Purging mechanism with active heating and low-temperature cooling functions

Abstract

The utility model discloses a purging mechanism with active heating and low-temperature cooling functions, which comprises a vortex tube for producing high-temperature gas and low-temperature gas, a rack, a primary distribution module and a secondary distribution module, the primary distribution module and the secondary distribution module are mounted on the rack, the primary distribution module is used for distributing the high-temperature gas entering each chamber, and the secondary distribution module is used for distributing the low-temperature gas entering each chamber. The secondary distribution module is used for distributing the low-temperature gas entering each chamber; the high-temperature gas transmission end of the vortex tube is connected with the gas inlet of the first-stage distribution module through a preset first-stage gas transmission pipe, and the low-temperature gas transmission end of the vortex tube is connected with the gas inlet of the second-stage distribution module through a preset second-stage gas transmission pipe; a pressure regulator used for regulating the pressure of gas input into an inner cavity of the vortex tube is arranged at the gas inlet end of the vortex tube, and the gas inlet end of the vortex tube is in threaded connection with the pressure regulator; the vortex tube distributes high temperature to achieve an active heating function of purge gas, and low temperature achieves an air cooling pump body function.

Description

Technical Field

[0001] This utility model relates to the technical field of purging equipment, and in particular to a purging mechanism with active heating and low-temperature cooling functions. Background Technology

[0002] Currently, in some processes requiring heated purging gases, the main approach is to use room-temperature gas generated by a vacuum pump for internal purging, coupled with a water-cooled pump body. However, using room-temperature gas for purging can cause dust condensation. Secondly, passively heating the purging gas using the pump structure often results in insufficient temperature, leading to condensation, increasing the likelihood of pump seizure, and affecting pump lifespan. Furthermore, water-cooled pump bodies require manufacturers in the photovoltaic or semiconductor industries to equip their systems with water pumps for circulating cooling. However, tap water often contains scale, which can cause blockages over time, resulting in insufficient water flow and ineffective cooling. Additionally, the common material for vacuum pump water cooling is nylon tubing, which may detach over time, or be caused by excessive water pressure, potentially leading to short circuits, equipment burnout, and product scrapping for customers.

[0003] Therefore, based on the above-mentioned technical problems, this application proposes a purging mechanism that is easy to operate, low-cost, and has active heating and low-temperature cooling functions. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the prior art and provide a purging mechanism that is easy to operate, low-cost, and has active heating and low-temperature cooling functions.

[0005] To achieve the above objectives, this utility model provides a purging mechanism with active heating and low-temperature cooling functions, comprising a vortex tube for producing high-temperature gas and low-temperature gas, a frame, and a primary distribution module and a secondary distribution module mounted on the frame. The primary distribution module distributes the high-temperature gas into each chamber, and the secondary distribution module distributes the low-temperature gas into each chamber. The high-temperature gas delivery end of the vortex tube is connected to the inlet of the primary distribution module via a pre-set primary gas delivery pipe, and the low-temperature gas delivery end of the vortex tube is connected to the inlet of the secondary distribution module via a pre-set primary gas delivery pipe. The system is connected to a secondary gas supply pipe. A pressure regulator is provided on the inlet end of the vortex tube to adjust the pressure of the gas entering the vortex tube cavity. The inlet end of the vortex tube is threadedly connected to the pressure regulator. As external gas is input through the inlet end, the vortex tube generates high-temperature gas and low-temperature gas. When the vortex tube delivers high-temperature gas to the primary distribution module through the primary gas supply pipe and low-temperature gas to the secondary distribution module through the secondary gas supply pipe, the primary and secondary distribution modules respectively deliver the corresponding high-temperature and low-temperature gases to the appropriate modules for purging or cooling.

[0006] Furthermore, a primary external thread is formed on the outer peripheral surface of the air intake end, and a secondary external thread and a secondary internal thread that mates with the corresponding thread are formed on the inner wall of one end of the pressure regulator.

[0007] Furthermore, the primary distribution module and the secondary distribution module are respectively equipped with a primary one-way valve and a secondary one-way valve at their air inlet ends to prevent gas backflow within the modules.

[0008] Furthermore, the high-temperature gas delivery end and the low-temperature gas delivery end of the vortex tube are respectively equipped with a primary connector and a secondary connector for quick connection with the pipeline. The primary distribution module is equipped with a regulating valve, which is used to regulate the flow rate of high-temperature gas entering the module. The secondary distribution module is also equipped with several vertically distributed tertiary connectors.

[0009] Furthermore, the primary gas pipeline and the secondary gas pipeline are respectively equipped with a fourth-level connector and a fifth-level connector, and the frame is also equipped with a sixth-level connector and electrical components.

[0010] Furthermore, it also includes a primary temperature sensor and a secondary temperature sensor for detecting the temperature inside the module, wherein the primary temperature sensor is located on the primary distribution module and the secondary temperature sensor is located on the secondary distribution module.

[0011] Furthermore, it also includes a primary pressure sensor and a secondary pressure sensor for detecting the pressure within the module, wherein the primary pressure sensor is located on the primary distribution module and the secondary pressure sensor is located on the secondary distribution module.

[0012] Furthermore, it also includes a primary solenoid valve and a secondary solenoid valve for controlling on / off states, wherein the primary solenoid valve is located on the primary distribution module and the secondary solenoid valve is located on the secondary distribution module.

[0013] Furthermore, the vortex tube includes a high-temperature tube, a vortex housing, and a flow guide valve that are coaxially distributed and connected in sequence. A low-temperature tube is formed on one end of the vortex housing. A primary silencer is provided on the high-temperature tube, and a secondary silencer is provided on the low-temperature tube. Both the primary and secondary silencers are used to reduce the noise generated by the gas. A secondary external thread is formed on the outer circumferential surface of the air inlet end of the high-temperature tube, and a secondary internal thread is formed on the inner wall of the other end of the vortex housing that is threaded to engage with the secondary external thread.

[0014] Furthermore, the vortex tube also includes a vortex generator and a vortex cap installed inside the vortex shell, wherein a sealing ring is provided between the vortex generator and the high-temperature tube, and a sealing gasket is provided at the connection between the vortex cap and the vortex shell.

[0015] The present invention adopts the above-described solution, and its beneficial effects are as follows:

[0016] By redesigning the water-cooled layout for vacuum pump purging and using vortex tubes to generate high-temperature gas for thermal purging, the potential risk of insufficient water flow due to scale buildup from long-term use, which would prevent the equipment from cooling, is avoided. This also avoids the risk of short circuits caused by water leaks, thereby improving overall safety. Furthermore, it eliminates the need for additional water supply pipes and equipment required for water-cooled purging, reducing operating costs. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall layout in this embodiment.

[0018] Figure 2 This is a schematic diagram of the vortex tube in this embodiment.

[0019] Figure 3 This is a cross-sectional schematic diagram of the vortex tube in this embodiment.

[0020] Among them, 1-vortex tube, 11-high temperature gas delivery end, 111-first stage connector, 12-low temperature gas delivery end, 121-second stage connector, 13-inlet end, 131-first stage external thread, 14-high temperature tube, 141-second stage external thread, 15-vortex housing, 151-low temperature tube, 152-second stage internal thread, 16-guide valve, 17-vortex generator, 18-vortex cap, 19-sealing ring, 10-sealing gasket, 2-frame, 21-sixth stage connector, 3-first stage distribution module, 31-first stage gas delivery tube, 3 11-Fourth-stage connector, 32-First-stage check valve, 33-First-stage pressure sensor, 34-First-stage temperature sensor, 35-First-stage solenoid valve, 36-Regulating valve, 4-Second-stage distribution module, 41-Second-stage gas supply pipe, 411-Fifth-stage connector, 42-Second-stage check valve, 43-Second-stage pressure sensor, 44-Second-stage temperature sensor, 45-Third-stage connector, 46-Second-stage solenoid valve, 5-Pressure regulator, 51-First-stage internal thread, 6-First-stage silencer, 7-Second-stage silencer, 8-Electrical components. Detailed Implementation

[0021] To facilitate understanding of this utility model, a more complete description of it is provided below with reference to the accompanying drawings. The drawings illustrate preferred embodiments of the utility model. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. These embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model.

[0022] See appendix Figure 1As shown, in this embodiment, a purging mechanism with active heating and low-temperature cooling functions includes a vortex tube 1 for producing high-temperature gas and low-temperature gas, a frame 2, and a primary distribution module 3 and a secondary distribution module 4 mounted on the frame 2. Both the primary distribution module 3 and the secondary distribution module 4 are fixedly connected to the frame 2 by pre-set screws. The primary distribution module 3 distributes the high-temperature gas entering each chamber, and the secondary distribution module 4 distributes the low-temperature gas entering each chamber. The high-temperature gas delivery end 11 of the vortex tube 1 is connected to the inlet of the primary distribution module 3 via a pre-set primary gas delivery pipe 31. The primary distribution module 3 is equipped with a regulating valve 36, which is used to regulate the flow rate of the high-temperature gas entering the module. The low-temperature gas delivery end 12 of the vortex tube 1 is connected to the inlet of the secondary distribution module 4 via a pre-set secondary gas delivery pipe 41. The inlet end 13 of the vortex tube 1 is equipped with a valve for regulating the pressure of the gas entering the cavity of the vortex tube 1. The pressure regulator 5 is threadedly connected to the inlet end 13 of the vortex tube 1. The outer circumferential surface of the inlet end 13 is formed with a first-stage external thread 131, and the inner wall of one end of the pressure regulator 5 is formed with a first-stage external thread 131 and a first-stage internal thread 51 that mates with it. By setting a regulating valve 36 on the first-stage distribution module 3, it is easier for users to adjust the flow rate of the high-temperature gas delivered to the first-stage distribution module 3 according to actual usage conditions, thereby ensuring more accurate operation and improving work precision. Furthermore, the threaded engagement between the first-stage external thread 131 and the first-stage internal thread 51 ensures a sealed and effective connection between the pressure regulator 5 and the vortex tube 1, and enables a detachable connection between them. This facilitates subsequent replacement of damaged pressure regulator 5 or vortex tube 1, reducing maintenance costs. Additionally, the other end of the pressure regulator 5 is externally connected to other gas delivery equipment, and the first-stage distribution module 3 is externally connected to a blowing device.

[0023] It should be noted that, unlike traditional purging mechanisms that passively heat the purging gas using a pump structure and cool it with a water-cooled pump body, the purging mechanism in this embodiment outputs gas with a temperature range of -40℃ to 130℃. High-temperature and low-temperature gases are produced by the vortex tube 1. The high-temperature gas is then transported to the primary distribution module 3 via the primary gas delivery pipe 31, where it is output for high-temperature purging. Next, the low-temperature gas is transported to the secondary distribution module 4 via the secondary gas delivery pipe 41, where it is distributed to the required cooling locations to achieve cooling and ensure timely cooling of the equipment. Furthermore, the pressure regulator 5 preferably uses a ball valve structure. When the user needs to use the equipment, the pressure regulator 5 is opened, and the opening degree of the regulator 5 is adjusted according to actual needs to control the pressure within the cavity. This prevents excessive pressure within the cavity from failing to be discharged or transported to the next module in time, which could cause injury and ensure the overall stability of the purging mechanism and the safety of the user.

[0024] Furthermore, as external gas is input through the inlet 13, the vortex tube 1 generates high-temperature gas and low-temperature gas. When the vortex tube 1 delivers high-temperature gas to the primary distribution module 3 through the primary gas delivery pipe 31 and low-temperature gas to the secondary distribution module 4 through the secondary gas delivery pipe 41, the primary distribution module 3 and the secondary distribution module 4 respectively deliver the corresponding high-temperature gas and low-temperature gas to the corresponding modules for purging or cooling. The high-temperature gas generated by the vortex tube 1 purifies the areas of the equipment that need cleaning, preventing dust condensation and thus reducing the probability of equipment failure and extending the service life of the equipment. Secondly, the low-temperature gas generated by the vortex tube 1 cools the equipment, preventing overheating caused by poor cooling effect, thereby achieving the cooling function of the equipment.

[0025] In this embodiment, the inlet end 13 of the primary distribution module 3 and the secondary distribution module 4 are respectively provided with a primary one-way valve 32 and a secondary one-way valve 42 to prevent the backflow of gas in the module, thereby ensuring that the relevant gas is prevented from flowing back after entering the corresponding module, and making it easier for the gas produced by the subsequent vortex tube 1 to continue to be input into the module, so that the gas capacity in the module is maintained within a preset range.

[0026] See appendix Figure 1 As shown, in this embodiment, the high-temperature gas delivery end 11 and the low-temperature gas delivery end 12 of the vortex tube 1 are respectively equipped with a primary connector 111 and a secondary connector 121 for quick connection with the pipeline. The secondary distribution module 4 is also equipped with several vertically distributed tertiary connectors 45. By setting the relevant connectors, the above-mentioned components can be quickly installed and disassembled, thereby reducing the assembly difficulty and assembly time. Furthermore, when the relevant module or the vortex tube 1 needs maintenance, the components to be maintained can be separated by disassembling the relevant connectors, which makes it easier to reduce maintenance costs.

[0027] Furthermore, the primary gas supply pipe 31 and the secondary gas supply pipe 41 are respectively equipped with a fourth-level connector 311 and a fifth-level connector 411. The frame 2 is also equipped with a sixth-level connector 21 and electrical components 8. The electrical components 8 include relevant power connectors, main control boards, and frequency converters. Secondly, by setting relevant connectors on the primary gas supply pipe 31, the secondary gas supply pipe 41, and the frame 2, it is convenient to quickly assemble the pipes or add other modules in subsequent use, thereby reducing the assembly time and improving the user experience.

[0028] See appendix Figure 1 As shown, in this embodiment, a primary temperature sensor 34 and a secondary temperature sensor 44 for detecting the temperature inside the module are also included. The primary temperature sensor 34 is located on the primary distribution module 3, and the secondary temperature sensor 44 is located on the secondary distribution module 4, which makes it easier for users to intuitively understand whether the gas temperature input into the primary distribution module 3 and the secondary distribution module 4 has reached the required range.

[0029] See appendix Figure 1 As shown, in this embodiment, a primary pressure sensor 33 and a secondary pressure sensor 43 for detecting the pressure inside the module are also included. The primary pressure sensor 33 is located on the primary distribution module 3, and the secondary pressure sensor 43 is located on the secondary distribution module 4, which makes it easier for users to intuitively understand whether the gas pressure input into the primary distribution module 3 and the secondary distribution module 4 reaches the required range.

[0030] See appendix Figure 1 As shown, this embodiment also includes a primary solenoid valve 35 and a secondary solenoid valve 46 for controlling the on / off state. The primary solenoid valve 35 is located on the primary distribution module 3, and the secondary solenoid valve 46 is located on the secondary distribution module 4. By controlling the high-temperature gas or low-temperature gas to enter the corresponding module through the above solenoid valves, and in conjunction with relevant temperature sensors and pressure sensors, it is easier for users to control the pressure in the module and increase safety.

[0031] See appendix Figure 3As shown, the vortex tube 1 further includes a high-temperature tube 14, a vortex housing 15, and a flow guide valve 16, which are coaxially distributed and connected in sequence. A low-temperature tube 151 is formed on one end of the vortex housing 15. A primary silencer 6 is provided on the high-temperature tube 14, and a secondary silencer 7 is provided on the low-temperature tube 151. Both the primary silencer 6 and the secondary silencer 7 are used to reduce the noise generated by the gas. A secondary external thread 141 is formed on the outer circumferential surface of the air inlet end 13 of the high-temperature tube 14, and a secondary internal thread that is threaded to the secondary external thread 141 is formed on the inner wall of the other end of the vortex housing 15. Specifically, the silencer 152 reduces the noise carried by high-temperature and low-temperature gases during production and transportation, minimizing the impact of noise on users and allowing them to concentrate on operation, thereby improving the user experience. Secondly, the engagement between the secondary external thread 141 and the secondary internal thread 152 ensures effective connection and sealing between the high-temperature tube 14 and the volute 15, and enables a detachable connection between the high-temperature tube 14 and the volute 15, facilitating the replacement of damaged high-temperature tube 14 or volute 15 and reducing maintenance costs.

[0032] See appendix Figure 3 As shown, the vortex tube 1 further includes a vortex generator 17 and a vortex cap 18 installed in the vortex shell 15. A sealing ring 19 is provided between the vortex generator 17 and the high-temperature tube 14, and a sealing gasket 10 is provided at the connection between the vortex cap 18 and the vortex shell 15. This facilitates sealing the airflow in the vortex tube 1, increases the airtightness of the vortex tube 1, prevents gas leakage, and improves heating and cooling efficiency.

[0033] To facilitate explanation, the following further explains the specific working process of the purging mechanism in this embodiment.

[0034] First, the external gas supply equipment is connected to the pressure regulator 5 installed on the vortex tube 1. The high-temperature gas supply end 11 of the vortex tube 1 is connected to the primary distribution module 3 through the primary gas supply pipe 31, and the low-temperature gas supply end 12 of the vortex tube 1 is connected to the secondary distribution module 4 through the secondary gas supply pipe 41. The external gas supply equipment delivers external gas to the vortex tube 1 through the pressure regulator 5, causing the external gas to form a vortex in the vortex tube 1, thereby generating high-temperature gas and low-temperature gas. The high-temperature gas is delivered to the primary distribution module 3 for temporary storage along the high-temperature pipe 14, the primary gas supply pipe 31 and the primary one-way valve 32, and the low-temperature gas is delivered to the secondary distribution module 4 for temporary storage along the low-temperature pipe 151, the secondary gas supply pipe 41 and the secondary one-way valve 42.

[0035] When the equipment needs to be purged at high temperature: the temperature of the high temperature gas is controlled by adjusting the opening degree of the pressure regulator 5 according to the required temperature; when the primary temperature sensor 34 on the primary distribution module 3 detects that the temperature inside the module has reached the preset range, the high temperature gas is output to the external blowing equipment to perform high temperature purging on the required purging position, thereby completing the high temperature purging work.

[0036] When the equipment needs to be cooled at low temperature: the temperature of the low temperature gas is controlled by adjusting the opening degree of the pressure regulator 5 according to the required temperature; when the secondary temperature sensor 44 on the secondary distribution module 4 detects that the temperature inside the module has reached the preset range, the secondary distribution module 4 outputs the low temperature gas to the corresponding chamber to cool the required location, thereby completing the low temperature cooling work.

[0037] The above embodiments are merely preferred embodiments of this utility model and are not intended to limit the utility model in any way. Any modifications or alterations made by those skilled in the art to the technical solution of this utility model without departing from its scope are equivalent embodiments of this utility model. Therefore, all equivalent changes made based on the concept of this utility model without departing from its scope should be covered within the protection scope of this utility model.

Claims

1. A purging mechanism with active heating and low-temperature cooling functions, characterized in that: The system includes a vortex tube (1) for producing high-temperature and low-temperature gases, a frame (2), and a primary distribution module (3) and a secondary distribution module (4) mounted on the frame (2). The primary distribution module (3) is used to distribute the high-temperature gas entering each chamber, and the secondary distribution module (4) is used to distribute the low-temperature gas entering each chamber. The high-temperature gas delivery end (11) of the vortex tube (1) is connected to the inlet of the primary distribution module (3) through a pre-set primary gas delivery pipe (31), and the low-temperature gas delivery end (12) of the vortex tube (1) is connected to the inlet of the secondary distribution module (4) through a pre-set secondary gas delivery pipe (41). The gas end (13) is provided with a pressure regulator (5) for adjusting the gas pressure inside the vortex tube (1). The gas inlet end (13) of the vortex tube (1) is threadedly connected to the pressure regulator (5). As external gas is input into the gas inlet end (13), the vortex tube (1) generates high-temperature gas and low-temperature gas. When the vortex tube (1) delivers high-temperature gas to the first-level distribution module (3) through the first-level gas delivery pipe (31) and delivers low-temperature gas to the second-level distribution module (4) through the second-level gas delivery pipe (41), the first-level distribution module (3) and the second-level distribution module (4) respectively deliver the corresponding high-temperature gas and low-temperature gas to the corresponding module for purging or cooling.

2. The purging mechanism with active heating and low-temperature cooling functions according to claim 1, characterized in that: The outer peripheral surface of the air inlet (13) is formed with a first-level external thread (131), and the inner wall of one end of the pressure regulator (5) is formed with a first-level external thread (131) and a first-level internal thread (51) that is threaded together.

3. The purging mechanism with active heating and low-temperature cooling functions according to claim 1, characterized in that: The primary distribution module (3) and the secondary distribution module (4) are respectively provided with a primary one-way valve (32) and a secondary one-way valve (42) on the air inlet end (13) to prevent the gas in the module from flowing back.

4. The purging mechanism with active heating and low-temperature cooling functions according to claim 1, characterized in that: The high-temperature gas delivery end (11) and low-temperature gas delivery end (12) of the vortex tube (1) are respectively equipped with a primary connector (111) and a secondary connector (121) for quick connection with the pipeline. The primary distribution module (3) is equipped with a regulating valve (36), which is used to regulate the flow rate of high-temperature gas entering the module. The secondary distribution module (4) is also equipped with several vertically distributed tertiary connectors (45).

5. A purging mechanism with active heating and low-temperature cooling functions according to claim 1, characterized in that: The first-stage gas pipeline (31) and the second-stage gas pipeline (41) are respectively provided with a fourth-stage connector (311) and a fifth-stage connector (411), and the frame (2) is also provided with a sixth-stage connector (21) and electrical components (8).

6. A purging mechanism with active heating and low-temperature cooling functions according to claim 1, characterized in that: It also includes a primary temperature sensor (34) and a secondary temperature sensor (44) for detecting the temperature inside the module, wherein the primary temperature sensor (34) is located on the primary distribution module (3) and the secondary temperature sensor (44) is located on the secondary distribution module (4).

7. A purging mechanism with active heating and low-temperature cooling functions according to claim 1, characterized in that: It also includes a primary pressure sensor (33) and a secondary pressure sensor (43) for detecting the pressure inside the module, wherein the primary pressure sensor (33) is located on the primary distribution module (3) and the secondary pressure sensor (43) is located on the secondary distribution module (4).

8. A purging mechanism with active heating and low-temperature cooling functions according to claim 1, characterized in that: It also includes a primary solenoid valve (35) and a secondary solenoid valve (46) for controlling the on and off states, wherein the primary solenoid valve (35) is located on the primary distribution module (3) and the secondary solenoid valve (46) is located on the secondary distribution module (4).

9. A purging mechanism with active heating and low-temperature cooling functions according to claim 1, characterized in that: The vortex tube (1) includes a high-temperature tube (14), a vortex shell (15), and a flow guide valve (16) that are coaxially distributed and connected in sequence. A low-temperature tube (151) is formed on one end of the vortex shell (15). A primary silencer (6) is provided on the high-temperature tube (14), and a secondary silencer (7) is provided on the low-temperature tube (151). Both the primary silencer (6) and the secondary silencer (7) are used to reduce the noise generated by the gas. A secondary external thread (141) is formed on the outer circumferential surface of the air inlet end (13) of the high-temperature tube (14), and a secondary external thread (141) and a secondary internal thread (152) that are threaded together are formed on the inner wall of the other end of the vortex shell (15).

10. A purging mechanism with active heating and low-temperature cooling functions according to claim 9, characterized in that: The vortex tube (1) also includes a vortex generator (17) and a vortex cap (18) installed in the vortex shell (15), wherein a sealing ring (19) is provided between the vortex generator (17) and the high temperature tube (14), and a sealing gasket (10) is provided at the connection between the vortex cap (18) and the vortex shell (15).

Images