Quartz negative pressure adsorption device
The efficient movement of the sapphire substrate and the high-precision alignment of the Micro LED chip are achieved by using a quartz negative pressure adsorption device, which solves the problem of low efficiency in traditional mass transfer and improves the mass production process of Micro LED.
Patent Information
- Application Number
- CN202423056804.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-11
- Publication Date
- 2025-12-05
- Estimated Expiration
- 2034-12-11
AI Technical Summary
Traditional mass transfer involves single-chip transfer and single-chip eutectic bonding, which severely limits the production efficiency and product yield of Micro LEDs, hindering the mass production process of Micro LEDs.
A quartz negative pressure adsorption device is adopted. By setting a quartz negative pressure adsorption unit above the desktop, the sapphire substrate is adsorbed using negative pressure adsorption holes and adsorption tubes. Combined with the cooperation of motor and winding rod, the movement and position adjustment of the sapphire substrate can be realized. With the help of high-definition transparent components, the Micro LED chip and the control substrate are aligned and eutectic welded with high precision.
This improved the mass production efficiency and product yield of Micro LEDs, and enabled efficient eutectic bonding of Micro LED chips and control substrates, thereby enhancing production efficiency and equipment stability.
Smart Images

Figure CN223639640U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the field of negative pressure adsorption, in particular to a quartz negative pressure adsorption device. BACKGROUND
[0002] The micro LED eutectic device is a high-precision, stable and precise device, which is widely used in semiconductor, LED and other electronic industries, and the control of the heating and welding of the eutectic device and the alignment of the control substrate and the chip is very important. The LED micro-matrix technology refers to the integration of high-density micro-micron LED arrays on a chip, which is widely used in display screens, visible light communication, intelligent portable devices and other fields. It has stable performance, long service life and other advantages, and also continues the advantages of low power consumption, fast response speed and high contrast of LED. At the same time, it also inherits the advantages of low power consumption, color saturation, fast response speed and high contrast of LED. The brightness of Micro LED is 30 times higher than that of OLED, and the energy consumption is about 10% of LCD and 50% of OLED.
[0003] Micro LED will have great application prospects in the future, but the current Micro LED manufacturing cost problem seriously affects its commercialization process. The main reason is that the mass transfer technology bottleneck still needs to be broken through. The traditional mass transfer is single transfer single eutectic welding, which puts strict requirements on the production efficiency and product yield of Micro LED, and seriously limits the Micro LED mass production process. UTILITY MODEL CONTENT
[0004] Therefore, the utility model aims at providing a quartz negative pressure adsorption device to solve the technical problem that the traditional mass transfer is single transfer single eutectic welding, which puts strict requirements on the production efficiency and product yield of Micro LED, and seriously limits the Micro LED mass production process.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a quartz negative pressure adsorption device, which comprises a desktop and a quartz negative pressure adsorption unit adjustably arranged above the desktop, both sides of the top surface of the desktop are embedded with fixing seats, the top end of the fixing seat is slidingly connected with a lifting rod, both ends of the lifting rod are fixed with horizontal rods, and a driving mechanism is embedded in the lifting rod, both ends of the quartz negative pressure adsorption unit are symmetrically fixed with sliding rods inserted into the horizontal rods, and a negative pressure cavity is formed at the center position of the quartz negative pressure adsorption unit, and a plurality of negative pressure adsorption holes are formed at the bottom end of the quartz negative pressure adsorption unit.
[0006] The utility model further sets up, the desktop top end face both sides are provided with processing platform and sapphire lining plate, the bottom of sapphire lining plate is fixed with a plurality of Micro LED chips, the center position of quartz negative pressure adsorption unit is provided with high definition transparent part.
[0007] The utility model further sets up, the side wall fixed mounting of quartz negative pressure adsorption unit has negative pressure adsorption pipe, the inner wall of negative pressure cavity is provided with negative pressure adsorption mouth with negative pressure adsorption pipe intercommunication.
[0008] The utility model further sets up, the recess is set up with winding rod in the recess, and the motor axle is fixedly connected with winding rod.
[0009] The utility model further sets up, the recess is set up with winding rod in the recess, and the motor axle is fixedly connected with winding rod.
[0010] The utility model further sets up, the winding rod is fixedly installed with pull rope on the winding rod, and two pull ropes are fixedly connected with both ends of quartz negative pressure adsorption unit respectively.
[0011] The utility model further sets up, the top of fixed seat is provided with telescopic groove, and the bottom of lifting rod is inserted in telescopic groove.
[0012] The utility model further sets up, the bottom of fixed seat is installed with electric push rod, and the top of electric push rod is fixedly connected with lifting rod in telescopic groove.
[0013] The utility model has the advantages and beneficial effects that: the utility model is provided with quartz negative pressure adsorption unit above the desktop, negative pressure adsorption hole is arranged at the bottom of quartz negative pressure adsorption unit, negative pressure adsorption pipe of the side wall of quartz negative pressure adsorption unit makes negative pressure adsorption hole adsorb sapphire lining plate through negative pressure adsorption mouth, and after adsorption, sapphire lining plate is moved above processing platform, which is convenient for adsorbing sapphire lining plate and a plurality of Micro LED chips, and improves the mass production process of Micro LED.
[0014] The utility model has the advantages and beneficial effects that: the utility model is provided with fixed seat in both ends of the desktop, electric push rod in two fixed seats drives lifting rod to move synchronously, thereby driving quartz negative pressure adsorption unit and sapphire lining plate to lift, and after lifting, one winding rod is wound around pull rope, and the other winding rod loosens pull rope, thereby making pull rope drive quartz negative pressure adsorption unit to move horizontally, so that quartz negative pressure adsorption unit is adsorbed sapphire lining plate and is moved above processing platform, which is convenient for adjusting the position and height of quartz negative pressure adsorption unit, and improves the convenience of quartz negative pressure adsorption unit movement. BRIEF DESCRIPTION OF DRAWINGS
[0015] Figure 1This is a schematic diagram of the overall structure of this utility model;
[0016] Figure 2 This is a schematic diagram of the quartz negative pressure adsorption unit structure of this utility model;
[0017] Figure 3 This utility model Figure 2 Enlarged schematic diagram of the structure at point A in the middle;
[0018] Figure 4 This is a cross-sectional structural diagram of the fixing base of this utility model;
[0019] Figure 5 This is a schematic diagram of the structure of an embodiment of the quartz negative pressure adsorption unit of this utility model;
[0020] Figure 6 This utility model Figure 5 Enlarged schematic diagram of the structure at point B;
[0021] Figure 7 This is a partial structural schematic diagram of an embodiment of the quartz negative pressure adsorption unit of this utility model.
[0022] In the diagram: 1. Desktop; 2. Negative pressure adsorption tube; 3. Sapphire liner; 4. Crossbar; 5. Sliding rod; 6. Quartz negative pressure adsorption unit; 7. High-definition transparent part; 8. Processing table; 9. Fixing base; 10. Lifting rod; 11. Negative pressure adsorption port; 12. Pull rope; 13. Negative pressure adsorption hole; 14. Negative pressure cavity; 15. Motor; 16. Groove; 17. Winding rod; 18. Electric push rod; 19. Telescopic groove; 20. Waist groove; 21. Negative pressure mounting groove. Detailed Implementation
[0023] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.
[0024] A quartz negative pressure adsorption device, such as Figures 1-4 As shown, the device includes a desktop 1 and an adjustable quartz negative pressure adsorption unit 6 mounted above the desktop 1. Fixing bases 9 are embedded in both sides of the top surface of the desktop 1. A lifting rod 10 is slidably inserted into the top of the fixing base 9. A crossbar 4 is fixed to both ends of the lifting rod 10, and a driving mechanism is embedded within the lifting rod 10. Sliding rods 5, inserted into the crossbars 4, are symmetrically fixed to both ends of the quartz negative pressure adsorption unit 6. A negative pressure cavity 14 is opened at the center of the quartz negative pressure adsorption unit 6, and multiple negative pressure adsorption holes 13 are opened at the bottom end of the quartz negative pressure adsorption unit 6.
[0025] The top end face of the desktop 1 is provided with a processing table 8 and a sapphire backing plate 3 respectively, a plurality of Micro LED chips are fixed at the bottom end of the sapphire backing plate 3, a high-definition transparent part 7 is arranged at the center position of the quartz negative pressure adsorption unit 6, a negative pressure adsorption pipe 2 is fixedly installed on the side wall of the quartz negative pressure adsorption unit 6, a negative pressure adsorption hole 13 is arranged at the bottom of the quartz negative pressure adsorption unit 6, and the negative pressure adsorption pipe 2 on the side wall of the quartz negative pressure adsorption unit 6 is connected with the negative pressure adsorption hole 13 through the negative pressure adsorption hole 11 in the inner wall of the negative pressure cavity 14. The sapphire backing plate 3 is adsorbed by the negative pressure adsorption hole 13 through the negative pressure adsorption hole 11, and after adsorption, the sapphire backing plate 3 is moved above the processing table 8. The quartz negative pressure adsorption unit 6 is made of colorless transparent quartz material as a Micro LED chip taking and fixing device. The eutectic welding and mounting process of Micro LED and control substrate is completed by laser heating. The eutectic process does not need to remove the sapphire backing plate of Micro LED, and the quartz negative pressure adsorption device is directly adsorbed to complete the eutectic welding work of the equipment, and the method of module transfer laser heating eutectic welding is adopted. The laser plane beam passes through the quartz negative pressure adsorption device to heat and weld the Micro LED and the control substrate which have been aligned and fixed.
[0026] Further, a groove 16 is arranged on the lifting rod 10, and a motor 15 is fixed at the top end of the lifting rod 10. A winding rod 17 is rotatably arranged in the groove 16, and the shaft of the motor 15 is fixedly connected with the winding rod 17. A pull rope 12 is fixedly installed on the winding rod 17, and the two pull ropes 12 are fixedly connected with the two ends of the quartz negative pressure adsorption unit 6. A telescopic groove 19 is arranged at the top end of the fixed seat 9, and the bottom end of the lifting rod 10 is inserted into the telescopic groove 19. An electric push rod 18 is installed at the bottom end of the fixed seat 9, and the top end of the electric push rod 18 is inserted into the telescopic groove 19 and fixedly connected with the lifting rod 10. The electric push rods 18 in the two fixed seats 9 drive the lifting rod 10 to move synchronously, thereby driving the quartz negative pressure adsorption unit 6 and the sapphire backing plate 3 to move up and down. After moving up and down, the winding rods 17 are driven to rotate by the two motors 15, one of the winding rods 17 is tightened around the pull rope 12, and the other winding rod 17 is loosened around the pull rope 12, so that the pull rope 12 drives the quartz negative pressure adsorption unit 6 to move transversely, thereby moving the quartz negative pressure adsorption unit 6 to above the processing table 8 after adsorbing the sapphire backing plate 3.
[0027] The extended embodiment of the quartz negative pressure adsorption unit 6 is that a waist groove 20 is arranged at the two ends of the quartz negative pressure adsorption unit 6, and a plurality of negative pressure installation grooves 21 are arranged at the top end of the quartz negative pressure adsorption unit 6 and connected with the negative pressure adsorption holes 13 respectively. A negative pressure pipe is installed in each of the negative pressure installation grooves 21, so that the plurality of negative pressure adsorption holes 13 can be used individually.
[0028] The working principle of the utility model is: in use, the electric push rod 18 in two fixed seats 9 drives the lifting rod 10 to move synchronously, thereby driving the quartz negative pressure adsorption unit 6 and the sapphire lining plate 3 to lift, and after lifting, two motors 15 drive the winding rods 17 to rotate, one winding rod 17 winds the pull rope 12, and the other winding rod 17 unwinds the pull rope 12, thereby making the pull rope 12 drive the quartz negative pressure adsorption unit 6 to move horizontally, thereby making the quartz negative pressure adsorption unit 6 move to above the processing table 8 after adsorbing the sapphire lining plate 3, the negative pressure adsorption pipe 2 of the side wall of the quartz negative pressure adsorption unit 6 makes the negative pressure adsorption hole 13 adsorb the sapphire lining plate 3 through the negative pressure adsorption mouth 11, and after adsorption, the sapphire lining plate 3 is moved to above the processing table 8, which is convenient for adsorbing the sapphire lining plate 3 and multiple Micro LED chips, and improves the mass production process of Micro LED. High-definition cameras are used to collect the position information of Micro LED chips and control substrates, and high-precision alignment platforms are used to carry out high-precision alignment of the two.
[0029] Although the embodiments of the utility model have been shown and described, the specific embodiments are only an explanation of the utility model, and are not a limitation of the utility model, and the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner, and those skilled in the art can make modifications, replacements and changes of the embodiments without creative contribution after reading the specification without departing from the principles and purposes of the utility model, but as long as in the range of the claims of the utility model, it is protected by the patent law.
Claims
1. A quartz negative pressure adsorption device, comprising a desktop (1) and a quartz negative pressure adsorption unit (6) adjustably arranged above the desktop (1), characterized in that: The top end face of the desktop (1) is embedded with a fixing seat (9) on both sides, the top end of the fixing seat (9) is slidingly inserted with a lifting rod (10), both ends of the lifting rod (10) are fixed with a cross rod (4), and a driving mechanism is embedded in the lifting rod (10), both ends of the quartz negative pressure adsorption unit (6) are symmetrically fixed with a sliding rod (5) inserted in the cross rod (4), and a negative pressure cavity (14) is formed at the center position of the quartz negative pressure adsorption unit (6), wherein a plurality of negative pressure adsorption holes (13) are formed at the bottom end of the quartz negative pressure adsorption unit (6).
2. The quartz negative pressure adsorption device according to claim 1, characterized in that: The top end face of the desktop (1) is embedded with a fixing seat (9) on both sides, the top end of the fixing seat (9) is slidingly inserted with a lifting rod (10), both ends of the lifting rod (10) are fixed with a cross rod (4), and a driving mechanism is embedded in the lifting rod (10), both ends of the quartz negative pressure adsorption unit (6) are symmetrically fixed with a sliding rod (5) inserted in the cross rod (4), and a negative pressure cavity (14) is formed at the center position of the quartz negative pressure adsorption unit (6), wherein a plurality of negative pressure adsorption holes (13) are formed at the bottom end of the quartz negative pressure adsorption unit (6).
3. The quartz negative pressure adsorption device according to claim 1, characterized in that: The side wall of the quartz negative pressure adsorption unit (6) is fixedly installed with a negative pressure adsorption pipe (2), and the inner wall of the negative pressure cavity (14) is provided with a negative pressure adsorption port (11) in communication with the negative pressure adsorption pipe (2).
4. The quartz negative pressure adsorption device according to claim 1, characterized in that: The lifting rod (10) is provided with a groove (16), and the top end of the lifting rod (10) is fixed with a motor (15).
5. The quartz negative pressure adsorption device according to claim 4, characterized in that: The groove (16) is rotatably provided with a winding rod (17), and the shaft of the motor (15) is fixedly connected with the winding rod (17).
6. The quartz negative pressure adsorption device according to claim 5, characterized in that: The winding rod (17) is fixedly installed with a pull rope (12), and the two pull ropes (12) are fixedly connected with both ends of the quartz negative pressure adsorption unit (6).
7. The quartz negative pressure adsorption device according to claim 1, characterized in that: The top end of the fixing seat (9) is provided with an expansion slot (19), and the bottom end of the lifting rod (10) is inserted into the expansion slot (19).
8. The quartz negative pressure adsorption device according to claim 7, characterized in that: The bottom end of the fixing seat (9) is installed with an electric push rod (18), and the top end of the electric push rod (18) is inserted into the expansion slot (19) and fixedly connected with the lifting rod (10).