed sequentially from top to bottom between the head of the bolt 16 and the first mounting hole. The tail of the bolt 16 is installed in the second mounting hole in the mounting base plate 4 by a nut 5. Rubber plugs 3 are installed on the outside of both the first and second mounting holes.

[0054] The first embodiment of this utility model:

[0055] The main body 9 has an inlet and an outlet (i.e., an inlet flow channel 107 and an outlet flow channel 110). With the inlet on the left and the outlet on the right, a positioning groove 100 is designed on the top of the main body 9 for positioning and installation with the top of the actuator 13. The upper interior of the main body 9 has a two-stage stepped design. A sealing rib 102 is designed in the middle of the upper first-stage step 101. This, along with the top of the actuator 13, the upper diaphragm 12, and the main body 9, forms a sealing structure to achieve a seal for the air source power. The lower interior of the main body 9 also has a two-stage stepped design. A sealing rib 102 is designed in the middle of the lower first-stage step 103. This, along with the bottom of the actuator 6, the lower double-headed diaphragm 8, and the main body 9, forms a sealing structure to achieve a seal for the fluid medium. A central through-hole 105 is designed in the center of the upper second-stage step 104, with the through-hole connecting the upper and lower sections. Meanwhile, an inlet end groove 108 is designed between the inlet end flow channel 107 and the central through hole 105. The opening end of the inlet end groove 108 is on the lower second step 106, and this groove is not continuous. An outlet end groove 109 is designed between the outlet end flow channel 110 and the central through hole 105. The opening end of the outlet end groove 109 is on the upper second step 104, and this groove is not continuous. At this point, the inlet end flow channel 107, the inlet end groove 108, the lower double-headed diaphragm 8, the outlet end groove 109, the upper diaphragm 12, and the outlet end flow channel 110 form a complete flow channel.

[0056] The top part 13 of the actuator: The main function of the top part 13 of the actuator is to seal the valve and position it according to the installation direction. An air inlet 113 is designed on the top part 13 of the actuator as a pressure source. At the same time, a positioning block 111 and a sealing groove 112 are designed at the lower end of the top part 13 of the actuator. By installing an O-ring 10 in the sealing groove 112, the top part 13 of the actuator is connected and sealed to the main body 9 of the mechanism. At the same time, a diaphragm groove is designed below the top part 13 of the actuator. The diaphragm groove and the upper diaphragm 12 form an air chamber.

[0057] The bottom end of the actuator 6 has two cylindrical slots. The larger slot serves as a space for mounting the spring assembly, while the smaller slot, with an outer diameter matching the inner diameter of the inner spring 1, primarily serves to fix and guide the spring assembly. The inner diameter of the smaller slot is slightly larger than the outer diameter of the cylindrical shaft of the actuator shaft 7, providing mounting space and vertical guidance for the shaft. The cylindrical slots are mainly used to mount the spring assembly, which includes an inner spring 1 and an outer spring 2. The inner spring 1 is fitted inside the outer spring 2, with the inner spring 1 being longer than the outer spring 2. The outer spring 2 has a higher stiffness than the inner spring 1, providing a layered elastic force.

[0058] The sealing assembly mainly includes an upper diaphragm 12, a diaphragm connecting post 11, and a lower double-ended diaphragm 8. It is composed of an actuator shaft 7. The upper diaphragm 12 is installed between the top end 13 of the actuator and the main body 9. The lower double-ended diaphragm 8 is installed between the main body 9 and the bottom end 6 of the actuator. The upper diaphragm 12 and the lower double-ended diaphragm 8 are connected by the diaphragm connecting post 11. The other side of the upper diaphragm 12 is connected to the actuator shaft 7, which is installed in a small cylindrical groove at the bottom end 6 of the actuator.

[0059] The working principle of this pressure regulating valve is as follows: The prerequisite is that the air source pressure equals the elastic force of the spring assembly. When fluid enters the pressure regulating valve from the inlet, the fluid flows through the entire flow channel. At this time, at the lower double-ended diaphragm 8, the fluid applies a downward force F1 to the diaphragm, causing it to move downwards. Simultaneously, the spring assembly applies an upward force P1 to the lower double-ended diaphragm 8. Within the entire valve body cavity, the fluid also applies an upward force F2 to the upper diaphragm 12. At the same time, the air source applies a downward force P2 to the upper diaphragm 12 through the air inlet on the top of the actuator. Through the elastic force of the spring assembly and the pressure of the air source, the fluid pressure is balanced, at which point F1 + P2 = F2 + P1.

[0060] When the inlet fluid pressure increases, F1 increases, the opening degree of the lower double-headed diaphragm 8 decreases and the opening and closing distance increases, and the force F2 exerted by the fluid pressure at the outlet on the upper diaphragm 12 increases. At this time, F1+P2>F2+P1, the opening degree of the upper diaphragm 12 increases and the opening and closing distance decreases, and the outlet fluid pressure decreases, F1+P2=F2+P1.

[0061] When the inlet fluid pressure decreases, F1 decreases, the opening degree of the lower double-headed diaphragm 8 increases and the opening and closing distance decreases, and the force F2 exerted by the fluid pressure at the outlet on the upper diaphragm 12 decreases. At this time, F1+P2<F2+P1, the opening degree of the upper diaphragm 12 decreases and the opening and closing distance increases, and the outlet fluid pressure increases, F1+P2=F2+P1.

[0062] This invention features a suitable flow channel structure, applicable to various media, including fluid and gaseous media.

[0063] This invention uses PTFE, a material currently required in the semiconductor industry, which meets the cleanliness requirements of semiconductor production. Furthermore, elastic components such as the spring assembly are not located within the fluid cavity, ensuring the cleanliness of the fluid area.

[0064] This invention achieves dynamic balancing of fluid pressure through appropriate structural design, thereby enabling stable output of fluid pressure.

[0065] This invention uses a pneumatic power source to regulate pressure, thereby achieving more stable regulation of fluid pressure.

[0066] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0067] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0068] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A pneumatic constant pressure diaphragm valve for conveying chemical liquid in semiconductor manufacturing, comprising, from top to bottom, a main body (9) and a mounting base plate (4). Its features are: An inlet flow channel (107) and an outlet flow channel (110) are arranged sequentially from left to right on the main body (9) of the mechanism. An upper first step (101) and an upper second step (104) are arranged sequentially from outside to inside on the inner side of the top of the main body (9). A lower first step (103) and a lower second step (106) are arranged sequentially from outside to inside on the inner side of the bottom of the main body (9). A central through hole (105) is opened in the middle of the inner side of the upper second step (104). An outlet waist groove (109) communicating with the outlet flow channel (110) is opened on the right side of the top of the upper second step (104). An inlet waist groove (108) communicating with the inlet flow channel (107) is opened on the left side of the bottom of the lower second step (106). It also includes actuator components and sealing components; The actuator assembly includes, from top to bottom, an actuator top part (13) and an actuator bottom part (6). The actuator top part (13) is installed on the top of the body (9), and the actuator bottom part (6) is installed on the bottom of the body (9). The mounting base plate (4) is installed on the bottom of the actuator bottom part (6). An actuator shaft (7) is installed inside the actuator bottom part (6). An air inlet (113) is provided on the top of the actuator top part (13). The sealing assembly includes, from top to bottom, an upper diaphragm (12), a diaphragm connecting post (11), and a lower double-headed diaphragm (8). The diaphragm connecting post (11) is located inside the central through hole (105). The upper diaphragm (12) installed on the top of the diaphragm connecting post (11) is located between the top part (13) of the actuator and the main body (9) of the actuator. The lower double-headed diaphragm (8) installed at the bottom of the diaphragm connecting post (11) is connected to the actuator shaft (7) below.

2. The pneumatic constant-pressure diaphragm valve for conveying chemical solutions in semiconductor manufacturing as described in claim 1, characterized in that, It also includes a spring assembly located on the bottom inner side of the bottom end (6) of the actuator, the actuator shaft (7) being in contact with the spring assembly below.

3. The pneumatic constant-pressure diaphragm valve for conveying chemical solutions in semiconductor manufacturing as described in claim 2, characterized in that, The spring assembly includes an inner spring (1) and an outer spring (2) from the inside to the outside. The working stroke of the inner spring (1) is greater than that of the outer spring (2), and the spring stiffness of the outer spring (2) is greater than that of the inner spring (1).

4. A pneumatic constant-pressure diaphragm valve for conveying chemical solutions in semiconductor manufacturing as described in claim 1, characterized in that, The top part (13) of the actuator, the main body (9), the bottom part (6) of the actuator and the mounting base plate (4) are connected together by a number of bolts (16).

5. A pneumatic constant-pressure diaphragm valve for conveying chemical solutions in semiconductor manufacturing as described in claim 4, characterized in that, The head of the bolt (16) is located in the first mounting hole in the top part (13) of the actuator, and an open washer (15) and a flat washer (14) are installed from top to bottom between the head of the bolt (16) and the first mounting hole. The tail of the bolt (16) is installed in the second mounting hole in the mounting base plate (4) by a nut (5).

6. A pneumatic constant-pressure diaphragm valve for conveying chemical solutions in semiconductor manufacturing as described in claim 5, characterized in that, Rubber plugs (3) are installed on the outside of both the first and second mounting holes.

7. A pneumatic constant-pressure diaphragm valve for conveying chemical solutions in semiconductor manufacturing as described in claim 1, characterized in that, A positioning groove (100) is provided on the top outer side of the main body (9) of the mechanism. A positioning block (111) adapted to the positioning groove (100) is provided on the bottom outer side of the top part (13) of the actuator directly above the positioning groove (100). A sealing groove (112) is provided on the inner side of the positioning block (111). An O-ring (10) is installed in the sealing groove (112).

8. A pneumatic constant-pressure diaphragm valve for conveying chemical solutions in semiconductor manufacturing as described in claim 1, characterized in that, Sealing ribs (102) are provided on the inner middle of the upper first step (101) and the inner middle of the lower first step (103).

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