Flip type butterfly cavity

Abstract

The utility model relates to the field of microwave plasma reactors, and discloses a flip type butterfly cavity which comprises a workbench and a magnetic control head, the bottom end of the magnetic control head is fixedly connected with a three-pin adjusting pipe, the right end of the three-pin adjusting pipe is fixedly connected with an adjusting seat, the right end of the adjusting seat is provided with a first adjusting assembly, and the first adjusting assembly is provided with a second adjusting assembly. The bottom end of the three-pin adjusting pipe is fixedly connected with a microwave guide pipe, the right end of the microwave guide pipe is fixedly connected with a microwave mode converter, the right end of the microwave mode converter is fixedly connected with a rectangular waveguide pipe, the right end of the rectangular waveguide pipe is provided with a second adjusting assembly, and the top end of the microwave mode converter is fixedly connected with a base station. According to the utility model, the microwave mode converter is provided with an independent water cooling device, and the pin adjusting screw rod adopts an air cooling and water cooling double-cooling mode, so that heat generated in the running process of equipment can be efficiently taken away, and the butterfly cavity has remarkable operation convenience in the MPCVD production process, and can easily carry out feeding and discharging operation.

Description

Technical Field

[0001] This utility model relates to the field of microwave plasma reactors, and more particularly to a flip-top butterfly-shaped cavity. Background Technology

[0002] With the rapid development of microwave plasma vapor deposition (MPCVD) technology, the demand for preparing high-quality diamond wafers and composite wafers is becoming increasingly urgent. This technology is widely involved in the fields of microwave plasma reactor technology and microwave plasma vapor deposition equipment, and is a key force driving the progress of materials science.

[0003] Traditional fixed chamber structures present several problems: inconvenient sample handling, reduced production efficiency, difficulty in maintaining a good seal after opening and closing operations, and a risk of microwave leakage. Furthermore, during MPCVD equipment operation, if precise impedance matching cannot be achieved under different power and pressure conditions, microwave loss will increase significantly, raising production costs. Additionally, the MPCVD process generates a large amount of heat, and if heat cannot be effectively dissipated, it will affect wafer quality and equipment reliability.

[0004] In response to the technical problems of traditional fixed chamber structures, such as inconvenience in sample handling, significant losses during wave mode conversion, and the generation of a large amount of heat during equipment operation, this application proposes a flip-top butterfly-shaped chamber. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a flip-top butterfly cavity. The microwave mode converter in this system is equipped with an independent water-cooling device, and the pin adjusting screw adopts a dual cooling method of air and water cooling, which can efficiently remove the heat generated during equipment operation. Furthermore, this butterfly cavity offers significant operational convenience during MPCVD production. Operators can easily open the flip-top for loading and unloading operations. Simultaneously, the short-circuit piston moves back and forth within the rectangular waveguide to adjust impedance matching under different power and air pressure conditions, reducing microwave loss and maximizing energy conversion efficiency.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a flip-top butterfly cavity, comprising a worktable and a magnetic control head, wherein a three-pin adjustment tube is fixedly connected to the bottom end of the magnetic control head, an adjustment seat is fixedly connected to the right end of the three-pin adjustment tube, an adjustment component one is provided at the right end of the adjustment seat, a microwave guide tube is fixedly connected to the bottom end of the three-pin adjustment tube, a microwave mode converter is fixedly connected to the right end of the microwave guide tube, a rectangular waveguide is fixedly connected to the right end of the microwave mode converter, an adjustment component two is provided at the right end of the rectangular waveguide, a base is fixedly connected to the top end of the microwave mode converter, the bottom end of the base is fixedly connected to the top end of the worktable, two first support columns and two second support columns are fixedly connected to the rear side of the top end of the worktable, a connecting plate is rotatably connected to one end of the first support column, and a butterfly cavity is fixedly connected to the inner wall of the connecting plate.

[0007] Furthermore, the adjustment assembly includes three pin adjustment screws threadedly connected to the inner wall of the adjustment seat. A first knob is fixedly connected to the right end of each pin adjustment screw, and the pin adjustment screws penetrate the inner wall of the right end of the three-pin adjustment tube.

[0008] Furthermore, a condensate inlet is provided at the upper front end of the regulating seat, and a condensate outlet is provided at the lower front end of the regulating seat. A ventilation connector is fixedly connected to the bottom end of the three-pin regulating pipe.

[0009] Furthermore, the second adjustment component includes a piston adjustment screw threadedly connected to the inner wall of the right end of the rectangular waveguide, a second knob fixedly connected to the right end of the piston adjustment screw, and a short-circuit piston rotatably connected to the left end of the piston adjustment screw.

[0010] Furthermore, a condensate drain connector is fixedly connected to the front end of the microwave mode converter for cooling the microwave mode converter.

[0011] Furthermore, a nitrogen spring is rotatably connected to one end of the second support column opposite to the other end, and the other end of the nitrogen spring is rotatably connected to the left and right ends of the connecting plate.

[0012] Furthermore, the outer wall of the butterfly cavity is provided with multiple observation windows for observing the wafer production process on the substrate.

[0013] Furthermore, a temperature sensor is fixedly connected to the top of the butterfly-shaped cavity to detect the temperature at the center of the grown wafer and upload the data to the terminal.

[0014] This utility model has the following beneficial effects:

[0015] 1. In this utility model, the butterfly-shaped cavity performs excellently in temperature control, achieving a uniform temperature distribution. The microwave mode converter in the system is equipped with an independent water cooling device, and the pin adjusting screw adopts a dual cooling method of air cooling and water cooling. This innovative cooling design can efficiently remove the heat generated during the operation of the equipment, ensuring the stability of the device temperature.

[0016] 2. In this utility model, the butterfly-shaped cavity has significant operational convenience in the MPCVD production process. Operators can easily open the flip cover for loading and unloading operations, which greatly improves production efficiency. Compared with other types of MPCVD equipment, the flip-top butterfly-shaped cavity has the advantage of easy cleaning. At the same time, this flip-top structure can ensure good sealing performance when closed, effectively reducing microwave leakage.

[0017] 3. In this utility model, by adjusting the knob, the short-circuit piston moves back and forth inside the rectangular waveguide to adjust the impedance matching under different power and air pressure, thereby reducing microwave loss, maximizing energy conversion efficiency, reducing unnecessary energy loss, and lowering production costs. Attached Figure Description

[0018] Figure 1 This is a perspective view of a flip-top butterfly-shaped cavity proposed in this utility model;

[0019] Figure 2 This is a front view of a flip-top butterfly-shaped cavity proposed in this utility model;

[0020] Figure 3 This is a schematic diagram of a three-pin adjusting tube for a flip-top butterfly-shaped cavity proposed in this utility model;

[0021] Figure 4 This is a schematic diagram of a flap-type butterfly-shaped ventilation connector proposed in this utility model;

[0022] Figure 5 This is a schematic diagram of a flip-top butterfly-shaped microwave mode converter proposed in this utility model;

[0023] Figure 6 This is a schematic diagram of a flip-top butterfly-shaped cavity proposed in this utility model;

[0024] Figure 7 A schematic diagram of a rectangular waveguide with a flip-top butterfly cavity proposed in this utility model;

[0025] Figure 8 This is a cross-sectional view of a rectangular waveguide with a flip-top butterfly cavity proposed in this utility model.

[0026] Legend:

[0027] 1. Workbench; 2. Magnetoid head; 3. Three-pin adjusting tube; 4. First knob; 5. Pin adjusting screw; 6. Condensate inlet; 7. Condensate outlet; 8. Ventilation connector; 9. Microwave mode converter; 10. Condensate connector; 11. Adjusting base; 12. Microwave conduit; 13. Rectangular waveguide; 14. Second knob; 15. Piston adjusting screw; 16. Short-circuit piston; 17. Base; 18. First support column; 19. Connecting plate; 20. Butterfly cavity; 21. Second support column; 22. Nitrogen spring; 23. Observation window; 24. Temperature sensor. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] Reference Figures 2-4 This utility model provides an embodiment of a flip-top butterfly-shaped cavity, including a worktable 1 and a magnetic control head 2. A three-pin adjusting tube 3 is fixedly connected to the bottom end of the magnetic control head 2. An adjusting seat 11 is fixedly connected to the right end of the three-pin adjusting tube 3. Three pin adjusting screws 5 are threadedly connected to the inner wall of the adjusting seat 11. A first knob 4 is fixedly connected to the right end of each pin adjusting screw 5. The pin adjusting screws 5 penetrate the inner wall of the right end of the three-pin adjusting tube 3. A condensate inlet 6 is opened at the upper front end of the adjusting seat 11, and a condensate outlet 7 is opened at the lower front end of the adjusting seat 11. A ventilation connector 8 is fixedly connected to the bottom end of the three-pin adjusting tube 3. A microwave conduit 12 is fixedly connected to the bottom end of the three-pin adjusting tube 3. A microwave mode converter 9 is fixedly connected to the right end of the microwave conduit 12. A rectangular waveguide 13 is fixedly connected to the right end of the microwave mode converter 9. (See reference...) Figure 7 and Figure 8 A piston adjusting screw 15 is threadedly connected to the inner wall of the right end of the rectangular waveguide 13. A second knob 14 is fixedly connected to the right end of the piston adjusting screw 15. A short-circuit piston 16 is rotatably connected to the left end of the piston adjusting screw 15. (Refer to...) Figure 5 A condensate connector 10 is fixedly connected to the front end of the microwave mode converter 9 for cooling the microwave mode converter 9.

[0030] Specifically, the microwave transmitted in the three-pin adjusting tube 3 couples with the pin adjusting screw 5, causing some of the microwave energy to be absorbed by the pin adjusting screw 5 and converted into heat energy, resulting in an increase in screw temperature. The adjusting seat 11 has a condensate flow tank. By connecting the condensate inlet 6, the condensate flows in the condensate flow tank, cooling the high-temperature pin adjusting screw 5. At the same time, cold air is blown into the bottom ventilation joint 8 to cool the pin adjusting screw 5 inserted in the three-pin adjusting tube 3, thus achieving dual cooling of air and water, improving the cooling effect. The microwave mode converter 9 generates a lot of heat when converting microwaves. Cold water is connected through the condensate joint 10, allowing the condensate to circulate and carry away the heat generated inside the mechanical equipment, maintaining the normal operation of the mechanical equipment and ensuring product quality and production efficiency.

[0031] Reference Figure 1 and Figure 6 A base 17 is fixedly connected to the top of the microwave mode converter 9. The bottom of the base 17 is fixedly connected to the top of the worktable 1. Two first support columns 18 and two second support columns 21 are fixedly connected to the rear side of the top of the worktable 1. A connecting plate 19 is rotatably connected to one end of the first support column 18. A butterfly cavity 20 is fixedly connected to the inner wall of the connecting plate 19. A nitrogen spring 22 is rotatably connected to one end of the second support column 21. The other end of the nitrogen spring 22 is rotatably connected to the left and right ends of the connecting plate 19. Multiple observation windows 23 are provided on the outer wall of the butterfly cavity 20 for observing the production status of the wafer on the base 17. A temperature sensor 24 is fixedly connected to the top of the butterfly cavity 20 for detecting the center temperature of the grown wafer and uploading the data information to the terminal.

[0032] Specifically, a handle is fixedly connected to the top of the butterfly cavity 20 for easy opening and closing. The connecting plate 19 controls the opening and closing of the butterfly cavity 20 through a nitrogen spring 22. The top of the base 17 is provided with a concave slope, while the bottom of the butterfly cavity 20 is provided with a convex slope opposite to the concave slope of the base 17, so that they fit together. At the same time, a sealing ring is provided on the butterfly cavity 20. When closed, the sealing ring will undergo elastic deformation under external pressure. This deformation allows the sealing ring to fit tightly against the sealed surface, separating the inside and outside of the cavity and completing the sealing of the inside and outside of the cavity. The temperature sensor 24 fixed to the top of the butterfly cavity 20 can monitor the temperature of the wafer on the base 17 in real time and upload the information to the terminal. At the same time, the observation window 23 on the outside of the butterfly cavity 20 can observe the production status of the wafer on the base 17.

[0033] Working principle: First, the nitrogen spring 22 extends to open the butterfly cavity 20, allowing the wafer to be placed on the base 17. Then, the nitrogen spring 22 retracts to close the butterfly cavity 20. After closing the butterfly cavity 20, the air inside the cavity is evacuated by a vacuum device to achieve the vacuum environment for MPCVD production. Then, the magnetron 2 is started by an external microwave power supply, generating microwaves. The microwaves pass through the three-pin adjustment tube 3. By rotating the first knob 4, the pin adjustment screw 5 is rotated, changing the length of the pin adjustment screw 5 inside the three-pin adjustment tube 3, thereby adjusting the standing wave and phase of the reflected microwaves. After passing through the three-pin adjustment tube 3, the microwaves enter the microwave... The microwave enters the microwave mode converter 9 through the microwave conduit 12. The microwave loss can be reduced by passing through the rectangular waveguide 13 on the right. Rotating the second knob 14 drives the piston adjusting screw 15 to rotate, causing the piston adjusting screw 15 to drive the short-circuit piston 16 to move back and forth in the rectangular waveguide 13, adjusting the impedance matching under different power and air pressure to reduce microwave loss. Finally, the microwave is introduced into the base 17 through the conversion antenna at the bottom of the microwave mode converter 9, and plasma is generated in the space above the base 17. The design of the base 17 and the butterfly cavity 20 and the characteristics of microwaves make the activated plasma elliptically distributed in the MPCVD cavity. Moreover, the cavity structure makes the flattening of the elliptical distribution larger than that of other devices, which can generate a more uniform electric field distribution.

[0034] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A flip-top butterfly-shaped cavity, characterized in that, The device includes a workbench (1) and a magnetron (2). The bottom end of the magnetron (2) is fixedly connected to a three-pin adjustment tube (3). The right end of the three-pin adjustment tube (3) is fixedly connected to an adjustment seat (11). The right end of the adjustment seat (11) is provided with an adjustment component one. The bottom end of the three-pin adjustment tube (3) is fixedly connected to a microwave guide tube (12). The right end of the microwave guide tube (12) is fixedly connected to a microwave mode converter (9). The right end of the microwave mode converter (9) is fixedly connected to a rectangular waveguide (13). The right end of the rectangular waveguide (13) is provided with an adjustment component two. The top end of the microwave mode converter (9) is fixedly connected to a base (17). The bottom end of the base (17) is fixedly connected to the top end of the workbench (1). The rear side of the top end of the workbench (1) is fixedly connected to two first support columns (18) and two second support columns (21). The first support column (18) is rotatably connected to a connecting plate (19) at one end. The inner wall of the connecting plate (19) is fixedly connected to a butterfly cavity (20).

2. The flip-top butterfly-shaped cavity according to claim 1, characterized in that: The adjustment assembly includes three pin adjustment screws (5) threaded to the inner wall of the adjustment seat (11). A first knob (4) is fixedly connected to the right end of each pin adjustment screw (5). The pin adjustment screw (5) passes through the inner wall of the right end of the three-pin adjustment tube (3).

3. The flip-top butterfly-shaped cavity according to claim 2, characterized in that: The upper front end of the regulating seat (11) is provided with a condensate inlet (6), the lower front end of the regulating seat (11) is provided with a condensate outlet (7), and the bottom end of the three-pin regulating pipe (3) is fixedly connected with a ventilation connector (8).

4. The flip-top butterfly-shaped cavity according to claim 1, characterized in that: The second adjustment component includes a piston adjustment screw (15) threadedly connected to the inner wall of the right end of the rectangular waveguide (13). A second knob (14) is fixedly connected to the right end of the piston adjustment screw (15), and a short-circuit piston (16) is rotatably connected to the left end of the piston adjustment screw (15).

5. A flip-top butterfly-shaped cavity according to claim 1, characterized in that: The microwave mode converter (9) is fixedly connected to a condensate connector (10) at its front end for cooling the microwave mode converter (9).

6. The flip-top butterfly-shaped cavity according to claim 1, characterized in that: The second support column (21) is rotatably connected to a nitrogen spring (22) at one end opposite to the other end, and the other end of the nitrogen spring (22) is rotatably connected to the left and right ends of the connecting plate (19).

7. A flip-top butterfly-shaped cavity according to claim 1, characterized in that: The outer wall of the butterfly cavity (20) is provided with multiple observation windows (23) for observing the wafer production process on the substrate (17).

8. A flip-top butterfly-shaped cavity according to claim 1, characterized in that: A temperature sensor (24) is fixedly connected to the top of the butterfly cavity (20) to detect the temperature at the center of the grown wafer and upload the data information to the terminal.

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