Sample fixing device
By designing the housing and telescopic components of the sample fixing device, the fixing ring can be fixed or unlocked from the front, solving the problem of sample detachment during transmission electron microscopy sampling, ensuring sample integrity, and meeting subsequent testing requirements.
Patent Information
- Application Number
- CN202520241765.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-14
- Publication Date
- 2025-12-02
- Estimated Expiration
- 2035-02-14
AI Technical Summary
During the sampling process of transmission electron microscopy, the sample is easily detached due to the falling of the focused ion beam grid or collision with other components, which cannot meet the requirements of subsequent testing.
Design a sample fixing device that uses a housing and a telescopic assembly to fix or unlock the fixing ring from the front, preventing the focused ion beam grid from falling or colliding during sampling.
Ensure that the sample does not fall off during the sampling process to meet the requirements of subsequent testing, especially chip failure analysis and energy-dispersive X-ray spectroscopy.
Smart Images
Figure CN223624924U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the semiconductor field, and in particular to a sample fixing device. Background Technology
[0002] A transmission electron microscope (TEM) is a microscope that uses an electron beam to penetrate ultrathin samples to obtain high-resolution images. With its high spatial resolution, TEM integrates functions such as morphology observation, crystal structure identification, and chemical composition analysis, providing a technique for directly observing morphology, interfaces, and crystal defects from the micrometer to the atomic scale. In operation, the TEM projects an accelerated and focused electron beam onto a very thin sample (around 100 nm in the laboratory). Electrons in the beam collide with atoms in the sample, changing their direction and producing solid-angle scattering.
[0003] Currently, transmission electron microscopes (TEM) use two rings of different thicknesses and a triangular gripper at the front of the sample holder to hold the focused ion beam grid (FIB grid) containing the sample before placing it into the TEM stage for imaging. During sampling, the sample must be placed face down, and the triangular gripper is pushed out from the back of the sample holder. The FIB grid, rings, and triangular gripper containing the sample then scatter and fall into the sample container from the back. During this fall, the sample is highly susceptible to colliding with the rings, triangular gripper, and sample container, causing the sample to fall out of the FIB grid. This prevents subsequent re-images or re-firing for energy dispersive X-ray spectroscopy (EDX).
[0004] Therefore, how to prevent sample detachment during transmission electron microscopy sampling is a problem that needs to be solved. Summary of the Invention
[0005] The technical problem to be solved by this invention is how to prevent samples from falling off during sampling with a transmission electron microscope, and provides a sample fixing device.
[0006] To address the aforementioned problems, this utility model provides a sample fixing device for fixing a focused ion beam grid with the sample fixed thereon to the sample placement area on the front side of a transmission electron microscope sample rod. The sample rod has a through hole adjacent to the placement area, the through hole penetrating both the front and back sides of the sample rod. The sample fixing device includes: a housing with an opening at its bottom; a fixing ring connected to the bottom of the housing and located on the same plane as the bottom of the housing, used to fix the focused ion beam grid; and a telescopic component located inside the housing. One end of the telescopic component near the opening can extend from the housing and pass through the through hole of the sample rod when the fixing ring is positioned at the placement area, and fit against the back side of the sample rod to fix the fixing ring, or retract into the housing and release its fit against the back side of the sample rod to unlock the fixing ring.
[0007] The above technical solution, by setting a telescopic component that can fix or unlock the fixing ring from the front, allows the sample fixing device to fix or remove the focused ion beam grid from the front, avoiding the problem of the focused ion beam grid falling or colliding with other components and causing the sample to fall off during the traditional sampling process, and ensuring that the sample can meet the requirements of subsequent testing.
[0008] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit the present invention. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. Attached Figure Description
[0009] To more clearly illustrate the technical solutions in the specific embodiments of this utility model, the accompanying drawings used in the description of the specific embodiments will be briefly introduced below. Obviously, the drawings described below are only some specific embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without any creative effort.
[0010] Figure 1 A flowchart illustrating the process of placing a sample at the tip of a transmission electron microscope sample holder;
[0011] Figure 2 This is a three-dimensional schematic diagram of the process of placing a sample at the front end of the sample holder in a transmission electron microscope.
[0012] Figure 3 This is a three-dimensional structural diagram of the first embodiment of the sample fixing device of this utility model;
[0013] Figure 4This is a top view schematic diagram of the sample fixing device of this utility model fixed on the sample rod of a transmission electron microscope;
[0014] Figure 5 A schematic diagram of the sample fixing device of this utility model in its fixed state;
[0015] Figure 6 This is a schematic diagram showing the unlocked state of the sample fixing device described in this utility model;
[0016] Figure 7 This is a schematic diagram of the second embodiment of the sample fixing device of this utility model;
[0017] Figure 8 This is a schematic diagram of the third embodiment of the sample fixing device of this utility model.
[0018] Explanation of reference numerals in the attached figures:
[0019] 11 Sample rod
[0020] 111 Lofting Area
[0021] 112 Through Hole
[0022] 12 Focused Ion Beam Grid
[0023] 13. Fixing ring
[0024] 14 Triangular claws
[0025] 31. Shell
[0026] 311 Opening
[0027] 312 Window
[0028] 313 opening
[0029] 32. Fixing ring
[0030] 33 Telescopic Components
[0031] 331 Moving parts
[0032] 332 handle
[0033] 333 Shrapnel Group
[0034] 3331 Shrapnel
[0035] 3332 Bending section
[0036] 334 Flexible Coil
[0037] 3341 First End
[0038] 3342 Second End
[0039] 335 spring
[0040] 41 Focused Ion Beam Grid
[0041] 42 Sample rod
[0042] 421 Lofting Section
[0043] 422 Through Hole
[0044] S1 Front
[0045] S2 back Detailed Implementation
[0046] The technical solutions in the embodiments of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.
[0047] Please see Figures 1-2 ,in, Figure 1 This is a flowchart illustrating a process for placing a sample at the tip of a transmission electron microscope sample holder. Figure 2 This is a three-dimensional schematic diagram illustrating the process of placing a sample at the tip of the sample holder in a transmission electron microscope. The specific steps are as follows: Figure 1 As shown in part (a), the front end of the sample rod 11 includes a placement area 111 and a through hole 112 adjacent to the placement area. The placement area 111 is located on the surface of the sample rod 11, and the through hole 112 penetrates the surface and back of the sample rod 11. Figure 1 As shown in section (b), the focused ion beam grid 12 with the sample is placed at the sample placement point 111 at the front end of the sample rod 11; as Figure 1 As shown in section (c), the fixing ring 13 is disposed on the surface of the focused ion beam grid 12; as Figure 1 As shown in section (d), a triangular claw 14 is positioned at the front end of the sample rod 11, fixing the retaining ring 13 and the focused ion beam grid 12, and covering the through hole 112. During sampling, a sampling needle is inserted into the through hole 112 from the back of the sample rod 11, pushing open the triangular claw 14 located on the surface of the sample rod 11. The triangular claw 14, the retaining ring 13, and the focused ion beam grid 12 detach together. During the detachment process, the triangular claw 14, the retaining ring 13, and the focused ion beam grid 12 are prone to collision, causing the sample to detach from the focused ion beam grid 12, which cannot meet the requirements of subsequent testing.
[0048] To address the aforementioned problems, this invention provides a sample fixing device for use on the sample holder of a transmission electron microscope. This device allows the focused ion beam grid to be removed from the front of the sample holder, preventing the sample from detaching from the grid during sampling. Please refer to [link to related information]. Figures 3-6 ,in, Figure 3 This is a schematic diagram of the sample fixing device described in this utility model; Figure 4 This is a top view schematic diagram of the sample fixing device of this utility model fixed on the sample rod of a transmission electron microscope; Figure 5 A schematic diagram of the sample fixing device of this utility model in its fixed state; Figure 6 This is a schematic diagram of the sample fixing device of this utility model in the unlocked state.
[0049] like Figures 3-6 As shown, the sample fixing device is used to fix the focused ion beam grid 41 on which the sample is fixed to the sample placement area 421 on the front side S1 of the sample rod 42 of the transmission electron microscope. The sample rod 42 has a through hole 422 adjacent to the sample placement area 421 (shown in the figure). Figure 5 The through hole 422 penetrates the front side S1 and back side S2 of the sample rod 42. The sample fixing device includes: a housing 31, a fixing ring 32, and a telescopic assembly 33. The bottom of the housing 31 has an opening 311. The fixing ring 32 is connected to the bottom of the housing 31 and is located on the same plane as the bottom of the housing 31, and is used to fix the focused ion beam grid 41. The telescopic assembly 33 is located inside the housing 31. When the fixing ring 32 is set at the sample placement point 421, the end of the telescopic assembly 33 can extend out of the housing 31 and pass through the through hole 422 of the sample rod 42 to fit against the back side S2 of the sample rod 42 to fix the fixing ring 32, or it can retract into the housing 31 and release from the fit against the back side S2 of the sample rod 42 to unlock the fixing ring 32.
[0050] The above technical solution, by setting a telescopic component that can fix or unlock the fixing ring from the front, allows the sample fixing device to fix or remove the focused ion beam grid from the front, avoiding the problem of the focused ion beam grid falling or colliding with other components and causing the sample to fall off during the traditional sampling process, and ensuring that the sample can meet the requirements of subsequent testing.
[0051] In the semiconductor industry, the focused ion beam grid 41 can support chip samples for chip failure analysis and process improvement, enabling precise processing and observation of the internal circuit structure of the chip. This helps engineers identify the causes of chip failures and optimize chip manufacturing processes. When preparing transmission electron microscope (TEM) samples using focused ion beam (FIB) technology, the sample is first cut into thin slices of appropriate thickness using FIB. These slices are then transferred and fixed onto the focused ion beam grid 41 before being placed in the TEM for observation and analysis. This method allows for the acquisition of high-resolution microstructure images of the sample, helping researchers understand its crystal structure, defect distribution, and other information. The focused ion beam grid 41 is made of metallic copper, which possesses good conductivity and mechanical stability, enabling it to withstand the focused ion beam without deformation or damage. For samples that react chemically with copper or require special conductivity or thermal conductivity, the focused ion beam grid 41 can also be made of metallic materials such as molybdenum or nickel, or non-metallic materials such as carbon fiber.
[0052] In some embodiments, a window 312 is provided on the side of the housing 31; the telescopic assembly 33 includes: a moving member 331, a handle 332, and a spring assembly 333. The moving member 331 is disposed inside the housing 31 and is capable of moving towards or away from the opening 311. The handle 332 is disposed on the side of the moving member 331 and extends through the window 312 to the outside of the housing 31, and the handle 332 is capable of driving the moving member 331 to move towards or away from the opening 311 within the range defined by the window 312. The spring piece assembly 333 is disposed at the bottom of the moving member 331 and located inside the housing 31. It includes multiple spring pieces 3331. The multiple spring pieces 3331 can move in a direction close to or away from the opening 311 under the drive of the moving member 331 and open after extending out of the housing 31. The bottom of each spring piece 3331 has a bent portion 3332. The bent portion 3332 can fit against the back surface S2 of the sample rod 42 after the spring piece 3331 passes through the through hole 422 of the sample rod 42.
[0053] When the sample is fixed using the sample fixing device, the focused ion beam grid 41 with the sample is first placed at the sample placement point 421, and then the fixing ring 32 is placed on the surface of the grid 41. The opening 311 of the housing 31 is placed at the through hole 422. The handle 332 is pulled to move the telescopic component 33 toward the opening 311. The spring sheet group 333 opens after passing through the through hole 422 from the front S1 of the sample rod 42. The multiple spring sheets 3331 move away from each other under the action of elastic force and approach the bottom surface S2 of the periphery of the through hole 422 respectively. The multiple bent parts 3332 are attached to the back S2 of the sample rod 42. The sample fixing device is in a fixed state.
[0054] In some embodiments, the handle 332 and the moving component 331 are integrally formed. In other embodiments, the handle 332 and the moving component 331 may also be configured as detachable structures to facilitate subsequent maintenance and replacement.
[0055] In some embodiments, both the housing 31 and the moving member 331 are cylindrical, and the length of the handle 332 is greater than the diameter difference between the housing 31 and the moving member 331, to ensure that the handle 332 can extend from the housing 31. Simultaneously, the range of motion of the handle 332 is limited to the edges of the window 312. When the handle 332 is located at the edge of the window 312 near the bottom of the housing 31, the handle 332 can support the moving member 331, preventing the spring assembly 333 from excessively descending and affecting the fixing effect; the distance between the handle 332 and the bent portion 3332 is equal to or slightly greater than the minimum distance between the window 312 and the bottom of the housing 31.
[0056] In some embodiments, the side of the housing 31 is provided with at least one opening 313, and the opening 313 is located on the side of the window 312 near the opening 311. The telescopic component 33 further includes: an elastic coil 334, located inside the housing 31 and sleeved on the spring sheet group 333. At least one end 3341 of the elastic coil 334 extends out from the opening 313. The elastic coil 334 can be tightened when both ends are subjected to force, thereby tightening the spring sheet group 333, and return to its original shape under the action of its own elastic force when both ends are not subjected to force.
[0057] In this embodiment, the housing 31 has two openings 313 on its side, and the second end 3342 of the elastic coil 334 extends out from the other opening 313. The elastic coil 334 can be tightened when the first end 3341 and the second end 3342 are subjected to tension.
[0058] In some embodiments, the distance between the opening 313 and the opening 311 is less than the length of the spring assembly 333, so as to ensure that the spring assembly 333 can smoothly extend out of the opening 311 and avoid the presence of the elastic coil 334 from hindering the movement of the spring assembly 333 or the moving member 331.
[0059] In some embodiments, the spring assembly 333, after being tightened, can retract into the housing 31 under the action of the handle 332 and the moving member 331, thereby releasing the fixation of the retaining ring 32. Figure 6 As shown, when the sample fixing device is in the fixed state, pulling the first end 3341 and the second end 3342 of the elastic coil 334 causes the elastic coil 334 to contract and tighten the spring sheet assembly 333, separating the bent part 3332 from the back side S2 of the sample rod 42. At this time, pulling the handle 332 drives the moving part 331 and the spring sheet assembly 333, causing the spring sheet assembly 333 to retract into the housing 31, and the sample fixing device is in the unlocked state. At this time, the sample fixing device and the focused ion beam grid 41 can be removed from the front side S1 of the sample rod 42 in sequence, avoiding the problem of the focused ion beam grid falling or colliding with other components during the traditional sampling process, which causes the sample to fall off, ensuring that the sample can meet the requirements of subsequent testing.
[0060] Please see Figure 7 This is a schematic diagram of the second embodiment of the sample fixing device of this utility model. Figure 7 The illustrated embodiments and Figures 3-6 Unlike the embodiment shown, the second end 3342 of the elastic coil 334 is fixed to the inner wall of the housing 31, and the elastic coil 334 can be tightened when the first end 3341 is subjected to tension. By fixing the second end 3342 of the elastic coil 334 to the inner wall of the housing 31, the elastic coil 334 can be tightened simply by pulling the first end 3341, reducing the difficulty of retracting the spring assembly 333.
[0061] Please see Figure 8 This is a schematic diagram of the third embodiment of the sample fixing device described in this utility model. Figure 8 The illustrated embodiments and Figure 7 Unlike the embodiment shown, the telescopic assembly also includes a spring 335. One end of the spring 335 is connected to the top of the moving part 331, and the other end is connected to the top of the inner wall of the housing 31. The spring 335 is in a stretched state when the spring sheet group passes through the through hole 422 of the sample rod 42 and is in contact with the back side S2 of the sample rod 42. After the spring sheet group 333 is tightened, it can drive the moving part to move away from the opening 311, thereby retracting the spring sheet group 333 into the housing 31, thus canceling the fixation of the fixing ring 32.
[0062] In this embodiment, during sample placement, the handle 332 drives the moving part 331 to move towards the opening 311, causing the spring 335 to be in a stretched state. The bent portion 3342 maintains force balance by adhering to the back surface S2 of the sample rod 42. During sample collection, pulling the elastic coil 334 tightens the spring sheet assembly 333, which then retracts into the housing 31 under the force of the spring 335. In this embodiment, the sample fixing device only requires pulling the elastic coil 334 to automatically retract the spring sheet assembly 333 during sample collection, eliminating the need to pull the handle 332, thus reducing operational difficulty and making the process more convenient and faster.
[0063] It should be noted that references to "an embodiment," "an embodiment," "an exemplary embodiment," "some embodiments," etc., in the specification indicate that the described embodiments may include specific features, structures, or characteristics, but each embodiment may not necessarily include that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure, or characteristic is described in connection with an embodiment, whether explicitly described or not, implementing such a feature, structure, or characteristic in conjunction with other embodiments is within the knowledge of those skilled in the art.
[0064] Generally, terms can be understood at least partially from their usage in context. For example, the term "one or more," as used herein, depends at least partially on the context and can be used to describe any feature, structure, or characteristic in a singular sense, or in a plural sense, to describe a combination of features, structures, or characteristics. Similarly, terms such as "a," "a," or "the" can also be understood, at least partially on the context, to express either a singular or plural usage. Furthermore, the term "based on" can be understood not necessarily to express an exclusive set of factors, but rather, alternatively, also at least partially on the context, to allow for the presence of other factors that are not necessarily explicitly described. It should also be noted in this specification that "connection / coupling" refers not only to a direct coupling of one component to another, but also to an indirect coupling of one component to another via an intermediate component.
[0065] It should be noted that the terms "comprising" and "having," and their variations, used in this utility model document are intended to cover non-exclusive inclusion. The terms "first," "second," etc., are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence, unless explicitly indicated by the context. It should be understood that such data used interchangeably where appropriate. Furthermore, embodiments and features within embodiments of this utility model can be combined with each other without conflict. In addition, descriptions of well-known components and technologies have been omitted in the above description to avoid unnecessarily obscuring the concepts of this utility model. In the various embodiments described above, each embodiment focuses on its differences from other embodiments; similar / identical parts between embodiments can be referred to mutually.
[0066] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.
Claims
1. A sample fixing device for fixing a focused ion beam grid, on which the sample is fixed, to a sample placement area on the front side of a sample holder of a transmission electron microscope, the sample holder having a through hole adjacent to the sample placement area, the through hole penetrating the front and back sides of the sample holder; characterized in that, The sample fixation device includes: A housing having an opening at its bottom; A fixing ring, connected to the bottom of the housing and located on the same plane as the bottom of the housing, is used to fix the focused ion beam grid; A telescopic component is located inside the housing. One end of the telescopic component near the opening can extend out of the housing and pass through the through hole of the sample rod to fit against the back of the sample rod to fix the fixing ring when the fixing ring is set at the sampling position, or it can retract into the housing and unfit against the back of the sample rod to unlock the fixing ring.
2. The sample fixing device according to claim 1, characterized in that, A window is provided on the side of the housing; the telescopic assembly includes: A moving component, disposed within the housing, is capable of moving in a direction toward or away from the opening; A handle is provided on the side of the moving part, extends through the window to the outside of the housing, and the handle can drive the moving part to move in a direction closer to or away from the opening within the range defined by the window; A spring sheet assembly is disposed at the bottom of the moving part and can extend out of the housing. The spring sheet assembly includes multiple spring sheets, which can move in a direction close to or away from the opening under the drive of the moving part and open after extending out of the housing. Each spring sheet has a bent portion at its bottom, which can fit against the back of the sample rod after the spring sheet passes through the through hole of the sample rod.
3. The sample fixing device according to claim 2, characterized in that, The handle and the moving part are integrally formed.
4. The sample fixing device according to claim 2, characterized in that, Both the housing and the moving part are cylindrical, and the length of the handle is greater than the difference in diameter between the housing and the moving part.
5. The sample fixing device according to claim 2, characterized in that, The side of the housing is also provided with at least one opening, and the opening is located on the side of the window near the opening. The telescopic assembly further includes: An elastic coil is located inside the housing and sleeved on the spring sheet assembly. At least one end of the elastic coil extends out from the opening. The elastic coil can be tightened when force is applied at both ends, thereby tightening the spring sheet assembly.
6. The sample fixing device according to claim 5, characterized in that, The second end of the elastic coil is fixed to the inner wall of the housing, and the elastic coil can be tightened when the first end is subjected to tension.
7. The sample fixing device according to claim 5, characterized in that, The housing has two openings on its side, and the second end of the elastic coil extends out from the other opening. The elastic coil can be tightened when the first end and the second end are subjected to tension.
8. The sample fixing device according to claim 5, characterized in that, The distance between the opening and the aperture is less than the length of the spring assembly.
9. The sample fixing device according to claim 5, characterized in that, The spring assembly can be retracted into the housing after tightening, driven by the handle and the moving part, thereby releasing the fixation of the retaining ring.
10. The sample fixing device according to claim 5, characterized in that, The telescopic assembly also includes a spring, one end of which is connected to the top of the moving part and the other end is connected to the top of the inner wall of the housing. The spring is in a stretched state when the spring group passes through the through hole of the sample rod and is in contact with the back of the sample rod. It can drive the moving part to move away from the opening after the spring group is tightened, thereby retracting the spring group into the housing and thus canceling the fixation of the fixing ring.