Air pipe assembly of coating machine and coating machine

Abstract

The utility model discloses an air pipe assembly of a coating machine and the coating machine, and relates to the field of coating machines, the air pipe assembly comprises a mounting pipe, one end of the outer wall of the mounting pipe is slidably sleeved with an exhaust pipe, a mounting assembly is arranged between the mounting pipe and the exhaust pipe, a butt joint lantern ring is fixedly sleeved outside the mounting pipe, and a connecting cap is rotatably sleeved outside the exhaust pipe. The locking assembly is arranged on the sides of the connecting cap and the butt joint lantern ring and used for clamping and locking the connecting cap and the butt joint lantern ring, the outer wall of the positioning plate is in sliding clamping connection with the clamping piece, and one end of the outer wall of the locking rod is in sliding clamping connection with an inner cavity of the locking hole. According to the utility model, by utilizing the matching use mode of the mounting pipe, the exhaust pipe and the mounting assembly, under the action of the locking assembly, the connecting cap and the butt joint sleeve ring can keep a stable connection state, so that the butt joint stability of the exhaust pipe and the mounting pipe is ensured, and the exhaust pipe and the mounting pipe can be directly separated by releasing the limitation of the locking assembly on the connecting cap.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of coating machine, especially relates to a gas pipe assembly of coating machine and coating machine. BACKGROUND

[0002] Coating machine is a kind of equipment for depositing thin film material on the surface of various substrates, and its working principle is mainly based on physical vapor deposition technology, including evaporation and sputtering two basic ways, coating machine is heated evaporation or sputtering out by film body material under high vacuum environment, then depositing on the substrate surface to form one or more layers of thin film.

[0003] When coating machine carries out vacuum operation, it is usually connected with vacuum pump through pipeline, and the connecting part of vacuum pump pipeline and coating machine vacuum chamber pipeline is usually installed in the way of flange plate and bolt, and its connecting part is usually located at the bottom or inside of coating machine, so when coating machine is maintained and the pipeline is disassembled, flange plate and bolt need to be disassembled, but the installation position affects the efficiency of wrench disassembling bolt, and it is inconvenient to manually disassemble it. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a kind of gas pipe assembly of coating machine and coating machine to solve the problems raised in the above background.

[0005] To achieve the above object, the utility model provides the following technical scheme: a kind of gas pipe assembly of coating machine, including installation pipe;

[0006] One end of the outer wall of the installation pipe is slidably sleeved with suction pipe, installation assembly is arranged between the installation pipe and the suction pipe, and the installation assembly comprises:

[0007] The butt joint sleeve ring is fixedly sleeved on the outside of the installation pipe;

[0008] The connecting cap is rotatably sleeved on the outside of the suction pipe;

[0009] Locking assembly is arranged on the side of the connecting cap and the butt joint sleeve ring, and the locking assembly is used for clamping and locking the connecting cap and the butt joint sleeve ring.

[0010] Preferably, the locking assembly comprises:

[0011] The clamping piece is fixedly connected to the side of the butt joint sleeve ring;

[0012] The positioning plate is fixedly connected to the side of the connecting cap, and the outer wall of the positioning plate is slidably clamped with the clamping piece.

[0013] Preferably, the clamping piece is provided with a locking rod, one side of the positioning plate is provided with a locking hole, and one end of the outer wall of the locking rod is slidably connected with the inner cavity of the locking hole.

[0014] Preferably, one side of the clamping piece is provided with a mounting hole, one side of the inner cavity of the mounting hole is fixedly sleeved with a limiting sleeve ring, the outer wall of the locking rod is fixedly sleeved with a fixed sleeve ring, and the outer wall of the locking rod is slidably sleeved with a limiting spring.

[0015] Preferably, one end of the locking rod is fixedly connected with a handle, the top of the handle is fixedly connected with a limiting plate, and the opposite sides of the limiting plate and the clamping piece are both fixedly embedded with magnets.

[0016] Preferably, the inner part of the air exhaust pipe is fixedly sleeved with a positioning sleeve ring, one side of the positioning sleeve ring is fixedly connected with a first sealing gasket, and one side of the first sealing gasket is extruded and attached to the end of the mounting pipe.

[0017] Preferably, one end of the outer wall of the air exhaust pipe is fixedly sleeved with a connecting sleeve ring, the connecting sleeve ring is rotatably sleeved in the inner part of the connecting cap, and the connecting cap and the butt joint sleeve ring are provided with a second sealing gasket.

[0018] Another purpose of the utility model lies in providing a coating machine, which comprises the air pipe assembly of the coating machine.

[0019] The utility model discloses a technical effect and advantage:

[0020] The utility model discloses a cooperation use mode of mounting pipe, air exhaust pipe and mounting assembly, the mounting assembly includes butt joint sleeve ring, connecting cap and locking assembly, under the action of locking assembly, connecting cap can keep stable connection state with butt joint sleeve ring, thereby guaranteeing the stability of air exhaust pipe and mounting pipe butt joint, and removing the limitation of locking assembly to connecting cap, can directly make air exhaust pipe and mounting pipe separate, thereby improving the convenience of dismounting. ACCURACY OF DRAWINGS

[0021] Figure 1 It is the whole structure schematic view of the utility model.

[0022] Figure 2 It is the whole structure schematic view of the utility model air exhaust pipe.

[0023] Figure 3 It is the inside structure schematic view of air exhaust pipe part downward face.

[0024] Figure 4 It is the inside structure schematic view of clamping piece front face.

[0025] In the figure: 1, installation pipe; 2, suction pipe; 3, installation assembly; 31, butt joint collar; 32, connecting cap; 33, locking assembly; 331, clamping piece; 332, positioning plate; 333, locking rod; 334, limiting spring; 335, handle; 336, limiting collar; 337, fixed collar; 338, limiting plate; 34, positioning collar; 35, first sealing gasket; 36, connecting collar; 37, second sealing gasket. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0027] The utility model provides a kind of air pipe assembly of coating machine as shown in Figures 1-4 The utility model provides a kind of air pipe assembly of coating machine as shown in The utility model discloses an air pipe assembly of coating machine, including installation pipe 1, installation pipe 1 is connected with the vacuum chamber of coating machine, and the outer wall of installation pipe 1 is slidably sleeved with suction pipe 2 on one end, and installation assembly 3 is arranged between installation pipe 1 and suction pipe 2, and installation assembly 3 includes butt joint collar 31, connecting cap 32 and locking assembly 33, butt joint collar 31 is fixedly sleeved on the outside of installation pipe 1, connecting cap 32 is rotatably sleeved on the outside of suction pipe 2, locking assembly 33 is arranged on the side of connecting cap 32 and butt joint collar 31, locking assembly 33 is used for clamping locking of connecting cap 32 and butt joint collar 31, so that when locking assembly 33 is locked to connecting cap 32 and butt joint collar 31, the stability of the connection of suction pipe 2 and installation pipe 1 can be guaranteed, and locking assembly 33 is disassembled, and suction pipe 2 and installation pipe 1 can be directly pulled and separated.

[0028] Especially, locking assembly 33 includes clamping piece 331 and positioning plate 332, clamping piece 331 is fixedly connected on the side of butt joint collar 31, positioning plate 332 is fixedly connected on the side of connecting cap 32, the outer wall of positioning plate 332 is slidably clamped with clamping piece 331, and the clamping piece 331 on the outside of butt joint collar 31 is arranged in annular array, and positioning plate 332 has protruding portion relative to clamping piece 331, so that connecting cap 32 is rotated relative to butt joint collar 31 by positioning plate 332, positioning plate 332 and clamping piece 331 can be clamped or separated, locking rod 333 is arranged on clamping piece 331, locking hole is formed in one side of positioning plate 332, one end of the outer wall of locking rod 333 is slidably clamped with the inner cavity of locking hole, when locking rod 333 is clamped with the locking hole on positioning plate 332, positioning plate 332 and clamping piece 331 can be kept in stable clamping state, and then the stability of the installation between connecting cap 32 and butt joint collar 31 can be guaranteed.

[0029] Specifically, one side of the clamping piece 331 is provided with a mounting hole, a limiting sleeve ring 336 is fixedly sleeved on one side of the inner cavity of the mounting hole, a fixed sleeve ring 337 is fixedly sleeved on the outer wall of the locking rod 333, the fixed sleeve ring 337 is slidingly sleeved in the inner part of the mounting hole, the outer wall of the locking rod 333 is slidingly sleeved with a limiting spring 334, the limiting spring 334 is located between the limiting sleeve ring 336 and the fixed sleeve ring 337, and the limiting spring 334 can provide the locking rod 333 with a spring force towards the positioning plate 332, so as to ensure the stability of the clamping of the locking rod 333 and the positioning plate 332.

[0030] Further, one end of the locking rod 333 is fixedly connected with a handle 335, the handle 335 can drive the locking rod 333 to separate from the positioning plate 332, so as to release the locking state of the positioning plate 332, the top of the handle 335 is fixedly connected with a limiting plate 338, the opposite sides of the limiting plate 338 and the clamping piece 331 are fixedly embedded with magnets, the magnets on the opposite sides of the limiting plate 338 and the clamping piece 331 are opposite in polarity, so as to improve the stability of the clamping of the limiting plate 338 and the clamping piece 331, and the handle 335 drives the locking rod 333 to separate from the positioning plate 332, the limiting plate 338 is rotated, and one end of the limiting plate 338 is clamped on one side of the clamping piece 331 towards the handle 335, so that the handle 335 drives the locking rod 333 to be in a stable state and separate from the positioning plate 332.

[0031] Further, the inner part of the air pipe 2 is fixedly sleeved with a positioning sleeve ring 34, one side of the positioning sleeve ring 34 is fixedly connected with a first sealing gasket 35, one side of the first sealing gasket 35 is extruded and attached to the end part of the mounting pipe 1, the first sealing gasket 35 can improve the sealing property between the air pipe 2 and the mounting pipe 1, one end of the outer wall of the air pipe 2 is fixedly sleeved with a connecting sleeve ring 36, the connecting sleeve ring 36 is rotationally sleeved in the inner part of the connecting cap 32, a second sealing gasket 37 is arranged between the connecting cap 32 and the butt joint sleeve ring 31, and the second sealing gasket 37 can improve the sealing property between the connecting cap 32 and the butt joint sleeve ring 31.

[0032] The embodiment provides a coating machine, which comprises the air pipe assembly of the coating machine.

[0033] Finally, it should be noted that: the above only describes the preferred embodiments of the present application, and is not intended to limit the present application, although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for some technical features, any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A gas pipe assembly of a coating machine, comprising a mounting pipe (1); characterized in that One end of the outer wall of the mounting pipe (1) is slidingly sleeved with a suction pipe (2), and a mounting assembly (3) is arranged between the mounting pipe (1) and the suction pipe (2), the mounting assembly (3) comprising: a butt joint sleeve ring (31) fixedly sleeved on the outside of the mounting pipe (1); a connecting cap (32) rotatably sleeved on the outside of the suction pipe (2); a locking assembly (33) arranged on the side of the connecting cap (32) and the butt joint sleeve ring (31), the locking assembly (33) being used for clamping and locking the connecting cap (32) and the butt joint sleeve ring (31).

2. The gas tube assembly of claim 1, wherein, The locking assembly (33) comprises: a clamping piece (331) fixedly connected to the side of the butt joint sleeve ring (31); a positioning plate (332) fixedly connected to the side of the connecting cap (32), the outer wall of the positioning plate (332) being slidingly clamped with the clamping piece (331).

3. The gas tube assembly of claim 2, wherein, A locking rod (333) is arranged on the clamping piece (331), one side of the positioning plate (332) is provided with a locking hole, and one end of the outer wall of the locking rod (333) is slidingly clamped with the inner cavity of the locking hole.

4. The gas tube assembly of claim 3, wherein, One side of the clamping piece (331) is provided with a mounting hole, a limiting sleeve ring (336) is fixedly sleeved on one side of the inner cavity of the mounting hole, a fixed sleeve ring (337) is fixedly sleeved on the outer wall of the locking rod (333), and a limiting spring (334) is slidingly sleeved on the outer wall of the locking rod (333), the limiting spring (334) being located between the limiting sleeve ring (336) and the fixed sleeve ring (337).

5. The gas tube assembly of claim 4, wherein, One end of the locking rod (333) is fixedly connected with a handle (335), the top of the handle (335) is fixedly connected with a limiting plate (338), and the opposite sides of the limiting plate (338) and the clamping piece (331) are fixedly embedded with magnets.

6. The gas tube assembly of claim 1, wherein, The inside of the suction pipe (2) is fixedly sleeved with a positioning sleeve ring (34), one side of the positioning sleeve ring (34) is fixedly connected with a first sealing gasket (35), and one side of the first sealing gasket (35) is extruded and attached to the end of the mounting pipe (1).

7. The gas tube assembly of claim 1, wherein, One end of the outer wall of the suction pipe (2) is fixedly sleeved with a connecting sleeve ring (36), the connecting sleeve ring (36) is rotatably sleeved in the connecting cap (32), and a second sealing gasket (37) is arranged between the connecting cap (32) and the butt joint sleeve ring (31).

8. A coating machine characterized by comprising: The coating machine comprises the gas pipe assembly of the coating machine according to any one of claims 1-7.

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