Evaporation source device with temperature zone control function

Abstract

The utility model discloses an evaporation source device with temperature zone control, which comprises a strip-shaped evaporation cylinder, an evaporation chamber is arranged in the evaporation cylinder, a strip-shaped slit is arranged at the upper end of the evaporation cylinder, the strip-shaped slit is communicated with the evaporation chamber and is arranged along the length of the evaporation chamber, a support frame is arranged at the bottom of the evaporation chamber, and the strip-shaped slit is communicated with the evaporation chamber. A crucible is arranged on the supporting frame, a plurality of grooves are formed in the upper end of the supporting frame and located below the crucible, the length of the grooves is parallel to the length of the evaporation cavity, the grooves are distributed at intervals in the length direction of the evaporation cavity, and heating devices with the length arranged along the grooves are arranged in the grooves. The bottom of the groove is connected with a wiring hole penetrating through the bottom of the evaporation cylinder, a plurality of heating devices are arranged below the crucible in a partitioned mode, and each heating device is independently controlled, so that the crucible is heated in the partitioned mode, the evaporation speeds of coating materials in the length direction of the evaporation source device are different, and the evaporation efficiency is improved. Therefore, the coating thickness on the plate can be controlled and adjusted.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of evaporation source, concretely relates to a temperature partition control's evaporation source device. BACKGROUND

[0002] Evaporation source is used in the device of evaporating coating, and the main function is to heat and evaporate coating materials such as perovskite, so as to be plated on the material. In the prior art, when coating is plated on the plate, the evaporation source is installed at the lower end of the coating chamber, and the evaporation source is vertically arranged in the length direction of the plate.

[0003] The existing evaporation source, for example, the record in the "evaporation source device for vacuum plate evaporation coating" with the publication number "CN221071631U", the crucible in the device is heated by the heating wire, so that the coating material in the crucible in the device is evaporated together. By this way, the coating thickness on the plate cannot be controlled. UTILITY MODEL CONTENT

[0004] In order to solve the above-mentioned deficiencies in the prior art, the utility model provides a temperature partition control's evaporation source device.

[0005] In order to realize the above-mentioned technical effect, the utility model adopts the following scheme:

[0006] A temperature partition control's evaporation source device, including the evaporation jar of strip shape, be equipped with evaporation chamber in the evaporation jar, the upper end of evaporation jar is equipped with the strip slit, the strip slit is communicated with evaporation chamber and the strip slit is along the length of evaporation chamber and is arranged, the bottom of evaporation chamber is equipped with support frame, be equipped with crucible on the support frame, the upper end of support frame is equipped with a plurality of grooves, the groove is located below the crucible, the length of the groove is parallel to the length of evaporation chamber, a plurality of grooves are distributed along the length direction of evaporation chamber, the groove is equipped with the length along the groove and is arranged heating device, the bottom of the groove is connected with the wiring hole that penetrates the bottom of evaporation jar.

[0007] The preferred technical scheme, the heating device is one of silicon carbon rod, silicon molybdenum rod, resistance wire or electric heating tube.

[0008] The preferred technical scheme, the four around side walls and the bottom and top of evaporation jar are equipped with interlayer water cavity in, the interlayer water cavity in the four around side walls and the bottom and top of evaporation jar are communicated and set up, the outer wall of evaporation jar is equipped with the water inlet and the water outlet that are communicated with interlayer water cavity.

[0009] Preferably, the upper end of the evaporation cylinder is provided with two adjusting plates located on both sides of the slit, the adjusting plates are slidably arranged on the upper end of the evaporation cylinder, the sliding direction of the adjusting plates is perpendicular to the length direction of the slit, the length direction of the adjusting plates is parallel to the length direction of the slit, and the length of the adjusting plates is not shorter than the length of the slit.

[0010] Preferably, at least two strip-shaped holes are formed in the adjusting plate, the length direction of the strip-shaped holes is perpendicular to the length direction of the slit, the at least two strip-shaped holes are uniformly arranged along the length direction of the adjusting plate, and a bolt is arranged in the strip-shaped hole and is screwed with the upper end of the evaporation cylinder.

[0011] Compared with the prior art, the beneficial effects are:

[0012] The utility model discloses a simple structure, convenient to use is below the crucible partition and is equipped with a plurality of heating devices, and each heating device is controlled individually to heat the crucible in partition, makes the evaporation speed of the plated layer material of evaporation source device in its length direction different, thereby can control and adjust the plated film thickness on the plate. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is the lateral section schematic drawing of the utility model;

[0014] Figure 2 It is the forward section schematic drawing of the support of the utility model.

[0015] Fig. 1, evaporation cylinder; 2, evaporation chamber; 3, slit; 4, support frame; 5, groove; 6, heating device; 7, crucible; 8, wiring hole; 9, adjusting plate; 10, strip-shaped hole; 11, bolt; 12, interlayer water cavity. DETAILED DESCRIPTION

[0016] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments.

[0017] A temperature partition control evaporation source device, including the evaporation cylinder 1 of strip shape, the upper end of evaporation cylinder 1 is equipped with a plurality of mounting holes, can be used to install evaporation cylinder 1 with the lower end of plated film chamber, the evaporation chamber 2 is arranged in the evaporation cylinder 1, and the plated layer material is heated and evaporated in the evaporation chamber 2.

[0018] The upper end of the evaporation cylinder 1 is provided with a strip-shaped slit 3, the strip-shaped slit 3 is communicated with the evaporation chamber 2, and the strip-shaped slit 3 is arranged along the length of the evaporation chamber 2. The plated layer material evaporated in the evaporation chamber 2 is discharged from the strip-shaped slit 3 into the plated film chamber.

[0019] The bottom of the evaporation chamber 2 is provided with a support frame 4, the support frame 4 is provided with a crucible 7, the upper end of the support frame 4 is provided with a plurality of grooves 5, the grooves 5 are located below the crucible 7, the length of the groove 5 is parallel to the length of the evaporation chamber 2, a plurality of grooves 5 are distributed along the length direction of the evaporation chamber 2, the groove 5 is provided with a heating device 6 with a length along the groove 5, the bottom of the groove 5 is connected with a wiring hole 8 penetrating through the bottom of the evaporation cylinder 1, each heating device 6 is independently powered and controlled through the wiring hole 8, and the wiring hole 8 is sealed.

[0020] A plurality of heating devices 6 are arranged below the crucible 7, each heating device 6 is controlled independently, thereby heating the crucible 7 in a partitioned manner, so that the evaporation speed of the plated material in the length direction of the evaporation source device is different, thereby being able to control and adjust the film thickness on the plate. Specifically, a film thickness measuring instrument is installed in the plating chamber to measure the film thickness on the plate.

[0021] Further, the heating device 6 is one of a silicon-carbon rod, a silicon-molybdenum rod, a resistance wire or an electric heating tube.

[0022] Further, the evaporation cylinder 1 is provided with a sandwiched water cavity 12 in the four peripheral side walls and the bottom and top, the sandwiched water cavity 12 in the four peripheral side walls and the bottom and top of the evaporation cylinder 1 is communicated, and the evaporation cylinder 1 is provided with a water inlet and a water outlet communicated with the sandwiched water cavity 12. The flowing cold water is injected into the sandwiched water cavity 12 from the water inlet to achieve heat insulation and then discharged from the water outlet, thereby reducing the temperature on the outer wall of the evaporation cylinder 1 and avoiding scalding,

[0023] Further, the upper end of the evaporation cylinder 1 is provided with two adjusting plates 9 located on both sides of the slit 3, the adjusting plates 9 are slidably arranged on the upper end of the evaporation cylinder 1, the sliding direction of the adjusting plate 9 is perpendicular to the length direction of the slit 3, the length direction of the adjusting plate 9 is parallel to the length direction of the slit 3, and the length of the adjusting plate 9 is not shorter than the length of the slit 3. The sliding adjusting plate 9 is used to adjust the distance between the two adjusting plates 9, thereby adjusting the width of the slit 3, and changing the flux of the plated material discharged from the evaporation chamber 2.

[0024] Further, at least two strip-shaped holes 10 are formed in the adjusting plate 9, the length direction of the strip-shaped hole 10 is perpendicular to the length direction of the slit 3, and at least two strip-shaped holes 10 are uniformly arranged along the length direction of the adjusting plate 9, and a bolt 11 is arranged in the strip-shaped hole 10 and screwed with the upper end of the evaporation cylinder 1. When the bolt 11 is loosened, the adjusting plate 9 can be slid, and after the position adjustment of the adjusting plate 9 is completed, the bolt 11 is tightened to lock and fix the adjusting plate 9.

[0025] In the description of the utility model, it is understood that the terms "upper", "lower", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the utility model product is used, or the orientation or positional relationship commonly understood by those skilled in the art, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model.

[0026] In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the utility model, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0027] Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model.

Claims

1. A temperature zoned controlled evaporation source apparatus, characterized in that, The application relates to a strip-shaped evaporation cylinder (1) which is internally provided with an evaporation chamber (2), the upper end of the evaporation cylinder (1) is provided with a strip-shaped slit (3), the strip-shaped slit (3) is communicated with the evaporation chamber (2) and the strip-shaped slit (3) is arranged along the length of the evaporation chamber (2), the bottom of the evaporation chamber (2) is provided with a supporting frame (4), the supporting frame (4) is provided with a crucible (7), the upper end of the supporting frame (4) is provided with a plurality of grooves (5), the grooves (5) are located below the crucible (7), the length of the grooves (5) is parallel to the length of the evaporation chamber (2), the plurality of grooves (5) are distributed along the length direction of the evaporation chamber (2), the grooves (5) are internally provided with a heating device (6) which is arranged along the length of the groove (5), and the bottom of the groove (5) is connected with a wiring hole (8) which penetrates the bottom of the evaporation cylinder (1).

2. The temperature zoned controlled evaporation source apparatus of claim 1, wherein, The heating device (6) is one of a silicon-carbon rod, a silicon-molybdenum rod, a resistance wire and an electric heating tube.

3. The temperature zoned controlled evaporation source apparatus of claim 1, wherein, The evaporation cylinder (1) is internally provided with a sandwich water cavity (12) on the four peripheral side walls, the bottom and the top, the sandwich water cavity (12) is communicated with the four peripheral side walls, the bottom and the top of the evaporation cylinder (1), the outer wall of the evaporation cylinder (1) is provided with a water inlet and a water outlet which are communicated with the sandwich water cavity (12).

4. The temperature zoned controlled evaporation source apparatus of claim 1, wherein, The upper end of the evaporation cylinder (1) is provided with two adjusting plates (9) which are respectively located on the two sides of the slit (3), the adjusting plates (9) are slidably arranged on the upper end of the evaporation cylinder (1), the sliding direction of the adjusting plates (9) is perpendicular to the length direction of the slit (3), the length direction of the adjusting plates (9) is parallel to the length direction of the slit (3), and the length of the adjusting plates (9) is not shorter than the length of the slit (3).

5. The temperature zoned controlled evaporation source apparatus of claim 4, wherein, The adjusting plates (9) are provided with at least two strip-shaped holes (10), the length direction of the strip-shaped holes (10) is perpendicular to the length direction of the slit (3), the at least two strip-shaped holes (10) are uniformly arranged along the length direction of the adjusting plates (9), and the strip-shaped holes (10) are internally provided with bolts (11) which are screwed with the upper end of the evaporation cylinder (1).

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