Ultrahigh-frequency high-power transformer

Abstract

The utility model provides an ultrahigh-frequency high-power transformer, which relates to the technical field of transformers and comprises a framework module, a magnetic core module and a winding module. The magnetic core module is arranged on the periphery of the framework module in a sleeving mode and comprises a plurality of amorphous magnetic cores of the same specification, an insulating layer is arranged between every two adjacent amorphous magnetic cores, and each amorphous magnetic core is of an air-gap-free closed structure. The winding module is wound on the framework module and the magnetic core module; the winding module comprises a primary winding and a secondary winding, the primary winding is formed by winding 2-10 primary winding wires with the same specification, and the secondary winding is formed by winding 2-10 secondary winding wires with the same specification. According to the technical scheme, the problems of serious heating, serious skin effect, large size, large leakage inductance and the like of a traditional transformer design in a megasonic driving power supply are solved, and the performance of a megasonic transducer can be better excited.

Description

Technical Field

[0001] This utility model relates to the field of transformer technology, and in particular to an ultra-high frequency high-power transformer device. Technical Background

[0002] The rapid development of high-tech industries such as semiconductors and integrated circuits has led to increasingly stringent requirements for the cleaning quality of components. Compared to traditional ultrasonic cleaning technology, megasonic cleaning technology has advantages such as less surface damage and higher cleaning precision, which can meet the cleaning needs of industries such as semiconductors and integrated circuits. However, the ultra-high frequency characteristics of megasonic cleaning technology make the effective matching between the megasonic transducer and the megasonic drive power supply one of the key factors affecting the efficiency of megasonic cleaning.

[0003] The megasonic transducer is a key component of the megasonic cleaning system, and its energy conversion performance directly affects the effectiveness of megasonic cleaning. To ensure the megasonic drive power supply can fully activate the transducer's performance, a matching network needs to be designed to adjust the total impedance on the load side of the megasonic transducer. The transformer is an important part of the matching network; a well-designed transformer can make the internal resistance of the megasonic drive power supply equal to the load impedance of the megasonic transducer, thereby maximizing system power transmission or minimizing signal reflection. To optimize the performance of the megasonic drive power supply, the transformer, while meeting basic design specifications, should minimize parasitic inductance and capacitance caused by ultra-high frequencies.

[0004] Traditional transformers with ferrite cores, such as EE, EI, and PQ type, suffer from problems like large size, severe eddy current effects, easy magnetic saturation, and high leakage inductance when used in mega-sound drive power supplies. The high leakage inductance, in particular, increases the difficulty of tuning the matching network, and this difficulty is further exacerbated in ultra-high frequency applications like mega-sound cleaning.

[0005] On the other hand, current traditional transformer designs generally use a single large-diameter winding, employing sandwich winding or laminated winding methods. When applied to mega-sound drive power supplies, the skin effect and proximity effect are significant, leading to problems such as large coupling capacitance and high copper loss in traditional transformer designs under ultra-high frequency operating conditions. Utility Model Content

[0006] To address the aforementioned problems, the present invention aims to provide an ultra-high frequency high-power transformer. This ultra-high frequency high-power transformer has a small coupling capacitance and low leakage inductance, which can significantly reduce the impact of the transformer on the tuning and matching of the mega-sonic drive power supply. It can also better cope with the skin effect of the transformer at ultra-high operating frequencies and alleviate the eddy current effect, while achieving a large power output.

[0007] To achieve the above objectives, the technical solution adopted by this utility model is as follows: an ultra-high frequency high-power transformer, comprising a bobbin module, a core module, and a winding module; the core module is sleeved on the outer periphery of the bobbin module, the core module contains multiple amorphous cores of the same specification, an insulating layer is provided between adjacent amorphous cores, and the amorphous cores are closed structures without air gaps; the winding module is wound around the bobbin module and the core module, and the outer surface of the winding module is wrapped with insulating material; the winding module includes a primary winding and a secondary winding, the primary winding is formed by winding 2 to 10 primary windings of the same specification, with the two ends of the primary windings twisted together, and the secondary winding is formed by winding 2 to 10 secondary windings of the same specification, with the two ends of the secondary windings twisted together.

[0008] The skeleton module has a partition structure, and the skeleton module includes a first skeleton and a second skeleton, with one end of the first skeleton and one end of the second skeleton connected to each other; the other end of the first skeleton and the other end of the second skeleton are provided with a plurality of equally spaced partitions, the number and angle of the partitions being consistent; the partitions form the partition structure of the skeleton module; the skeleton module is made of a material with high heat resistance and strong insulation.

[0009] An insulating layer is provided between the primary winding and the secondary winding. High-temperature resistant insulating material is provided between the laminated windings in the primary and secondary windings. The primary and secondary windings are made of triple-insulated Litz wire.

[0010] The beneficial effects of this utility model after adopting the above technical solution are:

[0011] 1. The ultra-high frequency high-power transformer of this utility model improves the frame by providing several equally spaced partitions at both ends to form a certain number of partition areas, which helps to evenly distribute the primary or secondary winding on the magnetic core and prevents the winding from slipping and misaligning during the winding process.

[0012] 2. The ultra-high frequency high-power transformer of this invention uses a toroidal amorphous magnetic core. On the one hand, the toroidal amorphous magnetic core is a closed structure without air gap, which can effectively reduce leakage inductance compared with transformers of EE, EI, and PQ types, and can significantly reduce the impact of the transformer on the tuning and matching of the mega-sonic drive power supply. On the other hand, the toroidal amorphous magnetic core has high magnetic flux density and low hysteresis loss, which enables the transformer using the amorphous toroidal magnetic core to maintain high energy conversion efficiency at ultra-high frequencies. In addition, due to the large magnetic flux density, window area, and cross-sectional area of ​​the toroidal amorphous magnetic core, the volume of the designed ultra-high frequency high-power transformer will be much smaller than that of conventional ultra-high frequency high-power transformers.

[0013] 3. The ultra-high frequency high-power transformer of this utility model adopts a stacked magnetic core design, which aims to solve the serious eddy current effect problem faced by traditional integrated large toroidal magnetic cores at ultra-high operating frequencies. That is, multiple thinner toroidal magnetic cores are vertically stacked to replace the traditional integrated, thick toroidal magnetic cores. This can effectively disperse eddy current paths, reduce eddy current density, significantly reduce eddy current losses, thereby reducing heat generation and improving transformer stability.

[0014] 4. The ultra-high frequency high-power transformer of this utility model adopts multiple small-diameter Litz wires wound in parallel to address the problem that the traditional single large-diameter winding cannot be completely close to the toroidal core, resulting in poor coupling between the winding and the core and unnecessary magnetic loss; at the same time, it alleviates the skin effect and improves heat dissipation performance to a certain extent.

[0015] 5. This utility model of an ultra-high frequency high-power transformer abandons the traditional sandwich winding or laminated winding method, and adopts a method in which the windings are evenly distributed on the magnetic core and frame. This winding method can effectively reduce coupling capacitance, especially at ultra-high operating frequencies, and can effectively reduce electromagnetic interference and noise, thereby improving the quality of the output waveform of the mega-sonic drive power supply.

[0016] In summary, this novel ultra-high frequency high-power transformer improves upon the problems faced by traditional transformer designs in megasonic drive power supplies, such as severe heat generation, severe skin effect, large size, and large coupling capacitance and leakage inductance leading to difficult tuning and matching. Simultaneously, it maintains high-efficiency energy conversion and low electromagnetic interference and noise at ultra-high operating frequencies, thereby improving the quality of the megasonic drive power supply's output waveform and better stimulating the performance of the megasonic transducer. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of the ultra-high frequency high-power transformer of this utility model;

[0018] Figure 2 yes Figure 1 View from direction A;

[0019] Figure 3 This is an exploded view of the skeleton module;

[0020] Figure 4 yes Figure 1 Exploded view;

[0021] In the diagram: 1. First frame, 2. Primary winding, 3. Secondary winding, 4. Magnetic core, 5. Second frame, 6. Separator, 7. Primary winding input terminal A, 8. Secondary winding output terminal A, 9. Primary winding input terminal B, 10. Secondary winding output terminal B, 11. Separation area, 12. Card protrusion, 13. Card slot. Detailed Implementation

[0022] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be described in detail below with reference to the accompanying drawings. The description in this part is only exemplary and explanatory, and should not be used to limit the scope of protection of this utility model in any way.

[0023] This specification will use the design of an 800W rated power, 1MHz operating frequency, and 1:2 turns ratio UHF high-power transformer as an example. Furthermore, all directions mentioned are based on the attached diagrams and represent relative positions, not absolute positions.

[0024] like Figure 1 , Figure 2 and Figure 4 As shown, an ultra-high frequency high-power transformer includes a bobbin module, a core module, and a winding module. The bobbin module is formed by interconnecting a first bobbin 1 and a second bobbin 5. The core module consists of multiple toroidal amorphous magnetic cores 4, which are fitted around the outer periphery of the bobbin module. The winding module includes a primary winding 2 and a secondary winding 3, which are wound around the bobbin module and the core module. After the primary winding 2 and the secondary winding 3 are wound, high-temperature resistant insulating tape is used to wrap the entire surface of the ultra-high frequency high-power transformer to achieve insulation protection.

[0025] like Figure 2 and Figure 3 As shown, the skeleton module is composed of a first skeleton 1 and a second skeleton 5 connected to each other along the axial direction of the ultra-high frequency high-power transformer via snap-fit ​​connections. The connecting end of the first skeleton has four equidistantly distributed slots 13, while the connecting end of the second skeleton 5 has four correspondingly arranged protrusions 12 that can mate with the slots 13 of the first skeleton. The other ends of both the first skeleton 1 and the second skeleton 5 have several equidistantly distributed partitions 6, with the number and position of the partitions 6 being identical for both. In this embodiment, both the first skeleton 1 and the second skeleton 5 have five partitions 6, forming five partition zones 11. The partition zones 11 facilitate the uniform distribution of the primary winding 2 or the secondary winding 3 on the core module and the skeleton module, and prevent slippage and misalignment of the windings during winding. It should be noted that the number of partition zones 11 is designed based on the number of turns of the primary winding 2 and the secondary winding 3. The number of partition zones shown in the attached figures is only a schematic diagram of the partition structure, and the number of partition zones is not limited to those shown in the figures. The skeleton module is made of a material with high heat resistance and strong insulation.

[0026] like Figure 1 and Figure 4As shown, the core module adopts a stacked core design to address the severe eddy current effect problem faced by traditional monolithic large toroidal cores at ultra-high operating frequencies. This involves vertically stacking multiple thinner toroidal cores to replace the traditional, thick, monolithic toroidal core. This effectively disperses eddy current paths, reduces eddy current density, significantly reduces eddy current losses, thereby reducing heat generation and improving transformer stability. The toroidal cores used are of identical specifications, with an insulating layer between adjacent cores, and are then fixed together by the frame module.

[0027] In this embodiment, the preferred magnetic core 4 is a toroidal amorphous magnetic core. On one hand, the toroidal amorphous magnetic core is a closed structure without an air gap, which effectively reduces leakage inductance compared to transformers with EE, EI, or PQ structures, significantly reducing the impact on tuning matching in the mega-sonic drive power supply matching network. On the other hand, the toroidal amorphous magnetic core has high flux density and low hysteresis loss, enabling the transformer using the amorphous toroidal magnetic core to maintain high energy conversion efficiency at ultra-high frequencies. Furthermore, due to the use of the toroidal amorphous magnetic core, the designed transformer volume is much smaller than that of conventional ultra-high frequency high-power transformers. Common toroidal amorphous magnetic cores are shown in the table below:

[0028]

[0029] In this embodiment, to meet the design requirements of a rated power of 800W and an operating frequency of 1MHz, the AP value needs to be calculated according to the formula to satisfy "A e A w "≥AP" to prevent magnetic saturation;

[0030]

[0031] Among them, P o K is the rated power of the transformer, K0 is the window utilization rate, and K f B is the waveform coefficient. w f is the rate of change of magnetic flux density. s For the operating frequency, j k A is the current density proportionality coefficient. e A is the effective cross-sectional area of ​​the magnetic core. w Let AP be the core aperture area. Substituting the relevant parameters, we can calculate that AP is 6.83 cm². 4 Therefore, five toroidal amorphous magnetic cores with an outer diameter of 32, an inner diameter of 20, and a height of 10 were selected to form the magnetic core module.

[0032] like Figure 1 , Figure 2 and Figure 3As shown in the figure, this utility model of ultra-high frequency high-power transformer, through innovation in the design of the bobbin module, abandons the traditional sandwich winding or laminated winding process. Instead, it adopts a new winding process: the primary winding 2 and the secondary winding 3 are both composed of 2 to 10 small-diameter Litz wires of the same specification arranged in parallel, and it is required that the two adjacent windings are tightly fitted together, and then evenly wound on the bobbin module and the core module.

[0033] In this embodiment, the transformer operates at a frequency of 1 MHz. To effectively avoid the skin effect, the single-strand copper wire used in the Litz wire should satisfy the following formula:

[0034]

[0035] Where δ is the skin depth, R is the radius of a single copper wire in the Litz wire, μ is the permeability, σ is the conductivity, and f is the operating frequency; substituting the corresponding parameters, the skin depth is calculated to be 66μm, and 0.1mm*30 strands of Litz wire are selected. Simultaneously, to meet the current resistance requirement of 3A, the total number of strands in the parallel winding should satisfy the following formula:

[0036]

[0037] Where NT is the total number of strands in the parallel winding, and I Rms I is the effective value of the current. Den Let d be the current density, and d be the diameter of a single copper wire in the Litz wire (the Litz wire is made of multiple strands of copper wire twisted together). Therefore, the primary winding 2 consists of three parallel 0.1*30 strand Litz wires; the secondary winding 3 consists of three parallel 0.1*30 strand Litz wires. According to the transformation ratio of 1:2 set in this embodiment, after the installation of the core module and the frame module is completed, the primary winding 2 is wound 5 turns on the core module and the frame module. Then, after wrapping a layer of high-temperature resistant insulating tape for isolation, the secondary winding 3 is wound 10 turns, and then the transformer is wrapped again with high-temperature resistant insulating tape. Finally, at the primary winding input terminal A, primary winding input terminal B, secondary winding output terminal A, and secondary winding output terminal B, appropriate lengths of winding are led out, and the insulation layer at the tail end is stripped to expose the copper core. The copper cores of the parallel windings are then twisted together, and a tin-immersion process is applied to enhance the reliability of the connection, thus completing the fabrication of the ultra-high frequency high-power transformer. The ultra-high frequency high-power transformer manufactured in this embodiment can operate stably in a mega-sonic drive power supply with a power of 800W and a working frequency of 1MHz, without abnormal heat generation, and reduces parasitic inductance and coupling capacitance. All performance indicators meet the expected design goals.

[0038] Furthermore, during manufacturing, the primary winding 2 or secondary winding 3 should be as close as possible to the bobbin module and the core module, while avoiding winding overlap as much as possible. If, due to design requirements, the primary winding 2 or secondary winding 3 has a large number of turns, or requires more parallel winding, making it impossible to completely avoid winding overlap, high-temperature resistant insulating tape should be pasted between the overlapped windings for isolation to prevent the coupling capacitance from adversely affecting performance.

Claims

1. A high-frequency, high-power transformer, characterized in that: The ultra-high frequency high-power transformer includes a bobbin module, a core module, and a winding module. The core module is fitted around the bobbin module and contains multiple amorphous cores of the same specification. An insulating layer is provided between adjacent amorphous cores, and the amorphous cores are closed structures without air gaps. The winding module is wound around the bobbin module and the core module, and the outer surface of the winding module is covered with insulating material. The winding module includes a primary winding and a secondary winding. The primary winding is formed by winding 2 to 10 primary windings of the same specification, with each end of the primary winding twisted together. The secondary winding is formed by winding 2 to 10 secondary windings of the same specification, with each end of the secondary winding twisted together.

2. The ultra-high frequency high-power transformer according to claim 1, characterized in that: The skeleton module has a partition structure, and the skeleton module includes a first skeleton and a second skeleton, with one end of the first skeleton and one end of the second skeleton connected to each other; the other end of the first skeleton and the other end of the second skeleton are provided with equally spaced partitions, and the partitions form the partition structure of the skeleton module. The skeleton module is made of a material with high heat resistance and strong insulation.

3. The ultra-high frequency high-power transformer according to claim 1, characterized in that: An insulating layer is provided between the primary winding and the secondary winding.

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