Filter column

Abstract

The utility model discloses a filter column which comprises a column body and an end cover, the column body is of a hollow structure and is filled with ion exchange resin, the end cover is installed at the end of the column body, a microwell plate is arranged on the side, close to the column body, of the end cover, a filter pipeline is arranged on the end cover, and the filter pipeline is communicated with the column body. According to the filter column, metal ions in a chemical reagent are absorbed through the ion exchange resin in the column body, and the effect of rapidly preparing the ultra-clean high-purity chemical reagent is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to chemical reagent preparation equipment field, especially a filter column. BACKGROUND

[0002] Ultra-clean high-purity chemical reagent is indispensable special chemical in integrated circuit (IC) and high-end semiconductor device manufacturing process, and it plays an important role in multiple key links of semiconductor manufacturing. For example, in the cleaning process of semiconductor wafer, ultra-clean high-purity chemical reagent is widely used, which can effectively remove small particles, organic matter and metal impurities and other pollutants on the wafer surface, ensure that the wafer surface reaches extremely high cleanliness, and provide a good basis for subsequent photoetching, etching and other process steps. These process procedures require ultra-clean high-purity chemical reagent to have high purity and low metal impurity content to avoid adverse effects on the performance and reliability of semiconductor devices.

[0003] Most of the filter columns filter the chemical reagents through the microporous plate to filter the bacteria, viruses, colloidal particles and macromolecular substances such as proteins contained therein. However, in order to obtain chemical reagents with high enough purity, researchers also need to filter metal ions in the reagents. However, the existing metal ion removal method is to add multiple reagents to form crystals and then filter the reagents, which is complicated and not conducive to quickly preparing ultra-clean high-purity chemical reagents. Therefore, there is an urgent need for a filter column that can quickly remove ions. SUMMARY

[0004] The utility model aims at providing a novel filter column to solve one or more technical problems existing in the prior art and at least provide a beneficial choice or create conditions.

[0005] The utility model solves the technical problem by the following solution:

[0006] The filter column comprises:

[0007] The column body is a hollow structure and is filled with ion exchange resin.

[0008] The filter unit comprises an end cover, a microporous plate and a filter pipeline. The end cover is installed at the end of the column body. The microporous plate is arranged on the side of the end cover close to the column body. The filter pipeline is arranged on the end cover and is communicated with the column body.

[0009] The technical scheme has at least the following beneficial effects: when preparing the reagent, the chemical reagent is introduced into the column through the filter pipeline, first, the ion exchange resin in the column exchanges ions with the metal ions contained in the reagent, thereby reducing the content of metal ions in the reagent, and then when the reagent passes through the microporous plate, the microporous plate traps the macromolecular substances such as bacteria, viruses, colloidal particles and proteins in the reagent, thereby realizing double filtration of the chemical reagent, reducing the content of metal ions in the chemical reagent, and improving the purity of the chemical reagent. The filter column can simultaneously separate macromolecules and ions from the chemical reagent, thereby accelerating the purification speed.

[0010] As a further improvement of the above technical scheme, the column is provided with the filter unit at both ends along the length direction of the column, and the segment of the column between the two filter units forms a storage cavity, and the ion exchange resin is located at the storage cavity. After the microporous plates are arranged on both sides of the column, the microporous plates block the ion exchange resin of small molecules, thereby reducing the movement of the ion exchange resin in the column and preventing the ion exchange resin from flowing out of the column along the conveying pipeline. At the same time, the two microporous plates filter the chemical reagent twice, thereby improving the filtering effect.

[0011] As a further improvement of the above technical scheme, the diameter of the microporous plate is greater than the inner diameter of the column, and after the end cap and the microporous plate are synchronously installed on the column, the end side wall of the column and the end cap clamp the microporous plate from both sides, thereby reducing the possibility of the microporous plate falling into the column.

[0012] As a further improvement of the above technical scheme, the end cap is provided with a mounting groove near one side of the column, and the microporous plate is mounted in the mounting groove, and the microporous plate is provided with a locking member for locking the microporous plate in the mounting groove. If the microporous plate is directly arranged between the end cap and the column, the microporous plate will be directly communicated with the column when the microporous plate is offset, so that the microporous plate is difficult to filter the chemical reagent. The mounting groove defines the position of the microporous plate on the end cap, improves the mounting stability of the microporous plate on the end cap, and enables the microporous plate to stably filter the chemical reagent.

[0013] As a further improvement of the above technical scheme, the locking member includes a buckle, the buckle is arranged on the microporous plate in a circumferential direction, and the end cap is communicated with a plurality of clamping grooves at the groove wall of the mounting groove. When the microporous plate is installed, the microporous plate can be directly clamped into the end cap, thereby realizing quick installation of the microporous plate and improving the use convenience of the filter column. Meanwhile, the buckle is integrally formed on the microporous plate, thereby reducing the use of other locking structures.

[0014] As a further improvement of the above technical solution, the end of the column is sleeved with a connecting ring, and the end cover is provided with a connecting piece for connecting the connecting ring to the end cover, so that the connecting piece provided on the column is reduced, thereby reducing the damage of other mechanical structures to the column.

[0015] As a further improvement of the above technical solution, a sealing ring is arranged between the end cover and the connecting ring, and the sealing ring is arranged between the gap between the end cover and the connecting ring, so that the sealing ring seals the gap between the end cover and the column, and reduces the outflow of chemical reagents from the small gap between the column and the connecting ring.

[0016] As a further improvement of the above technical solution, the column, the microplate and the end cover are made of low-out materials, so that the metal ions released from the components of the filter column are reduced, thereby reducing the absorption of metal ions by the chemical reagents during the flow process.

[0017] As a further improvement of the above technical solution, one end of the column is provided with a stirring rod, the stirring rod is provided with stirring blades, the column is provided with a driving assembly for driving the stirring rod to rotate forward or reverse in the column, and the rotation axis of the stirring rod extends along the length direction of the column.

[0018] By adopting the above scheme, the chemical reagents are stirred and dispersed by the stirring blades after passing through the stirring rod, so that the chemical reagents to be purified are uniformly distributed in the column and fully contact with the ion exchange resin in the column to absorb the metal ions in the reagents, thereby improving the filtering and purifying effect of the filter column on the chemical reagents.

[0019] As a further improvement of the above technical solution, the end of the column away from the stirring rod is provided with a mounting plate, the mounting plate is provided with a through slot opposite to the micropores of the microplate, the slot wall of the through slot is provided with a movable slot, the movable slot is provided with a through-closed plate, the through-closed plate can rotate relative to the microplate, the side of the through-closed plate close to the stirring shaft is provided with a guide plate, and the guide plate extends away from the mounting plate.

[0020] By adopting the above scheme, when the driving assembly drives the stirring rod to rotate forward, the stirring blade drives the ion exchange resin and the chemical reagent in the column to rotate synchronously, at this time, the chemical reagent drives the through-closed plate to rotate on the mounting plate through the guide plate, so that the through-closed plate is closed after rotating, the chemical reagent stays in the column, under the stirring action of the stirring blade, the chemical reagent and the ion exchange resin are fully contacted, the resin fully adsorbs the metal ions in the reagent, and the purification effect of the ion exchange resin on the chemical reagent is further improved, and when the driving assembly controls the stirring to reverse, the stirring blade stirs the chemical reagent and the ion exchange resin in the column, and drives the through-closed plate to rotate in the opposite direction through the guide plate, the through-closed plate is retracted into the movable groove, at this time, the through groove is opened, the chemical reagent can flow in the column, and the transmission of the chemical reagent continues. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical scheme in the embodiments of the present application, the drawings needed in the embodiment description will be briefly described. Obviously, the described drawings are only some of the embodiments of the present application, not all the embodiments, and the person skilled in the art can obtain other design schemes and drawings according to these drawings without creative labor.

[0022] Figure 1 is the overall structure schematic diagram of the filter column of the embodiment 1 of the present application;

[0023] Figure 2 is the front view perspective view of the filter column of the embodiment 1 of the present application;

[0024] Figure 3 is Figure 2 is the enlarged view of A in

[0025] Figure 4 is the front view perspective view of the filter column of the embodiment 2 of the present application;

[0026] Figure 5 is the overall structure schematic diagram of the microwell plate and the mounting plate of the embodiment 2 of the present application.

[0027] REFERENCE NUMERALS

[0028] 1, column; 11, ion exchange resin; 2, end cover; 21, mounting groove; 22, buckle; 23, clamping groove; 3, microwell plate; 4, connecting ring; 41, connecting bolt; 5, sealing ring; 6, stirring rod; 7, forward and reverse motor; 8, mounting plate; 81, through groove; 82, movable groove; 9, through-closed plate; 91, guide plate. DETAILED DESCRIPTION

[0029] The embodiments of the present application are described below in detail, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary only, and are used only for explaining the present application, and cannot be understood as a limitation of the present application.

[0030] In the description of the present application, it should be understood that, in relation to the orientation description, for example, the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0031] In the description of the present application, the meaning of several is one or more, and the meaning of multiple is more than two, greater than, less than, more than, etc. are understood as not including the number, and above, below, etc. are understood as including the number. If it is described as first, second, it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or the sequence of technical features indicated.

[0032] In the description of the present application, unless otherwise explicitly limited, the words such as setting, installing, connecting, etc. should be broadly understood, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical scheme.

[0033] In the production of G3 grade wet electronic chemicals such as semiconductor discrete devices, small and medium scale integrated circuits, etc., super-clean high-purity chemical reagents are usually used as special chemicals, and the reagents require high purity and low metal impurity content, but the existing super-clean high-purity chemical reagent purification process is complex, which is not conducive to rapid preparation, and therefore a filter column capable of rapidly separating impurities and metal ions in the reagent is needed.

[0034] Embodiment 1

[0035] With reference to Figure 1 and Figure 2 Embodiment 1 of the present application provides a filter column, which comprises:

[0036] A column body 1, the cross section of the column body 1 is circular, the column body 1 is a hollow structure and is internally filled with ion exchange resin 11;

[0037] The filter unit comprises an end cover 2, a microporous plate 3 and a filter pipe. The filter unit is provided with a pair of two filter units which are respectively installed at the two ends of the column 1 along the length direction. The end cover 2 is installed at the end of the column 1. The microporous plate 3 is installed on the side of each end cover 2 close to the column 1. The filter port is formed in the end cover 2. The microporous plate 3 is located on the side of the filter port close to the column 1. The filter pipe is installed on the end cover 2 at the filter port and is communicated with the inside of the column 1.

[0038] In the embodiment, the column 1, the microporous plate 3 and the end cover 2 are made of low-elution materials such as PEA (perfluoroalkoxy alkane), PTFE (polytetrafluoroethylene) or PVDF (polyvinylidene fluoride) and the like. Compared with using metal as the outer shell of the filter column, using these low-elution materials as the main material can effectively reduce the influence of the metal ions generated by the filter column during operation on the purity of the reagent.

[0039] When the filter column is used to filter the ultra-clean high-purity chemical reagent, the input pipe for conveying the chemical reagent is connected to the filter pipe at one of the end covers 2. The other filter pipe is connected to the collection tank for collecting the ultra-clean high-purity chemical reagent through the output pipe. Then the chemical reagent is pumped into the filter column. First, the chemical reagent passes through the microporous plate 3. The microporous plate 3 separates the bacteria, viruses, colloidal particles and proteins and other macromolecular substances in the chemical reagent from the reagent to complete the preliminary filtration. Then the reagent enters the inside of the column 1. The ions in the reagent are adsorbed by the ion exchange resin 11 in the inside of the column 1. The reagent continues to flow. At this time, the reagent is separated from the macromolecules in the ion exchange resin 11 by the second microporous plate 3 to obtain the final chemical reagent product which is transmitted to the collection tank through the conveying pipe. By filling the ion exchange resin 11 in the filter column and cooperating with the microporous plate 3, the chemical reagent is separated from the impurity molecules and ions to obtain the ultra-clean high-purity chemical reagent with high purity and low metal content. The purification method combines the processes of separating ions and separating macromolecules to accelerate the purification speed of the reagent.

[0040] Further preferably, the pore size of the microporous plate 3 is smaller than the diameter of the ion exchange resin 11. The ion exchange resin 11 is difficult to pass through the microporous plate 3. The segment of the column 1 between the two microporous plates 3 forms a storage cavity for storing the ion exchange resin 11. The ion exchange resin 11 is limited in the column by the storage cavity. While separating macromolecules, the ion exchange resin 11 is prevented from leaking to the final product of the ultra-clean high-purity chemical reagent through the conveying pipe.

[0041] Reference Figure 2 and Figure 3The diameter of each micro-hole plate 3 is greater than the inner diameter of the column 1. After the end cover 2 is installed on the column 1, if the diameter of the micro-hole plate 3 is less than the inner diameter of the column 1, the micro-hole plate 3 may fall into the column 1, thereby losing the limitation of the ion exchange resin 11, contaminating the chemical reagent, and greatly reducing the risk of the micro-hole plate 3 falling into the column 1.

[0042] The end cover 2 is provided with a mounting groove 21 near the column 1. The micro-hole plate 3 is mounted in the mounting groove 21, and the position of the micro-hole plate 3 is limited by the mounting groove 21, thereby improving the position stability of the micro-hole plate 3 and stably playing the effect of the micro-hole plate 3.

[0043] The micro-hole plate 3 is provided with a locking piece for locking the micro-hole plate 3 in the mounting groove 21. In this embodiment, the locking piece includes a plurality of buckles 22 which are circumferentially spaced apart on the side wall of the micro-hole plate 3. The buckle 22 is connected with the micro-hole plate 3 through an elastic plate. Each buckle 22 is provided with a guide surface away from the micro-hole plate 3. The end cover 2 is communicated with a plurality of clamping grooves 23 at the groove wall of the mounting groove 21. The buckle 22 is clamped in the end cover 2 through the clamping groove 23. When the micro-hole plate 3 is installed on the end cover 2, the micro-hole plate 3 is directly pushed into the mounting groove 21. Under the action of the guide surface, the buckle 22 is offset inward until the buckle 22 is opposite to the clamping groove 23. At this time, the buckle 22 is reset in the clamping groove 23 under the action of the elastic plate, and the locking of the micro-hole plate 3 is completed.

[0044] In other embodiments, the locking piece is a clamping block which is circumferentially spaced apart on the micro-hole plate 3 and is integrally formed with the micro-hole plate 3 and is made of a low-outgassing material. A locking groove is circumferentially spaced apart on the groove wall of the mounting groove 21. A sliding groove is communicated on the groove wall of each locking groove. The clamping block is slidably installed in the sliding groove and is slidably installed in the locking groove in the horizontal direction. The locking groove is interference-fitted with the clamping block. When it is needed to install the micro-hole plate 3 on the end cover 2, the micro-hole plate 3 is first installed in the mounting groove 21. At this time, the clamping block is simultaneously slid into the sliding groove. Then, the micro-hole plate 3 is rotated, and the clamping block is slid from the sliding groove into the locking groove. The micro-hole plate 3 is stably installed in the mounting groove 21 through the interference fit between the locking groove and the clamping block. This locking mode only needs to rotate the micro-hole plate 3 to realize the locking of the micro-hole plate 3, which is helpful for the user to quickly assemble the column 1.

[0045] Referring to Figure 2 and Figure 3The end of the column 1 is sleeved with a connecting ring 4, the top of the connecting ring 4 is flush with the end of the column 1, the filter column further comprises a connecting piece for fixedly connecting the connecting ring 4 to the end cover 2, in the embodiment, the connecting ring 4 is made of metal, the connecting piece comprises connecting bolts 41, a plurality of threaded holes are formed on the connecting ring 4, the connecting bolts 41 are rotatably installed on the end cover 2, and the ends of the connecting bolts 41 penetrating through the end cover 2 are threadedly connected to the connecting ring 4. First, the connecting ring 4 is connected to the end cover 2 through external connection, so that the connection between the end cover 2 and the column 1 made of low-elution material is avoided, the damage of the column 1 caused by the connecting hole is reduced, meanwhile, the connecting bolts 41 and the connecting ring 4 made of metal are away from the column 1, so that the possibility of contaminating the reagent due to rust of the connecting bolts 41 and the connecting ring 4 is reduced.

[0046] Further, as a preferred embodiment, a sealing ring 5 is arranged between the end cover 2 and the connecting ring 4, the two sides of the sealing ring 5 abut against the ends of the end cover 2 and the connecting ring 4 respectively, the microplate 3 is in the sealing ring 5, the diameter of the sealing ring 5 is greater than the inner diameter of the column 1 and less than the inner diameter of the connecting ring 4, the leakage of the chemical reagent between the end cover 2 and the column 1 can be effectively reduced through the sealing ring 5, and the sealing ring 5 is arranged between the connecting gap between the column 1 and the connecting ring 4, so that the sealing ring 5 can seal the gap between the end cover 2 and the column 1 and seal the gap between the column 1 and the connecting ring 4 at the same time, thereby reducing the leakage of the chemical reagent from the small gap between the column 1 and the connecting ring 4 and the waste caused thereby.

[0047] Embodiment 2

[0048] With reference to Figure 4 and Figure 5 The difference between the embodiment and the embodiment 1 is that one end of the column 1 is provided with a support, a stirring rod 6 is rotatably installed on the support, the stirring rod 6 extends along the length direction of the column 1, stirring blades are circumferentially and interval ly arranged on the end of the stirring rod 6, each stirring blade extends away from the stirring rod 6, and a driving assembly for driving the stirring rod 6 to rotate in the column 1 is installed on the column 1. The rotation axis of the stirring rod 6 extends along the length direction of the column 1. The chemical reagent flowing into the column 1 is stirred and dispersed through the stirring rod and the stirring blades arranged at the input end of the column 1, so that the chemical reagent is uniformly distributed in the column 1 and fully contacts with the ion exchange resin 11, and the purification effect is improved.

[0049] The end of the column 1 away from the stirring shaft 6 is provided with a mounting plate 8, the cross section of the mounting plate 8 is circular, the cross section of the mounting plate 8 is perpendicular to the length direction of the column 1, a plurality of through grooves 81 are formed on the side plate of the mounting plate 8 close to the stirring shaft 6 in the circumferential direction, each through groove 81 is opposite to the microwell of the microwell plate 3, a movable groove 82 is formed on the groove wall of each through groove 81 along one side of the mounting plate 8 in the circumferential direction, the movable groove 82 is rotatably mounted with a closing plate 9, the rotation axis of each closing plate 9 is located at the center of the mounting plate 8 and extends along the length direction of the column 1, each closing plate 9 can rotate relative to the microwell plate 3, the side of the closing plate 9 away from the microwell plate 3 and the end of the closing plate 9 away from the movable groove 82 are provided with a guide plate 91, each guide plate 91 extends away from the closing plate 9;

[0050] The materials of the support, the stirring rod, the stirring blade and the mounting plate are low-out materials, so that the support, the stirring rod, the stirring blade and the mounting plate installed in the column reduce the precipitation of metal ions, thereby reducing the ion content of the chemical reagent.

[0051] In the embodiment, the driving assembly includes a forward and reverse motor 7, the support is provided with a mounting cavity, the forward and reverse motor 7 is installed in the support and located in the mounting cavity, the support of low-out material protects the forward and reverse motor 7, the stirring rod 6 is connected to the output end of the forward and reverse motor 7, so as to control the forward rotation and reverse rotation of the stirring rod 6.

[0052] In other embodiments, the driving assembly further includes a transmission rod and a bevel gear set, the forward and reverse motor 7 is installed on the outer side wall of the column 1, one end of the transmission rod is connected to the output end of the forward and reverse motor 7, the other end of the transmission rod penetrates into the column 1, the end of the transmission rod penetrating into the column 1 is connected to the stirring rod 6 through the bevel gear set, the external forward and reverse motor 7 reduces the possibility of water entering the forward and reverse motor.

[0053] When the filtration of the chemical reagent is started, the forward and reverse motor 7 is started to drive the stirring rod 6 to rotate forward, the stirring blade drives the ion exchange resin 11 and the chemical reagent in the column 1 to rotate synchronously, at this time, the chemical reagent drives the closing plate 9 to rotate on the mounting plate 8 through the guide plate 91, so that the closing plate 9 closes the through groove 81 after rotating, the chemical reagent stays in the column 1, under the stirring action of the stirring blade, the chemical reagent and the ion exchange resin 11 are in full contact, the resin fully adsorbs the metal ions in the reagent, and the purity of the chemical reagent is improved, when the driving assembly controls the stirring to reverse, the chemical reagent and the ion exchange resin 11 in the column 1 are stirred by the stirring blade, and the closing plate 9 is driven to rotate in the opposite direction by the guide plate 91, the closing plate 9 is retracted into the movable groove 82, at this time, the through groove 81 is opened, the chemical reagent can continue to flow in the column 1, and the transmission of the chemical reagent is continued.

[0054] Further, the side of the guide plate 91 away from the movable groove 82 can be provided as an inclined surface, the inclined surface is inclined towards the direction of the movable groove 82, after the driving assembly drives the through-shut plate 9 to rotate, the inclined surface of the guide plate 91 will push the ion exchange resin in the through groove 81 out of the through groove 81 through the guiding effect of the inclined surface, back to the storage cavity, reduce the situation that the ion exchange resin is damaged under pressure.

[0055] The preferred embodiments of the present application are described in detail above, but the present application is not limited to the described embodiments, and those skilled in the art can make various equivalent modifications or replacements without departing from the spirit of the present application. These equivalent modifications or replacements are all included in the scope defined by the claims of the present application.

Claims

1. A filter column, characterised in that, The application relates to a column device for ion exchange chromatography. The column device comprises a column (1) filled with ion exchange resin (11), a filter unit comprising an end cover (2) installed at the end of the column (1), a microporous plate (3) arranged on the side of the column (1) close to the end cover (2), and a filter pipe arranged on the end cover (2) and connected to the column (1). The column (1) is provided with the filter unit at both ends along the length direction of the column (1), and the segment of the column (1) between the two microporous plates (3) of the filter units forms a storage cavity, and the ion exchange resin (11) is arranged in the storage cavity.

2. The filter column of claim 1, wherein, The diameter of the microporous plate (3) is larger than the inner diameter of the column (1).

3. The filter column of claim 1, wherein, The end cover (2) is provided with an installation groove (21) on the side close to the column (1), the microporous plate (3) is installed in the installation groove (21), and the microporous plate (3) is provided with a locking member for locking the microporous plate (3) in the installation groove (21).

4. The filter column of claim 1, wherein, The locking member comprises buckles (22) arranged on the microporous plate (3) at intervals in the circumferential direction, the end cover (2) is connected to the groove wall of the installation groove (21) and is provided with a plurality of clamping grooves (23), and the buckles (22) are clamped in the clamping grooves (23).

5. The filter column of claim 4, wherein, The end of the column (1) is sleeved with a connecting ring (4), and the end cover (2) is provided with a connecting member for connecting the connecting ring (4) to the end cover (2).

6. The filter column of claim 1, wherein, A sealing ring (5) is arranged between the end cover (2) and the connecting ring (4).

7. The filter column of claim 6, wherein, The column (1), the microporous plate (3) and the end cover (2) are made of low-outgassing material.

8. The filter column of claim 1, wherein, One end of the column (1) is provided with a stirring rod (6), the stirring rod (6) is provided with stirring blades, the column (1) is provided with a driving assembly for driving the stirring rod (6) to rotate in the column (1) in the forward direction or the reverse direction, and the rotation axis of the stirring rod (6) extends along the length direction of the column (1).

9. The filter column of claim 1, wherein, The end of the column (1) away from the stirring rod (6) is provided with a mounting plate (8), the mounting plate (8) is provided with a through groove (81) opposite the micropores of the microporous plate (3), the groove wall of the through groove (81) is provided with a movable groove (82), the movable groove (82) is provided with a through-closing plate (9), the through-closing plate (9) can rotate relative to the microporous plate (3), the through-closing plate (9) is provided with a guide plate (91) on the side close to the stirring rod (6), and the guide plate (91) extends away from the mounting plate (8).

10. The filter column of claim 9, wherein, The driving assembly comprises a forward-reverse motor (7), the stirring rod (6) is connected to the output end of the forward-reverse motor (7), and the stirring rod (6) and the stirring blades stir and disperse the chemical reagent introduced into the column (1). ​

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