Device for treating silicon-containing waste gas

Abstract

The utility model provides a device for treating silicon-containing waste gas, which is characterized in that firstly, organic silicon components in the silicon-containing waste gas are quickly dissolved in an alkaline environment through pretreatment of alkali washing equipment, so that the organic silicon components in the silicon-containing waste gas can be preliminarily removed, and the treatment load of tail gas at the rear end is reduced; then, particulate matters in the gas are intercepted through filtering equipment; and finally, the gas enters heat storage combustion equipment. According to the utility model, by selecting the plate-type heat storage ceramic with stronger anti-blocking capability, an air flow channel which is not restrained by a pore channel and is communicated with the pore channel can be formed, so that silicon dioxide particles formed in silicon-containing waste gas can pass through the heat storage body more smoothly, the pore channel is not easy to block, and the service life of the heat storage body is prolonged. Therefore, the problems of low heat recovery efficiency, ceramic fracture, sharp increase of pressure drop and the like caused by blockage are reduced. In addition, a ceramic random packing layer is arranged above the plate type heat storage ceramic, so that the period of cleaning or replacing the ceramic is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the organic gas treatment technical field, specifically relates to a device for silicon-containing waste gas treatment. BACKGROUND

[0002] At present, the treatment process of VOCs waste gas treatment mainly adopts adsorption, combustion or combined process, among which, high concentration waste gas generally adopts regenerative combustion (abbreviation: RTO) process, and at present, the process is widely applied in the field of VOCs waste gas treatment, and the application cases are more, and the technology is relatively mature.

[0003] However, the treatment of organic silicon-containing waste gas is still a pain point and difficulty in the industry, in order to avoid the blockage of regenerative ceramic, the treatment process of such waste gas on the market generally selects direct combustion furnace (i.e. TO furnace), for example, patent (a silicon-containing organic waste gas treatment process and equipment, patent number: CN114345109A). The TO furnace is different from the RTO equipment, the equipment has no regenerative ceramic, and the use of the equipment has the problem of high energy consumption, so that the use unit has a large economic burden.

[0004] Therefore, according to the treatment of organic silicon-containing waste gas, researchers have also developed some new processes, such as the process disclosed in patent CN114345109A, which adopts an equipment with an increased heat exchanger to achieve the purpose of energy saving. However, this method has two problems: (1) the heat exchange efficiency of ordinary heat exchanger is generally 40%~60%, which is lower than that of regenerative ceramic (the heat exchange efficiency can reach 95%); (2) the heat exchanger is easy to be blocked with the increase of use time, and then cannot be used, so the heat exchanger needs to be replaced, resulting in high economic cost. UTILITY MODEL CONTENTS

[0005] Therefore, the purpose of the utility model is to provide a device for silicon-containing waste gas treatment. The use of the device can avoid high energy consumption, and the operation and maintenance cost is low.

[0006] In order to achieve this purpose, the utility model adopts the following technical scheme:

[0007] The utility model provides a device for silicon-containing waste gas treatment, which comprises:

[0008] Alkaline washing equipment;

[0009] Filtering equipment communicated with the alkaline washing equipment;

[0010] Regenerative combustion equipment communicated with the filtering equipment;

[0011] The regenerative combustion equipment comprises a combustion chamber and a regenerative chamber arranged below the combustion chamber;

[0012] The inside of the heat storage chamber is filled with plate heat storage ceramic and ceramic random packing layer which is above the plate heat storage ceramic.

[0013] Preferably, the heat storage chambers are arranged side by side with 2n+1; n is any integer from 1 to 3.

[0014] Preferably, the heat storage chambers are arranged in a straight line with 3.

[0015] Preferably, the outside of the heat storage chamber is provided with differential pressure detection device and temperature detection device.

[0016] Preferably, the outside of the combustion chamber is provided with temperature detection device and high temperature valve.

[0017] Preferably, the inside of the caustic washing device is sequentially provided with demisting section, spraying section and filler absorption section from top to bottom.

[0018] Preferably, the filter device comprises 1-6 filter bags of different levels.

[0019] More preferably, the filter device comprises G4 level, F7 level and F9 level filter bags.

[0020] Preferably, one end of the filter bag is provided with a differential pressure detection device for detecting the pressure difference before and after the filter bag.

[0021] Preferably, the device for treating silicon-containing waste gas further comprises a gas discharge device communicated with the heat storage combustion device.

[0022] Compared with the prior art, the device has the advantages that:

[0023] The device for treating silicon-containing waste gas provided by the utility model firstly pre-treats the silicon-containing waste gas through the caustic washing device, and the organic silicon component in the silicon-containing waste gas is accelerated to dissolve under the alkaline environment, so that the organic silicon component in the silicon-containing waste gas can be preliminarily removed, and the treatment load of the tail gas at the rear end is reduced; then, the filter device is used to intercept the particulate matters in the gas; finally, the gas enters the heat storage combustion device.

[0024] In conclusion, the device provided by the utility model can effectively treat the silicon-containing waste gas, meet the gas emission requirements, prolong the service life of the heat storage ceramic, ensure the normal operation of the system, and reduce the operation and maintenance cost of the system.

[0025] Through research, the device provided by the utility model is suitable for the treatment process of silicon-containing waste gas in the integrated circuit industry, the new material industry, electrical insulating materials, paint, optical glass and other industries, such as silane (silane, disilane), silicate (tetraethyl orthosilicate, isopropyl orthosilicate), and silyl ether (trimethylsilyl, triisopropylsilyl). BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 It is a schematic view of the device for treating silicon-containing waste gas in the embodiment 1 of the utility model;

[0027] Among them, 1 is the alkali washing tower, 11 is the gas inlet below the tower body, 2 is the dry filter, 3 is the filter bag, 4 is the RTO equipment, 41 is the combustion chamber, 42 is the heat storage chamber, 43 is the plate type heat storage ceramic, and 44 is the ceramic scattered packing layer. DETAILED DESCRIPTION

[0028] The technical scheme of the utility model will be described clearly and completely in combination with the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skilled in the art without creative labor belong to the protection scope of the utility model.

[0029] The utility model provides a kind of device for silicon-containing waste gas treatment, comprising:

[0030] alkali washing equipment;

[0031] filtering equipment communicated with alkali washing equipment;

[0032] heat storage combustion equipment communicated with filtering equipment.

[0033] In the utility model, the alkali washing equipment is used to pretreat silicon-containing waste gas, and the alkali washing equipment is preferably alkali washing tower (see Figure 1the alkali washing tower is a water-gas reverse packing absorption tower, and the inside of the alkali washing tower is sequentially provided with a demisting section, a spraying section and a packing absorption section from top to bottom. The spraying liquid of the alkali washing tower is mainly NaOH solution, and the spraying liquid is sprayed onto the washing packing in the absorption section from top to bottom. When the silicon-containing waste gas passes through the absorption section provided with the packing, the organosilicon in the silicon-containing waste gas is intercepted, blocked and absorbed by the liquid film, and is transferred from the gas phase to the liquid phase; with the rising of the gas, the silicon-containing waste gas further contacts the spraying liquid in the spraying section, so that the organosilicon in the silicon-containing waste gas is accelerated to dissolve in the alkaline environment, and part of the organosilicon is removed; the organosilicon reacts with NaOH to generate silicate, thereby reducing the processing load of the rear-end processing equipment. For example, the chemical reaction of disilane with lye is as follows:

[0034] SiH4+3H2O=H2SiO3↓+4H2;H2SiO3+2NaOH=Na2SiO3+2H2O;

[0035] Finally, the mist droplets of the absorption liquid carried in the gas are removed in the demisting section, and the treated silicon-containing waste gas passes through the gas outlet above the alkali washing tower and enters the filtering system through the collecting pipe.

[0036] Exemplarily, the working state of the alkali washing device is as follows:

[0037] The silicon-containing waste gas passes through the collecting main pipe and enters the alkali washing tower under the action of the fan. The structure of the alkali washing tower is not particularly limited in the utility model, and the alkali washing tower can be a water-gas reverse packing absorption tower commonly used in the field. Generally, the silicon-containing waste gas enters the alkali washing tower from the gas inlet below the tower body of the alkali washing tower, and rapidly fills the gas inlet section space under the action of the fan, and then uniformly rises to the packing absorption section through the flow section. On the surface of the packing, the silicon-containing substances (such as SiH4) in the gas phase chemically react with the absorbents (NaOH) in the spraying liquid (specifically as above), and the reaction products flow into the lower tank. The silicon-containing waste gas that is not completely absorbed continues to rise to the spraying section. In the spraying section, the spraying liquid (NaOH) is sprayed at high speed, and the mist droplets are fully mixed, contacted and stirred with the silicon-containing waste gas, and the physical and chemical reactions (specifically as above) continue to occur. Finally, the gas passes through the demisting section at the uppermost part of the tower body, the mist droplets of the absorption liquid carried in the gas are removed, and the gas passes through the gas outlet above the alkali washing tower and enters the filtering system through the collecting pipe.

[0038] It should be noted that the packing absorption section and the spraying section can be provided with one or more than one according to the needs, for example, two packing absorption sections and two spraying sections, and specifically, the packing absorption section-spraying section-packing absorption section-spraying section.

[0039] In the utility model, the filtering system comprises a filtering device communicated with the alkali washing device.

[0040] Said filter device is a dry filter (see Figure 1 The filter device can completely remove dust, and the purification efficiency of dust with a size of 0.5 μm or more in the gas is as high as 99%. In the utility model, according to the silicon-containing waste gas to be treated, different levels of filter bags (see Figure 1 In some embodiments of the utility model, the filter device sequentially comprises filter bags of G4 level, F7 level and F9 level. The surface of the filter fiber is preferably subjected to flame retardant treatment, thereby reducing the risk of ignition after the waste gas is gathered.

[0041] The working principle of the filter device is that the filter fiber in the filter bag changes the direction of the inertial force of the gas particles, thereby separating the gas particles from the gas. The multiple filter fibers with gradually increasing density can increase the impact rate and improve the filtration efficiency. In the utility model, the filter fiber material combination in the filter bag of different filtration levels is sequentially used to accommodate the gas in the space of the material, so as to achieve higher filtration efficiency. In the utility model, when the pressure of the filter device reaches the set alarm value, the alarm system sends an alarm signal, the alarm signal is connected to the central control room, and the operator is reminded to replace the filter material, that is, the filter bag.

[0042] It should be noted that in some preferred embodiments of the utility model, one end of the filter bag is provided with a differential pressure gauge for measuring the pressure difference before and after each filter bag, so as to ensure the normal, safe and stable operation of the waste gas treatment system.

[0043] In the utility model, the filter device does not need a water pump and does not need to be corrosion-resistant. The device has a simple structure and low investment. In addition, the filter bags of different levels are modularly designed and are easy to assemble.

[0044] It should be noted that in the prior art, the heat accumulating thermal combustion treatment process is generally used for medium and high concentration waste gas. In order to avoid the problem of blockage of the heat accumulating ceramic, the TO furnace is generally used for direct combustion on the market. However, the TO furnace does not have heat accumulating ceramic and belongs to a direct combustion device without heat accumulating capacity, so the energy consumption is very high. If the TO furnace uses a heat exchanger to exchange heat and store energy, the heat exchange and storage capacity is generally 40% to 60%, the heat accumulating effect is poor and is very easy to block, and the replacement cost is high.

[0045] Therefore, according to the utility model, the gas treated by the filter device enters the subsequent heat accumulating combustion device.

[0046] In the utility model, the heat accumulating combustion device is specifically a regenerative thermal oxidizer (RTO), so the heat accumulating combustion device is also referred to as RTO device (see Figure 1(4) generally includes the combustion chamber (see reference 4). Figure 1 (Ref. 41) and the regenerator located below the combustion chamber (see) Figure 1 The working principle of the RTO (Regenerative Thermal Oxidizer) system (labeled 42) is as follows: Gas is heated to 760-850℃ in the combustion chamber, causing VOCs in the gas to oxidize and decompose into carbon dioxide and water. The high-temperature gas produced by oxidation flows through a specially designed ceramic heat storage body, causing the ceramic body to heat up and "store heat." This "stored heat" is used to preheat the gas entering subsequently, thus saving fuel consumption for gas heating. The RTO system should be divided into two (or more) zone chambers. Each heat storage chamber undergoes a cycle of heat storage, heat release, and cleaning, working continuously. Generally, after the heat storage chamber "releases heat," a portion of treated clean exhaust gas should be introduced immediately to clean the heat storage chamber (to ensure a VOC removal rate of over 99%). Only after cleaning is completed can the "heat storage" process begin. Cleaning is performed by introducing fresh air through a backflow blower.

[0047] Generally, RTO equipment primarily achieves heat storage through ceramic regenerators, which consist of individual channels. Therefore, it's crucial to ensure these channels remain unblocked; otherwise, exhaust gas cannot pass through the blocked areas, affecting equipment operation. For silicon-containing exhaust gas, combustion produces SiO2, which crystallizes on the surface of the ceramic regenerator filler. Since the regenerator ceramics are made of aluminosilicate-based refractory materials, the similarity between aluminosilicate and SiO2 crystals leads to a strong bond between SiO2 and the aluminosilicate on the ceramic surface, similar to chemical bonds. Macroscopically, this manifests as SiO2 crystals growing on the ceramic surface, occupying the pores and thus clogging the regenerator.

[0048] In the initial stage of SiO2 blockage in the thermal storage ceramic, SiO2 deposition reduces the effective flow diameter of the bed, increases bed resistance and pressure drop, and decreases the ventilation area of ​​the ceramic pores. As the RTO system pressure increases, the power consumption of the main fan also increases. Over time, the SiO2 in the ceramic pores gradually increases until the system is completely filled, leading to reduced exhaust volume or excessive pressure drop in the RTO system, triggering an emergency shutdown and disrupting normal production. However, when the thermal storage ceramic shuts down due to blockage, the entire piece usually needs to be replaced, which is extremely inconvenient, incurring high maintenance costs, and is difficult to replace.

[0049] Therefore, in this invention, the interior of the heat storage chamber is filled with plate-type heat storage ceramics (see [reference]). Figure 1The heat storage ceramic has a unique shape design, which can form a mutual gas flow channel not restricted by the holes, so that the SiO2 particles in the exhaust gas can pass through the heat storage body more smoothly, and the holes are not easy to be blocked, thereby reducing the problems of heat recovery efficiency reduction, ceramic cracking, and pressure surge caused by blockage.

[0050] It should be noted that the conventional RTO device generally only arranges a 100 mm thick ceramic rectangular saddle ring layer below the heat storage ceramic body to achieve the effect of air equalization and partial heat storage. However, when the RTO device processes the silicon-containing exhaust gas, the first layer (upper layer) of the heat storage ceramic body is most severely blocked, and the second layer of the heat storage ceramic is also blocked by SiO2, but the situation is relatively lighter than the first layer. Based on this, the ceramic random packing layer (see Figure 1 in the figure 44) is laid on the upper part of the heat storage ceramic, which acts as a sacrificial layer, and the filler in it is preferably a random saddle ceramic filler, such as a ceramic rectangular saddle ring, to ensure that the heat storage ceramic body will not be affected by the SiO2 blockage, and the period of cleaning or replacing the ceramic can be extended. In the present application, the ceramic random packing layer can replace the filler on the upper layer when it is blocked, which is easier to operate and has lower cost compared with replacing the heat storage ceramic.

[0051] In some preferred embodiments of the present application, a differential pressure detection device (such as a differential pressure gauge) and a temperature detection device (such as a temperature probe) are arranged on the outside of the heat storage chamber.

[0052] Generally, the pressure difference of the heat storage ceramic in the RTO device will increase with the blockage of the heat storage ceramic, so the present application can select to arrange a differential pressure gauge above and below the heat storage ceramic, such as the number 4 shown in the above figure, to monitor the pressure difference of the heat storage chamber. As the use time increases, the pressure difference of the system increases significantly, and when the pressure difference reaches a certain value, the differential pressure gauge can send an alarm signal to remind the operator to check and troubleshoot the blockage of the heat storage ceramic of the RTO device.

[0053] The temperature probe can monitor the outlet temperature of the gas to determine the heat storage capacity of the heat storage ceramic. Generally, the outlet temperature of the gas is mostly controlled at 90-120℃, and as the use time of the heat storage ceramic increases, the heat storage capacity will decrease, such as when the outlet temperature of the exhaust gas is >120°, which indicates that the heat storage capacity of the heat storage ceramic is weakened, and the heat storage ceramic may be blocked. At this time, the operator can be reminded to check and troubleshoot the RTO device.

[0054] In the utility model, the number of the heat storage chambers can be set according to the processing capacity of the silicon-containing waste gas, preferably 2n+1 are arranged side by side; n is any integer in 1-3, such as 1, 2 or 3. That is, the number of the heat storage chambers can be 3, 5 or 7. In this way, the RTO device can simultaneously include the heat storage chambers for gas inlet, gas outlet and back blowing. For example, when the number of the heat storage chambers is 3, the corresponding functions are 1 inlet, 1 outlet and 1 back blowing; when the number of the heat storage chambers is 5, the corresponding functions are 2 inlets, 2 outlets and 1 back blowing; and when the number of the heat storage chambers is 7, the corresponding functions are 3 inlets, 3 outlets and 1 back blowing. The switching valve is used to achieve the design requirements.

[0055] Exemplarily, in some embodiments of the utility model, the number of the heat storage chambers is 3, denoted as heat storage chamber A, heat storage chamber B and heat storage chamber C, and arranged in a linear shape. Among them, the heat storage chamber A is a gas inlet chamber, the heat storage chamber B is a back blowing chamber, and the heat storage chamber C is a gas outlet chamber. Specifically, the working state is as follows: the ignition burner combustion-supporting atomizer (which can spray natural gas or diesel oil or high-calorific-value solvent) is used to preheat the heat storage chamber A to the working condition, then the gas treated by the filtering device is introduced into the heat storage chamber A and preheated to about 650 DEG C, then enters the combustion chamber for sufficient oxidation and decomposition, when the gas temperature reaches about 760-850 DEG C, the organic components in the gas are completely oxidized and decomposed, the generated flue gas enters the heat storage chamber C, heat exchange is carried out in the heat storage chamber C, and then enters the subsequent discharge device. The heat storage chamber B is a back blowing chamber, under the action of the back blowing fan, fresh air is introduced to blow the heat storage chamber B, the components in the heat storage chamber B which cannot enter the combustion chamber due to the switching of the valve are blown to the combustion chamber, and then discharged from the heat storage chamber C after treatment. It should be noted that the above three heat storage chambers can automatically and periodically switch the working state of the heat storage chambers.

[0056] Generally, the temperature of the exhaust gas of the RTO device is controlled at 90-120 DEG C, if the concentration in the exhaust gas is too high, the oxidation and heat release of VOCs in the exhaust gas are too large, which leads to too high temperature in the furnace of the combustion chamber (generally set at 900 DEG C). At this time, in order to prevent the heat from moving downward and causing the outlet exhaust gas temperature to be too high to damage the sealing rubber strip of the valve, the high-temperature valve arranged on the outer side of the combustion chamber needs to be opened. The opening degree of the high-temperature valve can be automatically adjusted according to the temperature of the temperature control probe in the furnace.

[0057] Finally, according to the utility model, the VOCs content of the exhaust gas treated by the above-mentioned alkali washing, filtering and heat storage combustion is reduced to within the emission standard, which can be discharged through the discharge device, such as a chimney, at high altitude.

[0058] In summary, the device for treating silicon-containing waste gas is improved in process, so that medium and high concentration silicon-containing waste gas can also use RTO equipment, specifically sequentially through: "alkali washing + filtration + RTO equipment", by means of the reaction of lye and organosilicon in alkali washing and the particulate impurities filtered, the organosilicon entering the rear-end RTO equipment can be reduced from the source, avoiding the high energy consumption problem of the existing device using TO furnace to treat organic waste gas. At the same time, the heat storage capacity of RTO is > 95%, further improving the RTO equipment, effectively prolonging the normal service life of RTO, reducing energy consumption and operation and maintenance cost, and the economic benefit is very significant.

[0059] Through testing, the device provided by the utility model is used to treat silicon-containing waste gas with a wind volume of 30000 m 3 / h and a waste gas concentration of about 2300 mg / m³, and the waste gas outlet can reach 42 mg / m³, reaching the expected treatment effect and being stable in operation.

[0060] In order to further illustrate the utility model, the following examples are used for detailed description. The experimental raw materials used in the following examples of the utility model are all general market products. The silicon-containing waste gas involved below includes volatile organic waste gas such as ethanol and tetraethyl orthosilicate, and the wind volume is 30000 m 3 / h, and the waste gas concentration is about 2300 mg / m³ (of which the ethanol content accounts for 95 wt%, and the tetraethyl orthosilicate content accounts for 5 wt%).

[0061] Example 1

[0062] As Figure 1 , the embodiment provides a device for treating silicon-containing waste gas, and the working state is as follows:

[0063] (1) Alkali washing tower pretreatment system

[0064] The silicon-containing waste gas passes through the collection main pipe under the action of the fan and enters the alkali washing tower 1. The alkali washing tower is a water-gas reverse packed tower, and the silicon-containing waste gas enters the alkali washing tower from the air inlet 11 at the lower part of the tower body. Under the action of the fan, the air inlet section space is rapidly filled, and then uniformly rises to the packed absorption section through the flow section. On the surface of the packing, the silicon-containing substances (such as SiH4) in the gas phase react with the absorbent (NaOH) substances in the liquid phase, and the reaction products flow into the lower tank. The silicon-containing waste gas substances that are not completely absorbed continue to rise to the spray section. In the spray section, the absorption liquid is sprayed at high speed to form mist droplets, which are fully mixed, contacted and stirred with the silicon-containing waste gas, and the physical and chemical reactions continue to occur. The uppermost part of the tower body is the demisting section, where the mist droplets of the absorption liquid carried in the gas are removed, and the gas is discharged from the upper part of the alkali washing tower and enters the filtration system.

[0065] (2) Filtration system

[0066] The gas obtained after pretreatment by the alkali washing tower 1 enters the dry filter 2 through the alkali washing tower outlet and the collection pipe, the inside of the dry filter 2 is sequentially provided with filter bags 3 of different levels of G4, F7 and F9, and the surface of the filter fiber material in the filter bags 3 is subjected to flame retardant treatment. The gas passing through the dry filter enters the subsequent regenerative combustion system.

[0067] Each level of filter bag 3 of the dry filter is provided with a differential pressure gauge for measuring the pressure difference before and after each filter bag 3 to ensure that the waste gas treatment system operates normally, safely and stably.

[0068] (3) Regenerative combustion system

[0069] The regenerative combustion equipment 4 includes a combustion chamber 41 and a regenerative chamber 42 located below the combustion chamber, and the regenerative chamber 42 includes three regenerative chambers A, B and C arranged in a straight line from left to right. The regenerative chamber 42 is filled with plate-type regenerative ceramic 43 and ceramic random packing layer 44.

[0070] The specific working state is as follows: the normal temperature gas passing through the dry filter is introduced into the regenerative chamber A of the regenerative combustion equipment under the action of the RTO fan, and is preheated to about 650℃, and then enters the combustion chamber 41. When the temperature of the gas reaches about 800℃, the organic components in the gas are completely oxidized and decomposed, and the flue gas enters the regenerative chamber C. The ceramic regenerative heating in the regenerative chamber C is heated, and the flue gas is cooled and enters the subsequent discharge equipment. The regenerative chamber B is a backflushing chamber, and fresh air is introduced into the regenerative chamber B under the action of the backflushing fan to flush the regenerative chamber B, so that the components remaining in the regenerative chamber B due to valve switching are flushed into the combustion chamber, and then discharged from the regenerative chamber C after treatment.

[0071] The above three regenerative chambers can automatically and periodically switch the working state of the regenerative chambers.

[0072] The temperature of the exhaust gas discharged from the regenerative combustion equipment is generally controlled at 90-120℃. If the concentration of the exhaust gas is too high, the oxidation heat of VOCs in the exhaust gas is too large, and the temperature of the hearth in the combustion chamber 41 is too high (generally set at 900℃). At this time, in order to prevent the heat from moving downward and causing the outlet exhaust gas temperature to be too high to damage the sealing rubber strip of the valve, the high temperature valve can be opened. The opening degree of the high temperature valve is automatically adjusted according to the temperature of the temperature control probe in the hearth.

[0073] (4) Discharge system

[0074] The exhaust gas discharged from the regenerative chamber C has a concentration of 42 mg / m³, and the content of VOCs is reduced to within the emission standard, and can be discharged through a chimney at a high altitude.

[0075] The device provided by the utility model adopts the process of "alkali washing pretreatment + filtration + RTO equipment" to treat the waste gas with the air volume of 30000 m 3 / h and the waste gas concentration of about 2300 mg / m 3, and can still stably run in more than one year, and the heat storage ceramic in the heat storage chamber does not appear a large number of blockages needing replacement, so that the maintenance cost in the later period is greatly reduced.

[0076] The above description of disclosed embodiments enables those skilled in the art to implement or use the utility model. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the utility model. Therefore, the utility model will not be limited to these embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An apparatus for the treatment of silicon-containing off-gases, characterized in that, The device for treating waste gas containing silicon comprises: an alkali washing device; a filtering device connected with the alkali washing device; a regenerative combustion device connected with the filtering device; the regenerative combustion device comprises a combustion chamber and a regenerative chamber arranged below the combustion chamber; the interior of the regenerative chamber is filled with plate-type regenerative ceramic and ceramic random packing layers, and the ceramic random packing layers are arranged above the plate-type regenerative ceramic.

2. The apparatus for silicon-containing off-gas treatment according to claim 1, characterized in that, The regenerative chambers are arranged side by side in 2n+1; n is any integer in 1-3.

3. The device for silicon-containing off-gas treatment according to claim 1 or 2, characterized in that, The regenerative chambers are arranged in one word in 3.

4. The apparatus for silicon-containing off-gas treatment according to claim 1, wherein The outer side of the regenerative chamber is provided with a differential pressure detection device and a temperature detection device.

5. The apparatus for silicon-containing off-gas treatment according to claim 1, wherein The outer side of the combustion chamber is provided with a temperature detection device and a high-temperature valve.

6. The apparatus for silicon-containing off-gas treatment according to claim 1, wherein The interior of the alkali washing device is provided with a demisting section, a spraying section and a packing absorption section.

7. The apparatus for silicon-containing off-gas treatment according to claim 1, wherein The filtering device comprises 1-6 different levels of filter bags.

8. The apparatus for silicon-containing off-gas treatment according to claim 7, characterized in that, The filtering device comprises filter bags of G4, F7 and F9 levels.

9. The device for silicon-containing off-gas treatment according to claim 7 or 8, characterized in that, One end of the filter bag is provided with a differential pressure detection device for detecting the pressure difference before and after the filter bag.

10. The apparatus for silicon-containing off-gas treatment according to claim 1, wherein The device for treating waste gas containing silicon further comprises a gas discharge device connected with the regenerative combustion device.

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