Laser surface treatment equipment for remanufacturing rotary silicon-aluminum target material

Abstract

The utility model relates to the technical field of silicon-aluminum target remanufacturing, in particular to laser surface treatment equipment for rotating silicon-aluminum target remanufacturing, and adopts the technical scheme that the laser surface treatment equipment comprises a frame body, a rotating component is movably mounted at one end of the frame body, and a limiting component is fixedly mounted on one side, deviating from the rotating component, in the frame body; the frame body comprises a bottom frame and limiting frames fixedly installed on the two sides of the bottom frame at equal intervals. The rotating assembly comprises a driving motor, sliding frames are fixedly installed on the two sides of the driving motor respectively, the ends, away from the driving motor, of the sliding frames are movably inserted into the limiting frames, and the rotating assembly is slidably connected with the frame body through the sliding frames and the limiting frames; a clamping device is installed on the driving motor in a transmission mode, and a target material body is installed on the clamping device in a clamping mode. The device has the advantage of processing the long target material, and solves the problem that the length of the target material which can be processed by the device in the prior art is limited when the device is used.

Description

Technical Field

[0001] This utility model relates to the field of silicon-aluminum target remanufacturing technology, specifically to a laser surface treatment device for remanufacturing rotating silicon-aluminum targets. Background Technology

[0002] Silicon-aluminum sputtering targets are a commonly used material in vacuum magnetron sputtering technology. These targets typically employ a rotary design, consisting of a hollow cylindrical base and a multi-layered structure covering its outer surface. Specifically, the base is first coated with an underlayer, and then a silicon-aluminum layer is deposited on top of the underlayer. To ensure that the silicon-aluminum layer can generate sufficient magnetic field strength to meet the requirements of the magnetron sputtering coating process, plasma spraying technology is usually used to prepare it, controlling the thickness of the silicon-aluminum layer to be between approximately 6 and 9 millimeters. This design and preparation process helps improve sputtering efficiency and target lifespan.

[0003] Extensive searches revealed CN216576122U, which discloses a laser surface treatment device for remanufacturing rotating silicon-aluminum target materials. This device is capable of performing laser surface treatment on the surface of residual silicon-aluminum layers.

[0004] In existing technologies, the size of the target material that can be processed is relatively limited. Therefore, when processing long targets, the target material needs to be cut, which restricts its use. Therefore, a laser surface treatment device for the remanufacturing of rotating silicon-aluminum targets is needed to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a laser surface treatment device for the remanufacturing of rotating silicon-aluminum targets, which has the advantage of processing targets with longer lengths and solves the problem that the length of targets that can be processed by the existing devices is limited.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a laser surface treatment equipment for remanufacturing a rotating silicon-aluminum target, comprising a frame, a rotating component movably mounted at one end of the frame, a limiting component fixedly mounted on the side of the frame facing away from the rotating component, and the frame comprising a base frame and limiting frames fixedly mounted at equal intervals on both sides of the base frame;

[0007] The rotating assembly includes a drive motor, and slides are fixedly installed on both sides of the drive motor. The end of the slide away from the drive motor is movably inserted into the limiting frame. The rotating assembly is slidably connected to the frame through the slides and the limiting frame.

[0008] A clamp is mounted on the drive motor, and the target body is clamped on the clamp.

[0009] Preferably, the frame body further comprises a first mounting frame and a second mounting frame, both of which are fixedly installed on the inner side of the base frame.

[0010] Preferably, the second mounting frame is provided with a mounting groove at the top, and a laser is embedded in the mounting groove; a through-type reserved groove is formed in the second mounting frame below the mounting groove, and the reserved groove is in communication with the mounting groove.

[0011] The through-type reserved groove makes the installation and maintenance of the laser more convenient, provides stable support for the laser, reduces the space occupation, and improves the overall compactness of the device.

[0012] The communication between the reserved groove and the mounting groove can be used for cooling or protecting the laser, improving the functionality and safety of the device.

[0013] Preferably, the limiting assembly comprises a cylinder body, one end of which is fixedly connected to the inner side of the base frame, and the other end is a telescopic end; the telescopic end of the cylinder body penetrates through the first mounting frame and is fixedly installed with a placement sleeve, and the inner wall of the placement sleeve is provided with a soft rubber coating.

[0014] The placement sleeve is provided with a soft rubber coating on the inner wall, which can protect the target body from abrasion or damage and prolong the service life of the target.

[0015] Preferably, the target body passes through the reserved groove and is movably inserted into the placement sleeve at the end away from the holder.

[0016] The target body can rotate freely in the placement sleeve, which provides greater flexibility for laser surface treatment and allows different parts of the target to be processed.

[0017] This design allows the device to adapt to target materials of different lengths and diameters, improving the applicability and flexibility of the device.

[0018] Compared with the prior art, the device has the following advantages:

[0019] The utility model discloses a rotating assembly realizes the sliding connection with the frame body through the slide and the limiting frame, and this design makes the rotating assembly can move horizontally along the direction of the limiting frame to adapt to the target material of different length, and can realize the segmented processing of the target material after the target material is turned over. This flexibility allows the equipment to process without cutting the target material, breaks the length limit of the target material of the traditional equipment, and the driving motor provides power, so that the target material body can rotate, and the design of the slide allows the rotating action to be continuously carried out on the long target material, ensures the continuous processing of the long target material, and the clamping device driven and installed on the driving motor firmly clamps the target material body, ensures the stability and accuracy of the target material in the laser surface treatment process. The design of the clamping device makes the target material can be fixed in the proper position, and even when processing the long target material, the position can be kept from deviating, and this flexibility not only solves the problem of the limited length of the target material that can be processed in the prior art, but also improves the processing efficiency and the utilization rate of the target material.

[0020] In conclusion, the laser surface treatment equipment effectively solves the problem of the limited length of the target material that can be processed in the prior art, can effectively process the long target material, improves the flexibility, efficiency and accuracy of processing, and ensures the omnibearing processing capacity of the target material. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is the front view structure schematic drawing of the utility model;

[0022] Figure 2 It is the frame body structure schematic drawing of the utility model;

[0023] Figure 3 It is the rotating assembly structure schematic drawing of the utility model;

[0024] Figure 4 It is the limiting assembly structure schematic drawing of the utility model.

[0025] In the drawing: 1, frame body; 11, base frame; 12, first mounting frame; 13, second mounting frame; 131, installation groove; 132, reserved slot; 14, limiting frame; 2, laser; 3, rotating assembly; 31, driving motor; 311, slide; 32, clamping device; 4, target material body; 5, limiting assembly; 51, cylinder body; 52, placing sleeve. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be clearly and completely described with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative efforts fall within the scope of the present application.

[0027] Embodiment one

[0028] As shown in Figure 1 , Figure 2 , Figure 3 and Figure 4 , the present application provides an embodiment: a laser surface treatment equipment for rotating silicon-aluminum target material remanufacturing, comprising a frame body 1, a rotating assembly 3 movably mounted at one end of the frame body 1, a limiting assembly 5 fixedly mounted on the side of the frame body 1 away from the rotating assembly 3, the frame body 1 comprising a chassis 11 and limiting frames 14 fixedly installed at both sides of the chassis 11 at equal distances.

[0029] The rotating assembly 3 comprises a driving motor 31, and sliding frames 311 are fixedly installed at both sides of the driving motor 31, one end of the sliding frame 311 away from the driving motor 31 is movably inserted into the limiting frame 14, and the rotating assembly 3 is slidably connected with the frame body 1 through the sliding frame 311 and the limiting frame 14.

[0030] The driving motor 31 is drivingly installed with a gripper 32, and the gripper 32 is clamped with a target body 4.

[0031] Specifically, the rotating assembly 3 is slidably connected with the frame body 1 through the sliding frame 311 and the limiting frame 14, which makes the rotating assembly 3 horizontally move along the direction of the limiting frame 14 to adapt to target materials of different lengths, and realizes segmented processing of the target material after the target material is turned over. This flexibility allows the equipment to process without cutting the target material, breaking the length limit of the target material in the traditional equipment, and the driving motor 31 provides power to make the target body 4 rotate, and the design of the sliding frame 311 allows the rotating action to be continuously performed on a long target material, ensuring continuous processing of the long target material, and the gripper 32 drivingly installed on the driving motor 31 firmly clamps the target body 4, ensuring the stability and accuracy of the target material during the laser surface treatment process. The design of the gripper 32 makes the target material can be fixed at a proper position, and its position can be kept from deviating even when processing a long target material, which not only solves the problem of limited length of the target material that can be processed by the device in the prior art, but also improves the processing efficiency and utilization rate of the target material.

[0032] In conclusion, the laser surface treatment device effectively solves the problem of limited target material length that can be processed in the prior art device in use, can effectively process the target material with a longer length, improves the flexibility, efficiency and accuracy of processing, and at the same time ensures the omnidirectional processing capability of the target material.

[0033] Embodiment two

[0034] In order to improve the stability of the target material body during rotation in the processing process, as shown in Figure 1 , Figure 2 and Figure 4 , in this embodiment, the frame body 1 further comprises a first mounting frame 12 and a second mounting frame 13, and the first mounting frame 12 and the second mounting frame 13 are fixedly installed on the inner side of the base frame 11. In the design, the first mounting frame 12 and the second mounting frame 13 are fixedly installed on the inner side of the base frame 11, which enhances the stability and rigidity of the entire device, ensures that the device will not displace due to vibration during laser processing, and thus ensures the accuracy of processing.

[0035] Further, a mounting groove 131 is formed on the top of the second mounting frame 13, and a laser 2 is embedded in the mounting groove 131. A through-type reserved groove 132 is formed in the second mounting frame 13 below the mounting groove 131, and the reserved groove 132 is in communication with the mounting groove 131. In the design, the laser 2 can be precisely positioned by forming the mounting groove 131 on the top of the second mounting frame 13 and embedding the laser 2, which ensures that the laser beam accurately irradiates the surface of the target material body 4.

[0036] The design of the through-type reserved groove 132 makes the installation and maintenance of the laser 2 more convenient, and at the same time provides stable support for the laser 2, reduces the space occupation, and improves the overall compactness of the device.

[0037] The design of the communication between the reserved groove 132 and the mounting groove 131 can be used for cooling or protecting the laser 2, which improves the functionality and safety of the device.

[0038] Further, the limiting assembly 5 comprises a cylinder body 51, one end of which is fixedly connected to the inner side of the base frame 11, and the other end is a telescopic end. The telescopic end of the cylinder body 51 passes through the first mounting frame 12 and is fixedly installed with a placement sleeve 52, and the inner wall of the placement sleeve 52 is provided with a soft rubber coating. In the design, the telescopic end of the cylinder body 51 passes through the first mounting frame 12 and is fixedly installed with the placement sleeve 52, which can accurately control the position of the target material body 4 and ensure the accuracy and consistency of laser processing.

[0039] The inner wall of the placement sleeve 52 is provided with a soft rubber coating, which can protect the target material body 4 from wear or damage and prolong the service life of the target material.

[0040] Further, the target body 4 passes through the reserved slot 132 and is movably inserted into the placement sleeve 52 at the end away from the clamp 32. The design that the target body 4 passes through the reserved slot 132 and is movably inserted into the placement sleeve 52 makes the installation and positioning of the target more integrated and simplifies the operation process.

[0041] The target body 4 can rotate freely in the placement sleeve 52, which provides greater flexibility for laser surface treatment and allows different parts of the target to be treated.

[0042] This design allows the device to adapt to targets of different lengths and diameters, improving the applicability and flexibility of the device.

[0043] When the utility model is used, it is checked whether the driving motor 31 and the laser 2 are working normally to ensure stable power and gas supply. The silicon aluminum target body 4 is placed on the clamp 32, and it is ensured that the target body 4 is clamped correctly. One end of the target body 4 should be movably inserted into the placement sleeve 52, and it is ensured that the target can rotate freely. The laser 2 is embedded into the installation slot 131 at the top of the second mounting frame 13, and it is ensured that the laser 2 is aligned with the surface of the target body 4. Start the driving motor 31 to make the target body 4 start rotating. At the same time, start the laser 2 to perform laser surface treatment on the surface of the rotating target body 4. During the entire laser treatment process, the rotation speed of the target body 4 and the output power of the laser 2 are monitored to ensure that the treatment effect meets the expectations. The target body 4 is pushed by the limiting assembly 5 to realize the treatment of the surface of the target body 4. When the length of the target body 4 is too long and does not exceed twice the distance between the opposite sides of the first mounting frame 12 and the second mounting frame 13, the target body 4 can be turned over, and the above operation can be repeated to realize the machining operation of the super-long target body 4. After the target body 4 is completely processed, the laser 2 and the driving motor 31 are turned off, the surface treatment effect of the target body 4 is checked to ensure that there is no defect or damage, the residues and dust on the device are cleaned, especially the area where the laser 2 and the target body 4 contact, and necessary maintenance is performed on the device, including lubrication, checking of worn parts, etc. to ensure that the device can work normally next time.

[0044] It is obvious to those skilled in the art that the utility model is not limited to the details of the above exemplary embodiments, and can be realized in other specific forms without departing from the spirit or basic characteristics of the utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, and the scope of the utility model is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the utility model. Any reference signs in the claims should not be regarded as limiting the claims involved.

Claims

1. A laser surface treatment device for remanufacturing a rotating silicon-aluminum target, comprising a frame (1), wherein a rotating component (3) is movably mounted at one end of the frame (1), and a limiting component (5) is fixedly mounted inside the frame (1) on the side opposite to the rotating component (3), characterized in that: The frame (1) includes a base frame (11) and a limiting frame (14) that is fixedly installed at equal intervals on both sides of the base frame (11); The rotating assembly (3) includes a drive motor (31), and slides (311) are fixedly installed on both sides of the drive motor (31). The end of the slide (311) facing away from the drive motor (31) is movably inserted into the limiting frame (14). The rotating assembly (3) is slidably connected to the frame (1) through the slide (311) and the limiting frame (14). A clamp (32) is mounted on the drive motor (31), and the target body (4) is clamped on the clamp (32).

2. The laser surface treatment equipment for remanufacturing rotating silicon-aluminum target materials according to claim 1, characterized in that, The frame (1) also includes a first mounting bracket (12) and a second mounting bracket (13), both of which are fixedly installed inside the base frame (11).

3. The laser surface treatment equipment for remanufacturing rotating silicon-aluminum target materials according to claim 2, characterized in that, The second mounting bracket (13) has a mounting groove (131) on its top, and a laser (2) is embedded in the mounting groove (131). The second mounting bracket (13) below the mounting groove (131) has a through-type reserved groove (132), and the reserved groove (132) is connected to the mounting groove (131).

4. The laser surface treatment equipment for remanufacturing rotating silicon-aluminum target materials according to claim 1, characterized in that, The limiting component (5) includes a cylinder body (51), one end of which is fixedly connected to the inner side of the base frame (11), and the other end of which is a telescopic end. The telescopic end of the cylinder body (51) passes through the first mounting frame (12) and is fixedly installed with a placement sleeve (52). The inner wall of the placement sleeve (52) is provided with a soft rubber coating.

5. The laser surface treatment equipment for remanufacturing rotating silicon-aluminum target materials according to claim 1, characterized in that, The target body (4) passes through the reserved groove (132), and the end of the target body (4) facing away from the clamp (32) is movably inserted into the placement sleeve (52).

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