Laser interferometer detection jig
By designing a laser interferometer inspection fixture and utilizing the difference between the upper and lower openings and the ring stage to shield the edge light source of the lens, the problems of misjudgment and low efficiency in traditional inspection were solved, and high-precision lens surface shape inspection was achieved.
Patent Information
- Application Number
- CN202520055837.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-10
- Publication Date
- 2025-12-05
- Estimated Expiration
- 2035-01-10
AI Technical Summary
Traditional vertical spherical laser interferometers suffer from misjudgment and low detection efficiency when inspecting the surface shape of lenses, especially when there are defects such as hook edges or vertical edges on the lens, making it difficult to accurately detect the surface shape of high-precision lenses.
A laser interferometer inspection fixture was designed, comprising upper and lower openings and an annular stage. The laser source in the peripheral area of the lens is blocked by the difference in the design of the upper and lower openings, and the annular stage is used to shield the edge defects of the lens, thereby improving the inspection accuracy and efficiency.
It effectively reduces the impact of lens edge defects on detection, improves detection accuracy and efficiency, and reduces the false judgment rate.
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Figure CN223636816U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to laser interferometer detection technical field, specifically related to a kind of laser interferometer detection fixture applied to lens surface shape detection. BACKGROUND
[0002] In the traditional method, when detecting lens surface shape by using vertical spherical laser interferometer, 3-point positioning type gauge is used to implement full aperture light detection. Since the general lens surface shape control range is 80% to 95% of the full aperture of the lens, full aperture measurement exists waste of over-detection. When the lens edge hooking and edge vertical defects occur, it is very easy to produce misjudgment, especially for high specification lens (such as PV value within 0.100um), which is more likely to cause misjudgment, seriously affecting detection efficiency and increasing rework operation to cause low working operation efficiency and other aspects. UTILITY MODEL CONTENTS
[0003] In order to solve the above problems, the utility model aims at providing a kind of laser interferometer detection fixture, including jig main body and the opening of the jig main body, the opening includes upper opening and lower opening, the bottom of the upper opening is provided with annular loading platform for carrying detection lens. The light source of the detection lens can be shielded by the annular loading platform, especially the peripheral area of the lens that can receive detection laser is shielded, the degree of hooking, vertical edge and other lens edge defects is reduced, and the detection efficiency is improved to reduce misjudgment.
[0004] The utility model is realized through the following technical schemes:
[0005] A kind of laser interferometer detection fixture, including jig main body and the opening of the jig main body, the opening includes upper opening and lower opening, the bottom of the upper opening is provided with annular loading platform for carrying detection lens.
[0006] In one embodiment, the upper opening can present cylindrical structure, and the lower opening can present cylindrical or inverted circular table structure.
[0007] Specifically, the lower opening is preferably inverted circular table structure.
[0008] The upper opening and the outer ring of the annular loading platform have the same aperture, and the part of the lower opening in contact with the annular loading platform has the same aperture as the inner ring of the annular loading platform. When the laser interferometer is used to detect the lens in the upper opening, the aperture of the upper and lower openings is different, which can block the laser light source entering the peripheral area of the lens.
[0009] In one embodiment, the opening further comprises a light transmission port, and the inner ring of the annular carrier can extend to form the light transmission port, the light transmission port is in a cylindrical structure, and is arranged between the upper opening and the lower opening and used for transmitting the laser light source of the lens.
[0010] In one embodiment, the jig body can further be provided with at least one lens taking port at the position of the upper opening and the annular carrier, so as to facilitate the taking and placing of the lens, and preferably two lens taking ports.
[0011] In one embodiment, the jig body can further be provided with a notch at the position of the upper opening, and the notch can reduce the abrasion between the edge of the lens and the sidewall of the upper opening when the lens is placed or taken out.
[0012] In one embodiment, the jig body further comprises a bearing table, and the bearing table is arranged in a circular table structure and is perpendicular to the axis of the opening.
[0013] Further, the bearing table comprises a plurality of through screw holes used for fixing the jig.
[0014] Compared with the prior art, the utility model has the following beneficial technical effects:
[0015] The laser interferometer detection jig disclosed by the utility model can effectively solve the problem of excessive detection error caused by edge area defects when a traditional laser is used to detect a lens, and comprises a jig body and an opening penetrating the jig body, the opening comprises an upper opening and a lower opening, and the bottom of the upper opening is provided with an annular carrier used for bearing a detection lens. After the detection laser passes through the opening, the annular carrier can block the light entering the peripheral area of the lens, reduce the degree of lens edge defects such as hooking and vertical edge, improve the detection efficiency, and reduce the misjudgment. BRIEF DESCRIPTION OF DRAWINGS
[0016] In order to more clearly illustrate the technical solutions in the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiment description. Obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can also be obtained according to these drawings without creative labor for those skilled in the art.
[0017] Figure 1 Fig. 1 is a cross-sectional structure schematic view of a laser interferometer detection jig provided by an embodiment of the utility model;
[0018] Figure 2 Fig. 2 is a top view schematic view of a laser interferometer detection jig provided by an embodiment of the utility model.
[0019] 10, jig body; 101, mirror taking port; 102, bearing table; 103, screw hole; 104, notch; 20, opening; 201, upper opening; 202, lower opening; 203, light passing port; 30, annular bearing table. DETAILED DESCRIPTION
[0020] The utility model will be further described below in conjunction with the embodiments and drawings, but not as the limitation of the scope of protection of the present application. It should be understood that the specific embodiments described herein are only used to explain the utility model and not used to limit the utility model.
[0021] In the description of the utility model, unless otherwise specified, the meaning of "a plurality of" is two or more than two; The orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail", "vertical", "horizontal", "top", "bottom", "inner", "outer" is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and cannot be understood as limiting the indicated device or element to have a specific orientation, to be constructed and operated in a specific orientation, therefore, it cannot be understood as limiting the utility model. In addition, the terms "first", "second", "third" and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance.
[0022] When the conventional vertical spherical laser interferometer is used to detect the surface shape of the lens, the full-aperture light detection of the bearing lens is usually carried out, and the error is small in the scene with low detection precision requirement, however, in the scene with high detection precision requirement, the defects of the periphery of the lens are large relative to the middle region, and the defects such as the hooking edge and the vertical edge of the lens will seriously affect the detection precision, causing the deviation of the detection result to be too large and other problems.
[0023] The present application improves the original lens bearing detection tool, and provides a laser interferometer detection jig, which comprises a jig body 10 and an opening 20 penetrating the jig body, the opening 20 comprises an upper opening 201 and a lower opening 202, and the bottom of the upper opening 201 is provided with an annular bearing table 30 for bearing the detection lens.
[0024] Please refer to Figures 1-3 The laser interferometer emits detection light from the bottom, which passes through the lower opening 202, the light passing port 203 and the upper opening 201 in turn, and the detection light entering the upper opening 201, especially the light of the periphery, is selectively shielded due to the annular bearing table 30 arranged at the bottom of the upper opening. When the surface shape of the lens is detected, the lens to be detected is placed on the annular bearing table 30, and the detection light does not pass through the peripheral defect region of the lens, so that the precision of the detection result is higher.
[0025] In one embodiment, the upper opening 201 can have a cylindrical structure, and the lower opening 202 can have a cylindrical or inverted circular table structure.
[0026] Preferably, the lower opening 202 has an inverted circular table structure.
[0027] The upper opening 201 has the same diameter as the outer ring of the annular carrier 30, and the part of the lower opening 202 in contact with the annular carrier 30 has the same diameter as the inner ring of the annular carrier 30. When a laser interferometer is used to detect the lens at the upper opening 201, the laser light source entering the peripheral area of the lens can be blocked due to the difference in the diameters of the upper and lower openings.
[0028] In actual applications, the bottom diameter of the upper opening 201 is larger than the top diameter of the lower opening 202. When setting the diameters of the openings, the actual situation of the lens can be considered. The bottom diameter of the upper opening 201 can be consistent with the lens to be detected, and the top diameter of the lower opening 202 can be set according to the allowable error of detection. In scenarios with high detection accuracy requirements, the top diameter of the lower opening 202 can be appropriately reduced to reduce the detection of the peripheral defect area of the lens to be detected.
[0029] The bottom diameter of the lower opening 202 can be selected according to the actual situation of the detection light source, and the bottom diameter should not be smaller than the top diameter.
[0030] In one embodiment, the opening 20 further comprises a light transmission opening 203, and the inner ring of the annular carrier 30 can extend to form the light transmission opening 203. The light transmission opening 203 has a cylindrical structure and is arranged between the upper opening 201 and the lower opening 202 for transmission of the laser light source used for detecting the lens.
[0031] The light transmission opening 203 is obtained by extending the inner ring of the annular carrier 30 in the direction of the central axis of the opening 20. The light transmission opening 203 mainly undertakes the function of light transmission, and its diameter should be consistent with the top diameter of the lower opening 202.
[0032] In one embodiment, the jig body 10 can further comprise at least one lens taking opening 101 at the position of the upper opening 201 and the annular carrier 30 to facilitate the taking and placing of the lens, and preferably two lens taking openings 101.
[0033] From Figure 3The upper opening 201 can expose part of the annular carrier 30, so that people can directly contact the lens placed on the annular carrier 30 when detecting. Meanwhile, the jig body 10 can be provided with a notch 104 at the position of the upper opening 201, which can assist in taking and placing the lens. The notch 104 can reduce the abrasion between the edge of the lens and the sidewall of the upper opening when the lens is placed or taken out.
[0034] In one embodiment, the jig body 10 further comprises a carrier 102, which is provided in a circular table structure and is perpendicular to the axis of the opening 20.
[0035] Further, the carrier 102 comprises a plurality of through screw holes 103 for fixing the detection jig.
[0036] The application provides a laser interferometer detection jig, which is applied to the technical field of laser interferometer detection and comprises a jig body 10 and an opening 20 penetrating the jig body. The opening 20 comprises an upper opening 201 and a lower opening 202, and the bottom of the upper opening 201 is provided with an annular carrier 30 for carrying a detection lens. When the laser interferometer is used to detect the surface structure of the lens, the aperture difference between the upper opening and the lower opening is utilized to shield the detection light for part of the peripheral area of the lens, so that the influence of defects such as lens hooking and vertical edge on the whole detection operation is reduced, and the detection efficiency is improved.
[0037] The above embodiments are only preferred embodiments of the application, and it should be pointed out that, for ordinary skilled in the art, various changes, modifications, replacements and deformations can be made to the embodiments without departing from the principle of the application. The technical solutions obtained by equivalent replacement of the claims of the application all fall within the protection scope of the application, and the protection scope of the application is defined by the appended claims and their equivalents.
Claims
1. A laser interferometer inspection fixture, comprising: The tool body comprises an opening, which comprises an upper opening and a lower opening, and the bottom of the upper opening is provided with an annular carrier for carrying a testing lens.
2. The laser interferometer inspection tool of claim 1, wherein, The upper opening is in a cylindrical structure, and the lower opening is in a cylindrical or inverted circular table structure.
3. The laser interferometer inspection tool of claim 2, wherein, The lower opening is in an inverted circular table structure.
4. The laser interferometer inspection tool of claim 1, wherein, The upper opening has the same diameter as the outer ring of the annular carrier, and the part of the lower opening in contact with the annular carrier has the same diameter as the inner ring of the annular carrier.
5. The laser interferometer inspection tool of claim 1, wherein, The opening further comprises a light transmission opening, the inner ring of the annular carrier extends to form the light transmission opening, the light transmission opening is in a cylindrical structure, and is arranged between the upper opening and the lower opening for transmitting a laser light source of the testing lens.
6. The laser interferometer inspection tool of claim 1, wherein, The tool body is further provided with at least one lens taking opening at the position of the upper opening and the annular carrier.
7. The laser interferometer inspection tool of claim 6, wherein, The lens taking opening is two.
8. The laser interferometer inspection tool of claim 1, wherein, The tool body is provided with a notch at the position of the upper opening, and the notch reduces the abrasion between the lens edge and the side of the upper opening when the lens is placed or taken out.
9. The laser interferometer inspection tool of claim 1, wherein, The tool body further comprises a carrier, which is in a circular table structure and is perpendicular to the central axis of the opening.
10. The laser interferometer inspection tool of claim 9, wherein, The carrier comprises a plurality of through screw holes.