Device for deoxidizing ultra-pure nitrogen

Abstract

The utility model relates to the technical field of nitrogen deoxidation, in particular to an ultra-pure nitrogen deoxidation device. According to the technical scheme, the device comprises an air compressor system, a compressed air purification system, an adsorption system and a nitrogen buffer system, the air compressor system comprises an air compressor and an air buffer tank, the compressed air purification system comprises a drying machine located on one side of the air compressor, and one end of the drying machine is connected with a tight filter; the adsorption system comprises an adsorption tower arranged on one side of the tight filter, and the nitrogen buffer system comprises a nitrogen filter arranged on one side of the adsorption tower. According to the utility model, impurities and harmful substances in the air can be filtered and cleaned through the arrangement of the compact filter, and oxygen in the air can be adsorbed and removed in a multi-layer manner through the arrangement of mutual matching of multiple groups of activated carbon adsorption and membrane separation, so that the purity of nitrogen can be better improved; and meanwhile, the nitrogen after being deoxidized for multiple times can be detected again and emptied through mutual cooperation of the nitrogen analyzer and the emptying device.

Description

TECHNICAL FIELD

[0001] The utility model relates to nitrogen deoxidation technical field especially relates to a device for deoxidizing ultrapure nitrogen. BACKGROUND

[0002] The deoxidation of ultrapure nitrogen is mainly to remove the residual oxygen in nitrogen by physical, chemical or catalytic methods. In the prior art, the deoxidation technology of ultrapure nitrogen usually adopts physical adsorption method, catalytic deoxidation method, membrane separation method and low-temperature fractionation method. The physical adsorption method mostly uses molecular sieve for adsorption, but the cost of molecular sieve is high, and it needs to be replaced frequently, which increases the production cost. The catalytic deoxidation method mostly uses catalyst for deoxidation, but the catalyst is easily affected by impurities in the air during the deoxidation process, which reduces the activity of the catalyst and affects the stability and efficiency of nitrogen deoxidation. The consumption of low-temperature fractionation method is high, and the energy efficiency is low, which is not conducive to the production of nitrogen for enterprises. The energy efficiency of membrane separation method is relatively high, but the membrane separation efficiency is usually limited by the selectivity of membrane material, so the single membrane separation effect may not meet the requirements of ultrapure nitrogen. Therefore, we propose a device for deoxidizing ultrapure nitrogen. SUMMARY

[0003] The utility model aims at the problems in the background art and provides a device for deoxidizing ultrapure nitrogen.

[0004] The technical scheme of the utility model is a device for deoxidizing ultrapure nitrogen, which comprises an air compressor system, a compressed air purification system, an adsorption system and a nitrogen buffer system. The air compressor system comprises an air compressor and an air buffer tank. The compressed air purification system comprises a dryer located on one side of the air compressor. One end of the dryer is connected with a tight filter. The tight filter comprises an activated carbon filter and a dust filter. The adsorption system comprises an adsorption tower arranged on one side of the tight filter. The adsorption tower is provided with a pneumatic valve and a PLC controller. The adsorption tower is provided with multiple groups of activated carbon adsorption and membrane separation. The nitrogen buffer system comprises a nitrogen filter arranged on one side of the adsorption tower. A nitrogen buffer tank is arranged on one side of the nitrogen filter. A nitrogen analyzer is arranged on the nitrogen buffer tank. A flowmeter, a pressure gauge and a vent are arranged on one side of the nitrogen analyzer.

[0005] Preferably, the absorption end of the air compressor is connected with an air source, and the output end of the air compressor is correspondingly installed with the air buffer tank.

[0006] Preferably, the absorption port of the dryer is correspondingly installed with the air buffer tank, the output port of the dryer is correspondingly installed with the tight filter, and multiple groups of the activated carbon filter and the dust filter are correspondingly installed with the inner cavity of the tight filter.

[0007] Preferably, the connecting port of the adsorption tower is installed corresponding to the air outlet port of the close filter, and the installation end of the pneumatic valve and the PLC controller are all installed corresponding to the upper side of the adsorption tower.

[0008] Preferably, the multiple groups of the activated carbon adsorption and the membrane separation are arranged in longitudinal alternating array in the adsorption tower respectively.

[0009] Preferably, the air inlet port of the nitrogen filter is installed corresponding to the output port of the adsorption tower, and the air outlet port of the nitrogen filter is installed corresponding to the receiving port of the nitrogen buffer tank.

[0010] Preferably, the installation end of the nitrogen analyzer, the flow meter, the pressure gauge and the vent are all installed corresponding to the nitrogen buffer tank, and the air outlet port of the vent is installed corresponding to the nitrogen tank.

[0011] Compared with the prior art, the utility model has the following beneficial technical effects:

[0012] The utility model discloses a whole simple structure can filter the impurity and harmful substance in air through the setting of close filter, and simultaneously through the multiple groups of activated carbon adsorption and membrane separation mutual cooperation's setting can multilayer to the oxygen in air adsorption removes, thereby can better improve the nitrogen purity, and simultaneously through the nitrogen analyzer and vent mutual cooperation's setting can again detect and empty the nitrogen after multiple deoxidation and handle, thereby make the nitrogen that obtains meets the standard requirement of ultra -pure nitrogen. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is whole module schematic drawing of the utility model;

[0014] Figure 2 It is module schematic drawing of the air compressor system in the utility model;

[0015] Figure 3 It is module schematic drawing of the compressed air purification system in the utility model;

[0016] Figure 4 It is module schematic drawing of the adsorption system in the utility model;

[0017] Figure 5 It is module schematic drawing of the nitrogen buffer system in the utility model.

[0018] Fig. 1, air compressor system; 11, air compressor; 12, air buffer tank; 2, compressed air purification system; 21, drying machine; 22, tight filter; 221, activated carbon filter; 222, dust filter; 3, adsorption system; 31, adsorption tower; 311, activated carbon adsorption; 312, membrane separation; 32, pneumatic valve; 33, PLC controller; 4, nitrogen buffer system; 41, nitrogen filter; 42, nitrogen buffer tank; 43, nitrogen analyzer; 44, flow meter; 45, pressure gauge; 46, vent. DETAILED DESCRIPTION

[0019] The technical scheme of the utility model is further explained below in combination with the drawings and specific embodiments.

[0020] EMBODIMENT

[0021] As Figures 1-5 shown in the utility model discloses a kind of device for ultra-pure nitrogen deoxidation, including air compressor system 1, compressed air purification system 2, adsorption system 3 and nitrogen buffer system 4, air compressor system 1 includes air compressor 11 and air buffer tank 12, the absorption end of air compressor 11 is connected to air source, air compressor 11 can be set to compress air, the output end of air compressor 11 is installed corresponding with air buffer tank 12, air buffer tank 12 has condensate water discharge function, the setting of air buffer tank 12 can store compressed air, while periodically discharging condensate water in air, to ensure air quality;

[0022] compressed air purification system 2 includes drying machine 21 located in the side of air compressor 11, the absorption port of drying machine 21 is installed corresponding with air buffer tank 12, the setting of drying machine 21 can dry and remove moisture in compressed air, so as to ensure the dryness and cleanliness of air, one end of drying machine 21 is connected with tight filter 22, the output port of drying machine 21 is installed corresponding with tight filter 22, the output port of drying machine 21 is fixedly connected with tight filter 22, tight filter 22 includes activated carbon filter 221 and dust filter 222, a plurality of activated carbon filters 221 and dust filters 222 are respectively installed corresponding with the inner cavity of tight filter 22, the setting of activated carbon filter 221 and dust filter 222 can filter various impurities in air after drying treatment, so as to further improve the cleanliness of air, the setting of compressed air purification system 2 can clean compressed air multiple times, so as to better deoxidize air operation;

[0023] The adsorption system 3 comprises an adsorption tower 31 arranged on one side of the close filter 22, a connecting port of the adsorption tower 31 is correspondingly arranged with the air outlet port of the close filter 22, the connecting port of the adsorption tower 31 is fixedly connected with the close filter 22, the adsorption tower 31 is provided with a pneumatic valve 32 and a PLC controller 33, the installation end of the pneumatic valve 32 and the PLC controller 33 are correspondingly arranged on one side above the adsorption tower 31, the installation end of the pneumatic valve 32 is fixedly connected with the adsorption tower 31, the pneumatic valve 32 is arranged to adjust the pressure in the adsorption tower 31, so as to ensure that the pressure in the adsorption tower 31 is moderate and keeps a suitable pressure value, the installation end of the PLC controller 33 is fixedly connected with the adsorption tower 31, the PLC controller 33 comprises a central processing unit, a power supply, an input and an output module, the central processing unit is responsible for processing input signals, executing programs and controlling output, the input module receives signals from sensors, switches and other external devices, and converts them into a format that the PLC can process, the output module transmits the signals processed by the PLC to the pneumatic valve 32, the power supply can provide stable power supply for the adsorption system 3, the arrangement of the PLC controller 33 facilitates the operator to adjust the pressure of the adsorption tower 31 through the pneumatic valve 32, the adsorption tower 31 is provided with a plurality of groups of activated carbon adsorption 311 and membrane separation 312, the plurality of groups of activated carbon adsorption 311 and membrane separation 312 are arranged in a longitudinal alternating array in the adsorption tower 31, the activated carbon adsorption 311 is arranged to adsorb toxic gases in the air, and can separate and pretreat oxygen and nitrogen in the air, the membrane separation 312 is arranged to further deoxidize the pretreated air, the plurality of groups of activated carbon adsorption 311 and membrane separation 312 are arranged to cooperate with each other to use physical adsorption technology and membrane separation technology to deoxidize the air, thereby better improving the purity of nitrogen;

[0024] The nitrogen buffer system 4 comprises a nitrogen filter 41 arranged on one side of the adsorption tower 31, the air inlet port of the nitrogen filter 41 is correspondingly arranged with the output port of the adsorption tower 31, the nitrogen filter 41 is fixedly connected with the adsorption tower 31, the arrangement of the nitrogen filter 41 can further purify the deoxidized nitrogen, thereby ensuring the purity of the nitrogen, a nitrogen buffer tank 42 is arranged on one side of the nitrogen filter 41, the air outlet port of the nitrogen filter 41 is correspondingly arranged with the receiving port of the nitrogen buffer tank 42, the nitrogen filter 41 is fixedly connected with the nitrogen buffer tank 42, the arrangement of the nitrogen buffer tank 42 can store the filtered nitrogen and adjust the pressure of the nitrogen, a nitrogen analyzer 43 is arranged on the nitrogen buffer tank 42, the arrangement of the nitrogen analyzer 43 can detect and analyze the nitrogen in the nitrogen buffer tank 42, a flow meter 44, a pressure gauge 45 and a vent 46 are arranged on one side of the nitrogen analyzer 43 on the nitrogen buffer tank 42, the installation ends of the nitrogen analyzer 43, the flow meter 44, the pressure gauge 45 and the vent 46 are correspondingly arranged with the nitrogen buffer tank 42, the installation ends of the nitrogen analyzer 43, the flow meter 44, the pressure gauge 45 and the vent 46 are fixedly connected with the nitrogen buffer tank 42, the arrangement of the flow meter 44 can detect the flow of the nitrogen in the nitrogen buffer tank 42, the arrangement of the pressure gauge 45 can detect the pressure value in the nitrogen buffer tank 42, the arrangement of the flow meter 44 and the pressure gauge 45 can make the nitrogen more stable when being delivered into the nitrogen buffer tank, the air outlet port of the vent 46 is correspondingly arranged with the nitrogen tank, the arrangement of the vent 46 can vent the unqualified nitrogen through the venting port, and at the same time, deliver the nitrogen meeting the purity standard into the nitrogen tank for storage, the arrangement of the nitrogen buffer system 4 can analyze the deoxidized nitrogen and vent the unqualified nitrogen, thereby making the obtained nitrogen meet the ultra-pure nitrogen standard.

[0025] In this embodiment, the operator first connects the air compressor 11 to the air source, then compresses the incoming air through the air compressor 11, and delivers the compressed air into the air buffer tank 12, then delivers the compressed air into the dryer 21 through the air buffer tank 12 for drying treatment, then filters the dried air through the activated carbon filter 221 and the compact filter 22 to remove impurities in the air, then delivers the filtered air into the adsorption tower 31 for deoxidation, then performs multiple deoxidation treatment on the air through the activated carbon adsorption 311 and the membrane separation 312, then forms nitrogen after deoxidation, then delivers the nitrogen into the nitrogen filter 41 for further filtration to improve the purity of the nitrogen, then detects the purity of the nitrogen through the nitrogen analyzer 43, then vents the unqualified nitrogen after detection through the venting port of the vent 46, and stores the ultra-pure nitrogen meeting the standard into the nitrogen tank.

[0026] The above specific embodiments are only preferred embodiments of the present application, and based on the technical scheme of the present application and the related enlightenment of the above embodiments, those skilled in the art can make various alternative improvements and combinations on the above specific embodiments.

Claims

1. A device for ultra-pure nitrogen deoxidation, comprising an air compressor system (1), a compressed air purification system (2), an adsorption system (3) and a nitrogen buffer system (4), characterized in that: The air compressor system (1) includes an air compressor (11) and an air buffer tank (12), the compressed air purification system (2) includes a drying machine (21) on one side of the air compressor (11), one end of the drying machine (21) is connected with a tight filter (22), the tight filter (22) includes an activated carbon filter (221) and a dust filter (222), the adsorption system (3) includes an adsorption tower (31) arranged on one side of the tight filter (22), the adsorption tower (31) is provided with a pneumatic valve (32) and a PLC controller (33), a plurality of activated carbon adsorption (311) and membrane separation (312) are arranged in the adsorption tower (31), the nitrogen buffer system (4) includes a nitrogen filter (41) arranged on one side of the adsorption tower (31), the nitrogen filter (41) is provided with a nitrogen buffer tank (42) on one side, the nitrogen buffer tank (42) is provided with a nitrogen analyzer (43), the nitrogen analyzer (43) is provided with a flowmeter (44), a pressure gauge (45) and a vent (46) on one side of the nitrogen buffer tank (42).

2. The device for producing ultra-pure nitrogen according to claim 1, wherein The absorption end of the air compressor (11) is connected with an air source, and the output end of the air compressor (11) is correspondingly installed with the air buffer tank (12).

3. The device for producing ultra-pure nitrogen according to claim 1, wherein The absorption port of the drying machine (21) is correspondingly installed with the air buffer tank (12), the output port of the drying machine (21) is correspondingly installed with the tight filter (22), and a plurality of activated carbon filters (221) and dust filters (222) are correspondingly installed in the inner cavity of the tight filter (22).

4. The device for producing ultra-pure nitrogen according to claim 1, wherein The connecting port of the adsorption tower (31) is correspondingly installed with the air outlet port of the tight filter (22), and the installation ends of the pneumatic valve (32) and the PLC controller (33) are correspondingly installed on one side above the adsorption tower (31).

5. The device for producing ultra-pure nitrogen according to claim 1, wherein A plurality of activated carbon adsorption (311) and membrane separation (312) are arranged in the adsorption tower (31) in a longitudinal alternating array.

6. The device for producing ultra-pure nitrogen according to claim 1, wherein The air inlet port of the nitrogen filter (41) is correspondingly installed with the output port of the adsorption tower (31), and the air outlet port of the nitrogen filter (41) is correspondingly installed with the receiving port of the nitrogen buffer tank (42).

7. The device for producing ultra-pure nitrogen according to claim 1, wherein The installation ends of the nitrogen analyzer (43), the flowmeter (44), the pressure gauge (45) and the vent (46) are correspondingly installed with the nitrogen buffer tank (42), and the air outlet port of the vent (46) is correspondingly installed with the nitrogen tank.

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