Heating equipment

Abstract

The utility model discloses a heating device. The heating device comprises a furnace tube; the furnace door is used for opening and closing the furnace tube and comprises a base and a sealing piece arranged on the side, close to the furnace tube, of the base, the sealing piece is provided with a sealing groove sunken in the thickness direction of the base, and when the furnace door is in a closed state relative to the furnace tube, the sealing groove is attached to a tube opening of the furnace tube; the adjusting mechanism at least comprises a first adjusting assembly, the first adjusting assembly is connected with the side, away from the furnace tube, of the furnace door, the first adjusting assembly is used for driving the furnace door to move in the first direction so as to adjust the relative position of the sealing groove and the tube opening in the first direction, and the first direction is the length direction of the furnace tube. The utility model has the advantage of enhancing the sealing property of the heating equipment, and can effectively reduce the heat loss.

Description

Technical Field

[0001] This utility model relates to the technical field of solar cells, and more particularly to a heating device. Background Technology

[0002] In the solar cell production process, heating equipment needs to be carried out in a highly sealed environment when performing steps such as diffusion doping or impurity adsorption. However, the current heating equipment suffers from unstable sealing and low sealing reliability, which urgently needs to be improved. Utility Model Content

[0003] To enhance the sealing performance of heating equipment, this utility model discloses a heating device.

[0004] The heating device includes:

[0005] Furnace tubes;

[0006] A furnace door, used to open and close the furnace tube, the furnace door includes a base and a sealing element disposed on the base near the furnace tube. The sealing element is provided with a sealing groove that is recessed in the thickness direction of the base. When the furnace door is in a closed state relative to the furnace tube, the sealing groove is in contact with the opening of the furnace tube.

[0007] An adjustment mechanism, comprising at least: a first adjustment component connected to the side of the furnace door away from the furnace tube, the first adjustment component being used to drive the furnace door to move along a first direction to adjust the relative position of the sealing groove and the tube opening in the first direction, wherein the first direction is the length direction of the furnace tube.

[0008] As an optional implementation, in an embodiment of this utility model, the end of the pipe opening has a first protrusion, and the sealing groove includes a first recess.

[0009] When the furnace door is closed relative to the furnace tube, the first protrusion is matched and located in the first recess, the first protrusion and the first recess are in contact, or there is a gap between the first protrusion and the first recess and the sealing element is a thermal expansion sealing element.

[0010] As an optional implementation, in an embodiment of the present invention, the first protrusion has a cross-section with a horizontal cross-section relative to the first direction, and the area of ​​the cross-section gradually increases toward the furnace door.

[0011] As an optional implementation, in an embodiment of the present invention, the end of the pipe opening further has a second protrusion, and the second protrusion is located inside the first protrusion.

[0012] The sealing groove further includes a second recess, which together with the first recess forms a stepped sealing groove, and the second recess is located at the end facing the pipe opening;

[0013] When the furnace door is closed relative to the furnace tube, the second protrusion is matched and located in the second recess, the second protrusion and the second recess are in contact, or there is a gap between the second protrusion and the second recess and the sealing element is the sealing element that expands thermally.

[0014] As an optional implementation, in an embodiment of this utility model, the second protrusion is distributed on the inner and / or outer side of the furnace tube.

[0015] As an optional implementation, in an embodiment of this utility model, the furnace door further includes:

[0016] The hot-stop device has a bent region that bends circumferentially toward the side where the base is located;

[0017] A connecting sleeve, which is connected to the hot-stopping element at the bending area;

[0018] A connecting bracket has a first sub-rod and a plurality of second sub-rods surrounding and connected to one end of the first sub-rod, the other end of the first sub-rod being connected to the base, and the end of the second sub-rod facing away from the first sub-rod being sleeved in the connecting sleeve;

[0019] When the furnace door is in a closed state relative to the furnace tube, the hot-stop door is located inside the tube opening.

[0020] As an optional implementation, in an embodiment of this utility model, the material of the heat-resistant door is quartz; and / or, the material of the connecting sleeve is polytetrafluoroethylene.

[0021] As an optional implementation, in an embodiment of this utility model, the adjustment mechanism further includes:

[0022] A second adjustment assembly is connected to the side of the furnace door opposite to the furnace tube. This second adjustment assembly is used to move the furnace door along a second direction to adjust the relative position of the sealing groove and the tube opening in the second direction, wherein the second direction is a horizontal direction perpendicular to the length direction of the furnace tube; and / or,

[0023] The third adjustment component is connected to the side of the furnace door away from the furnace tube. The third adjustment component is used to drive the furnace door to move along a third direction to adjust the relative position of the sealing groove and the pipe opening in the third direction, wherein the third direction is a vertical direction perpendicular to the length direction of the furnace tube.

[0024] As an optional implementation, in an embodiment of this utility model, the adjustment mechanism includes a second adjustment component, which is disposed on the first adjustment assembly and moves along the first direction; and / or

[0025] The adjustment mechanism includes the third adjustment component, and the first adjustment component is disposed on the third adjustment component and moves along the third direction.

[0026] As an optional implementation, in an embodiment of this utility model, the first adjustment component includes:

[0027] First abutment;

[0028] A first slide rail is disposed on the first base, and the length direction of the first slide rail is the first direction;

[0029] The first sliding member is connected to the first slide rail;

[0030] The first driving member drives the first sliding member to move along the first direction;

[0031] And / or,

[0032] The adjustment mechanism includes the second adjustment component, the second adjustment component comprising:

[0033] The second base is disposed on the first sliding member;

[0034] The second slide rail is disposed on the second base, and the length direction of the second slide rail is the second direction;

[0035] The second sliding member is connected to the second slide rail;

[0036] The second driving member drives the second sliding member to move along the second direction;

[0037] And / or,

[0038] The adjustment mechanism includes the third adjustment component, the third adjustment component comprising:

[0039] The third base;

[0040] The third lead screw is threadedly connected to the third base, and the length direction of the third lead screw is the third direction;

[0041] The third sliding member is fixedly connected to the third nut of the third lead screw;

[0042] The third driving member drives the third sliding member to move along the third direction.

[0043] As an optional implementation, in an embodiment of this utility model, the first adjustment component includes the first driving member, the first driving member includes a first motor and a first lead screw, the first motor is fixedly connected to the first lead screw, the length direction of the first lead screw is the first direction, the first lead screw has a first nut, the first nut is fixedly connected to the first sliding member, and is used to drive the first sliding member to move along the first direction;

[0044] The second driving component includes a second motor and a second lead screw. The second motor is fixedly connected to the second lead screw. The length direction of the second lead screw is the second direction. The second lead screw has a second nut, which is fixedly connected to the second sliding member and is used to drive the second sliding member to move along the second direction.

[0045] As an optional implementation, in an embodiment of this utility model, a pressure sensor is fixed between the base and the seal, and the pressure sensor is distributed below the seal.

[0046] As an optional implementation, in an embodiment of this utility model, the adjustment mechanism includes a connecting arm, one end of which is connected to the second sliding member, and the other end of which is connected to the base.

[0047] As an optional implementation, in an embodiment of this utility model, the adjustment mechanism further includes at least one straightening motor, which is connected to the connecting arm and is located near the surface of the base opposite to the sealing groove. The output shaft of the straightening motor is a telescopic rod, and the length direction of the telescopic rod is the first direction. The straightening motor is used to increase the pressure on the furnace door along the first direction.

[0048] As an optional implementation, in an embodiment of this utility model, the heating device further includes an air extraction device, which is connected to the furnace tube.

[0049] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0050] This utility model provides a heating device that features a sealing groove on the sealing element of the furnace door near the furnace tube, and an adjustment mechanism with a first adjustment component on the side of the furnace door away from the furnace tube. This structural improvement allows the first adjustment component to move along the length of the furnace tube, enhancing the fit between the sealing groove of the furnace door and the opening of the furnace tube. This results in a tighter fit between the sealing groove and the opening, reducing gaps and improving the sealing reliability of the furnace door. This effectively reduces heat loss or gas permeation caused by uneven contact surfaces or excessive gaps between the furnace door and the furnace tube.

[0051] Furthermore, the improved sealing reliability also mitigates problems such as leakage of harmful gases or high-temperature steam, enhancing operator safety. In addition, by adjusting the mechanism's settings, the relative position between the furnace door and furnace tubes can be flexibly adjusted according to actual needs, making the opening and closing of the furnace door smoother and less strenuous. Attached Figure Description

[0052] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0053] Figure 1 This is a schematic diagram of the overall structure of the heating device disclosed in this embodiment of the utility model;

[0054] Figure 2 For illustration Figure 1 Schematic diagram of the structure of the furnace door;

[0055] Figure 3 yes Figure 1 An enlarged structural diagram of part A;

[0056] Figure 4 yes Figure 3 A schematic diagram of another modified structure of part A;

[0057] Figure 5 For illustration purposes Figure 1 A schematic diagram of the structure of the furnace door near the furnace tube;

[0058] Figure 6 This is a schematic diagram illustrating the structure of the connecting bracket in the furnace door.

[0059] Icons: 1. Furnace tube; 11. First protrusion; 12. Second protrusion;

[0060] 2. Furnace door; 21. Base; 22. Sealing element; 221. Sealing groove; 2211. First recess; 2212. Second recess; 23. Door blocking element; 231. Bending area; 24. Connecting sleeve; 25. Connecting bracket; 251. First sub-rod; 252. Second sub-rod; 26. Pressure sensor;

[0061] 3. Adjustment mechanism; 31. First adjustment assembly; 311. First base; 312. First slide rail; 313. First sliding member; 314. First driving member; 3141. First motor; 3142. First lead screw; 32. Second adjustment assembly; 321. Second base; 322. Second slide rail; 323. Second sliding member; 33. Connecting arm; 34. Correction motor; 35. Mounting bracket;

[0062] 4. Air extraction device. Detailed Implementation

[0063] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0064] In this invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this invention and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0065] Furthermore, in addition to indicating direction or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances.

[0066] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.

[0067] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0068] The technical solution of this utility model will be further described below with reference to the embodiments and accompanying drawings.

[0069] This utility model provides a heating device, referring to... Figure 1 and Figure 2 The heating device includes:

[0070] Furnace tube 1;

[0071] Furnace door 2, used for opening and closing furnace tube 1, includes a base 21 and a sealing element 22 located on the side of the base 21 near the furnace tube 1. The sealing element 22 has an inwardly recessed part along the thickness direction of the base 21 (i.e., Figure 2 The sealing groove 221 (concave to the right of the sealing element 22) fits against the opening of the furnace tube 1 when the furnace door 2 is in a closed state relative to the furnace tube 1.

[0072] Adjustment mechanism 3, comprising at least: a first adjustment component 31, connected to the side of furnace door 2 away from furnace tube 1, the first adjustment component 31 being used to move furnace door 2 along a first direction to adjust the relative position of sealing groove 221 and tube opening in the first direction, wherein the first direction is the length direction of furnace tube 1, which is also... Figure 1 The x-direction is shown.

[0073] The heating device of this utility model has a sealing groove 221 on the sealing member 22 on the side of the furnace door 2 near the furnace tube 1, and an adjustment mechanism 3 with a first adjustment component 31 on the side of the furnace door 2 away from the furnace tube 1. Through the above-mentioned structural improvement, the movement of the first adjustment component 31 along the length of the furnace tube 1 is beneficial to improving the fit between the sealing groove 221 of the sealing member 22 on the furnace door 2 and the opening of the furnace tube 1, so that the sealing groove 221 and the opening form a tighter fit and reduce the existence of gaps, thereby improving the sealing reliability of the furnace door 2 to the furnace tube 1, and effectively reducing heat loss or gas penetration caused by uneven contact surfaces or large gaps between the furnace door 2 and the furnace tube 1.

[0074] Furthermore, the improved sealing reliability also mitigates problems such as leakage of harmful gases or high-temperature steam, enhancing operator safety. In addition, by adjusting the mechanism 3, the relative position between the furnace door 2 and the furnace tube 1 can be flexibly adjusted according to actual needs, making the opening and closing of the furnace door 2 smoother and less strenuous.

[0075] Furthermore, in heating equipment used in this field for performing diffusion doping or impurity adsorption, the furnace tube 1 is typically made of quartz. By controlling the position of the furnace door 2 through the adjusting mechanism 3, the position of the furnace door 2 can be adaptively adjusted according to sealing requirements, which helps reduce the possibility of damage to the furnace tube 1.

[0076] Reference Figure 3 In some embodiments, the end of the furnace tube 1 has a first protrusion 11, and the sealing groove 221 includes a first recess 2211.

[0077] When the furnace door 2 is closed relative to the furnace tube 1, the first protrusion 11 is matched and located in the first recess 2211. The first protrusion 11 and the first recess 2211 are in contact, or there is a gap between the first protrusion 11 and the first recess 2211 and the sealing member 22 is a thermally expanding sealing member 22.

[0078] The first protrusion 11 and the first recess 2211 work together to improve the sealing performance at the opening of the furnace tube 1, thus meeting the sealing requirements of the furnace tube 1 under high temperature or high pressure conditions.

[0079] Furthermore, a gap can be left between the first protrusion 11 and the first recess 2211, which facilitates the insertion of the first protrusion 11. This not only makes it easier for the furnace door 2 to close quickly but also reduces manufacturing and insertion errors. During operation in the heating state, the thermal expansion seal 22 undergoes a dimensional change due to thermal expansion, thereby filling the gap between the first protrusion 11 and the first recess 2211, resulting in a better fit and improved sealing performance.

[0080] More preferably, the thermally expanding seal 22 can be a rubber seal 22.

[0081] Reference Figure 3 In some embodiments, the first protrusion 11 has a cross-section with a horizontal cross-section relative to the first direction, and the area of ​​the cross-section gradually increases toward the furnace door 2.

[0082] Since the cross-section of the first protrusion 11 gradually increases towards the furnace door 2, when the first protrusion 11 and the first recess 2211 are engaged, a gradually tightening sealing area will be formed on the contact surface. This sealing area is not easy to be displaced or loosened under the action of external force, which is conducive to improving the contact stability of the two.

[0083] Furthermore, the first protrusion 11 of the above shape can, to a certain extent, disperse the stress between the furnace tube 1 and the furnace door 2 under high temperature and high pressure, reduce the impact and damage to the sealing interface, and extend the service life of the heating equipment.

[0084] In some embodiments, reference is made to Figure 4 The end of the pipe opening may also have a second protrusion 12, and the second protrusion 12 is located inside the first protrusion 11.

[0085] The sealing groove 221 also includes a second recess 2212, which together with the first recess 2211 forms a stepped sealing groove 221, and the second recess 2212 is located at the end facing the pipe opening.

[0086] When the furnace door 2 is closed relative to the furnace tube 1, the second protrusion 12 is matched and located in the second recess 2212. The second protrusion 12 and the second recess 2212 are in contact, or there is a gap between the second protrusion 12 and the second recess 2212 and the sealing member 22 is a thermally expandable sealing member 22.

[0087] The cooperation between the second protrusion 12 and the first protrusion 11 can further enhance the sealing performance of the furnace door 2 to the furnace tube 1.

[0088] Furthermore, similar to the way the first protrusion 11 and the first recess 2211 cooperate, the second protrusion 12 and the second recess 2212 can not only contact each other in a close fit, but also, when the sealing element 22 is a sealing element with thermal expansion properties, a gap can be left between the second protrusion 12 and the second recess 2212. When the sealing element 22 is a sealing element with thermal expansion properties, gaps are left between the first protrusion 11 and the first recess 2211, and between the second protrusion 12 and the second recess 2212. This cooperation method can make full use of the thermal expansion performance advantage of the sealing element 22, that is, it is convenient for the first protrusion 11 and the second protrusion 12 to be inserted into or detached from the sealing groove 221, and since the heating equipment is in operation, the sealing groove 221 can fit with the first protrusion 11 and the second protrusion 12, which is conducive to improving the sealing performance of the furnace tube 1.

[0089] Reference Figure 4 More preferably, the second protrusion 12 is distributed on the inner and / or outer sides of the furnace tube 1.

[0090] The second protrusion 12 can be distributed individually on the inner or outer side of the furnace tube 1, or simultaneously on both sides of the furnace tube 1. When the second protrusion 12 is distributed simultaneously on both sides of the furnace tube 1, multi-layer sealing can be achieved, further enhancing the sealing performance of the furnace tube 1.

[0091] Reference Figure 2 and Figure 5 In some embodiments, the furnace door 2 further includes:

[0092] The hot spot 23 has a bent region 231 that bends circumferentially toward the side where the base 21 is located;

[0093] Connecting sleeve 24, connecting sleeve 24 and blocking door 23 are connected in the bending area 231;

[0094] The connecting bracket 25 has a first sub-rod 251 and a plurality of second sub-rods 252 that surround and are connected to one end of the first sub-rod 251. The other end of the first sub-rod 251 is connected to the base 21, and the end of the second sub-rod 252 facing away from the first sub-rod 251 is sleeved in the connecting sleeve 24.

[0095] When the furnace door 2 is closed relative to the furnace tube 1, the hot door 23 is located inside the tube opening.

[0096] When the heating equipment is in operation, the aforementioned heat-blocking door 23 is used to seal the pipe opening, which can reduce heat loss and prevent the base 21 from deforming due to high temperature during operation, thus reducing the possibility of decreased sealing due to deformation of the furnace door 2.

[0097] Preferably, the material of the heat-resistant door 23 is quartz; and / or, the material of the connecting sleeve 24 is polytetrafluoroethylene.

[0098] Quartz has heat-insulating properties, which can better reduce heat loss and reduce the possibility of overheating deformation of the heat-insulating door 23. In addition, quartz has excellent thermal stability and is not likely to react with the materials inside the furnace tube 1, which can prevent metal contamination in high-temperature environments.

[0099] Polytetrafluoroethylene (PTFE) has the advantage of high temperature resistance, can remain stable at high temperatures, is not easily deformed, and can keep the parts in contact with the door 23 and the connecting bracket 25 in a tight state for a long time, thereby achieving a stable connection between the door 23 and the connecting bracket 25.

[0100] By using the specific shape of the door stopper 23 and the connecting sleeve 24, the relative positions of the door stopper 23 and the connecting bracket 25 can be fixed without using metal bolts, thus avoiding damage to the quartz door stopper 23 caused by the use of bolts.

[0101] Preferably, refer to Figure 2 and Figure 6 There are three second sub-rods 252, which are evenly distributed on the side of the blocking door 23 facing the base 21 and are sleeved in the connecting sleeve 24. By controlling the number of second sub-rods 252 to three, it is beneficial to improve the connection stability between the second sub-rods 252 and the connecting sleeve 24, thereby enhancing the connection stability of the blocking door 23.

[0102] Reference Figure 2 In some embodiments, the adjustment mechanism 3 further includes:

[0103] The second adjustment assembly 32 is connected to the side of the furnace door 2 away from the furnace tube 1. The second adjustment assembly 32 is used to move the furnace door 2 along a second direction to adjust the relative position of the sealing groove 221 and the tube opening in the second direction, wherein the second direction is a horizontal direction perpendicular to the length direction of the furnace tube 1. The main function of the second adjustment assembly 32 is to move the furnace door 2 along the second direction.

[0104] In some embodiments, the adjustment mechanism 3 may also include a third adjustment component (not shown in the figure). The main function of the third adjustment component is to move the furnace door 2 along a third direction. The third adjustment component is connected to the side of the furnace door 2 away from the furnace tube 1. The third adjustment component is used to move the furnace door 2 along a third direction to adjust the relative position of the sealing groove 221 and the pipe opening in the third direction. The third direction is the vertical direction perpendicular to the length direction of the furnace tube 1. Figure 1 The z-direction is shown.

[0105] By adding a second adjustment component 32, a third adjustment component, or both the second and third adjustment components, multi-dimensional precise control of the furnace door 2's position can be achieved. This design not only improves the stability and efficiency of the heating process but also enhances the adaptability and flexibility of the furnace door 2 to better meet the sealing requirements of the heating equipment.

[0106] Furthermore, when the second and third adjustment components are added simultaneously and used in conjunction with the first adjustment component, the adjustment process can be simplified. The furnace door 2 can be controlled to move along the first, second, and third directions individually or simultaneously, thereby providing the ability to flexibly adjust the position of the furnace door 2 in three-dimensional space. This also helps to improve the precise positioning and sealing of the furnace door 2, promotes the operational stability and production efficiency of the heating equipment, and better ensures product quality.

[0107] Reference Figure 2 In some embodiments, the first adjustment component 31 includes:

[0108] First base 311;

[0109] The first slide rail 312 is disposed on the first base 311, and the length direction of the first slide rail 312 is the first direction;

[0110] The first sliding member 313 is connected to the first slide rail 312;

[0111] The first driving member 314 drives the first sliding member 313 to move along the first direction;

[0112] And / or,

[0113] The second adjustment component 32 includes:

[0114] The second base 321 is disposed on the first sliding member 313;

[0115] The second slide rail 322 is disposed on the second base 321, and the length direction of the second slide rail 322 is the second direction;

[0116] The second sliding member 323 is connected to the second slide rail 322;

[0117] The second driving member (not shown in the figure) drives the second sliding member 323 to move along the second direction;

[0118] And / or,

[0119] Adjustment mechanism 3 includes a third adjustment component (not shown in the figure), which includes:

[0120] The third base;

[0121] The third lead screw is threaded onto the third base, and the length direction of the third lead screw is the third direction.

[0122] The third sliding member has one side fixedly connected to the third nut of the third lead screw, and the side of the third sliding member away from the third nut is fixedly connected to the first base 311.

[0123] The third driving component drives the third sliding component to move along a third direction.

[0124] The combination of the first adjustment component 31, the second adjustment component 32, and the third adjustment component enables three-dimensional adjustment of the furnace door 2. These adjustment components can be used individually or in combination as needed to achieve the best sealing effect.

[0125] Reference Figure 2 In some embodiments, the first driving member 314 includes a first motor 3141 and a first lead screw 3142. The first motor 3141 is disposed on the surface of the first base 311 and fixedly connected to the first lead screw 3142. The length direction of the first lead screw 3142 is a first direction. The first lead screw 3142 has a first nut, which is fixedly connected to the first sliding member 313 and is used to drive the first sliding member 313 to move along the first direction.

[0126] The second driving component includes a second motor and a second lead screw. The second motor is disposed on the surface of the second base 321 and is fixedly connected to the second lead screw. The length direction of the second lead screw is the second direction. The second lead screw has a second nut, which is fixedly connected to the second sliding member 323 and is used to drive the second sliding member 323 to move along the second direction.

[0127] The third driving component is the third motor.

[0128] The above design combines the rotational power of the motor with the linear transmission characteristics of the lead screw, enabling precise and stable linear motion. By controlling the rotational speed and direction of the first motor 3141 and the second motor, the movement distance and speed of the first sliding member 313 and the second sliding member 323 in a specific direction can be precisely controlled. Furthermore, due to the high precision and stability of the threaded engagement between the lead screw and the nut, this drive method helps improve the positioning accuracy of the furnace door 2.

[0129] Furthermore, such as Figure 2As shown, there are two first sliding members 313, both of which are fixedly connected to the second base 321. The use of two first sliding members 313 enhances the stability of the first adjustment mechanism 3, enabling more stable and accurate control of the furnace door 2's movement. Furthermore, since the second base 321 is connected to both first sliding members 313, only one of the first sliding members 313 needs to be fixedly connected to the first nut. The first motor 3141, in conjunction with the first lead screw 3142, can drive the first nut to move along the first direction, thereby causing the second base 321 and the first sliding member 313 to move synchronously along the length of the first slide rail 312.

[0130] Reference Figure 2 In some embodiments, a pressure sensor 26 is fixed between the base 21 and the seal 22, and the pressure sensor 26 is distributed below the seal 22.

[0131] The pressure sensor 26 can monitor the pressure state inside the furnace tube 1 by detecting pressure changes below the seal 22, thereby monitoring the sealing performance of the furnace tube 1. When the detected pressure is lower than the preset safety threshold or the contact pressure, it indicates that the vacuum degree of the furnace tube 1 is low or the sealing performance has decreased. The sealing performance of the furnace tube 1 can be enhanced by adjusting the position of the furnace door 2 by adjusting the mechanism 3 or applying additional force.

[0132] Reference Figure 2 In some embodiments, the adjustment mechanism 3 includes a connecting arm 33, one end of which is connected to the second sliding member 323 and the other end of which is connected to the base 21.

[0133] like Figure 2 As shown, to enhance the stability of the second adjustment mechanism 3, there are two second slide rails 322, which are arranged parallel to each other on the surface of the second base 321. Correspondingly, each second slide rail 322 surface is equipped with two second sliding members 323. Since the connecting arm 33 is connected to each second sliding member 323, it is only necessary to fix one of the two second sliding members 323 to the second nut. The second motor, in conjunction with the second lead screw, can drive the second nut to move in the second direction, thereby causing the connecting arm 33 and the second sliding member 323 to move synchronously along the length direction of the second slide rail 322, so that the sliding of the connecting arm 33 and the second sliding member 323 relative to the second slide rail 322 is more stable.

[0134] Reference Figure 2 In some embodiments, the adjustment mechanism 3 further includes at least one correction motor 34, which is connected to the connecting arm 33 and is located near the surface of the base 21 opposite to the sealing groove 221. The output shaft of the correction motor 34 is a telescopic rod, and the length direction of the telescopic rod is a first direction. The correction motor 34 is used to increase the pressure on the furnace door 2 along the first direction.

[0135] When the pressure sensor 26 detects that the pressure is lower than the preset safety threshold or the bonding pressure, the furnace door 2 can be subjected to pressure along the first direction by using the correction motor 34 to further improve the bonding degree between the furnace tube 1 and the furnace door 2, thereby further improving the sealing performance of the furnace tube 1.

[0136] Preferably, the corrective motor 34 can be a miniature motor with a telescopic rod. One, two, or three corrective motors 34 can be provided. Preferably, there are two corrective motors 34, and the two corrective motors 34 are arranged symmetrically.

[0137] Furthermore, the connecting arm 33 is fixed with mounting brackets 35 matching the number of straightening motors 34, with one straightening motor 34 mounted on each mounting bracket 35. The mounting brackets 35 enable the connection between the straightening motors 34 and the connecting arm 33.

[0138] In some embodiments, the heating device further includes an exhaust device 4, which is connected to the furnace tube 1.

[0139] When the extraction device 4 is working, the gas inside the furnace tube 1 is drawn away by the extraction device 4 through the exhaust port. In actual operation, the pressure inside the furnace tube 1 can be adjusted according to the reaction requirements to create the environment needed for the process.

[0140] The working process of the heating equipment is explained below:

[0141] When furnace tube 1 needs to be closed, the furnace door 2 is moved along one of the first, second, or third directions, or simultaneously along several directions, by controlling the adjustment mechanism 3. As the furnace door 2 moves towards the furnace tube 1, its position is adjusted simultaneously, allowing the first protrusion 11 and the second protrusion 12 at the opening of the furnace tube 1 to quickly and accurately insert into the sealing groove 221, thus closing the furnace tube 1. This effectively reduces the possibility of poor sealing due to a poor fit between the furnace door 2 and the furnace tube 1. Furthermore, when the pressure sensor 26 can monitor the pressure inside the furnace tube 1 in real time, and if the pressure sensor 26 detects an abnormal pressure, the relative position of the furnace door 2 and the furnace tube 1 can be finely adjusted by the adjustment mechanism 3 or by the correction motor 34. This allows for real-time adjustment of the fit between the furnace door 2 and the furnace tube 1, improving the sealing performance of the furnace door 2 and thus enhancing the reliability of the heating equipment.

[0142] When the furnace tube 1 needs to be opened, the furnace door 2 is moved along the first, second, or third direction by controlling the adjustment mechanism 3, so that the first protrusion 11 and the second protrusion 12 at the opening of the furnace tube 1 are disengaged from the sealing groove 221, thereby closing the furnace tube 1.

[0143] The heating device disclosed in the embodiments of this utility model has been described in detail above. Specific examples have been used to illustrate the principle and implementation of this utility model. The description of the above embodiments is only for the purpose of helping to understand the heating device and its core idea of ​​this utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​this utility model. Therefore, the content of this specification should not be construed as a limitation of this utility model.

Claims

1. A heating device, characterized in that, The heating device includes: Furnace tubes; A furnace door, used to open and close the furnace tube, the furnace door includes a base and a sealing element disposed on the base near the furnace tube. The sealing element is provided with a sealing groove that is recessed in the thickness direction of the base. When the furnace door is in a closed state relative to the furnace tube, the sealing groove is in contact with the opening of the furnace tube. An adjustment mechanism, comprising at least: a first adjustment component connected to the side of the furnace door away from the furnace tube, the first adjustment component being used to drive the furnace door to move along a first direction to adjust the relative position of the sealing groove and the tube opening in the first direction, wherein the first direction is the length direction of the furnace tube.

2. The heating device according to claim 1, characterized in that, The end of the pipe opening has a first protrusion, and the sealing groove includes a first recess; When the furnace door is closed relative to the furnace tube, the first protrusion is matched and located in the first recess, the first protrusion and the first recess are in contact, or there is a gap between the first protrusion and the first recess and the sealing element is a thermal expansion sealing element.

3. The heating device according to claim 2, characterized in that, The first protrusion has a cross-section along a horizontal direction relative to the first direction, and the area of ​​the cross-section gradually increases toward the furnace door.

4. The heating device according to claim 2, characterized in that, The end of the pipe opening also has a second protrusion, and the second protrusion is located inside the first protrusion. The sealing groove further includes a second recess, which together with the first recess forms a stepped sealing groove, and the second recess is located at the end facing the pipe opening; When the furnace door is closed relative to the furnace tube, the second protrusion is matched and located in the second recess, the second protrusion and the second recess are in contact, or there is a gap between the second protrusion and the second recess and the sealing element is the sealing element that expands thermally.

5. The heating device according to claim 4, characterized in that, The second protrusion is located on the inner and / or outer side of the furnace tube.

6. The heating device according to any one of claims 1-5, characterized in that, The furnace door also includes: The hot-stop device has a bent region that bends circumferentially toward the side where the base is located; A connecting sleeve, which is connected to the hot-stopping element at the bending area; A connecting bracket has a first sub-rod and a plurality of second sub-rods surrounding and connected to one end of the first sub-rod, the other end of the first sub-rod being connected to the base, and the end of the second sub-rod facing away from the first sub-rod being sleeved in the connecting sleeve; When the furnace door is in a closed state relative to the furnace tube, the hot door is located inside the tube opening; The material of the heat-resistant door is quartz; and / or the material of the connecting sleeve is polytetrafluoroethylene.

7. The heating device according to any one of claims 1-5, characterized in that, The adjustment mechanism also includes: A second adjustment assembly is connected to the side of the furnace door opposite to the furnace tube. This second adjustment assembly is used to move the furnace door along a second direction to adjust the relative position of the sealing groove and the tube opening in the second direction, wherein the second direction is a horizontal direction perpendicular to the length direction of the furnace tube; and / or, The third adjustment component is connected to the side of the furnace door away from the furnace tube. The third adjustment component is used to drive the furnace door to move along a third direction to adjust the relative position of the sealing groove and the pipe opening in the third direction, wherein the third direction is a vertical direction perpendicular to the length direction of the furnace tube.

8. The heating device according to claim 7, characterized in that, The first adjustment component includes: First abutment; A first slide rail is disposed on the first base, and the length direction of the first slide rail is the first direction; The first sliding member is connected to the first slide rail; The first driving member drives the first sliding member to move along the first direction; And / or, The adjustment mechanism includes the second adjustment component, the second adjustment component comprising: The second base is disposed on the first sliding member; The second slide rail is disposed on the second base, and the length direction of the second slide rail is the second direction; The second sliding member is connected to the second slide rail; The second driving member drives the second sliding member to move along the second direction; And / or, The adjustment mechanism includes the third adjustment component, the third adjustment component comprising: The third base; The third lead screw is threadedly connected to the third base, and the length direction of the third lead screw is the third direction; The third sliding member is fixedly connected to the third nut of the third lead screw; The third driving member drives the third sliding member to move along the third direction.

9. The heating device according to claim 8, characterized in that, A pressure sensor is fixed between the base and the seal, and the pressure sensor is located below the seal.

10. The heating device according to claim 9, characterized in that, The adjustment mechanism includes a connecting arm, one end of which is connected to the second sliding member and the other end of which is connected to the base; the adjustment mechanism also includes at least one straightening motor, which is connected to the connecting arm and is located near the surface of the base opposite to the sealing groove. The output shaft of the straightening motor is a telescopic rod, the length direction of which is the first direction. The straightening motor is used to increase the pressure on the furnace door along the first direction.

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