Rotor device with improved cover capable of balancing weight

Abstract

The utility model relates to a rotor device with an improved cover capable of balancing weight. The rotor device is used for being arranged on a turbo-molecular vacuum pump. The rotor device with the improved cover capable of balancing the weight comprises a rotating shaft, a rotor body, the cover and a weight balancing unit, one end of the rotating shaft is arranged on the turbo-molecular vacuum pump, the other end of the rotating shaft is connected to the rotor body, and one end, opposite to the rotating shaft, of the rotor body is provided with a locking space; the cover comprises a reinforcing unit, a linking unit and a counterweight unit, one end of the linking unit is arranged at one end of the rotating shaft, and one end of the reinforcing unit is linked with the other end of the linking unit; the counterweight unit is arranged on the linking unit and located between the reinforcing unit and the rotating shaft.

Description

Technical Field

[0001] This utility model relates to a rotor device with a counterweight-balanced improved cover, and more particularly to a rotor device with a counterweight-balanced improved cover installed in a turbomolecular vacuum pump. Background Technology

[0002] In semiconductor manufacturing, turbomolecular vacuum pumps play a crucial role, primarily used in processes requiring high vacuum. Semiconductor manufacturing necessitates highly controlled environments to ensure stability and precision. Common applications of turbomolecular vacuum pumps in semiconductor manufacturing include chemical vapor deposition (CVD), physical vapor deposition (PVD), photolithography, and etching. In these scenarios, turbomolecular vacuum pumps not only ensure process stability and precision but also effectively control the concentration of trace gases due to their high pumping speed and high vacuum, achieving higher production quality and yield. However, due to their use in these environments, the pumps operate at extremely high speeds and have a compact structure, posing a risk of dust accumulation. If dust-containing gases are drawn in, fine particles may deposit on the internal structure. Excessive dust accumulation can affect the pump's vacuum efficiency, rotor balance, and even lead to malfunctions.

[0003] Currently known methods for preventing dust accumulation primarily involve regular maintenance or maintaining a clean environment. Some manufacturers even pre-treat the gas, using a backing pump or filter to reduce particulate matter intake before it enters the molecular pump. While these methods can slow down dust accumulation, it will still occur if cleaning is neglected for extended periods or if the vacuum pump operates for long periods. To address this, some manufacturers have designed covers to cover the rotor opening. While these covers effectively prevent dust buildup, their locking mechanisms can still cause vibration or center of gravity shift during high-speed rotor rotation. If this is not detected promptly, it can lead to wear and tear between the cover and the rotor, or even loosening, causing malfunctions or damage.

[0004] Therefore, how to design a device that can prevent dust accumulation at the rotor opening of a turbomolecular vacuum pump while maintaining its center of gravity and stability is a problem that the industry urgently needs to solve. Utility Model Content

[0005] The purpose of this utility model is to overcome the above-mentioned shortcomings and propose an improved rotor device with a counterweight-balanced cover, comprising:

[0006] A rotating shaft is provided, one end of which is disposed on a turbomolecular vacuum pump; a rotor body is connected to the other end of the rotating shaft and has a locking space relative to the one end of the rotating shaft; a cover includes a connecting unit, one end of which is disposed on the one end of the rotating shaft; a reinforcing unit is connected to the other end of the connecting unit relative to the rotating shaft; and a counterweight unit is disposed on the connecting unit and located between the reinforcing unit and the rotating shaft. This rotor assembly with a counterweight-balanced cover thus avoids dust accumulation and center of gravity shift that may occur when the turbomolecular vacuum pump operates at high speed.

[0007] The rotor device with a counterweight-balanced modified cover, wherein the counterweight unit is provided with a plurality of counterweight slots.

[0008] The rotor device with the improved cover that can be counterbalanced, wherein the plurality of counterweight slots can be fitted with weights and can be adjusted according to the rotor balance to achieve high-speed and stable operation.

[0009] The rotor device with the improved cover that can be counterbalanced is provided in which the counterbalance unit is further provided with a fixing component, which is disposed on the bottom side of the counterbalance unit.

[0010] The rotor device with a counterweight-balanced improved cover, wherein the cover is further provided with a reinforcing unit located at the bottom of the cover and connected to the linking unit.

[0011] The rotor device with a counterweight-balanced modified cover, wherein the linking unit has at least one fixing groove.

[0012] The rotor device with a counterweight-balanced modified cover, wherein the rotor body has a locking space at one end relative to the rotating shaft.

[0013] The rotor device with a counterweight-balanced improved cover, wherein the counterweight unit is an aluminum alloy counterweight unit. The counterweight unit (70) is made of aluminum alloy material.

[0014] The rotor device with a counterweight-balanced modified cover, wherein the bottom of the locking space is provided with a plurality of fixing components.

[0015] The rotor device with a counterweight-balanced improved cover, wherein the plurality of counterweight slots are of equal size and spacing. Attached Figure Description

[0016] Figure 1This is a side sectional view of a rotor device with a counterweight-balanced cover according to the present invention.

[0017] Figure 2 This is a perspective view of a rotor device with a counterweight-balanced, improved cover according to the present invention.

[0018] Figure 3 This is a side view of a rotor device with a counterweight-balanced, improved cover according to the present invention.

[0019] In the figure, 1 is the rotor device of the improved cover with counterweight balance; 10 is the turbomolecular vacuum pump; 20 is the rotating shaft; 30 is the rotor body; 40 is the locking space; 50 is the cover; 60 is the connecting unit; 601 is the fixing groove; 70 is the counterweight unit; 701 is the counterweight groove; 702 is the screw-on assembly; 80 is the reinforcement unit; and 90 is the fixing assembly. Detailed Implementation

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0021] Since the basic principles of the structure or other accommodating methods used in the improved cover rotor device with counterweight balance of this utility model are already understood by those skilled in the art, the following description will not be fully presented. Furthermore, the accompanying drawings shown below are schematic diagrams illustrating the structure related to the features of this utility model and are not, and do not need to be, drawn to actual dimensions; this is hereby stated in advance.

[0022] like Figure 1 The diagram shown is a schematic of the rotor device 1 of the improved cover with counterweight balance proposed in this utility model. Figure 2 This is a perspective view of the lid 50 proposed in this utility model. Figure 3 This is a schematic diagram of the combination of the cover 50 and the counterweight unit 70 proposed in this utility model.

[0023] The rotor device 1 of the counterweight-balanced improved cover includes a rotating shaft 20, one end of which is disposed on a turbomolecular vacuum pump 10; a rotor body 30 connected to the other end of the rotating shaft 20, and the rotor body 30 having a locking space 40 relative to one end of the rotating shaft 20; a cover 50, the cover 50 including a connecting unit 60, one end of which is disposed on one end of the rotating shaft 20; a reinforcing unit 80 connected to the other end of the connecting unit 60 relative to the rotating shaft 20; and a counterweight unit 70 disposed on the connecting unit 60 and located between the reinforcing unit 80 and the rotating shaft 20.

[0024] For example, when the rotor device 1 of the improved cover with counterweight balance is installed, the turbomolecular vacuum pump 10 is started when processing is required. The turbomolecular vacuum pump 10 can drive the rotating shaft 20 to rotate, and the rotating shaft 20 will drive the rotor body 30 to rotate, thus achieving the function of vacuum pumping. The connecting unit 60 is connected to the rotating shaft 20, the counterweight unit 70 is placed in the locking space 40, and finally the reinforcing unit 80 at the bottom of the cover 50 is connected to the connecting unit 60, so that the cover 50 can rest against the top of the rotor body 30 and completely cover the opening of the locking space 40, thereby preventing particulate dust generated during processing from depositing in the locking space 40. The above is only an example and is not limited thereto.

[0025] Preferably, the counterweight unit 70 is further provided with a plurality of counterweight slots 701; for example, when the turbomolecular vacuum pump is running, its rotor device operates at high speed. If the attached dust cover is not properly secured or the weight distribution is unbalanced, it may cause wear or loosening of related components, resulting in equipment damage. Therefore, before operation, the user can place weights in the counterweight slots 701 according to different situations and the angle of equipment connection, based on the formula for moment of inertia I = ∑mr 2 When weights are added around the axis of rotation, the mass distribution is further away from the center of rotation. The greater the mass, the farther away from the center, and the greater the moment of inertia. This increases the stability of angular momentum and makes the center of rotation less likely to deviate from its direction due to small disturbances, thereby maintaining the center of gravity.

[0026] Preferably, the counterweight unit 70 is further provided with a fastening assembly 702, which is disposed on the bottom side of the counterweight unit 70. During installation, the fastening assembly 702 is first fixed at a specific height of the connecting unit 60. The actual height adjustment varies depending on the usage scenario. Then, the counterweight unit 70 is inserted and connected to the connecting unit 60. The top of the fastening assembly 702 has an internal thread that is opposite to the direction of the rotor device during operation. This internal thread can engage with the external thread at the bottom of the counterweight unit 70. Thus, when the rotor device is running, the counterweight unit 70 and the fastening assembly 702 achieve the function of strengthening fixation and providing stability because the thread direction is opposite to that during operation.

[0027] Preferably, the cover 50 is further provided with a reinforcing unit 80, which is located at the bottom of the cover 50 and connected to the other end of the connecting unit 60 relative to the rotating shaft 20. When the connecting unit 60 and the counterweight unit 70 are installed into the locking space 40, the cover 50 will be screwed tightly over the locking space 40. The connecting unit 60 and the reinforcing unit 80 also have internal and external threads that are opposite to the direction of the rotor device during operation. When the cover 50 is screwed to the tightest position, the reinforcing unit 80 will engage with the corresponding snap-fit ​​structure in the locking space 40, thereby achieving the effect of reinforcing and stabilizing the cover.

[0028] Preferably, the linking unit 60 has at least one fixing groove 601. When installing the rotor device 1 with the counterweight-balanced modified cover, since one end of the linking unit 60 needs to be positioned on the rotating shaft 20 relative to the turbomolecular vacuum pump 10, and the linking unit 60 is a cylinder, in order to ensure that the linking unit 60 is fixed tightly enough, the fixing groove 601 allows the installer to clamp the part with a tool, and after ensuring that the surface has a sufficiently stable frictional force, the linking unit 60 can be screwed onto the rotating shaft 20, thereby achieving the function of tight locking.

[0029] Preferably, the rotor body 30 has a locking space 40 at one end relative to the rotating shaft 20. When the turbomolecular vacuum pump 10 is running, fine dust or particles may still be generated due to different environments and gases used. If the dust or particles fall into the locking space 40, the cover 50 is tightly attached to the top side of the locking space 40, which can effectively intercept the dust or particles that have fallen in and prevent them from drifting out of the locking space 40 again due to airflow disturbance during operation. This can reduce the pollution or damage to the processed products.

[0030] Preferably, the counterweight unit 70 is an aluminum alloy counterweight unit; due to the lightweight and high strength characteristics of aluminum alloy, the counterweight unit 70 can withstand the torque generated by high-speed operation, and its corrosion resistance can also avoid the influence of acid and alkali value differences caused by gases generated by different processed products.

[0031] Preferably, the bottom of the locking space 40 is provided with a plurality of fixing components 90, which are used to fix the rotating shaft 20 and the rotor body 30. One end of each fixing component 90 is on the bottom side of the locking space 40, and the other end is connected to the rotating shaft 20, thereby fixing the rotor body 30 to the rotating shaft 20.

[0032] Preferably, the plurality of counterweight slots 701 are of equal size and spacing. In the semiconductor industry, the turbomolecular vacuum pump 10 operates at a speed mostly between 24,000 and 36,000 RPM to achieve a specific vacuum. To maintain the stability of the mechanism under this high-speed operation, specific weights can be placed in the plurality of counterweight slots 701. Due to its fixed spacing design, the user can adjust the number of weights or the spacing between them according to the environment and the products being processed. This allows for the adjustment of the stability of angular momentum during operation to avoid the center of gravity shifting during high-speed operation.

[0033] The above description is only a preferred embodiment of the present utility model and is not intended to limit the patent rights of the present utility model. At the same time, the above description should be clear and implementable to those skilled in the art. Therefore, other equivalent changes or modifications made without departing from the spirit disclosed in the present utility model should be included in the scope of the patent application.

Claims

1. A rotor device with a counterweight-balanced, modified cover for use in a turbomolecular vacuum pump (10), characterized in that, include: A rotating shaft (20), one end of which is disposed at the turbomolecular vacuum pump (10); and A rotor body (30) is connected to the other end of the rotating shaft (20), and the rotor body (30) has a locking space (40) relative to one end of the rotating shaft; and A lid (50), including; A linking unit (60), one end of which is disposed at one end of the rotating shaft (20); and A reinforcing unit (80), one end of which is connected to the other end of the connecting unit (60); and A counterweight unit (70) is disposed on the linking unit (60) and located between the reinforcing unit (80) and the rotating shaft (20).

2. The rotor device with a counterweight-balanced, improved cover as described in claim 1, characterized in that, The counterweight unit (70) is provided with a plurality of counterweight slots (701).

3. The rotor device with a counterweight-balanced, improved lid as described in claim 2, characterized in that, The plurality of counterweight slots (701) can be fitted with weights and can be adjusted according to the rotor balance to achieve high-speed and stable operation.

4. The rotor device with a counterweight-balanced, improved cover as described in claim 2, characterized in that, The counterweight unit (70) is further provided with a screw fastening assembly (702), which is located on the bottom side of the counterweight unit.

5. The rotor device with a counterweight-balanced, improved cover as described in claim 1, characterized in that, The cover (50) is further provided with a reinforcing unit (80), which is located at the bottom of the cover (50) and connected to the linking unit (60).

6. The rotor device with a counterweight-balanced, improved cover as described in claim 1, characterized in that, The link unit (60) has at least one fixing slot (601).

7. The rotor device with a counterweight-balanced, improved cover as described in claim 1, characterized in that, The rotor body (30) has a locking space (40) at one end relative to the rotating shaft (20).

8. A rotor device with a counterweight-balanced, improved lid as described in claim 2, characterized in that, The counterweight unit (70) is made of aluminum alloy.

9. A rotor device with a counterweight-balanced, improved lid as described in claim 1, characterized in that, The bottom of the locking space (40) is provided with a plurality of fixing components (90).

10. A rotor device with a counterweight-balanced, improved lid as described in claim 2, characterized in that, The plurality of counterweight grooves (701) are all equal in size and spacing.

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