Novel glass passivation quartz boat
By designing a quartz boat structure that adapts to glass materials of different sizes, the problem of increased procurement costs caused by different sizes of glass materials in the existing technology has been solved, achieving cost savings and improved process stability.
Patent Information
- Application Number
- CN202422949033.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-02
- Publication Date
- 2025-12-02
- Estimated Expiration
- 2034-12-02
AI Technical Summary
In the existing technology, the new type of quartz boat for glass passivation requires the purchase of different models of quartz boats when dealing with glass materials of different sizes, which leads to increased production costs and management complexity.
A novel quartz boat for glass passivation was designed. Through the combination of adjusting rollers and sliding plates, it can adapt to glass materials of different sizes, saving procurement costs, and the rubber plate improves the overall stability and shock resistance.
This eliminates the need to purchase different models of quartz boats, reducing procurement costs while ensuring the smooth progress of the glass passivation process and the reliability of product quality.
Smart Images
Figure CN223624947U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of quartz boat technology, and in particular to a novel glass passivated quartz boat. Background Technology
[0002] Glass passivation is a surface treatment technology. It refers to the formation of a glassy protective film on the surface of semiconductor devices (such as diodes and transistors). Quartz boats are used to support materials such as chips in semiconductor manufacturing processes. In the high-temperature environment of glass passivation, novel quartz boats resist deformation and chemical corrosion during the high-temperature process, ensuring their physical and chemical stability, thus enabling long-term stable use in the glass passivation process.
[0003] The glass-coated chip is placed in a high-temperature resistant quartz boat or other support vessel and then sent to a high-temperature furnace for sintering. The sintering temperature is generally several hundred degrees Celsius, but the specific temperature depends on the composition of the glass and the requirements of the chip. At high temperatures, the glass melts and flows on the chip surface, gradually forming a dense glassy protective film.
[0004] In existing technologies, some novel glass passivation quartz boats encounter glass pieces of varying sizes during the loading and fitting process. The appropriate quartz boat model must then be matched to the glass piece's dimensions. This means that additional time and manpower are required in the production process to manage the compatibility of the glass piece and the quartz boat. For example, a detailed inventory management system is needed to record the quantity and storage location of different quartz boat models. Furthermore, precise measurement and classification of the glass piece dimensions are required to ensure that each piece of glass can be loaded using a suitable quartz boat, resulting in significant production costs. Therefore, to address these shortcomings, a novel glass passivation quartz boat is proposed to solve these problems. Utility Model Content
[0005] To overcome the above shortcomings, this utility model provides a novel glass passivation quartz boat, which aims to improve the problem that some existing glass passivation quartz boats require the expenditure of funds to purchase different models of quartz boats when encountering glass materials of different sizes.
[0006] To achieve the above objectives, the present invention adopts the following technical solution:
[0007] A novel glass passivation quartz boat includes two upright plates. Two inclined plates are fixedly connected to adjacent sides of the two upright plates. A reinforcing component to enhance the stability of the upright plates is fixedly connected to the bottom side of the inclined plates. Two sliding columns are slidably connected to the inner walls of the upright plates. Two adjusting rollers are fixedly connected to adjacent sides of multiple sliding columns. A circular plate is fixedly connected to the side of each of the multiple sliding columns away from the adjusting rollers. A sliding plate is slidably connected to the inner wall of each sliding column. Two sliding rods are slidably connected to the inner wall of each sliding plate. A limit plate is fixedly connected to the outside of each sliding rod. A spring is fixedly connected to the side of each of the multiple sliding plates near the adjusting rollers. Two support rollers are fixedly connected to adjacent sides of the two upright plates.
[0008] As a further description of the above technical solution:
[0009] The reinforcement assembly includes a connecting plate, the top side of which is fixedly connected to the bottom side of the inclined plate, and a rubber plate is fixedly connected to the bottom side of the connecting plate away from the inclined plate.
[0010] As a further description of the above technical solution:
[0011] The inner wall of the upright plate has multiple square openings on both the upper and lower sides, and the outer side of the limiting plate is slidably connected to the inside of the square openings.
[0012] As a further description of the above technical solution:
[0013] The outer sides of the two limiting plates are slidably connected to the inner walls of the upper and lower ends of the sliding column, respectively, and the inner wall of the circular plate is slidably connected to the outer side of the sliding plate.
[0014] As a further description of the above technical solution:
[0015] The sliding plate has two inclined openings inside, and the outside of the sliding rod is slidably connected to the inside of the inclined openings;
[0016] As a further description of the above technical solution:
[0017] The sides of the multiple springs near the adjusting roller are respectively fixedly connected to the inner walls of the multiple sliding columns near the adjusting roller, and the sides of the multiple circular plates near the adjusting roller are respectively slidably connected to the opposite sides of the two vertical plates.
[0018] As a further description of the above technical solution:
[0019] The adjusting roller has multiple cavities inside, and the two limiting plates are slidably connected to the inner wall of the sliding plate at their adjacent ends.
[0020] As a further description of the above technical solution:
[0021] The two vertical plates are fixedly connected to the left and right sides of the two connecting plates respectively on their adjacent sides, and the support roller has multiple semi-circular openings inside.
[0022] This utility model has the following beneficial effects:
[0023] 1. In this utility model, by adjusting the position of the roller, after adjusting it to the desired size of the glass material, the pushing force on the sliding plate is released, so that the spring can be reset and drive the sliding plate to slide, thereby driving the sliding rod to slide, and then pushing the limiting plate to be reset and locked inside the upright plate for restriction, thus completing the adjustment of the position of the roller, so that it can adapt to different sizes of glass materials, eliminating the need to purchase different models of quartz boats, thereby saving procurement costs.
[0024] 2. In this utility model, the top side of the connecting plate is connected to the inclined plate, which increases the overall stability. At the same time, when external vibrations are transmitted to the quartz boat, the rubber plate, with its good elasticity and damping characteristics, avoids vibration interference and adheres evenly and stably to the chip surface, thereby ensuring the smooth progress of the glass passivation process and the reliability of product quality. Attached Figure Description
[0025] Figure 1 This is a perspective view of a novel glass-passivated quartz boat proposed in this utility model;
[0026] Figure 2 This is a schematic diagram of the support roller structure of a novel glass passivation quartz boat proposed in this utility model;
[0027] Figure 3 for Figure 4 Enlarged view of point A in the middle;
[0028] Figure 4 This is a schematic diagram of the sliding rod of a novel glass-passivated quartz boat proposed in this utility model.
[0029] Legend:
[0030] 1. Vertical plate; 2. Inclined plate; 3. Connecting plate; 4. Rubber plate; 5. Sliding column; 6. Adjusting roller; 7. Cavity; 8. Circular plate; 9. Sliding plate; 10. Inclined opening; 11. Sliding rod; 12. Limiting plate; 13. Spring; 14. Support roller; 15. Square opening. Detailed Implementation
[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0032] Reference Figures 1 to 2 This utility model provides an embodiment of a novel glass passivated quartz boat, comprising two upright plates 1, which serve as the main vertical support components of the entire quartz boat. Two inclined plates 2 are fixedly connected to the adjacent sides of the two upright plates 1. The inclined plates 2 connect the two upright plates 1, and their material matches that of the upright plates 1. A special high-temperature bonding process ensures a stable spacing and a firm connection between the two upright plates 1. A reinforcing component to enhance the stability of the upright plates 1 is fixedly connected to the bottom side of the inclined plates 2. This reinforcing component further enhances the structural stability of the upright plates 1 and prevents displacement during use. The reinforcing component includes a connecting plate 3, which supports subsequent components. The adjacent sides of the two upright plates 1 are fixedly connected to the left and right sides of the two connecting plates 3, respectively. A high-temperature bonding process forms a stable triangular structure between the connecting plates 3 and the upright plates 1, greatly improving the overall stability. The top side of the connecting plate 3 is fixedly connected to the bottom side of the inclined plate 2. A rubber plate 4 is fixedly connected to the bottom side of the connecting plate 3 away from the inclined plate 2. The rubber plate 4 reduces the impact of external vibrations on the quartz boat.
[0033] Reference Figures 2 to 4 Two sliding columns 5 are slidably connected to the inner wall of the vertical plate 1. The sliding columns 5 can slide up and down on the inner wall of the vertical plate 1 to accommodate materials of different sizes. Two adjusting rollers 6 are fixedly connected to the adjacent sides of the multiple sliding columns 5, and the adjusting rollers 6 serve as carriers for the glass material. Multiple cavities 7 are provided inside to provide locking space for the glass material. A circular plate 8 is fixedly connected to the side of each of the multiple sliding columns 5 away from the adjusting rollers 6. The diameter of the circular plate 8 is larger than the diameter of the sliding column 5, which serves to limit and stabilize the sliding columns 5. The sides of the multiple circular plates 8 closest to the adjusting rollers 6 are slidably connected to the opposite sides of the two vertical plates 1, making the relative movement between the circular plates 8 and the vertical plates 1 smooth and stable. A sliding plate 9 is slidably connected to the inner wall of the sliding column 5. The sliding of the sliding plate 9 within the sliding column 5 can transmit force to subsequent components. The inner wall of the circular plate 8 is slidably connected to the outside of the sliding plate 9.
[0034] The sliding plate 9 has two inclined openings 10 inside. The shape and angle of the inclined openings 10 are used to guide and restrict the sliding of subsequent components. Two sliding rods 11 are slidably connected to the inner wall of the sliding plate 9. The sliding rods 11 can slide within the inclined openings 10, thereby transmitting the horizontal sliding force of the sliding plate 9 into vertical up-and-down sliding. The outer surfaces of the sliding rods 11 are slidably connected to the inside of the inclined openings 10. Limiting plates 12 are fixedly connected to the outer surfaces of the sliding rods 11, and the limiting plates 12 are used to engage inside the upright plate 1, thus completing the fixation. The adjacent ends of the two limiting plates 12 are slidably connected to the inner wall of the sliding plate 9, allowing the limiting plates 12 to move stably within the sliding plate 9. The outer surfaces of the two limiting plates 12 are slidably connected to the inner walls of the upper and lower ends of the sliding column 5, further enhancing the stability of the internal structure of the sliding column 5.
[0035] Multiple sliding plates 9 are fixedly connected to springs 13 on the side near the adjusting roller 6. As elastic adjustment elements, the springs 13 store elastic potential energy when compressed by the sliding plates 9. The sides of the multiple springs 13 near the adjusting roller 6 are respectively fixedly connected to the inner walls of multiple sliding columns 5 near the adjusting roller 6, determining the installation position and force direction of the springs 13. Two support rollers 14 are fixedly connected to adjacent sides of the two upright plates 1. The support rollers 14 cooperate with the adjusting roller 6 to jointly bear the material load. Multiple semi-circular openings are provided inside the upright plates 1, which facilitates the stable placement of materials on the support rollers 14. Multiple square openings 15 are provided on the upper and lower sides of the inner wall of the upright plates 1. The square openings 15 provide necessary space and guidance for the sliding of the limiting plate 12. The external sliding connection of the limiting plate 12 is within the square openings 15, ensuring the stable movement of the limiting plate 12 within the upright plates 1.
[0036] Working principle: Based on the size of the glass material, the sliding plate 9 is pushed, causing the sliding rod 11 to slide within the inclined opening 10. The sliding rod 11 is then restricted by the inclined opening 10, allowing it to pull the limiting plate 12 downwards until the limiting plate 12 slides away from the interior of the vertical plate 1. During the sliding process, the sliding plate 9 also compresses the spring 13, allowing the spring 13 to store elastic potential energy. This energy then applies a force in the opposite direction to the sliding plate 9 to reset it. At this point, the circular plate 8 is pushed, causing the sliding column 5 to slide, thereby changing the position of the adjusting roller 6. After adjusting to the desired glass material size, the pushing force on the sliding plate 9 is released, allowing the spring 13 to reset and drive the sliding plate 9 to slide, which in turn drives the sliding rod 11 to slide. This pushes the limiting plate 12 to reset and engage inside the vertical plate 1 for restriction, thus completing the adjustment of the position of the adjusting roller 6. This allows it to adapt to different sizes of glass materials, eliminating the need to purchase different models of quartz boats and saving on procurement costs.
[0037] The connection between the top side of the connecting plate 3 and the inclined plate 2 increases the overall stability. At the same time, when external vibrations are transmitted to the quartz boat, the rubber plate 4, with its good elasticity and damping characteristics, can absorb and buffer the vibration energy, prevent the vibration from propagating and amplifying within the quartz boat structure, avoid the vibration causing displacement of the glass material, and ensure that the glass passivation layer is uniformly and stably attached to the chip surface without vibration interference during the formation process. This ensures the smooth progress of the glass passivation process and the reliability of product quality.
[0038] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A novel glass-passivated quartz boat, comprising two upright plates (1), characterized in that: Two inclined plates (2) are fixedly connected to the adjacent sides of the two upright plates (1). A reinforcing component to enhance the stability of the upright plates (1) is fixedly connected to the bottom side of the inclined plates (2). Two sliding columns (5) are slidably connected to the inner wall of the upright plates (1). Two adjusting rollers (6) are fixedly connected to the adjacent sides of the plurality of sliding columns (5). A circular plate (8) is fixedly connected to the side of the plurality of sliding columns (5) away from the adjusting rollers (6). A sliding plate (9) is slidably connected to the inner wall of the sliding column (5). Two sliding rods (11) are slidably connected to the inner wall of the sliding plate (9). A limit plate (12) is fixedly connected to the outside of the sliding rods (11). A spring (13) is fixedly connected to the side of the plurality of sliding plates (9) near the adjusting rollers (6). Two support rollers (14) are fixedly connected to the adjacent sides of the two upright plates (1).
2. The novel glass-passivated quartz boat according to claim 1, characterized in that: The reinforcement component includes a connecting plate (3), the top side of which is fixedly connected to the bottom side of the inclined plate (2), and a rubber plate (4) is fixedly connected to the bottom side of the connecting plate (3) away from the inclined plate (2).
3. The novel glass-passivated quartz boat according to claim 1, characterized in that: The inner wall of the upright plate (1) has multiple square openings (15) on both the upper and lower sides, and the outer side of the limiting plate (12) is slidably connected to the inside of the square openings (15).
4. The novel glass-passivated quartz boat according to claim 1, characterized in that: The outer sides of the two limiting plates (12) are slidably connected to the inner walls of the upper and lower ends of the sliding column (5), and the inner wall of the circular plate (8) is slidably connected to the outer side of the sliding plate (9).
5. A novel glass-passivated quartz boat according to claim 4, characterized in that: The sliding plate (9) has two inclined openings (10) inside, and the sliding rod (11) is slidably connected to the inside of the inclined openings (10).
6. A novel glass-passivated quartz boat according to claim 4, characterized in that: The multiple springs (13) are fixedly connected to the inner wall of the multiple sliding columns (5) near the side of the adjusting roller (6) respectively, and the multiple circular plates (8) are slidably connected to the opposite side of the two vertical plates (1) near the side of the adjusting roller (6).
7. A novel glass-passivated quartz boat according to claim 6, characterized in that: The adjusting roller (6) has multiple cavities (7) inside, and the two limiting plates (12) are slidably connected to the inner wall of the sliding plate (9) at their adjacent ends.
8. A novel glass-passivated quartz boat according to claim 2, characterized in that: The two upright plates (1) are fixedly connected to the left and right sides of the two connecting plates (3) respectively on their adjacent sides, and the support roller (14) has multiple semi-circular openings inside.