Clamping jaw for grabbing and automatically locking top of wafer box

Abstract

The utility model provides a clamping jaw for grabbing the top of a wafer box and automatically locking, which comprises a mounting body, the mounting body is connected with the upper end of an I-shaped piece, rotating shafts are respectively mounted on two sides of the lower end of the I-shaped piece, reset torsion springs are further arranged between the rotating shafts and the I-shaped piece, the rotating shafts are fixedly connected with the middle parts of clamping arms, and the middle parts of the clamping arms are fixedly connected with the mounting body. The lower ends of the clamping arms are provided with elastic clamping blocks used for clamping, the upper ends of the clamping arms are provided with guide wheels, the upper end of the I-shaped piece is further vertically and slidably connected with a regulation and control cylinder, the upper end of the regulation and control cylinder is connected with the push rod end of an electric push rod through a connecting piece, and a machine body of the electric push rod is connected with an installation body. The lower end of the regulation and control cylinder is connected with a detection rod in a sliding mode, a spring is further arranged between the detection rod and the regulation and control cylinder, the detection rod is provided with a microswitch and a supporting block, and the middle of the regulation and control cylinder is provided with an arc-shaped linkage part matched with the guide wheel.

Description

TECHNICAL FIELD

[0001] The utility model belongs to mechanical technical field relates to a kind of for grabbing wafer box top automatic locking gripper. BACKGROUND

[0002] Wafer box is indispensable in semiconductor manufacturing process, it is often needed to be transferred from one station to another station in use process, to ensure the safety and efficient flow of wafer in production process.

[0003] In order to ensure that wafer box can be smoothly and accurately grabbed, to avoid its damage in the process of grabbing, therefore, it is necessary to develop such a kind of for grabbing wafer box top automatic locking gripper. SUMMARY

[0004] The utility model aims at the above-mentioned problems existing in prior art, and proposes a kind of for grabbing wafer box top automatic locking gripper.

[0005] The utility model can be realized by the following technical scheme: a kind of for grabbing wafer box top automatic locking gripper, including installation body, it is characterized in that, the installation body and the upper end of I-shaped piece are connected, the lower end of I-shaped piece is respectively installed with pivot on both sides, reset torsional spring is further present between pivot and I-shaped piece, pivot and the middle part of clamping arm are fixedly connected, the lower end of clamping arm has the elastic clamping block for clamping, the upper end of clamping arm has guide wheel, the upper end of I-shaped piece is also vertically slidably connected with control cylinder, the upper end of control cylinder is connected with the push rod end of electric push rod by connecting piece, the body of electric push rod is connected with installation body, the lower end of control cylinder is slidably connected with detection rod, spring is further present between detection rod and control cylinder, microswitch is present on detection rod, support block is further present on detection rod, the middle part of control cylinder has arc linkage portion matched with guide wheel.

[0006] The installation body is also connected with the lower end of adjusting rod, fixed guide base is slidably connected on the adjusting rod, locking screw is threadedly connected on the fixed guide base.

[0007] The locking screw is hand screw.

[0008] The upper end of the adjusting rod further has a limiting pin.

[0009] Compared with prior art, the present application has the following advantages:

[0010] In the utility model, the microswitch and the wafer box top are matched before the clamping arm clamps and locks the wafer box top, the contact of the microswitch is contacted with the wafer box top only when the wafer box is placed in place, and then the clamping arm clamps the wafer box, so that the clamping process is safer and more reliable. BRIEF DESCRIPTION OF DRAWINGS

[0011] Fig. 1 It is the plane structure schematic diagram of the utility model;

[0012] Fig. 2 It is the partial close-up of A place;

[0013] Fig. 3 It is the plane structure schematic diagram of the utility model in the control cylinder;

[0014] In the drawing, 1, installation body;2, control cylinder;2a, arc linkage part;3, elastic clamping block;4, clamping arm;5, pivot;6, guide wheel;7, I-shaped piece;8, connecting piece;9, fixed guide base;10, locking screw;11, adjusting rod;12, limiting pin;13, electric push rod;14, detection rod;15, spring;16, supporting block;17, microswitch. DETAILED DESCRIPTION

[0015] The following is the specific embodiment of the utility model and is further described the technical scheme of the utility model in combination with the drawings, but the utility model is not limited to these embodiments.

[0016] As Figs. 1-3As shown, the gripper for automatically locking the top of the wafer box comprises a mounting body 1, the mounting body 1 is connected with the upper end of an I-shaped piece 7, the lower end of the I-shaped piece 7 is provided with a rotating shaft 5 on both sides, the rotating shaft 5 and the I-shaped piece 7 are further provided with a reset torsion spring, the rotating shaft 5 is fixedly connected with the middle part of a clamping arm 4, the lower end of the clamping arm 4 is provided with an elastic clamping block 3 for clamping, the upper end of the clamping arm 4 is provided with a guide wheel 6, the upper end of the I-shaped piece 7 is further vertically and slidably connected with a control cylinder 2, the upper end of the control cylinder 2 is connected with the end of a push rod of an electric push rod 13 through a connecting piece 8, the body of the electric push rod 13 is connected with the mounting body 1, the lower end of the control cylinder 2 is slidably connected with a detection rod 14, the detection rod 14 and the control cylinder 2 are further provided with a spring 15, the detection rod 14 is provided with a micro switch 17, the detection rod 14 is further provided with a supporting block 16, the middle part of the control cylinder 2 is provided with an arc-shaped linkage part 2a matched with the guide wheel 6; by adopting the structure, after the gripper moves to the clamping position, the electric push rod 13 works, the control cylinder 2 moves downward, the micro switch 17 can contact the top of the wafer box, the wafer box is judged to be placed in place, then the electric push rod 13 continues to work, at this time, the arc-shaped linkage part 2a is matched with the guide wheel 6, the lower ends of the clamping arms 4 are close to each other, the wafer box top is clamped and locked under the cooperation of the elastic clamping blocks 3; after the micro switch 17 is triggered, the supporting block 16 contacts the top of the wafer box, so that the force of the spring 15 is mostly applied to the supporting block 16.

[0017] The mounting body 1 is further connected with the lower end of an adjusting rod 11, the adjusting rod 11 is slidably connected with a fixed guide base 9, the fixed guide base 9 is threadedly connected with a locking screw 10, specifically: the locking screw 10 is a hand screw, the upper end of the adjusting rod 11 is further provided with a limiting pin 12; by adopting the structure, the fixed guide base 9 can be connected with a mechanical arm, so that the whole gripper is mounted on the mechanical arm.

[0018] In the embodiment, the electric push rod 13 and the micro switch 17 in the gripper are connected with an electric control module in the existing mechanical arm, which is the prior art.

[0019] In the utility model, the clamping arm 4 cooperates with the top of the wafer box through the micro switch 17 before clamping and locking the top of the wafer box; only when the wafer box is correctly placed in place, the contact of the micro switch 17 contacts the top of the wafer box, and then the clamping arm 4 clamps the wafer box, which makes the clamping process more safe and reliable.

[0020] The above components are all general standard components or components known by those skilled in the art, and the structure and principle thereof can be known by those skilled in the art through a technical manual or through a conventional experimental method.

[0021] The specific embodiments described herein are merely illustrative of the spirit of the present application. Those skilled in the art of the present application can make various modifications or supplements to the described specific embodiments or replace them with similar ways, but will not deviate from the spirit of the present application or exceed the scope defined by the appended claims.

Claims

1. A gripper for grabbing the top of a wafer box, comprising a mounting body (1), characterized in that, The mounting body (1) is connected with the upper end of the I-shaped piece (7), the lower end of the I-shaped piece (7) is provided with rotating shafts (5) on both sides, reset torsion springs are arranged between the rotating shafts (5) and the I-shaped piece (7), the rotating shafts (5) are fixedly connected with the middle portions of the clamping arms (4), the lower ends of the clamping arms (4) are provided with elastic clamping blocks (3) for clamping, the upper ends of the clamping arms (4) are provided with guide wheels (6), the upper end of the I-shaped piece (7) is also vertically and slidably connected with a control cylinder (2), the upper end of the control cylinder (2) is connected with the push rod end of an electric push rod (13) through a connecting piece (8), the body of the electric push rod (13) is connected with the mounting body (1), the lower end of the control cylinder (2) is slidably connected with a detection rod (14), springs (15) are arranged between the detection rod (14) and the control cylinder (2), the detection rod (14) is provided with micro switches (17), the detection rod (14) is also provided with supporting blocks (16), and the middle portion of the control cylinder (2) is provided with an arc-shaped linkage part (2a) matched with the guide wheel (6).

2. The gripper for automatically locking the top of a wafer box according to claim 1, wherein The mounting body (1) is also connected with the lower end of an adjusting rod (11), the adjusting rod (11) is slidably connected with a fixed guide base (9), and the fixed guide base (9) is threadedly connected with locking screws (10).

3. The gripper for automatically locking the top of a wafer box according to claim 2, wherein The locking screws (10) are hand-tightening parts.

4. The gripper for automatically locking the top of a wafer box according to claim 2, wherein The upper end of the adjusting rod (11) is also provided with limiting pins (12).

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