Product cooling partition adsorption rotary carrying table of laser processing equipment

Abstract

The utility model relates to a product cooling partition adsorption rotary carrying table of laser processing equipment, which comprises a carrying table lower plate, a rotary motor and a base, and the rotary motor mounted on the base drives the carrying table lower plate above to rotate through a rotary motor connecting plate; a cooling adsorption plate is mounted on the carrying platform lower plate, cooling water joints are mounted at two ends of the cooling adsorption plate, and criss-cross cooling water channels are arranged in the cooling adsorption plate between the two cooling water joints; a plurality of vacuum adsorption cavities are sequentially arranged in the carrying platform lower plate from inside to outside, and a quick connector is installed on the carrying platform lower plate at one end of each vacuum adsorption cavity. According to the utility model, the adverse effect of heat generated by laser processing on the product is obviously reduced, and the yield of the product is improved.

Description

Technical Field

[0001] This utility model relates to the technical field of laser processing equipment, and in particular to a product cooling zone adsorption rotary stage for laser processing equipment. Background Technology

[0002] With the development of laser micromachining technology, its application industries and processed products are becoming increasingly widespread. Materials range from silicon and silicon carbide wafers in the semiconductor industry to prisms and lenses in the optics industry. Laser micromachining technology has taken root in various industries due to its unparalleled advantages over common mechanical processing, such as processing efficiency, processing precision, and processing flexibility.

[0003] After extensive searching, it was found that the existing Chinese patent announcement number CN217444361U discloses a quartz rotary adsorption stage, which includes, from top to bottom, a grooved quartz carrier, a quartz mounting plate, a stage base, a rotary motor, and a rotary shaft pad. The rotary motor is installed in the middle of the rotary shaft pad, and the drive end of the top of the rotary motor is connected to the stage base above. The quartz mounting plate is installed on the stage base, and the grooved quartz carrier is installed on the inner top of the quartz mounting plate. Several suction cup brackets are evenly installed on the stage base along the circumferential direction, and suction cups are installed on the suction cup brackets.

[0004] In pursuit of higher processing efficiency, the laser power used in laser micromachining technology has been further improved. However, the heat generated by high-frequency lasers cannot be dissipated in time, and thermal impact has become a bottleneck for improving processing efficiency in the laser micromachining industry.

[0005] In view of the above-mentioned shortcomings, the designer actively researched and innovated in order to create a product cooling zone adsorption rotary stage for laser processing equipment, making it more valuable for industrial use. Utility Model Content

[0006] To solve any of the above-mentioned technical problems, the purpose of this utility model is to provide a product cooling zone adsorption rotary stage for laser processing equipment.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] The product cooling zone adsorption rotating platform of the laser processing equipment includes a lower platform plate, a rotary motor and a base. The rotary motor mounted on the base drives the upper lower platform plate to rotate through a rotary motor connecting plate.

[0009] A cooling adsorption plate is installed on the lower plate of the platform. Cooling water connectors are installed at both ends of the cooling adsorption plate. A crisscrossing cooling water channel is set in the cooling adsorption plate between the two cooling water connectors.

[0010] Several vacuum adsorption chambers are arranged sequentially from the inside to the outside inside the lower plate of the stage, and quick connectors are installed on the lower plate of the stage at one end of the vacuum adsorption chamber.

[0011] As a further improvement of this utility model, a water-holding tray is installed on the outer bottom of the lower plate of the platform.

[0012] As a further improvement of this utility model, a leakage detection line is installed at the edge of the water-holding tray.

[0013] As a further improvement of this utility model, the leakage detection line is secured by several detection line fixing blocks.

[0014] As a further improvement of this utility model, four vacuum adsorption cavities are arranged sequentially from the inside to the outside inside the lower plate of the stage.

[0015] As a further improvement of this utility model, the flatness of the cooling adsorption plate and the lower plate of the platform, as well as the parallelism of the upper surface, are both 0.02 mm.

[0016] By means of the above solution, this utility model has at least the following advantages:

[0017] This invention significantly reduces the adverse effects of heat generated during laser processing on products, thereby improving product yield.

[0018] This invention can achieve compatibility with products of different sizes (4-inch, 6-inch, 8-inch, and 12-inch) by connecting to a vacuum through different quick connectors, and can ensure that the adsorption area is as large as possible to ensure that the entire product can be attached to the table surface.

[0019] This invention can also incorporate four sets of vacuum generators to achieve automatic switching between products of different sizes, without the need for manual sealing of pipelines and remaining vacuum adsorption holes.

[0020] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of a product cooling zone adsorption rotary stage for laser processing equipment according to this utility model;

[0023] Figure 2 yes Figure 1 Top view;

[0024] Figure 3 yes Figure 1 Top view after the cooling adsorption plate has been removed.

[0025] The meanings of the labels in the figures are as follows.

[0026] 1. Cooling adsorption plate; 2. Leakage detection line; 3. Water tray; 4. Cooling water connector; 5. Quick connector; 6. Lower platform plate; 7. Rotary motor connecting plate; 8. Rotary motor; 9. Base; 10. Vacuum adsorption chamber; 11. Detection line fixing block. Detailed Implementation

[0027] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0028] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0029] like Figures 1-3 As shown, a product cooling zone adsorption rotary stage of a laser processing equipment includes a lower stage plate 6, a rotary motor 8, and a base 9. The rotary motor 8, mounted on the base 9, drives the upper lower stage plate 6 to rotate through a rotary motor connecting plate 7.

[0030] A cooling adsorption plate 1 is installed on the lower plate 6 of the platform. Cooling water connectors 4 are installed at both ends of the cooling adsorption plate 1. A crisscrossing cooling water channel is provided in the cooling adsorption plate 1 between the two cooling water connectors 4.

[0031] Several vacuum adsorption chambers 10 are arranged sequentially from the inside to the outside within the lower plate 6 of the stage, and quick connectors 5 are installed on the lower plate 6 at one end of each vacuum adsorption chamber 10. Specifically, four vacuum adsorption chambers 10 are arranged sequentially from the inside to the outside within the lower plate 6 of the stage.

[0032] A water-collecting tray 3 is installed on the outer bottom of the lower plate 6 of the platform. A leak detection line 2 is installed on the inner edge of the water-collecting tray 3, and the leak detection line 2 is secured by several detection line fixing blocks 11.

[0033] To address the issue of heat-affected zones, some systems use power control systems for real-time power management, while others employ inert gas protection during processing to prevent materials from reacting with air. However, the most direct approach is still to utilize efficient heat dissipation methods to ensure that products are processed within acceptable and minimal temperature fluctuations.

[0034] Among various heat dissipation methods, water's high specific heat capacity makes water cooling more efficient than air cooling. Compared to oil-based refrigerants (such as Freon), water cooling offers a safer operating environment and a simpler mechanical structure, making it the preferred heat dissipation option in the laser micromachining industry.

[0035] Currently, there are three main types of commonly used adsorption platforms. One type uses metal materials with holes or grooves, through which vacuum adsorbs and fixes the product. Another type uses porous ceramic discs for adsorption and fixation. After the ceramic is sintered, countless tiny capillaries are formed inside, through which vacuum adsorbs and fixes the product. The third type uses quartz glass with holes or grooves, through which vacuum adsorbs and fixes the product.

[0036] The flatness of adsorption stages made of metal materials is unstable and greatly affected by ambient temperature and the heat generated during processing. Temperature changes cause changes in the flatness of the stage, affecting the cutting dimensional accuracy. Adsorption stages made of porous ceramics and quartz have stable flatness and are less affected by ambient temperature, but they cannot absorb deformation caused by the heat generated during processing.

[0037] This invention utilizes a metal adsorption platform with through holes, forming a vacuum adsorption cavity 10 with the recessed space of the lower plate for zoned adsorption. The platform features crisscrossing cooling water channels, maintaining a constant platform temperature through cooling water circulation. This ensures the platform is unaffected by external environmental changes and heat generated during processing, guaranteeing its flatness. Furthermore, the use of cavities of different sizes allows for the adsorption of 4-inch, 6-inch, 8-inch, and 12-inch products without the need for manual sealing of the vacuum through holes, increasing the convenience of product switching.

[0038] The base 9 is installed on the motion platform of the laser processing equipment. The rotary motor 8 is installed on the base 9. The rotary motor connecting plate 7 is connected to the rotating body of the rotary motor 8 by screws. The cooling adsorption plate 1 is connected to the lower plate 6 of the stage by screws. The lower plate 6 of the stage is recessed to a certain depth to form a cavity corresponding to different sizes of products. When connecting, a sealing strip must be installed to ensure that there is no possibility of air leakage between cavities of different sizes. The water tray 3 is connected to the back of the lower plate 6 of the stage by screws. The water leakage detection line 2 is fixed at the edge of the water tray 3. The cooling water connector 4 is connected to both sides of the cooling adsorption plate 1. The other openings need to be sealed with plugs to ensure that the cooling water can pass through inside and carry away heat. The quick connector 5 is connected to the lower plate 6 of the stage.

[0039] The working principle and process of this utility model are as follows: The flatness of the entire fixture is achieved by installing the base 9, rotary motor 8, and rotary motor connecting plate 7, adjusting the flatness using gap plates, and then using these components as a foundation. The lower platform plate 6 and the cooling adsorption plate 1 are locked together before further processing. Finally, the fixture is connected to the adjusted rotary motor connecting plate 7, ensuring that the parallelism between the cooling adsorption plate 1 and the upper surface of the moving platform, as well as its own flatness, are both 0.02mm. During operation, the vacuum adsorption area is controlled by switching the four different positions of the quick connector 5, accommodating up to four product types: 4-inch, 6-inch, 8-inch, and 12-inch. There is no need to seal the remaining adsorption holes to maintain vacuum when processing small products. Cooling water from an external chiller is introduced into the cooling adsorption plate 1 through the cooling water connector 4. The cooling adsorption plate 1 has crisscrossing through holes, allowing cooling water to enter from one side and exit from the other, thus removing the heat generated during processing and reducing adverse effects on the product.

[0040] This invention significantly reduces the adverse effects of heat generated during laser processing on products, thereby improving product yield. By using different quick-connect couplings to access the vacuum, it can achieve compatibility with products of different sizes (4-inch, 6-inch, 8-inch, and 12-inch) and ensures the adsorption area is as large as possible, guaranteeing that the entire product adheres smoothly to the worktable. It can also incorporate four sets of vacuum generators to achieve automatic switching between different product sizes, eliminating the need for manual sealing of pipelines and remaining vacuum adsorption holes.

[0041] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0042] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0043] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A product cooling zone adsorption rotary stage for laser processing equipment, comprising a lower stage plate (6), a rotary motor (8), and a base (9), wherein the rotary motor (8) mounted on the base (9) drives the upper lower stage plate (6) to rotate via a rotary motor connecting plate (7); characterized in that: A cooling adsorption plate (1) is installed on the lower plate (6) of the platform. Cooling water connectors (4) are installed at both ends of the cooling adsorption plate (1). A crisscrossing cooling water channel is provided in the cooling adsorption plate (1) between the two cooling water connectors (4). A number of vacuum adsorption chambers (10) are arranged sequentially from the inside to the outside in the lower plate (6) of the stage, and a quick connector (5) is installed on the lower plate (6) of the stage at one end of the vacuum adsorption chamber (10).

2. The product cooling zone adsorption rotary stage of the laser processing equipment as described in claim 1, characterized in that, A water tray (3) is installed on the outer bottom of the lower plate (6) of the platform.

3. The product cooling zone adsorption rotary stage of the laser processing equipment as described in claim 2, characterized in that, A leak detection line (2) is installed at the edge of the water-holding tray (3).

4. The product cooling zone adsorption rotary stage of the laser processing equipment as described in claim 3, characterized in that, The leakage detection line (2) is secured by several detection line fixing blocks (11).

5. The product cooling zone adsorption rotary stage of the laser processing equipment as described in claim 1, characterized in that, Four vacuum adsorption chambers (10) are arranged sequentially from the inside to the outside inside the lower plate (6) of the stage.

6. The product cooling zone adsorption rotary stage of the laser processing equipment as described in claim 1, characterized in that, The flatness and parallelism of the upper surface of the cooling adsorption plate (1) and the lower plate (6) of the platform are both 0.02 mm.

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