Boat support, bearing mechanism and machining equipment

Abstract

The utility model provides a boat support, a bearing mechanism and processing equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem that sheet materials are easy to slip. The boat support comprises two side plates, the two side plates are oppositely arranged, the upper end of each side plate is provided with a through groove, a first included angle which is an acute angle is formed between the groove bottom of each through groove and the horizontal plane, under the condition that the boat support bears a boat structure, at least part of the boat lugs are placed in the through grooves, and the borne faces are parallel to and abut against the groove bottoms of the through grooves; a first included angle is formed between the sheet material and the horizontal plane, and the blocking piece abuts against the side edge of the sinking side of the sheet material so as to limit the sheet material from sliding out of the boat structure; and the connecting plate is used for connecting the two side plates. By means of the structure, due to the gravity of the flaky materials, the flaky materials can move downwards in an inclined mode and finally abut against the blocking piece, continuous movement of the flaky materials is limited by the blocking piece, and therefore the flaky materials are stably placed in the boat structure.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, in particular to a boat holder, a bearing mechanism and a processing device. BACKGROUND

[0002] When coating a silicon wafer, the silicon wafer can be processed in the form of a whole piece or a half piece. The whole piece of silicon wafer usually refers to a rectangular silicon wafer with a size of 180 mm (or greater than 180 mm) x 180 mm (or greater than 180 mm), and the half piece of silicon wafer usually refers to a rectangular silicon wafer with a size of half of the whole piece of silicon wafer, for example, 182 mm x 90 mm. The horizontal insertion piece half piece coating process is a type of photovoltaic device process route. The obvious feature of this type of process is that the silicon wafer has a small size and a light weight, so the silicon wafer is less affected by the friction caused by the weight and is more affected by the airflow and vibration.

[0003] In the traditional horizontal insertion piece half piece coating process, the silicon wafer is horizontally placed in a quartz boat, the quartz boat is horizontally placed on a boat holder, and the silicon wafer is in a horizontal state and enters a furnace tube for processing. When the furnace tube is evacuated, the silicon wafer is easily slid out of the quartz boat due to the influence of airflow fluctuations in the furnace tube, resulting in the sliding piece phenomenon. This leads to uneven film thickness of the silicon wafer, increased fragment rate, abnormal equipment alarm, and difficulty in automation. CONTENT OF THE UTILITY MODEL

[0004] To solve at least one of the above technical problems, the present application is proposed. The embodiments of the present application provide a boat holder, a bearing mechanism and a processing device.

[0005] In a first aspect, an embodiment of the present application provides a boat holder, which is configured to bear a boat structure, the boat structure is configured to bear a sheet material, the boat structure includes two boat ears and at least one blocking piece, the boat ear has a bearing surface parallel to a horizontal plane, and in the case that the boat structure bears the sheet material, the sheet material is adjacent to the blocking piece, and the sheet material is parallel to the bearing surface; wherein the boat holder includes: two side plates, the two side plates are oppositely arranged, and the upper end of each side plate has a through slot, wherein the slot bottom of the through slot has a first included angle with the horizontal plane, the angle is an acute angle, and in the case that the boat holder bears the boat structure, the boat ear is at least partially placed in the through slot, the bearing surface is parallel to and abuts the slot bottom of the through slot, so as to form a first included angle between the sheet material and the horizontal plane, and the blocking piece abuts the side edge on the sinking side of the sheet material, so as to limit the sheet material from sliding out of the boat structure; and a connecting plate for connecting the two side plates.

[0006] In some embodiments, the first included angle ranges from 1.4 degrees to 5 degrees.

[0007] In some embodiments, the side plate extends along a first horizontal direction, the trough bottom has opposite first and second ends in the extension direction of the side plate, the vertical height of the trough bottom at the first end is less than the vertical height of the trough bottom at the second end; wherein the side wall close to the first end of the trough bottom is a first side wall, the second included angle between the bottom area of the first side wall and the trough bottom is less than or equal to 90 degrees.

[0008] In some embodiments, the side plate extends along a first horizontal direction, the trough bottom has opposite first and second ends in the extension direction of the side plate, the vertical height of the trough bottom at the first end is less than the vertical height of the trough bottom at the second end; wherein the side wall close to the first end of the trough bottom is a first side wall, the side wall close to the second end of the trough bottom is a second side wall, the top area of the first side wall has a first guide surface, the top area of the second side wall has a second guide surface, the distance between the first guide surface and the second guide surface gradually increases from close to the trough bottom to away from the trough bottom.

[0009] In the second aspect, an embodiment of the present application provides a bearing mechanism, characterized in that it comprises: a boat structure, the boat structure comprising a first end plate, a second end plate, a plurality of slot rods, two boat ears and at least one blocking piece, wherein the second end plate is arranged opposite to the first end plate, the slot rods connect the first end plate and the second end plate, the plurality of slot rods form at least one accommodation space, the accommodation space is configured to accommodate sheet materials, the boat ear is connected with at least one slot rod, and the boat ear has a bearing surface; in the case that the boat structure bears the sheet materials, the sheet materials are adjacent to the blocking piece, and the sheet materials are parallel to the bearing surface; the boat support of any of the above is configured to bear the boat structure.

[0010] In some embodiments, the blocking piece connects the first end plate and the second end plate, and is arranged adjacent to the accommodation space; the blocking piece is configured to block the sheet materials from sliding out of the accommodation space.

[0011] In some embodiments, the blocking piece is close to the central area of the side of the accommodation space.

[0012] In some embodiments, the plurality of slot rods are arranged in M rows and N columns along a first direction and a second direction, M and N are positive integers, the accommodation space formed by each adjacent two rows of slot rods can accommodate a plurality of sheet materials arranged along a third direction, the first direction is perpendicular to the second direction, the third direction is perpendicular to the first direction and the second direction, and at least one blocking piece is arranged corresponding to the accommodation space formed by each adjacent two rows of slot rods.

[0013] In some embodiments, the slot rod has a slot tooth, the slot tooth is configured to bear the sheet materials, and the bearing surfaces formed by the slot teeth bearing the same sheet material are parallel to the bearing surface.

[0014] In a third aspect, an embodiment of the present application provides a processing device, comprising: a reaction furnace, the reaction furnace having a process chamber; the carrying mechanism of any one of the second aspect, configured to carry the sheet material; and a boat pushing device, configured to transport the carrying mechanism to the process chamber, so that the reaction furnace processes the sheet material carried by the carrying mechanism.

[0015] The boat holder, the carrying mechanism and the processing device provided by the embodiments of the present application can place the boat structure in the boat holder, and because the sheet material is parallel to the carried surface, the carried surface is parallel to and abuts the groove bottom of the through groove, and the groove bottom has an acute first included angle with the horizontal plane, the sheet material has the first included angle with the horizontal plane, that is, the sheet material is in an inclined state. Under the influence of the gravity of the sheet material itself, the sheet material moves obliquely downward, and finally abuts against the blocking piece and is limited by the blocking piece to continue to move, so that the sheet material is stably placed in the boat structure. If the sheet material is to slide, the gravity caused by the center of gravity offset and the friction force need to be overcome, which is more difficult than the conventional horizontally placed silicon wafer that only needs to overcome the friction force to slide. Therefore, by using this structure, firstly, the stability of the sheet material is improved, so that the sheet material is prevented from sliding due to the influence of the air flow in the reaction furnace, and the uncertain factors such as position change are reduced. Secondly, the problem of uneven film coating caused by the sheet sliding phenomenon is improved, the process yield is increased, and the production capacity is improved. Finally, because the sheet material cannot slide randomly in the boat structure, the probability of collision of the sheet material is reduced, and in turn the fragment rate is reduced, which helps to improve the production capacity and the yield of the sheet material. BRIEF DESCRIPTION OF DRAWINGS

[0016] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings in which like reference characters refer to like parts throughout the figures. The accompanying drawings are included to provide a further understanding of the embodiments of the present application and constitute a part of the specification, illustrate embodiments of the present application and are used to explain the present application, but do not constitute a limitation of the present application. In the drawings, the same reference numerals generally refer to the same components or steps throughout the figures.

[0017] Figure 1 Fig. 1 shows a structural schematic diagram of a boat structure provided by an exemplary embodiment of the present application.

[0018] Figure 2 Fig. 2 shows a front view of the boat structure provided by an exemplary embodiment of the present application.

[0019] Figure 3 Fig. 3 shows a front view of a boat holder provided by an exemplary embodiment of the present application.

[0020] Figure 4 Fig. 4 shows a structural schematic diagram of a carrying mechanism provided by an exemplary embodiment of the present application. Figure 3 Fig. 5 shows a partial enlarged view of the boat holder in the A area.

[0021] Figure 5 The diagram shown is a schematic of a boat structure placed on a boat support according to an exemplary embodiment of this application.

[0022] Figure 6 The image shown is an exemplary embodiment of this application. Figure 1 The diagram shows a magnified view of the boat structure in region B.

[0023] Figure 7 The diagram shown is a schematic diagram of the processing equipment provided in an exemplary embodiment of this application.

[0024] Figure label:

[0025] 100. Boat support; 110. Side plate; 111. Through groove; 1111. Groove bottom; 1112. First side wall; 11121. First guide surface; 1113. Second side wall; 11131. Second guide surface; 120. Connecting plate; 200. Boat structure; 210. Boat lug; 211. Bearing surface; 220. Blocking element; 230. First end plate; 240. Second end plate; 250. Groove bar; 251. Groove tooth; 2511. Upper surface of groove tooth; 300. Sheet material; 310. Side of the sunken side; 400. Bearing mechanism; 500. Processing equipment; 600. Reactor; 700. Boat pushing device. Detailed Implementation

[0026] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0027] Figure 1 The diagram shown is a schematic representation of a boat structure provided in an exemplary embodiment of this application. Figure 2 The image shown is a front view of a boat structure provided in an exemplary embodiment of this application. Figure 3 The image shown is a front view of a boat carrier provided in an exemplary embodiment of this application. Figure 4 The image shown is an exemplary embodiment of this application. Figure 3 The image shown is a magnified view of a portion of area A containing the boat support. Figure 5 The diagram shown is a schematic of a boat structure placed on a boat support according to an exemplary embodiment of this application.

[0028] like Figures 1 to 5As shown, this application embodiment provides a boat support 100 configured to support a boat structure 200. The boat structure 200 is configured to support a sheet material 300. The boat structure 200 includes two boat ears 210 and at least one blocking member 220. The boat ears 210 have a supported surface 211 parallel to the horizontal plane. When the boat structure 200 supports the sheet material 300, the sheet material 300 is adjacent to the blocking member 220, and the sheet material 300 is parallel to the supported surface 211. The boat support 100 includes two side plates 110 and a connecting plate 120. The two side plates 110 are arranged opposite each other, and the upper end of each side plate 110 has a through groove 111, wherein the bottom 1111 of the through groove 111 is parallel to the horizontal plane (e.g., ...). Figure 4 The first included angle between the dashed line P (as shown in the figure) and the first included angle is an acute angle (as shown in the figure). Figure 4 As shown in the included angle c), when the boat support 100 supports the boat structure 200, the boat ear 210 is at least partially placed in the through groove 111, with the bearing surface 211 parallel to and abutting against the bottom 1111 of the through groove 111, so that the sheet material 300 forms a first included angle with the horizontal plane, and the blocking member 220 abuts against the side edge 310 of the sheet material 300 on the side that sinks, so as to restrict the sheet material 300 from sliding out of the boat structure 200. The connecting plate 120 is used to connect the two side plates 110.

[0029] For example, the sheet material 300 is a whole silicon wafer or a half silicon wafer.

[0030] For example, there is one connecting plate 120, and the two ends of the connecting plate 120 are connected to two side plates 110.

[0031] For example, the side panel 110 is along the first horizontal direction (e.g. Figure 3 Extending in the direction E, the side plate 110 has a first end and a second end in the first horizontal direction, and there are two connecting plates 120, one connecting plate 120 connecting between the first ends of the two side plates 110, and the other connecting plate 120 connecting between the second ends of the two side plates 110.

[0032] For example, the bottom of the boat ear 210 can be placed in the through groove 111.

[0033] For example, each boat structure 200 has two boat ears 210 disposed opposite to each other, and through slots 111 on the two side plates 110 are disposed opposite to each other. The two boat ears 210 of each boat structure 200 can be placed at least partially in the two through slots 111 disposed opposite to each other on the two side plates 110.

[0034] For example, each side plate has a plurality of through slots 111 arranged in a horizontal direction, thereby enabling the boat support 100 to support a plurality of boat structures 200.

[0035] In the above embodiment, after the boat structure 200 is placed in the boat support 100, since the sheet material 300 is parallel to the supported surface 211, the supported surface 211 is parallel to and abuts against the bottom 1111 of the through groove 111, and the bottom 1111 of the through groove 111 has a first angle with an acute angle with the horizontal plane, the sheet material 300 will have a first angle with the horizontal plane, that is, the sheet material 300 will be in an inclined state. In this way, under the influence of the sheet material 300's own weight, the sheet material 300 will move obliquely downward and eventually abut against the blocking member 220, and the blocking member 220 restricts the sheet material 300 from continuing to move, thereby making the sheet material 300 stably placed in the boat structure 200. If the sheet material 300 were to slide, it would need to overcome the effects of gravity and friction caused by the shift in the center of gravity. Compared to a traditional horizontally placed silicon wafer, which only needs to overcome friction to slide, this structure is much more difficult. Therefore, this structure firstly increases the stability of the sheet material 300, ensuring that it will not slide due to airflow within the reactor, reducing uncertainties such as positional changes. Secondly, it improves the problem of uneven coating caused by the slippage phenomenon, increasing process yield and helping to improve production capacity. Finally, since the sheet material 300 cannot slide freely within the boat structure 200, the probability of collision is reduced, thereby reducing the breakage rate and helping to improve production capacity and the yield of the sheet material 300.

[0036] In some embodiments, the first included angle ranges from 1.4 degrees to 5 degrees.

[0037] If the tilt angle of the sheet material 300 is too large, i.e., the tilt angle of the boat structure 200 is too large, the following problems will occur. First, the tilted placement of the boat structure 200 will occupy more space; second, the sides of the boat lug 210 will bear greater force; third, the blocking member 220 will be subjected to greater force. In the above embodiment, by making the first included angle range from 1.4 degrees to 5 degrees, it is possible to ensure that the sheet material 300 is not prone to slippage under its own weight, and due to the smaller tilt angle, the above-mentioned problems can be avoided.

[0038] In some embodiments, such as Figure 4 As shown, the side plate 110 extends along a first horizontal direction, and the groove bottom 1111 has a first end and a second end opposite to each other in the extending direction of the side plate 110. The vertical height of the groove bottom 1111 at the first end is less than the vertical height of the groove bottom 1111 at the second end. The sidewall near the first end of the groove bottom 1111 is a first sidewall 1112, and the second included angle between the bottom region of the first sidewall 1112 and the groove bottom 1111 (e.g., ...) Figure 4 The included angle d) is less than or equal to 90 degrees.

[0039] For example, the second included angle is 90 degrees or 89 degrees.

[0040] In the above embodiments, by making the second included angle between the bottom area of ​​the first sidewall 1112 and the bottom of the trough 1111 less than or equal to 90 degrees, when the boat support 100 supports the boat structure 200, the first sidewall 1112 can abut against the side of the boat ear 210, thereby restricting the boat ear 210 from moving towards the first sidewall 1112 and improving the stability of the boat structure 200 placed on the boat support 100.

[0041] In some embodiments, such as Figure 4 As shown, the side plate 110 extends along a first horizontal direction, and the bottom of the groove 1111 has a first end and a second end opposite to each other in the extension direction of the side plate 110. The vertical height of the bottom of the groove 1111 at the first end is less than the vertical height of the bottom of the groove 1111 at the second end. The side wall near the first end of the bottom of the groove 1111 is a first side wall 1112, and the side wall near the second end of the bottom of the groove 1111 is a second side wall 1113. The top area of ​​the first side wall 1112 has a first guide surface 11121, and the top area of ​​the second side wall 1113 has a second guide surface 11131. The distance between the first guide surface 11121 and the second guide surface 11131 gradually increases from the direction near the bottom of the groove 1111 to the direction away from the bottom of the groove 1111.

[0042] For example, the first guide surface 11121 can be a plane or an arc surface, and the second guide surface 11131 can be a plane or an arc surface.

[0043] In the above embodiments, through this structure, such as Figure 4 As shown, the top of the first sidewall 1112 and the top of the second sidewall 1113 can form an opening that gradually increases from bottom to top, so that the boat ear 210 can fall smoothly into the through groove 111.

[0044] Based on the same concept, this application also provides a support mechanism 400, which includes a boat structure 200 and a boat support 100 as described in the above embodiments. The boat structure 200 includes a first end plate 230, a second end plate 240, a plurality of grooved rods 250, two boat ears 210, and at least one blocking member 220. The second end plate 240 is disposed opposite to the first end plate 230. The grooved rods 250 connect the first end plate 230 and the second end plate 240. The plurality of grooved rods 250 form at least one receiving space configured to receive sheet material 300. The boat ears 210 are connected to at least one grooved rod 250 and have a bearing surface 211. When the boat structure 200 bears the sheet material 300, the sheet material 300 is adjacent to the blocking member 220 and parallel to the bearing surface 211. The boat support 100 is configured to bear the boat structure 200.

[0045] For example, the blocking member 220 is a rod-shaped structure, and the cross-sectional shape of the blocking member 220 can be circular, rectangular or other polygonal.

[0046] In some embodiments, such as Figure 1 As shown, the blocking member 220 is connected to the first end plate 230 and the second end plate 240. The blocking member 220 is disposed adjacent to the receiving space and is configured to prevent the sheet material 300 from sliding out of the receiving space.

[0047] For example, the two ends of the blocking member 220 can be welded to the first end plate 230 and the second end plate 240 respectively.

[0048] For example, the boat ear 210 extends along a second direction and has a first end and a second end in the second direction. The first end and the second end of the boat ear 210 are respectively connected to two slotted rods 250.

[0049] In some embodiments, the blocking member 220 is located near the central region on one side of the receiving space.

[0050] Specifically, if the orthographic projection of the blocking member 220 on the second end plate 240 is the first projection, and the orthographic projection of the accommodating space on the second end plate 240 is the second projection, the first edge region of the second projection near the first projection is along the first direction (e.g., Figure 1 Extending in the X direction, the first edge region has a first end, a second end, and an intermediate region located between the first end and the second end in the first direction, with the stop 220 adjacent to the intermediate region. Exemplarily, the length of the intermediate region in the first direction accounts for a portion of the length of the first edge region in the first direction.

[0051] In the above embodiments, by bringing the blocking member 220 close to the center region of the receiving space, the blocking member 220 can abut against the middle of the side 310 of the side where the sheet material 300 sinks, thereby stably preventing the sheet material 300 from sliding out of the receiving space.

[0052] In some embodiments, the plurality of grooved bars 250 are arranged along a first direction and a second direction (e.g., Figure 1 (As shown in the Y direction) are arranged in M ​​rows and N columns, where M and N are positive integers. The space formed by each pair of adjacent rows of slot bars 250 can accommodate space along a third direction (such as...). Figure 1 Multiple sheet materials 300 arranged in the Z direction, with the first direction perpendicular to the second direction and the third direction perpendicular to the first and second directions, and at least one blocking member 220 corresponding to the accommodating space formed by each two adjacent rows of grooved bars 250.

[0053] For example, such as Figure 1As shown, six slot bars 250 are arranged in three rows and two columns along a first direction and a second direction. Specifically, the three rows of slot bars along the first direction are the first row of slot bars, the second row of slot bars, and the third row of slot bars. A receiving space is formed between the first row of slot bars and the second row of slot bars, and a receiving space is formed between the second row of slot bars and the third row of slot bars. The two receiving spaces can each accommodate two sets of sheet materials 300 (such as half silicon wafers) arranged along the third direction. A blocking member 220 is provided next to each receiving space so that each blocking member 220 can prevent the sheet material 300 in the receiving space from sliding out of the receiving space.

[0054] In the above embodiment, by setting M rows and N columns of grooved bars 250, multiple receiving spaces can be set in the boat structure 200 to carry more sheet material 300, and a blocking member 220 is set for each receiving space to prevent the sheet material 300 from sliding out of the receiving space.

[0055] Figure 6 The image shown is an exemplary embodiment of this application. Figure 1 The diagram shows a magnified view of the boat structure in region B.

[0056] In some embodiments, such as Figure 6 As shown, the grooved bar 250 has grooves 251, which are configured to support the sheet material 300. The bearing surface formed by the grooves 251 supporting the same sheet material 300 is parallel to the bearing surface 211.

[0057] For example, the slot 251 and the sheet material 300 are in point contact, line contact, or surface contact.

[0058] For example, such as Figure 6 As shown, the cross-sectional shape of the slot tooth 251 in the first and second directions is triangular.

[0059] In the above embodiments, by making the bearing surface parallel to the bearing surface 211, the sheet material 300 and the bottom of the groove 1111 can have the same tilt angle when the bearing surface 211 contacts the bottom of the groove 1111.

[0060] Figure 7 The diagram shown is a schematic diagram of the processing equipment provided in an exemplary embodiment of this application.

[0061] Based on the same concept, such as Figure 7As shown in the illustration, this application also provides a processing apparatus 500, which includes a reactor 600, a support mechanism 400 as described in the above embodiments, and a pusher device 700. The reactor 600 has a process chamber. The support mechanism 400 is configured to support sheet material 300. The pusher device 700 is configured to transport the support mechanism 400 to the process chamber so that the reactor 600 processes the sheet material 300 supported by the support mechanism 400.

[0062] For example, reactor 600 is a chemical vapor deposition (CVD) apparatus.

[0063] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0064] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0065] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0066] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0067] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A boat support, characterized in that, The material is configured to support a boat structure, the boat structure being configured to support sheet material, the boat structure including two lugs and at least one stopper, the lugs having a supported surface parallel to a horizontal plane, wherein when the boat structure supports the sheet material, the sheet material is adjacent to the stopper and the sheet material is parallel to the supported surface; The boat support includes: Two side plates are arranged opposite each other. Each side plate has a through groove at its upper end. The bottom of the through groove has a first included angle of acute angle with the horizontal plane. When the boat support carries the boat structure, the boat ear is at least partially placed in the through groove. The supported surface is parallel to and abuts against the bottom of the through groove, so that the sheet material forms the first included angle with the horizontal plane. The blocking member abuts against the side of the sheet material on the side that sinks, so as to restrict the sheet material from sliding out of the boat structure. A connecting plate is used to connect the two side plates.

2. The boat support according to claim 1, characterized in that, The first included angle ranges from 1.4 degrees to 5 degrees.

3. The boat support according to claim 1 or 2, characterized in that, The side plate extends along a first horizontal direction, and the bottom of the groove has a first end and a second end opposite to each other in the direction of extension of the side plate, wherein the vertical height of the bottom of the groove at the first end is less than the vertical height of the bottom of the groove at the second end. The sidewall near the first end of the tank bottom is called the first sidewall, and the second included angle between the bottom area of ​​the first sidewall and the tank bottom is less than or equal to 90 degrees.

4. The boat support according to claim 1 or 2, characterized in that, The side plate extends along a first horizontal direction, and the bottom of the groove has a first end and a second end opposite to each other in the direction of extension of the side plate, wherein the vertical height of the bottom of the groove at the first end is less than the vertical height of the bottom of the groove at the second end. The sidewall at the first end near the bottom of the tank is called the first sidewall, and the sidewall at the second end near the bottom of the tank is called the second sidewall. The top area of ​​the first sidewall has a first guide surface, and the top area of ​​the second sidewall has a second guide surface. The distance between the first guide surface and the second guide surface gradually increases from near the bottom of the tank to away from the bottom of the tank.

5. A load-bearing mechanism, characterized in that, include: A boat structure includes a first end plate, a second end plate, a plurality of grooved bars, two boat ears, and at least one blocking member. The second end plate is disposed opposite to the first end plate. The grooved bars connect the first end plate and the second end plate. The plurality of grooved bars form at least one receiving space configured to receive the sheet material. The boat ears are connected to at least one of the grooved bars and have a bearing surface. When the boat structure carries the sheet material, the sheet material is adjacent to the blocking member and parallel to the bearing surface. The boat support according to any one of claims 1 to 4 is configured to support the boat structure.

6. The bearing mechanism according to claim 5, characterized in that, The blocking member connects the first end plate and the second end plate, and is disposed adjacent to the receiving space. The blocking member is configured to prevent the sheet material from sliding out of the receiving space.

7. The bearing mechanism according to claim 6, characterized in that, The blocking member is located in the central region near the side of the receiving space.

8. The bearing mechanism according to claim 6 or 7, characterized in that, The plurality of grooved bars are arranged in M ​​rows and N columns along a first direction and a second direction, where M and N are positive integers. The accommodating space formed by each two adjacent rows of grooved bars can accommodate multiple sheets of sheet material arranged along a third direction. The first direction is perpendicular to the second direction, and the third direction is perpendicular to both the first direction and the second direction. At least one blocking member is provided in each accommodating space formed by each two adjacent rows of grooved bars.

9. The bearing mechanism according to any one of claims 5 to 7, characterized in that, The grooved bar has grooves that are configured to support the sheet material. The supporting surface formed by the grooves supporting the same sheet material is parallel to the supported surface.

10. A processing device, characterized in that, include: A reactor having a process chamber; The bearing mechanism according to any one of claims 5 to 9 is configured to bear sheet material; A boat-pushing device is configured to transport the carrier mechanism to the process chamber so that the reactor can process the sheet material carried by the carrier mechanism.

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