Partition door lifting air cylinder disassembling and assembling jig

Abstract

The utility model provides a partition door lifting air cylinder disassembling and assembling jig, and relates to the technical field of etching machine maintenance. The partition door lifting air cylinder disassembling and assembling jig comprises a supporting part and a fixing part. The supporting part is configured to abut against the wall, provided with the first opening, of the main body. The fixing part is fixedly connected with the supporting part, and the fixing part is configured to be fixed with the partition door; when the partition door is fixed to the fixing part in a suspended mode, at least part of the supporting part exceeds the first opening. By means of the operation space above the machine table, two persons can disassemble and assemble the partition door telescopic air cylinder above and below the machine table, lifting of the partition door telescopic air cylinder is facilitated, and connecting bolts between the partition door telescopic air cylinder and the machine table can be conveniently operated and disassembled. The problems that in the prior art, the space is narrow during disassembly and assembly, the partition door telescopic air cylinder can be disassembled and assembled only by one person, the partition door telescopic air cylinder is prone to falling off, and the damage risk of personnel and an etching machine is increased are solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to etching machine maintenance technical field, concretely relates to a partition door lifting cylinder dismounting fixture. BACKGROUND

[0002] Etching machine is one of the main instruments of semiconductor manufacturing, its structure is compact, and the operation space is small when disassembling and maintaining. Especially the partition door lifting cylinder, the operation space is very small when disassembling, and the existing dismounting needs to first remove the cover plate of the machine table from the top, then remove the sealing part on the partition door, then lift the partition door lifting cylinder from the bottom, remove the fixing bolt of the partition door lifting cylinder from the bottom, and then take out the partition door lifting cylinder.

[0003] In the dismounting process, because the dismounting operation space below is very small, it cannot accommodate two people to operate simultaneously, because only one person can stretch one hand into the etching machine to lift the partition door lifting cylinder, and the other person can remove the fixing bolt of the partition door cylinder from the bottom. The weight of the partition door lifting cylinder is relatively large, usually more than 10 kg or even heavier, and it is very inconvenient to lift with one hand and remove with the other hand, and there is a risk of falling of the partition door lifting cylinder, which can easily cause damage to personnel and the etching machine. Therefore, it is necessary to provide a partition door lifting cylinder dismounting fixture to improve the safety of dismounting the partition door lifting cylinder. SUMMARY

[0004] In view of the problems existing in the prior art, the utility model provides a partition door lifting cylinder dismounting fixture to improve the existing problems that one hand needs to lift and one hand needs to remove the bolt when dismounting the partition door lifting cylinder, which is inconvenient to operate and increases the risk of falling of the partition door lifting cylinder, which can easily cause damage to personnel and the etching machine.

[0005] To achieve the above-mentioned purpose and other related purposes, the utility model provides a partition door lifting cylinder dismounting fixture, the partition door lifting cylinder is installed on the machine table, the machine table includes a main body and a cover plate, the main body is provided with a containing cavity, the opposite side of the containing cavity is provided with a first opening and a second opening, the cover plate covers the first opening, the partition door of the partition door lifting cylinder extends into the containing cavity from the second opening, the fixture includes a supporting part and a fixing part, the supporting part is configured to press against the wall of the main body provided with the first opening, the fixing part is fixedly connected with the supporting part, and the fixing part is configured to be fixed with the partition door, wherein when the partition door is fixedly suspended on the fixing part, the supporting part at least partially exceeds the first opening.

[0006] In an exemplary embodiment of the utility model, the partition door lifting cylinder includes a connecting part, the fixing part and the supporting part are fixed through the connecting part, and the connecting part extends into the containing cavity.

[0007] The connecting part can increase the depth of the jig into the accommodating cavity, reduce the distance between the fixing part and the partition door, and facilitate the fixing of the fixing part and the partition door.

[0008] In an exemplary embodiment of the utility model, the connecting part includes two, which are respectively arranged on the two sides of the fixing part; the supporting part includes two, which are respectively arranged on the end of the connecting part away from the fixing part.

[0009] The two supporting parts are respectively arranged on the two connecting parts, the two supporting parts increase the bearing of the jig and the partition door lifting cylinder, and the stability is improved. The jig as a whole is in a frame structure through the fixing part, the two supporting parts and the two connecting parts, the weight of the jig is reduced, and the pressure strength of the machine table is reduced.

[0010] In an exemplary embodiment of the utility model, the two supporting parts extend away from each other along the wall where the first opening is located.

[0011] The two supporting parts extend away from each other, that is, the two supporting parts press against the two walls on the opposite sides of the first opening, thereby effectively improving the stability of the jig and avoiding the jig from falling down from the first opening when bearing the partition door telescopic cylinder.

[0012] In an exemplary embodiment of the utility model, the fixing part is provided with a first through hole, and the first through hole is configured to accommodate a screw rod passing through a threaded hole on the partition door.

[0013] The first through hole is arranged, the partition door and the fixing part can be fixed by using a bolt, and the fixing part and the partition door lifting cylinder are relatively fixed.

[0014] In an exemplary embodiment of the utility model, the supporting part is provided with a second through hole.

[0015] The second through hole is arranged, the supporting part can be fixed on the wall of the machine table where the first opening is arranged by using a bolt, on the one hand, the connection stability between the supporting part and the machine table can be increased, the jig can be prevented from falling down, and the connection bolt between the partition door lifting cylinder and the machine table can be conveniently disassembled; on the other hand, after the partition door lifting cylinder is disassembled, the jig is always fixed on the machine table, when the partition door lifting cylinder is installed, the jig and the partition door lifting cylinder are first fixed, because the position of the jig does not change, after the jig and the partition door lifting cylinder are fixed, the position of the partition door lifting cylinder is consistent with the position of the partition door lifting cylinder when disassembled, the installation convenience of the partition door lifting cylinder is increased, and the installation difference of disassembly operation of different operators is reduced.

[0016] In an exemplary embodiment of the utility model, the second through hole is a long hole.

[0017] The second through hole is a long hole, which can effectively increase the adaptability of the jig, improve the application range of the jig, and meet the use requirements of different etching machines.

[0018] In an exemplary embodiment of the present application, the fixing part is provided with a magnetic member.

[0019] The magnetic member is used to fix the partition door and the fixing part, so that the operation is more convenient and simple, and the partition door lifting cylinder is more convenient to disassemble.

[0020] In an exemplary embodiment of the present application, the magnetic member is an electromagnet, and the electromagnet is electrically connected with a switch.

[0021] By using the electromagnet, the situation that the fixing part extends into the accommodating cavity and is mistakenly adsorbed on the side wall of the accommodating cavity can be reduced, and the convenience of operation is improved.

[0022] In an exemplary embodiment of the present application, the switch is a foot switch.

[0023] By using the foot switch, after the bolts between the partition door lifting cylinder and the machine table are unscrewed, one person can lift the partition door lifting cylinder, and the magnetization and demagnetization of the electromagnet can be completed by stepping on the foot switch, so that the partition door lifting cylinder and the machine table are conveniently separated.

[0024] In combination with the prior art, the present application has the following advantages:

[0025] The existing partition door telescopic cylinder is disassembled, and because the operation space is narrow, only one person can operate, one hand holds the partition door telescopic cylinder, and the other hand unscrews or tightens the bolts, which is inconvenient on the one hand, and increases the risk of damage to personnel and the machine table caused by the falling of the partition door telescopic cylinder on the other hand. The jig of the present application comprises a supporting part and a fixing part, when the partition door telescopic cylinder is disassembled, the space above the machine table is used for operation, the cover plate on the machine table and the sealing part on the partition door are first disassembled, then the jig is placed on the machine table from the upper part of the machine table, the fixing part is used to fix the partition door of the partition door telescopic cylinder, the supporting part is pressed against the wall provided with the first opening to bear the jig and the partition door telescopic cylinder, and then the worker can disassemble the connecting screws between the partition door telescopic cylinder and the machine table below the machine table; then the worker can hold the partition door telescopic cylinder with both hands, and then disconnect the fixing between the fixing part and the partition door telescopic cylinder. The jig of the present application utilizes the operation space above the machine table, and two people can disassemble and assemble the partition door telescopic cylinder above and below the machine table, which is convenient for holding the partition door telescopic cylinder and convenient for operating the disassembly of the connecting bolts between the partition door telescopic cylinder and the machine table. The problem that the existing disassembly space is narrow, only one person can disassemble and assemble the partition door telescopic cylinder, and the partition door telescopic cylinder is easily dropped, increasing the risk of damage to personnel and the etching machine is solved. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other embodiments can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a three-dimensional structural diagram of the fixture of the present invention in one embodiment;

[0028] Figure 2 This is a top view schematic diagram of the fixture of this utility model in one embodiment;

[0029] Figure 3 This is a front view schematic diagram of the fixture of this utility model in one embodiment;

[0030] Figure 4 This is a schematic diagram of an exemplary machine tool according to the present invention;

[0031] Figure 5 This is a top view of an exemplary machine tool according to the present invention;

[0032] Figure 6 This is a schematic diagram of an exemplary partition door lifting cylinder of this utility model.

[0033] Component designation explanation:

[0034] 100. Support section; 110. Second through hole;

[0035] 200, Fixing part; 210, First through hole;

[0036] 300. Connecting part;

[0037] 400, machine base; 410, first opening; 420, second opening; 430, receiving cavity;

[0038] 500, Partition door lifting cylinder; 510, Partition door; 520, Threaded hole. Detailed Implementation

[0039] The following embodiments and features together with advantages thereof will be best understood from the following detailed description taken in conjunction with the annexed drawings. The embodiments of the present application can be implemented in a variety of ways, and the present application can be implemented in many different forms. The embodiments of the present application are merely illustrative of the principles of the present application and should not be used to limit the scope of the present application. The present application will be best understood by referring to the following detailed description along with the accompanying drawings. The following detailed description is provided to best explain the present application in an appropriate context. The present application is described with reference to the following drawings, in which:

[0040] When the embodiments give a numerical range, it should be understood that, unless the present application indicates otherwise, each numerical range of two endpoints and any one numerical value between the two endpoints can be selected. Unless otherwise defined, all technical and scientific terms used in the present application are used by those skilled in the art and the present application, and any method, equipment and material of the prior art similar or equivalent to the method, equipment and material of the embodiments of the present application can be used to realize the present application.

[0041] It should be understood that the terms such as "up", "down", "left", "right", "middle" and "one" in the specification are only for the convenience of clear description, and are not used to limit the scope of the present application. The change or adjustment of the relative relationship is also considered as the scope of the present application without substantial change of the technical content.

[0042] The structure of the etching machine is compact. When the partition door lifting cylinder 500 is disassembled, the connecting screws of the partition door lifting cylinder 500 and the machine table 400 are arranged at the lower part of the machine table 400, and the operation space of the lower part of the machine table 400 is too small to accommodate only one person to operate, so that the operator needs to lift the partition door lifting cylinder 500 and twist the screw. The partition door lifting cylinder 500 is heavy, and there is a risk of falling of the partition door lifting cylinder 500, which can easily cause damage to personnel or machines.

[0043] Therefore, the present application provides a partition door lifting cylinder 500 dismounting jig. After the cover plate of the machine table 400 is removed, the jig is connected and separated from the partition door lifting cylinder 500 above the machine table 400, the operation space is increased, and the operator can operate above the machine table 400 and lift below at the same time, thereby effectively reducing the risk of falling of the partition door lifting cylinder 500 and improving the convenience of operation of the partition door lifting cylinder 500.

[0044] Please refer toFigures 1 to 6 The utility model provides a kind of partition door lifting cylinder 500 dismounting jig for assisting the dismounting of partition door lifting cylinder 500.The partition door lifting cylinder 500 is installed in machine table 400, the machine table 400 includes main body and cover plate, the main body is equipped with containing cavity 430, the opposite side of containing cavity 430 is provided with first opening 410 and second opening 420, the cover plate is capped on first opening 410, the partition door 510 on the partition door lifting cylinder 500 is inserted into containing cavity 430 from second opening 420, and the connecting bolt of partition door lifting cylinder 500 and machine table 400 is arranged at the bottom of machine table 400, so when separating partition door lifting cylinder 500, the cover plate of machine table 400 needs to be removed first, then the sealing part connected with partition door 510 in containing cavity 430 is removed, and the connecting bolt is removed from the bottom of machine table 400.The jig includes support part 100 and fixed part 200, the support part 100 is configured to be pressed on the wall of the main body provided with first opening 410;Fixed part 200 is fixedly connected with support part 100, and the fixed part 200 is configured to be fixed with the partition door 510;Wherein, when the partition door 510 is suspended and fixed on the fixed part 200, the support part 100 at least partially exceeds the first opening 410.When removing partition door lifting cylinder 500, after removing the cover plate and the sealing part, the jig is placed on machine table 400, the fixed part 200 is fixed with the partition door 510, and the support part 100 is pressed on the wall of machine table 400 provided with first opening 410 to bear the jig and partition door lifting cylinder 500, so that the connecting bolt of machine table 400 and partition door lifting cylinder 500 can be removed directly from the bottom of machine table 400 without holding by hand.After the removal of the connecting bolt is completed, another operator holds partition door lifting cylinder 500 with both hands, and another operator operates through the upper part of machine table 400, so that the fixed part 200 is separated from the partition door 510, and then the removal of partition door lifting cylinder 500 is completed, and the installation operation sequence is opposite to the removal sequence.By using the jig of the utility model, the upper space of machine table 400 is effectively utilized for operation, the operation space of partition door lifting cylinder 500 is increased, single-handed holding is changed to double-handed holding, and the holding and operation of dismounting screw can be performed by two operators, effectively reducing the risk of falling of partition door lifting cylinder 500, and reducing the risk of damage of personnel or machine due to the falling of partition door lifting cylinder 500.

[0045] Please refer to Figure 1 and Figure 3In the embodiment, the partition door lifting cylinder 500 comprises a connecting portion 300, the fixing portion 200 and the supporting portion 100 are fixed through the connecting portion 300, and the connecting portion 300 extends into the accommodating cavity 430. The connecting portion 300 increases the depth of the jig extending into the accommodating cavity 430, reduces the distance between the fixing portion 200 and the partition door 510, and facilitates the fixing of the fixing portion 200 and the partition door 510. By arranging the connecting portion 300, the thickness of the fixing portion 200 can be reduced, and the weight of the jig can be reduced, thereby reducing the load on the machine table 400.

[0046] Please refer to Figure 1 and Figure 3 In an embodiment, the connecting portion 300 comprises two connecting portions 300 arranged on both sides of the fixing portion 200. In order to enhance the connection between the fixing portion 200 and the partition door 510, the fixing portion 200 is preferably a long strip-shaped fixing portion 200, and the two connecting portions 300 are symmetrically arranged at both ends of the fixing portion 200, thereby effectively increasing the stability of the fixing portion 200. It should be noted that the connecting portion 300 can be fixed at the end of the fixing portion 200, or at a certain distance from the end of the fixing portion 200. The supporting portion 100 comprises two supporting portions 100 arranged at one end of the connecting portion 300 away from the fixing portion 200, and the two supporting portions 100 increase the load bearing of the jig and the partition door lifting cylinder 500, thereby improving the stability. By arranging one fixing portion 200, two supporting portions 100 and two connecting portions 300, the jig as a whole has a frame structure, thereby reducing the weight of the jig and reducing the pressure intensity of the machine table 400.

[0047] In an embodiment, the connecting portion 300 is a telescopic connecting rod, which can be fixed at any length within a length range, thereby facilitating the adjustment of the depth of the fixing portion 200 extending into the accommodating cavity 430 according to different machine models, reducing the distance between the fixing portion 200 and the partition door 510, and preferably, the fixing portion 200 abuts against the partition door 510, thereby facilitating the fixed connection between the fixing portion 200 and the partition door 510.

[0048] In an embodiment, the length of the connecting portion 300 is 60mm-100mm, and the length can be any value within the range of 60mm-100mm, such as 60mm, 80mm, 100mm, etc.

[0049] In an embodiment, the two ends of the fixing portion 200 are arc-shaped, so as to reduce the risk of damage caused by knocking against the wall of the accommodating cavity 430 when the fixing portion 200 extends into the accommodating cavity 430.

[0050] Please refer to Figure 1 and Figure 3In an embodiment, the two support portions 100 extend along the opposite walls of the wall where the first opening 410 is located. The two support portions 100 are respectively pressed against the two walls on the opposite sides of the first opening 410, thereby effectively improving the stability of the jig and avoiding the jig from falling down from the first opening 410 when the extension cylinder of the partition door 510 is being carried. Further, the two support portions 100 are symmetrically arranged, and the symmetry planes of the two support portions 100 coincide with the symmetry planes of the two connecting portions 300, so that the jig as a whole is symmetrical, the wall of the machine table 400 where the first opening 410 is arranged is uniformly loaded, and the risk of damage to the machine table 400 is reduced.

[0051] Please refer to Figure 1 and Figure 2 In an embodiment, the fixing portion 200 is provided with a first through hole 210, and the first through hole 210 accommodates a screw rod that cooperates with the threaded hole 520 on the partition door 510. By arranging the first through hole 210, aligning the threaded hole 520 on the partition door 510 with the first through hole 210, and then using a bolt to connect and fix the partition door 510 and the fixing portion 200 on the upper part of the machine table 400, the fixing portion 200 is relatively fixed with the partition door lifting cylinder 500, which is convenient and simple to operate, does not need to change the original structure of the partition door 510, and improves the disassembly and assembly efficiency of the partition door lifting cylinder 500.

[0052] In an embodiment, the first through hole 210 is provided with not less than two, such as two, three, four, etc., to increase the connection stability between the fixing portion 200 and the partition door 510, and prevent the relative rotation between the partition door lifting cylinder 500 and the fixing portion 200 after the screw between the partition door lifting cylinder 500 and the machine table 400 is removed.

[0053] In an embodiment, the first through hole 210 is an elongated countersunk hole, so as to facilitate the alignment of the first through hole 210 and the threaded hole 520. Further, one end of the elongated countersunk hole is open, so as to facilitate the alignment of the first through hole 210 and the threaded hole 520 in the smaller space in the accommodating cavity 430.

[0054] In an embodiment, the fixing portion 200 is a telescopic fixing rod, which can be fixed at any length within a length range, so as to adjust the length of the telescopic fixing rod according to different machine models, and also adjust the relative position between the first through hole 210 and the threaded hole 520 on the partition door 510, so that the first through hole 210 is aligned with the threaded hole 520.

[0055] Please refer to Figure 1 and Figure 2In an embodiment, the support part 100 is provided with a second through hole 110. The second through hole 110 is provided so that the support part 100 can be fixed on the wall of the machine table 400 provided with the first opening 410. On the one hand, the connection stability between the support part 100 and the machine table 400 can be increased to avoid the jig from falling off, and the connection bolt between the partition door lifting cylinder 500 and the machine table 400 can be conveniently disassembled. On the other hand, after the partition door lifting cylinder 500 is disassembled, the jig is always fixed on the machine table 400. When the partition door lifting cylinder 500 is installed, the jig is first fixed with the partition door lifting cylinder 500. Because the position of the jig does not change, the jig is fixed with the partition door lifting cylinder 500, and the position of the partition door lifting cylinder 500 is consistent with that when the partition door lifting cylinder 500 is disassembled. The installation convenience of the partition door lifting cylinder 500 is increased, and the installation difference of disassembly operation by different operators is reduced.

[0056] Further, the second through hole 110 is a long hole. The second through hole 110 is a long hole, which can effectively increase the adaptability of the jig, improve the application range of the jig, and meet the use requirements of different etching machines.

[0057] Further, the second through hole 110 is a countersunk hole, so as to reduce the risk of collision caused by the bolt exposed outside the jig.

[0058] In an embodiment, the length of the fixing part 200 is 180mm-370mm. The length can be any value between 180mm and 370mm, such as 180mm, 200mm, 300mm, 370mm, etc. The total length of the jig is greater than 370mm, so that the support part 100 can be pressed on the machine table 400.

[0059] In an embodiment, the fixing part 200 is provided with a magnetic part. The partition door 510 is fixed with the fixing part 200 through the magnetic part. The operation is more convenient and simple, and the disassembly of the partition door lifting cylinder 500 is more convenient.

[0060] In an embodiment, the magnetic part is an electromagnet. The electromagnet is electrically connected with a switch. The switch controls the on-off of the electromagnet circuit to realize the magnetization and demagnetization of the electromagnet. Thus, the connection and disconnection between the fixing part 200 and the partition door 510 are more convenient. One person can also use the jig to complete the disassembly of the partition door lifting cylinder 500. At the same time, the situation that the fixing part 200 extends into the accommodating cavity 430 and is adsorbed on the side wall of the accommodating cavity 430 can be reduced, and the operation convenience is improved.

[0061] In an embodiment, the switch is a foot switch. By using the foot switch, after the stud between the partition door lifting cylinder 500 and the machine table 400 is unscrewed, a single person can lift the partition door lifting cylinder 500, and can complete the magnetization and demagnetization of the electromagnet by stepping on the foot switch, thereby facilitating the separation of the partition door lifting cylinder 500 and the machine table 400, and a single person can complete the connection and disconnection of the partition door 510 and the fixed part 200, and facilitate the disassembly and assembly of the partition door lifting cylinder 500.

[0062] In another embodiment, the switch is a remote control switch. The remote control switch is more convenient to use in different working conditions, and does not need to consider the line connection between the switch and the electromagnet, and is convenient to use in different operation spaces.

[0063] The partition door lifting cylinder 500 dismounting jig effectively utilizes the operation space above the machine table 400, and the operator can operate above the machine table 400 and lift below the machine table 400 at the same time, solves the problem that single hand lifting and single hand operation need to be performed at the same time during dismounting, effectively reduces the risk of falling of the partition door lifting cylinder 500, and improves the convenience of operation of the partition door lifting cylinder 500. Therefore, the partition door lifting cylinder 500 dismounting jig effectively overcomes some practical problems in the prior art, and has high utilization value and use significance.

[0064] The above embodiments only exemplarily illustrate the principle and effect of the partition door lifting cylinder 500 dismounting jig, and are not used to limit the partition door lifting cylinder 500 dismounting jig. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the partition door lifting cylinder 500 dismounting jig. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought disclosed by the partition door lifting cylinder 500 dismounting jig should be covered by the claims of the partition door lifting cylinder 500 dismounting jig.

Claims

1. A fixture for disassembling and assembling a partition door lifting cylinder, wherein the partition door lifting cylinder is mounted on a machine base, the machine base comprising a main body and a cover plate, the main body having a receiving cavity, a first opening and a second opening being provided on opposite sides of the receiving cavity, the cover plate sealing the first opening, and the partition door on the partition door lifting cylinder extending into the receiving cavity through the second opening, characterized in that, The tool comprises: a support part configured to press against a wall of the main body provided with a first opening; a fixing part fixedly connected with the support part, configured to be fixed with the partition door; wherein when the partition door is fixedly suspended on the fixing part, the support part at least partially protrudes out of the first opening.

2. The partition door lifting cylinder dismounting jig according to claim 1, wherein The fixing part and the support part are fixedly connected through a connecting part, and the connecting part extends into the accommodating cavity.

3. The partition door lifting cylinder dismounting jig according to claim 2, wherein The connecting part comprises two parts respectively arranged on two sides of the fixing part, and the support part comprises two parts respectively arranged on one end of the connecting part away from the fixing part.

4. The partition door lifting cylinder dismounting jig according to claim 3, wherein The two support parts extend along the wall where the first opening is located in opposite directions.

5. The partition door lifting cylinder dismounting jig according to claim 1, wherein The fixing part is provided with a first through hole configured to accommodate a screw rod passing through a threaded hole on the partition door.

6. The partition door lifting cylinder dismounting jig according to claim 1, wherein The support part is provided with a second through hole.

7. The partition door lifting cylinder dismounting jig according to claim 6, wherein The second through hole is a long slot.

8. The partition door lifting cylinder dismounting jig according to claim 1, wherein The fixing part is provided with a magnetic member.

9. The partition door lifting cylinder dismounting jig according to claim 8, wherein The magnetic member is an electromagnet, and the electromagnet is electrically connected with a switch.

10. The partition door lifting cylinder dismounting jig according to claim 9, wherein The switch is a foot switch.

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