Power-off protection structure for double-Z-axis six-axis linear rail high-precision motion platform

Abstract

The utility model belongs to the technical field of high-precision motion platform protection application, and particularly discloses a power-off protection structure for a double-Z-axis six-axis linear rail high-precision motion platform. Comprising a marble base table, a set of transition plates, an n-shaped beam, a set of vertical track plates, a set of vertical tracks, a set of sliding block bases, a vertical fixing plate, a small vertical hydraulic cylinder, a screw, a lug plate, a lug plate through hole, a screw locking nut and the like. The utility model has the beneficial effects that: 1, a reasonably designed protection structure can carry out vertical anti-falling positioning protection on Z1 and Z2 linear motor driving, and meanwhile, double-cylinder balance control is adopted for falling prevention, so that the vertical impact is reduced, and the impact damage to working parts is avoided; 2, an upper strip-shaped limiting plate, a lower strip-shaped limiting plate, an upper buffer transition block and a lower buffer transition block are additionally arranged to serve as supplementary power-off protection of double air cylinders, and a double-insurance structure for anti-falling protection is achieved; the overall design is convenient to assemble or disassemble and maintain, and practicability is high.

Description

Technical Field

[0001] This utility model belongs to the field of high-precision motion stage protection application technology, specifically relating to a power failure protection structure for a dual Z-axis 6-axis linear guide high-precision motion stage. Background Technology

[0002] The six-axis precision motion stage meets the needs of high-speed, high-acceleration, and high-precision customized product processing. It is suitable for high-end manufacturing industries such as glass sheet inspection, glass cutting, laser processing, screen inspection, CCD imaging, wafer inspection, and 3D topology.

[0003] During its operation, in order to ensure the safety of precision instruments and equipment, power-off protection is required for the linear motor drives of Z1 and Z2. That is, after power failure, the slider seat may fall rapidly on the vertical track. If limit protection is not implemented, it will cause irreversible damage to the working parts, the base parts, or the processed products.

[0004] Therefore, based on the above problems, this utility model provides a power failure protection structure for a high-precision motion table with dual Z-axis and 6-axis linear guides. Utility Model Content

[0005] Purpose of the utility model: The purpose of this utility model is to provide a power failure protection structure for a high-precision motion table with dual Z-axis and 6-axis linear guides. It is suitable for the Z1 and Z2 linear motor drives installed on the slider seat to provide safe anti-fall protection after power failure, so as to achieve safe production and processing operations.

[0006] Technical Solution: The power failure protection structure for a high-precision motion table with dual Z-axis and 6-axis linear guide provided by this utility model includes a marble base, a set of transition plates, an n-shaped beam, a set of vertical track plates, a set of vertical tracks, and a set of slider seats. Vertical fixing plates are symmetrically arranged on the same side edge of the n-shaped beam and on both sides of the vertical track plates. Small vertical hydraulic cylinders are respectively arranged in the upper end face of the vertical fixing plates. Each small vertical hydraulic cylinder is equipped with a screw. Ear plates are symmetrically arranged on the outer walls of both ends of the slider seats. Ear plates are respectively provided with ear plate through holes. The small vertical hydraulic cylinders and ear plates are fixed together by screws, ear plate through holes, and screw locking nuts.

[0007] The power-off protection structure for the dual Z-axis 6-axis linear guide high-precision motion table of this technical solution also includes an upper strip-shaped limiting plate and a lower strip-shaped limiting plate, which are symmetrically arranged on the same side end face of the n-shaped beam and located between the vertical fixing plates to cooperate with the slider seat.

[0008] The power failure protection structure for the dual Z-axis 6-axis linear guide high-precision motion table of this technical solution also includes an upper buffer transition block and a lower buffer transition block, which are symmetrically arranged on the opposite surfaces of the upper and lower strip limit plates and cooperate with the slider seat.

[0009] In this technical solution, the vertical fixing plates are respectively configured as inverted L-shaped structures.

[0010] Compared with the prior art, the beneficial effects of the power failure protection structure for a high-precision motion table with dual Z-axis and 6-axis linear guides of this utility model are as follows: 1. The rationally designed protection structure can provide vertical anti-fall positioning protection for the Z1 and Z2 linear motor drives. At the same time, the anti-fall protection adopts dual-cylinder balanced control to reduce vertical impact and prevent impact damage to working parts; 2. The added upper strip limit plate, lower strip limit plate, upper buffer transition block, and lower buffer transition block serve as supplementary power failure protection for the dual cylinders, realizing a double insurance structure for anti-fall protection; 3. The overall design is easy to assemble or disassemble and maintain, and has strong practicality. Attached Figure Description

[0011] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the following will describe the embodiments.

[0012] The accompanying drawings used in the embodiments are briefly introduced. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0013] Figure 1 This is a schematic diagram of the main structure of the power failure protection structure for a dual Z-axis 6-axis linear guide high-precision motion table of this utility model.

[0014] Figure 2 yes Figure 1 A schematic diagram of the right-side view structure;

[0015] Figure 3 yes Figure 1 A right-view structural schematic diagram of the upper and lower strip limiting plates, the upper buffer transition block, and the lower buffer transition block;

[0016] The numbers in the diagram are as follows: 100-Marble base, 101-Transition plate, 102-N-shaped beam, 103-Vertical track plate, 104-Vertical track, 105-Slider seat, 200-Vertical fixing plate, 201-Small vertical hydraulic cylinder, 202-Screw, 203-Ear plate, 204-Ear plate through hole, 205-Screw locking nut, 300-Upper strip limit plate, 301-Upper buffer transition block, 302-Lower strip limit plate, 303-Lower buffer transition block. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0018] In the description of this utility model, it should be noted that the terms "top," "bottom," "one side," "the other side," "front," "back," "middle part," "inner," "top," and "bottom," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. The terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Furthermore, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "joined" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0019] Example 1: As Figure 1 , Figure 2 and Figure 3 The power failure protection structure shown for a dual Z-axis 6-axis linear motion table includes a marble base 100, a set of transition plates 101, an n-shaped beam 102, a set of vertical track plates 103, a set of vertical tracks 104, and a set of slider seats 105.

[0020] Vertical fixing plates 200 are symmetrically arranged on both sides of the same end face edge of the n-shaped beam 102 and on both sides of the vertical track plate 103.

[0021] Small vertical hydraulic cylinders 201 are respectively installed inside the upper end face of the vertical fixing plate 200.

[0022] Each of the small vertical hydraulic cylinders 201 is equipped with a screw 202.

[0023] The outer walls at both ends of the slider base 105 are symmetrically provided with ear plates 203.

[0024] Each ear plate 203 is provided with an ear plate through hole 204.

[0025] The small vertical hydraulic cylinder 201 and the ear plate 203 are fixed together by a screw 202, an ear plate through hole 204, and a screw locking nut 205.

[0026] The working principle is as follows: When a power failure occurs, the slider seat 105 (driven by Z1 and Z2 linear motors respectively installed on the slider seat 105) falls on the surface of the vertical track 104. At this time, the small vertical hydraulic cylinder 201 pulls the slider seat 105 upward through the screw 202 and the ear plate 203, thus preventing the slider seat 105 from falling rapidly. At the same time, the small vertical hydraulic cylinder 201 remains in place to protect the slider seat 105.

[0027] The small vertical hydraulic cylinder 201 and screw 202 move in a synchronous vertical reciprocating motion with the ear plate 203 and the slider seat 105.

[0028] Example 2: Based on Example 1, the power failure protection structure for a dual Z-axis 6-axis linear guide high-precision motion table further includes an upper strip-shaped limiting plate 300 and a lower strip-shaped limiting plate 302, which are symmetrically arranged on the same side end face of the n-shaped beam 102 and located between the vertical fixing plates 200 to cooperate with the slider seat 105.

[0029] The upper strip limiting plate 300 and the lower strip limiting plate 302 are respectively set at right angles to the n-shaped beam 102.

[0030] When the small vertical hydraulic cylinder 201 malfunctions and cannot perform positioning protection, the lower strip limit plate 302 provides protection against the downward stroke of the slider seat 105 after power failure, while the upper strip limit plate 300 provides positioning protection against the slider seat 105 during upward movement (preventing the slider seat 105 from detaching from the upper end face of the vertical track 104).

[0031] Example 3: Based on Example 2, the power failure protection structure for a dual Z-axis 6-axis linear guide high-precision motion table further includes an upper buffer transition block 301 and a lower buffer transition block 303, which are symmetrically arranged on the opposite surfaces of the upper strip limit plate 300 and the lower strip limit plate 302, and are used in conjunction with the slider seat 105.

[0032] Among them, the upper buffer transition block 301 and the lower buffer transition block 303 include, but are not limited to, circular rubber blocks, which reduce the impact and wear on the slider seat 105, and thus provide corresponding buffer protection for the Z1 and Z2 linear motor drives on the slider seat 105 (not shown in the figure, which does not affect the disclosure of the technical solution of this application).

[0033] In addition, the vertical fixing plates 200 are preferably configured as inverted L-shaped structures and are matched and installed with the small vertical hydraulic cylinders 201 respectively, so as to realize quick and convenient assembly or disassembly operations with the screw 202, the ear plate through hole 204, the screw locking nut 205 and the ear plate 203.

[0034] The power-off protection structure for a high-precision motion table with dual Z-axis and 6-axis linear guides in this application includes conventional components such as a marble base 100, a set of transition plates 101, an n-shaped beam 102, a set of vertical track plates 103, a set of vertical tracks 104, a set of slider seats 105, and a small vertical hydraulic cylinder 201. These components will not be described in detail in this application.

[0035] It should be noted that, in this document, terms such as "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0036] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A power-off protection structure for a high-precision motion table with dual Z-axis and 6-axis linear guides, comprising a marble base (100), a set of transition plates (101), an n-shaped beam (102), a set of vertical track plates (103), a set of vertical tracks (104), and a set of slider seats (105), characterized in that: Vertical fixing plates (200) are symmetrically arranged on both sides of the same end face edge of the n-shaped beam (102) and on both sides of the vertical track plate (103). Small vertical hydraulic cylinders (201) are respectively installed in the upper end face of the vertical fixing plate (200). Each of the small vertical hydraulic cylinders (201) is equipped with a screw (202). The slider seat (105) has ear plates (203) symmetrically arranged on the outer walls of both ends. The ear plate (203) is provided with ear plate through holes (204). The small vertical hydraulic cylinder (201) and the ear plate (203) are fixed together by a screw (202), an ear plate through hole (204), and a screw locking nut (205).

2. The power-off protection structure for a high-precision motion table with dual Z-axis and 6-axis linear guides according to claim 1, characterized in that: It also includes an upper strip-shaped limiting plate (300) and a lower strip-shaped limiting plate (302) that are symmetrically arranged on the same side end face of the n-shaped beam (102) and located between the vertical fixing plate (200) to cooperate with the slider seat (105).

3. The power failure protection structure for a high-precision motion table with dual Z-axis and 6-axis linear guides according to claim 2, characterized in that: It also includes an upper buffer transition block (301) and a lower buffer transition block (303) that are symmetrically arranged on the opposite sides of the upper strip limit plate (300) and the lower strip limit plate (302) and are used in conjunction with the slider seat (105).

4. The power-off protection structure for a high-precision motion table with dual Z-axis and 6-axis linear guides according to claim 1, characterized in that: The vertical fixing plates (200) are respectively configured as inverted L-shaped structures.

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