Cover opening structure and semiconductor device

Abstract

A cover opening structure and a semiconductor device, the cover opening structure is connected with a cover body and is used for enabling the cover body to open or close an opening of a cavity, and the cover opening structure comprises a fixing structure fixedly arranged at the edge of the cover body; the first base is located on the side wall of the cavity, and a positioning hole is formed in the first base; the rotating shaft is fixedly connected with the fixing structure and is in running fit with the first base; the rotating arm is fixedly connected with the rotating shaft and used for driving the cover body to open or close the opening, a through hole is formed in the rotating arm, and the through hole, the positioning hole and the rotating shaft have the same extending direction; and the positioning structure is used for penetrating through the through hole and entering the positioning hole of the first base. The opening is usually located at the top of the cavity, the corresponding rotating shaft is horizontally arranged, so that the cover body is easier to open and close, and the through hole, the positioning hole and the rotating shaft have the same extension direction, so that the positioning structure can be horizontally inserted or taken out from the side surface, and the space required during operation is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, and more particularly to a cover-opening structure and a semiconductor device. Background Technology

[0002] In semiconductor manufacturing, processes such as deposition and etching are critical production steps, typically performed in specialized equipment, such as process chambers. A process chamber consists of a chamber body and a cover. To ensure process stability and long-term reliable operation of the equipment, regular maintenance is required. This necessitates that the equipment have a structure that allows for easy opening of the cover, enabling personnel to conveniently inspect, clean, and replace internal components.

[0003] Existing semiconductor devices are typically equipped with a capping mechanism. In operation, the capping mechanism ensures a tight seal between the top cover and the cavity, allowing for a vacuum to be created inside to provide a suitable process environment. When maintenance is required, the top cover is opened via the capping mechanism, exposing the internal components of the cavity and the components on the top cover for easy disassembly and maintenance.

[0004] However, existing opening structures require a large operating space for positioning or releasing the cover during operation, which not only affects the efficiency of the equipment but may also threaten the safety of operators and the equipment itself, such as by damaging parts. Therefore, there is an urgent need for an improved opening structure to solve these problems. Utility Model Content

[0005] The present invention addresses the problem of providing a cover-opening structure and a semiconductor device for reducing the operating space required during the opening or closing of a cavity.

[0006] To address the aforementioned problems, this utility model provides a cover opening structure connected to a cover body for opening or closing the opening of a cavity. The cover opening structure includes: a fixing structure fixedly disposed on the edge of the cover body; a first base located on the side wall of the cavity, the first base having a positioning hole; a rotating shaft fixedly connected to the fixing structure and rotatably engaged with the first base; a rotating arm fixedly connected to the rotating shaft for driving the cover body to open or close the opening, the rotating arm having a through hole, the through hole, the positioning hole, and the rotating shaft having the same extending direction; and a positioning structure for penetrating the through hole and entering the positioning hole of the first base.

[0007] Optionally, the positioning hole is located on the side of the first base facing the rotating arm. The positioning hole includes an open positioning hole and a closed positioning hole spaced apart from each other. The open positioning hole is used to cooperate with the positioning structure when the opening is open; the closed positioning hole is used to cooperate with the positioning structure when the opening is closed.

[0008] Optionally, the opening hole and the closing hole are located on the same arc with the rotation axis as the center.

[0009] Optionally, the first base further includes: a plurality of angle adjustment holes disposed between the open position hole and the closed position hole, wherein the open position hole, the closed position hole and the plurality of angle adjustment holes are located on the same arc with the rotation axis as the center.

[0010] Optionally, the rotating arm has a square hole, and the end of the rotating shaft is a square shaft, with the square shaft engaging with the square hole to transmit torque; or, the rotating arm and the rotating shaft engage with a key to transmit torque.

[0011] Optionally, a fan-shaped groove is provided on the side of the rotating arm facing the first base; the opening structure further includes: a cylindrical pin, which is fixedly disposed on the side of the first base facing the rotating arm, and the cylindrical pin protrudes from the surface of the first base and is slidably disposed in the fan-shaped groove.

[0012] Optionally, the opening structure further includes: a second base located on the side of the fixing structure away from the first base, the second base being fixedly mounted on the side wall of the cavity; the end of the rotating shaft away from the first base being rotatably connected to the second base.

[0013] Optionally, the positioning structure includes a knob plunger.

[0014] Optionally, the fixing structure has a through polygonal hole, and the part of the rotating shaft that is fixedly connected to the fixing structure is a polygonal shaft.

[0015] This utility model embodiment also provides a semiconductor device, including: a cavity having an opening; a cover covering the opening; and the aforementioned opening structure, which is connected to both the cavity and the cover, for allowing the cover to be flipped to open or close the opening of the cavity.

[0016] Compared with the prior art, the technical solution of this utility model embodiment has the following advantages:

[0017] The opening structure provided in this embodiment of the utility model is connected to the cover body and is used to open or close the opening of the cavity. The opening structure includes: a fixing structure, fixedly disposed on the edge of the cover body; a first base, located on the side wall of the cavity, the first base having a positioning hole; a rotating shaft, fixedly connected to the fixing structure and rotatably engaged with the first base; a rotating arm, fixedly connected to the rotating shaft, used to drive the cover body to open or close the opening, the rotating arm having a through hole, the through hole, the positioning hole, and the rotating shaft having the same extending direction; and a positioning structure, used to penetrate the through hole and connect to the positioning hole on the first base. When the opening structure is used to open the opening of the cavity, the positioning structure is removed from the through hole and the positioning hole; force is applied to the rotating arm, so that the rotating shaft rotates relative to the first base under the drive of the rotating arm, and the fixing structure fixedly connected to the rotating shaft also rotates accordingly, ultimately causing the cover body to flip relative to the cavity, thereby opening the opening of the cavity. When closing the cavity opening using the cover-opening structure, the positioning structure is removed from the through hole and positioning hole. Force is applied to the rotating arm, causing the rotating shaft to rotate relative to the first base. This causes the fixed structure, which is fixedly connected to the rotating shaft, to also rotate, ultimately causing the cover to flip relative to the cavity, thus closing the cavity opening. Because the opening is usually located at the top of the cavity, the rotating shaft is horizontally positioned to facilitate opening or closing the cavity opening. Since the through hole on the rotating arm and the positioning hole on the first base have the same extending direction as the rotating shaft, the corresponding positioning structure is installed or removed horizontally from the side through the through hole and positioning hole, reducing the operating space during the opening or closing process. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the opening structure of an embodiment of this utility model;

[0019] Figure 2 This is a schematic diagram of the rotating arm in an embodiment of the present invention;

[0020] Figure 3 This is a schematic diagram of the structure of the first base in an embodiment of this utility model;

[0021] Figure 4 This is a schematic diagram of the structure of the rotating shaft in an embodiment of the present invention;

[0022] Figure 5 and Figure 6 This is a schematic diagram of the structure of the cover-opening structure closing the opening of the chamber in the semiconductor device according to an embodiment of the present invention;

[0023] Figure 7 yes Figure 6 Sectional view at point BB;

[0024] Figure 8 yes Figure 7 A partial method diagram at point A in the middle;

[0025] Figure 9 This is a schematic diagram of the opening of the chamber in the cover-opening structure of the semiconductor device according to an embodiment of the present invention;

[0026] Figure 10 This is a schematic diagram of the cover during the flipping process of an embodiment of the present invention. Detailed Implementation

[0027] As can be seen from the background technology, existing lid-opening structures have the following problems during operation. First, the operating space required for positioning or releasing the lid is relatively large. Second, excessive rotation of the lid can easily cause injury to personnel or equipment. These problems not only affect the efficiency of equipment use but may also threaten the safety of operators. Therefore, an improved lid-opening structure is urgently needed to solve these problems.

[0028] To solve the aforementioned technical problem, this utility model provides a cover-opening structure connected to a cover body for opening or closing the cavity opening. The cover-opening structure includes: a fixing structure fixedly disposed on the edge of the cover body; a first base located on the side wall of the cavity, the first base having a positioning hole; a rotating shaft fixedly connected to the fixing structure and rotatably engaged with the first base; a rotating arm fixedly connected to the rotating shaft for driving the cover body to open or close the opening, the rotating arm having a through hole, the through hole, the positioning hole, and the rotating shaft having the same extending direction; and a positioning structure penetrating the through hole and connected to the positioning hole on the first base. When opening the cavity opening using the cover-opening structure, the positioning structure is removed from the through hole and the positioning hole; force is applied to the rotating arm, causing the rotating shaft to rotate relative to the first base under the drive of the rotating arm, thereby causing the fixing structure fixedly connected to the rotating shaft to also rotate, ultimately causing the cover body to flip relative to the cavity, thus opening the cavity opening. When closing the cavity opening using the cover-opening structure, the positioning structure is removed from the through hole and positioning hole. Force is applied to the rotating arm, causing the rotating shaft to rotate relative to the first base. This causes the fixed structure, which is fixedly connected to the rotating shaft, to also rotate, ultimately causing the cover to flip relative to the cavity, thus closing the cavity opening. Because the opening is usually located at the top of the cavity, the rotating shaft is horizontally positioned to facilitate opening or closing the cavity opening. Since the through hole on the rotating arm and the positioning hole on the first base have the same extending direction as the rotating shaft, the corresponding positioning structure is installed or removed horizontally from the side through hole and positioning hole, greatly reducing the required operating space.

[0029] To make the above-mentioned objectives, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0030] Combination Figures 1 to 4 ,refer to Figures 5 to 10 This utility model embodiment provides an opening structure 100 (such as...). Figure 1 As shown), and the cover 10 (as shown) Figure 5 (As shown) connection, used to open or close the cavity 20 (as shown) of the cover 10. Figure 5 The opening 11 (as shown) Figure 9 As shown), the opening structure 100 includes: a fixing structure 101 (as shown in the figure). Figure 1 As shown), it is fixedly installed on the edge of the cover 10; the first base 102 (as shown) Figure 1 As shown), located on the side wall of the cavity 20, the first base 102 is provided with a positioning hole 103 (as shown). Figure 3 As shown); Rotating shaft 104 (as shown) Figure 1 As shown), it is fixedly connected to the fixed structure 101 and to the first base 102 (as shown). Figure 1 (As shown) Rotational fit; Rotating arm 105 (as shown) Figure 1 As shown), it is fixedly connected to the rotating shaft 104 and is used to drive the cover 10 to open or close the opening 11. The rotating arm 105 is provided with a through hole 106 (as shown). Figure 2 As shown), the through hole 106, the positioning hole 103, and the rotating shaft 104 have the same extending direction; the positioning structure 107 (as shown) Figure 1 As shown), it is used to penetrate the through hole 106 and connect to the positioning hole 103 on the first base 102.

[0031] In this embodiment of the invention, when the opening 11 of the cavity 20 is opened using the cover opening structure 100, the positioning structure 107 is first removed from the through hole 106 and the positioning hole 103; force is applied to the rotating arm 105, causing the rotating shaft 104 to rotate relative to the first base 102 under the drive of the rotating arm 105, and the fixed structure 101 fixedly connected to the rotating shaft 104 also rotates accordingly, ultimately causing the cover 10 to flip relative to the cavity 20, thereby opening the opening 11 of the cavity 20. When the opening 11 of the cavity 20 is closed using the cover opening structure 100, the positioning structure 107 is first removed from the through hole 106 and the positioning hole 103; force is applied to the rotating arm 105, causing the rotating shaft 104 to rotate relative to the first base 102 under the drive of the rotating arm 105, and the fixed structure 101 fixedly connected to the rotating shaft 104 also rotates accordingly, ultimately causing the cover 10 to flip relative to the cavity 20, thereby closing the opening 11 of the cavity 20. Since the opening 11 is usually located at the top of the cavity 20, the rotating shaft 104 is horizontally arranged to facilitate the operation of opening or closing the opening 11 of the cavity 20 by flipping the cover 10. Because the through hole 106 on the rotating arm 105 and the positioning hole 103 on the first base 102 have the same extension direction as the rotating shaft 104, the corresponding positioning structure 107 is horizontally inserted into the through hole 106 and the positioning hole 103 from the side or taken out from the through hole 106 and the positioning hole 103 when it is installed or removed, which greatly reduces the required operating space.

[0032] The fixing structure 101 is fixedly installed on the edge of the cover 10.

[0033] The fixing structure 101 securely connects the opening structure 100 to the cover 10, enabling the cover 10 to open and close via the opening structure 100. When it is necessary to open or close the opening 11 of the cavity 20, the rotating arm 105 drives the rotating shaft 104 to rotate. Since the fixing structure 101 is fixedly connected to the rotating shaft 104, it moves along with the rotation of the rotating shaft 104. This movement is directly transmitted to the cover 10, causing the cover 10 to flip relative to the cavity 20, thereby achieving the purpose of opening or closing the opening 11 of the cavity 20. In addition, the fixing structure 101, located at the edge of the cover 10, provides a stable support point when the cover 10 is opened.

[0034] In this embodiment, the fixing structure 101 is fixedly connected to the edge of the cover 10 by screws. In other embodiments, the fixing structure and the cover may adopt other fixing methods.

[0035] The first base 102 is located on the side wall of the cavity 20.

[0036] The first base 102 provides stable rotation and support for the rotating shaft 104, and provides a stable rotation fulcrum for the rotating shaft 104, thereby improving the accuracy and reliability of the cover 10 during the opening and closing process.

[0037] In this embodiment, the first base 102 and the side wall of the cavity 20 are fixed with screws, ensuring stability during the opening and closing of the cover 10. In other embodiments, the first base and the cavity can also be joined by welding or riveting. In some other embodiments, the first base can be a component of the cavity, meaning the first base and the cavity are an integral structure, machined as a whole.

[0038] In this embodiment, the first base 102 is fixedly disposed on the side wall of the cavity 20 near the opening 11. Both the first base 102 and the rotating arm 105 are connected to the rotating shaft 104. The position of the first base 102 affects the movement trajectory and range of the rotating arm 105. The first base 102 being fixed on the side wall of the cavity 20 near the opening 11 helps to reduce the torque when opening and closing the cover, making the operation of flipping the cover 10 easier.

[0039] In this embodiment, the first base 102 is provided with an open positioning hole 108 and a closed positioning hole 109 spaced apart on the side facing the rotating arm 105. The open positioning hole 108 is used to cooperate with the positioning structure 107 when the opening 11 is open; the closed positioning hole 109 is used to cooperate with the positioning structure 107 when the opening 11 is closed.

[0040] It should also be noted that the first base 102 is provided with a positioning hole 103. The positioning hole 103 is used to cooperate with the positioning structure 107. During the opening or closing of the cover 10, when it is necessary to fix the position of the cover 10, the position of the cover 10 is locked by cooperating with the positioning structure 107 through the positioning hole 103. In addition, the positioning hole 103 is also used to prevent the cover 10 from being opened or closed accidentally, thereby improving the safety of equipment operation.

[0041] In this embodiment, the positioning hole 103 is located on the side of the first base 102 facing the rotating arm 105. This allows the positioning structure 107 to pass through the through hole 106 on the rotating arm 105 and be inserted into the positioning hole 103, enabling the cover 10 to be locked or released at a specific position, thus improving the safety and reliability of the entire opening structure 100.

[0042] In this embodiment, the positioning hole 103 includes an open positioning hole 108 and a closed positioning hole 109 spaced apart. The open positioning hole 108 is used to cooperate with the positioning structure 107 when the opening 11 is open; the closed positioning hole 109 is used to cooperate with the positioning structure 107 when the opening 11 is closed. By cooperating with the open positioning hole 108 and the closed positioning hole 109, the positioning hole 103 realizes the locking function during the opening or closing of the chamber opening 11 of the cover 10. By setting the open positioning hole 108 and the closed positioning hole 109, the rotation angle of the rotating arm 105 is limited, which solves the technical problem that excessive rotation angle can easily cause injury to personnel or equipment compared with the prior art.

[0043] In this embodiment, the open positioning hole 108 and the closed positioning hole 109 are located on the same arc with the rotation axis 104 as the center.

[0044] During the process of opening or closing the opening 11 of the cavity 20, the rotating arm 105 drives the rotating shaft 104 to rotate. Because the open position hole 108 and the closed position hole 109 are located on the same arc with the rotating shaft 104 as the center, when the cover 10 reaches the predetermined position during the opening or closing process, the positioning structure 107 can selectively insert into the open position hole 108 or the closed position hole 109 through the through hole 106 on the rotating arm 105, which helps to simplify the complexity of the cover opening structure 100.

[0045] It should be noted that the first base 102 also includes a plurality of angle adjustment holes 110, which are disposed between the open position hole 108 and the closed position hole 109, and the open position hole 108, the closed position hole 109 and the plurality of angle adjustment holes 110 are located on the same arc with the rotation axis 104 as the center.

[0046] During the process of opening or closing the opening 11 of the cavity 20, the positioning structure 107 can be inserted into different angle adjustment holes 110 to lock the cover 10 at different angles, which can meet the equipment maintenance needs at specific angles. Moreover, the open position hole 108, the closed position hole 109, and the multiple angle adjustment holes 110 are located on the same arc with the rotation axis 104 as the center, so that the positioning structure 107 can selectively insert into the open position hole 108 or the closed position hole 109 through the through hole 106 on the rotating arm 105, which helps to simplify the complexity of the cover opening structure 100.

[0047] The rotating shaft 104 is fixedly connected to the fixed structure 101 and rotatably engaged with the first base 102.

[0048] The rotating shaft 104 is fixedly connected to the fixed structure 101, which firmly combines the opening structure 100 and the cover 10 together, and plays the role of transmitting torque, so that the rotating shaft 104 can drive the cover 10 to flip. At the same time, the rotating shaft is rotatably connected to the first base 102, so that the rotating shaft 104 can rotate relative to the cavity 20, providing a rotation fulcrum for the opening and closing action of the cover 10.

[0049] In this embodiment, the fixing structure 101 has a through polygonal hole 111a, and the part of the rotating shaft 104 that is fixedly connected to the fixing structure 101 is a polygonal shaft 112a (e.g., Figure 4 (As shown). The polygonal hole 111a includes, but is not limited to, a square hole or a pentagonal hole, and the corresponding polygonal shaft 112a includes, but is not limited to, a square shaft, a pentagonal shaft, or a quincunx shaft. The polygonal hole 111a and the polygonal shaft 112a cooperate to achieve a rigid connection between the fixed structure 101 and the rotating shaft 104, effectively transmitting torque, which is beneficial to the stability and accuracy of opening or closing the opening 11 of the cavity 20 of the cover 10, and prevents relative sliding or rotation between the fixed structure 101 and the rotating shaft 104.

[0050] It should be noted that the part of the rotating shaft 104 that rotatably engages with the first base 102 is a round shaft 118. The round shaft 118 ensures that the rotating shaft 104 is subjected to uniform force during rotation, reducing friction and wear, and improving the service life and operational smoothness of the opening structure 100.

[0051] The opening structure 100 also includes a bushing (not shown in the figure), disposed between the rotating shaft 104 and the fixed structure 101. The bushing, disposed between the rotating shaft 104 and the fixed structure 101, can significantly reduce the direct friction between the rotating shaft 104 and the fixed structure 101, thereby reducing the resistance during the opening or closing of the cover 10 and reducing any possible shaking or offset during the rotation of the rotating shaft 104; furthermore, it can effectively extend the service life of the rotating shaft 104 and the fixed structure 101.

[0052] It should be noted that the bushing is usually designed as a cylinder, and the inner diameter of the bushing matches the outer diameter of the rotating shaft 104, while the outer diameter of the bushing matches the inner diameter of the corresponding hole in the fixing structure 101.

[0053] In this embodiment, the bushing may be installed in the fixed structure 101 with an interference fit to ensure that it will not loosen or fall off during use. A sliding fit may be used between the bushing and the rotating shaft 104 to allow the rotating shaft 104 to rotate freely.

[0054] The rotating arm 105 is fixedly connected to the rotating shaft 104 and is used to drive the cover 10 to open or close the opening 11.

[0055] The rotating arm 105 is a drive component that provides power for opening or closing the cover 10. Specifically, the rotating arm 105 is fixedly connected to the rotating shaft 104, which converts the applied force into the rotational motion of the cover 10, so that the applied force is effectively transmitted, thereby realizing the opening or closing of the opening 11 of the cavity 20.

[0056] In this embodiment, the rotating arm 105 is a rod-shaped structure. One end of the rotating arm 105 is fixedly connected to the rotating shaft 104, and the other end of the rotating arm 105 is shaped to be easy to hold, so as to improve the ease of operation.

[0057] In this embodiment, the rotating arm 105 has a square hole 111b, and the end of the rotating shaft 104 is a square shaft 112b (e.g., ...). Figure 4 As shown, the square shaft 112b of the rotating shaft 104 engages with the square hole 111b to transmit torque, so that during the opening or closing of the cavity 20 opening 11 of the cover 10, the rotational motion of the rotating arm 105 can be transmitted to the rotating shaft 104, thereby driving the entire cover 10 to perform a stable and controllable opening and closing action. In other embodiments, the rotating arm and the rotating shaft can also be engaged by a key to transmit torque.

[0058] It should be noted that the rotating arm 105 is provided with a through hole 106, and the through hole 106, the positioning hole 103, and the rotating shaft 104 have the same extending direction. The fact that the through hole 106, the positioning hole 103, and the rotating shaft 104 have the same extending direction allows the positioning structure 107 to pass through both the through hole 106 of the rotating arm 105 and the positioning hole 103 of the first base 102 simultaneously, thereby achieving reliable locking and convenient release of the cover 10 at a specific position. Furthermore, the fact that the through hole 106, the positioning hole 103, and the rotating shaft 104 have the same extending direction simplifies the insertion and removal operation of the positioning structure 107, improving the overall efficiency of the opening process.

[0059] like Figure 2 As shown, the rotating arm 105 includes a first end 105a and a second end 105b, the first end 105a being rotatably connected to the rotating shaft 104; the opening structure 100 further includes an assisting structure 112, the assisting structure 112 being rotatably connected to the second end 105b of the rotating arm 105.

[0060] The first end 105a of the rotating arm 105 is rotatably connected to the rotating shaft 104, so that the rotating arm 105 can rotate with the rotating shaft 104, thereby driving the cover 10 to open or close the opening 11 of the cavity 20. The connection between the second end 105b and the assist structure 112 provides additional force support during the opening or closing process.

[0061] In this embodiment, the second end 105b of the rotating arm 105 is rotatably connected to the assist structure 112, so that the assist structure 112 changes position as the rotating arm 105 rotates during the opening of the cover.

[0062] It should be noted that the second end 105b of the rotating arm 105 is provided with a cylindrical protrusion 113, and the auxiliary structure 112 is provided with a circular hole for rotating engagement with the cylindrical protrusion 113 of the second end 105b of the rotating arm 105.

[0063] It should also be noted that a support structure 116 is provided at the bottom of the cavity 20. The end of the assist structure 112 away from the rotating arm 105 is connected to the support structure 116. As an example, the support structure 116 is a support leg.

[0064] In this embodiment, the assist structure 112 includes a nitrogen spring. The nitrogen spring can provide a large thrust in the initial stage of opening the cover 10, and the thrust gradually decreases as the opening angle of the cover 10 increases, thereby achieving a smooth opening process of the cover 10. In other embodiments, the assist structure includes a telescopic rod, a cylinder, or a hydraulic cylinder.

[0065] In this embodiment, the through hole 106 is a circular hole with a diameter slightly larger than that of the positioning structure 107, so as to ensure that the positioning structure 107 can pass through smoothly.

[0066] In this embodiment, a fan-shaped groove 114 is provided on the side of the rotating arm 105 facing the first base 102. The opening structure 100 further includes a cylindrical pin 115, which is fixedly disposed on the side of the first base 102 facing the rotating arm 105, and the cylindrical pin 115 protrudes from the surface of the first base 102, and the cylindrical pin 115 is slidably disposed in the fan-shaped groove 114.

[0067] The sector groove 114 and the cylindrical pin 115 are arranged facing each other, so that the sector groove 114 on the rotating arm 105 and the cylindrical pin 115 on the first base 102 together form a limiting mechanism. Through the arc design of the sector groove 114, the maximum rotation angle of the rotating arm 105 can be controlled, thereby precisely controlling the maximum rotation angle of the cover 10 and preventing excessive opening. While the cylindrical pin 115 is fixed on the first base 102, it slides in the sector groove 114, which restricts the movement trajectory of the rotating arm 105. When the cover is opened to the correct position, the cylindrical pin 115 is located at the end of the sector groove 114, which can prevent the cover 10 from continuing to rotate and play a self-locking role.

[0068] In this embodiment, the curvature of the sector groove 114 determines the maximum rotation angle of the rotating arm 105.

[0069] It should be noted that the width of the sector groove 114 is slightly larger than the diameter of the cylindrical pin 115, in order to ensure that the cylindrical pin 115 slides smoothly in the sector groove 114.

[0070] In this embodiment, the cylindrical pin 115 is fixed to the first base 102 by welding, threaded connection or other means, so that the cylindrical pin 115 and the first base 102 are stably connected.

[0071] The opening structure 100 further includes: a second base 117 located on the side of the fixing structure 101 away from the first base 102; the end of the rotating shaft 104 away from the first base 102 is rotatably connected to the second base 117.

[0072] The first base 102 provides a support point for one end of the rotating shaft 104, and the second base 117 provides a support point for the rotating shaft 104 away from the end of the first base 102, so that both ends of the rotating shaft 104 are supported, and the rotating shaft 104 can rotate stably.

[0073] In this embodiment, the second base 117 is fixed to the cavity 20 by bolts or welding. In other embodiments, the second base may also be a component of the cavity, that is, the second base and the cavity are an integral structure and are machined as a whole.

[0074] It should be noted that a first base 102, a fixed structure 101 and a rotating shaft 104 constitute a cover opening unit. The cover opening structure 100 may include 1 to 3 cover opening units, with 2 being the preferred embodiment, and the two cover opening units are arranged symmetrically.

[0075] The two opening units are symmetrically arranged, which can evenly distribute the force during the process of opening or closing the opening 11 of the cavity 20 by the cover 10, reducing the possibility of deflection or jamming, thereby improving the operational stability of the opening structure 100. Moreover, the two opening units work together to withstand a greater load.

[0076] In this embodiment, there is one second base 117, which is disposed between the two opening units.

[0077] The second base 117 is positioned between the two opening units, making the opening structure 100 symmetrically arranged. This helps to balance the forces on the entire opening structure 100 and ensures the synchronous movement of the opening units on both sides.

[0078] Specifically, the rotating shaft 104 is rotatably mounted in the second base 117. The second base 117 serves as a support point for the rotating shaft 104, enhancing its stability and facilitating the reliable operation of the cover-opening structure 100.

[0079] As an example, the rotating shaft 104 is rotatably disposed in the second base 117 via a bearing, or rotatably disposed in the second base 117 via a bushing.

[0080] In this embodiment, the end of the rotating shaft 104 away from the fixed structure 101 is exposed outside the first base 102; the rotating arm 105 is fixedly connected to the end of the rotating shaft 104 away from the fixed structure 101. The exposed end of the rotating shaft 104 allows the rotating arm 105 to be directly connected to the exposed end of the rotating shaft 104, enabling direct force application to the rotating arm 105 and facilitating transmission.

[0081] The positioning structure 107 is used to penetrate the through hole 106 and enter the positioning hole 103 of the first base 102. By penetrating the through hole 106 and entering the positioning hole 103 of the first base 102, the positioning structure 107 controls the opening and closing state of the cover 10, realizes the positioning and locking of the cover 10 in a specific position, and prevents accidental opening or closing.

[0082] In this embodiment, the positioning structure 107 includes a knob plunger. The knob plunger can be inserted into the positioning hole 103 on the first base 102 to lock the position of the cover 10 and prevent the cover 10 from being accidentally opened or closed. Specifically, the knob plunger can be inserted into or removed from the positioning hole 103 when needed by rotating, thereby locking or releasing the cover 10.

[0083] like Figure 3 As shown, the positioning hole 103 includes an open position hole 108, a closed position hole 109, and multiple angle adjustment holes 110. Through the cooperation of the positioning structure 107 with the open position hole 108, the closed position hole 109, and the multiple angle adjustment holes 110, the cover 10 can be opened at multiple angles as needed.

[0084] The following describes the process of opening and closing the cover 10 using the opening structure 100.

[0085] During the process of opening the cover 10 using the opening structure 100, the positioning structure 107 is first removed from the closed position hole 109, releasing the locked state of the cover 10. A positive force is applied to the rotating arm 105. Since the rotating arm 105 is fixedly connected to the rotating shaft 104, the rotating shaft 104 drives the fixed structure 101, which is fixedly connected to it, to rotate in the positive direction, thereby driving the cover 10 to open. During the opening process, the fan-shaped groove 114 on the rotating arm 105 engages with the cylindrical pin 115 on the first base 102, limiting the rotation range of the cover 10 and preventing over-opening. Figure 10 As shown, if it is necessary to stop at the middle position, the positioning structure 107 can be inserted into the angle adjustment hole 110 on the first base 102 to achieve multi-angle positioning of the cover 10. Figure 9 As shown, if it is necessary to stay in the maximum open position, the operator inserts the positioning structure 107 into the opening hole 108 of the first base 102 to lock the position of the cover 10.

[0086] During the closing process of the cover 100, the positioning structure 107 is removed from the opening hole 108, releasing the locking state of the cover 10. A reverse force is applied to the rotating arm 105, causing the rotating shaft 104 to drive the fixed structure 101 to rotate, thereby closing the cover 10. During the closing process, the sector groove 114 and the cylindrical pin 115 slide together to ensure the cover 10 closes smoothly. If it is necessary to stop at the intermediate position, the positioning structure 107 can be inserted into the angle adjustment hole 110 on the first base 102 to achieve multi-angle positioning of the cover 10. Figure 5 As shown, if it is necessary to completely close the opening 11 of the cavity 20, the operator inserts the positioning structure 107 into the closing position hole 109 of the first base 102 to lock the position of the cover 10.

[0087] refer to Figures 5 to 10 The present invention also provides a semiconductor device. The semiconductor device includes: a cavity 20 having an opening 11; a cover 10 covering the opening 11; and a cover opening structure 100 connected to both the cavity 20 and the cover 10, for allowing the cover 10 to be flipped open or closed by opening or closing the opening 11 of the cavity 20.

[0088] In the semiconductor device provided by this embodiment of the present invention, the through hole 106, the positioning hole 103, and the rotating shaft 104 have the same extending direction. The positioning structure 107 is used to penetrate the through hole 106 and enter the positioning hole 103. Since the opening 11 is usually located at the top of the cavity 20, the rotating shaft 104 is horizontally arranged to facilitate the operation of flipping the cover 10 to open or close the opening 11 of the cavity 20. Because the through hole 106 on the rotating arm 105 and the positioning hole 103 on the first base 102 have the same extending direction as the rotating shaft 104, the corresponding positioning structure 107 is installed or removed horizontally from the side by inserting into the through hole 106 and the positioning hole 103 or from the through hole 106 and the positioning hole 103, which greatly reduces the required operating space.

[0089] In addition, the cover opening structure 100 adopts a double safety mechanism, namely the cooperation between the cylindrical pin 115 and the sector groove 114 and the cooperation between the knob plunger and the positioning hole 103, which can reduce the risk of personnel or equipment damage due to misoperation during the opening or closing of the semiconductor device. Even if the knob plunger is forgotten to be installed, the cooperation between the sector groove 114 and the cylindrical pin 115 can still effectively prevent the cover 10 from being opened too much.

[0090] When the cover 10 is placed over the opening 11 of the cavity 20, the cavity 20 provides a closed space for wafer processing, serving as a reaction chamber for vapor deposition or plasma etching processes.

[0091] It should be noted that the opening structure 100 is located on one side of the cover body 10, and a handle 119 is provided on the side of the cover body 10 that is far away from the opening structure 100.

[0092] The handle 119 is located on the side of the cover 10 that is far away from the cover structure 100, which helps to reduce the torque during the opening and closing of the cover 10, so that the operator can easily grasp the cover 10 and perform the opening and closing operations.

[0093] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A cover opening structure, connected to a cover body, for opening or closing the opening of a cavity in the cover body, characterized in that, The opening structure includes: A fixed structure is fixedly installed on the edge of the cover; A first base is located on the side wall of the cavity, and a positioning hole is provided on the first base; A rotating shaft is fixedly connected to the fixed structure and rotatably engaged with the first base; A rotating arm, fixedly connected to the rotating shaft, is used to drive the cover to open or close the opening. The rotating arm is provided with a through hole, and the through hole, the positioning hole and the rotating shaft have the same extending direction. A positioning structure is provided for penetrating the through hole and entering the positioning hole of the first base.

2. The opening structure as described in claim 1, characterized in that, The positioning hole is located on the side of the first base facing the rotating arm. The positioning hole includes an open-position hole and a closed-position hole spaced apart. The open-position hole is used to cooperate with the positioning structure when the opening is open. The closing hole is used to cooperate with the positioning structure when the opening is closed.

3. The opening structure as described in claim 2, characterized in that, The opening and closing holes are located on the same arc centered on the rotation axis.

4. The opening structure as described in claim 2, characterized in that, The first base also includes: Multiple angle adjustment holes are provided between the open position hole and the closed position hole, and the open position hole, the closed position hole and the multiple angle adjustment holes are located on the same arc with the rotation axis as the center.

5. The opening structure as described in claim 1, characterized in that, The rotating arm has a square hole, and the end of the rotating shaft is a square shaft. The square shaft of the rotating shaft cooperates with the square hole to transmit torque. Alternatively, the rotating arm and rotating shaft can be connected by a key to transmit torque.

6. The opening structure as described in claim 1, characterized in that, A fan-shaped groove is provided on the side of the rotating arm facing the first base; The opening structure further includes a cylindrical pin, which is fixedly disposed on the side of the first base facing the rotating arm, and the cylindrical pin protrudes from the surface of the first base and is slidably disposed in the sector groove.

7. The opening structure as described in claim 1, characterized in that, The opening structure also includes: The second base is located on the side of the fixing structure opposite to the first base, and the second base is fixedly mounted on the side wall of the cavity; The end of the rotating shaft away from the first base is rotatably connected to the second base.

8. The opening structure as described in claim 1, characterized in that, The positioning structure includes a knob plunger.

9. The opening structure as described in claim 1, characterized in that, The fixed structure has a through polygonal hole, and the part of the rotating shaft that is fixedly connected to the fixed structure is a polygonal shaft.

10. A semiconductor device, characterized in that, include: A cavity having an opening; A cover, which is placed over the opening; The opening structure according to any one of claims 1 to 9, wherein the opening structure is simultaneously connected to the cavity and the cover, and is used to allow the cover to be flipped open or closed to open the opening of the cavity.

Images