Shielding device and cutting equipment

Abstract

The utility model discloses a shielding device and cutting equipment, and belongs to the technical field of cutting machines, the shielding device is used for shielding a flow channel of the cutting equipment, and the shielding device comprises a connecting piece detachably connected to the equipment; the first plate piece is located on one side of the connecting piece, connected with the connecting piece and used for shielding the runner; and the second plate is located on the side, away from the connecting piece, of the first plate and connected with the first plate, and the second plate and the first plate define a containing space. When foreign matters and impurities attached to the top of the cutting chamber fall down, the falling foreign matters and impurities can be blocked by installing the first plate piece, are prevented from falling into the flow channel and flow into the diamond wire along with liquid in the flow channel, and normal work of the diamond wire is guaranteed. And meanwhile, the accommodating space defined by the first plate and the second plate can block and store the foreign matters, so that workers can conveniently and uniformly treat the foreign matters in the accommodating space after the cutting work is completed.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of cutting machines, and particularly relates to a shielding device and a cutting device. BACKGROUND

[0002] In the production of silicon wafers, a diamond wire on a cutting device is used to cut a silicon rod, and water needs to be sprayed on the silicon rod during the cutting process. However, the working environment in the cutting device is relatively complex, and with the vibration of the cutting device, foreign matters are likely to enter the diamond wire of the cutting device along with the water flow, affecting the normal work of the diamond wire. CONTENT OF THE UTILITY MODEL

[0003] The utility model aims to overcome the technical problem that foreign matters may enter the diamond wire of the cutting device along with the water flow when the silicon rod is cut. Another object of the utility model is to provide a cutting device.

[0004] TECHNICAL SCHEME The shielding device provided in the utility model is used for shielding the flow channel of the cutting device, and comprises:

[0005] A connecting piece is detachably connected to the device.

[0006] A first plate piece is located on one side of the connecting piece and connected to the connecting piece, and is used for shielding the flow channel.

[0007] A second plate piece is located on the side of the first plate piece away from the connecting piece and connected to the first plate piece, and the second plate piece and the first plate piece enclose a containing space.

[0008] In some embodiments, the shielding device comprises:

[0009] A third plate piece is located on the side of the second plate piece away from the first plate piece and connected to the second plate piece, and the included angle between the third plate piece and the second plate piece is α, and 90°≤α≤180° is satisfied.

[0010] In some embodiments, the shielding device comprises a plurality of blocking components, the plurality of blocking components are arranged on the side of the first plate piece away from the flow channel, the plurality of blocking components are arranged at intervals along a first direction, and two adjacent blocking components are arranged at intervals along the first direction.

[0011] The blocking component comprises a plurality of blocking parts, and the plurality of blocking parts are arranged at intervals along a second direction.

[0012] The first direction intersects the second direction.

[0013] In some embodiments, the blocking part is a convex structure or a groove structure.

[0014] In some embodiments, the first plate includes:

[0015] A planar portion is located on one side of the connector and connected to the connector, and the planar portion extends in the horizontal direction;

[0016] The curved part is located on the side of the flat part opposite to the connector and is connected to the flat part.

[0017] In some embodiments, the first plate includes:

[0018] The flanged portion is located on the side of the curved surface that is opposite to the flat surface and is connected to the curved surface. The extension direction of the flanged portion is the same as the extension direction of the second plate. The second plate is detachably connected to the flanged portion.

[0019] In some embodiments, the first plate further includes:

[0020] An assembly part is located on the side of the flanged part away from the curved surface and is connected to the flanged part. The assembly part has an assembly groove in which a portion of the second plate is embedded.

[0021] In some embodiments, the first plate further includes:

[0022] The magnetic suction part is located inside the assembly groove and is connected to the bottom wall of the assembly groove. The magnetic suction part is magnetically connected to the second plate.

[0023] In some embodiments, the cutting device has a snap-fit ​​element, and the connector has a slot that mates with the snap-fit ​​element.

[0024] A cutting device comprising the shielding device described in any one of the above descriptions.

[0025] Beneficial Effects: The shielding device of this application embodiment is used to shield the flow channel of the cutting equipment. The shielding device includes: a connector, detachably connected to the equipment; a first plate, located on one side of the connector and connected to the connector, used to shield the flow channel; and a second plate, located on the side of the first plate away from the connector and connected to the first plate. The second plate and the first plate together form a receiving space. The first plate is positioned above the flow channel, which can shield the flow channel without interfering with the flow pattern and direction of the liquid in the flow channel. When the cutting equipment vibrates during operation, foreign objects and impurities attached to the top of the cutting chamber may fall down. By installing the first plate, the falling foreign objects and impurities can be blocked, preventing them from falling into the flow channel and preventing them from flowing into the diamond wire with the liquid in the flow channel, thus ensuring the normal operation of the diamond wire. At the same time, the receiving space enclosed by the first and second plates can block and store these foreign objects, facilitating the unified disposal of foreign objects in the receiving space by the operator after the cutting work is completed. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the connection between the shielding device and the cutting equipment in an embodiment of this application;

[0028] Figure 2 This is a schematic diagram of the shielding device according to an embodiment of this application, wherein the included angle α is less than ninety degrees;

[0029] Figure 3 This is a perspective view of the shielding device according to an embodiment of this application;

[0030] Figure 4 This is a top view of the first plate component according to an embodiment of this application;

[0031] Figure 5 This is a schematic diagram of the structure of the blocking component in an embodiment of this application;

[0032] Figure 6 This is a schematic diagram of the shielding device according to an embodiment of this application, wherein the included angle α is between 90 degrees and 180 degrees;

[0033] Figure 7 Examples of this application Figure 6 A structural diagram of area A, in which the second plate is connected to the flanged part by bolts;

[0034] Figure 8 Examples of this application Figure 6 A structural diagram of area A, in which the second plate is connected to the flanged part through an assembly part;

[0035] Reference numerals: 10-Connector; 11-Slot; 20-First plate; 21-Flat surface; 22-Curved surface; 23-Flanged edge; 24-Assembly part; 241-Assembly slot; 25-Magnetic suction part; 30-Second plate; 40-Accommodation space; 50-Third plate; 60-Blocking assembly; 61-Blocking part; 70-Cutting equipment; 71-Flow channel; 72-Snap-fit; X-First direction; Y-Second direction. Detailed Implementation

[0036] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0037] In the description of this application, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, and "at least one" can mean one, two, or more, unless otherwise explicitly specified.

[0038] During silicon wafer production, diamond wire is used to cut silicon rods on cutting equipment. During the cutting process, water is sprayed onto the silicon rods using a nozzle. However, the working environment inside the cutting equipment is quite complex. Silicon sludge or inconspicuous steel wire ends and other debris often accumulate on the surface of the top of the cutting chamber and near the feed table. During the cutting process, due to machine vibration or the impact of splashing cutting fluid, silicon sludge, steel wire ends and other debris fall into the flow channel of the nozzle. As the liquid in the flow channel flows into the diamond wire mesh, it causes frequent skipping of the diamond wire, thereby increasing the risk of defective products.

[0039] In view of the above, embodiments of this application provide a shielding device to overcome at least one of the above-mentioned technical problems.

[0040] Please see Figure 1 and Figure 3 In this embodiment of the application, the shielding device includes a shielding device for shielding the flow channel 71 of the cutting equipment 70. The shielding device includes a connector 10, a first plate 20, and a second plate 30.

[0041] The connector 10 is detachably connected to the device. The first plate 20 is located on one side of the connector 10 and connected to the connector 10, and is used to shield the flow channel 71. The second plate 30 is located on the side of the first plate 20 away from the connector 10 and is connected to the first plate 20. The second plate 30 and the first plate 20 enclose and form an accommodating space 40.

[0042] It can be understood that, since the liquid sprayed from the nozzle on the cutting device 70 forms a flow channel on the cutting device 70, a shielding device can be installed above the flow channel to shield it. The shielding device is connected to the cutting device 70 via the connector 10, allowing the shielding device to be installed on the cutting device 70. The main body of the shielding device consists of a first plate 20 and a second plate 30 connected together. The first plate 20 is also connected to the connector 10, allowing the first plate 20 and the second plate 30 to be installed on the cutting device 70. The first plate 20 is positioned above the flow channel 71, shielding the flow channel 71 and preventing interference with the flow pattern and direction of the liquid in the flow channel 71. When the cutting device 70 vibrates during operation, foreign objects and impurities attached to the top of the cutting chamber may fall down. By installing the first plate 20, the falling foreign objects and impurities can be blocked, preventing them from falling into the flow channel 71. Figure 1 The lines with arrows indicate the flow direction of the liquid in the flow channel 71, preventing foreign objects from flowing into the diamond wire along with the liquid in the flow channel 71, thus ensuring the normal operation of the diamond wire. Simultaneously, a second plate 30 is provided on the side of the first plate 20 away from the connector 10. The extension direction of the second plate 30 intersects the extension direction of the first plate 20 and extends away from the flow channel 71, allowing the second plate 30 and the first plate 20 to enclose and form a receiving space 40. When foreign objects fall from the top of the cutting chamber, they will fall onto the first plate 20. Under the influence of gravity, these foreign objects will slide to the bottom of the first plate 20 and be blocked by the second plate 30. At this point, the foreign objects are located within the receiving space 40. The receiving space 40 can block and store these foreign objects, preventing them from sliding down the upper surface of the first plate 20, ensuring the concentration of these foreign objects, and facilitating the unified treatment of the foreign objects in the receiving space 40 by the staff after the cutting work is completed, and cleaning the foreign objects out from the left and right sides of the receiving space 40.

[0043] Please see Figure 1 and Figure 2 In conjunction with the above embodiments, in some embodiments, the shielding device includes a third plate 50. The third plate 50 is located on the side of the second plate 30 opposite to the first plate 20 and is connected to the second plate 30. The included angle between the third plate 50 and the second plate 30 is α, which satisfies 90°≤α≤180°.

[0044] It is understandable that a third plate 50 is provided on the side of the second plate 30 away from the first plate 20. The angle α between the extending direction of the third plate 50 and the extending direction of the second plate 30 is between 90 degrees and 180 degrees. Within this range, the third plate 50 can further block falling foreign objects. When the angle α is less than 90 degrees, the third plate 50 will block the top of the second plate 30, causing the top of the second plate 30 to lose its function of blocking foreign objects. In this case, if a foreign object falls on the top of the third plate 50, it will slide along the top surface of the third plate 50 and fall outside the blocking device. The top of the second plate 30 will no longer be able to block this part of the foreign object, causing it to fall into the receiving space 40. If the angle α is greater than 180 degrees, the blocking effect of the third plate 50 on foreign objects is weakened, and its use is not recommended. Therefore, when the included angle α is between 90 degrees and 180 degrees, the third plate 50 has a good function of blocking foreign objects. If the kinetic energy of the foreign object is too large, the third plate 50 can prevent the foreign object from rushing out of the receiving space 40.

[0045] Please see Figure 4 and Figure 5 In conjunction with the above embodiments, in some embodiments, the blocking device includes a plurality of blocking components 60, which are disposed on the side of the first plate 20 opposite to the flow channel 71. The plurality of blocking components 60 are arranged at intervals along a first direction X, and adjacent blocking components 60 are staggered along the first direction X. Each blocking component 60 includes a plurality of blocking parts 61, which are arranged at intervals along a second direction Y. The first direction X intersects the second direction Y; preferably, the first direction X and the second direction Y are perpendicular to each other.

[0046] It is understandable that multiple blocking components 60 are provided on the side of the first plate 20 away from the flow channel 71. The multiple blocking components 60 are arranged at intervals in the first direction X (which can be regarded as multiple blocking components 60 being arranged at intervals in the width direction of the first plate 20). That is, multiple blocking components 60 are provided on the surface of the first plate 20 that contacts the falling foreign object. When the foreign object slides along the surface of the first plate 20 under the action of gravity, it will come into contact with multiple blocking components 60, thereby being blocked and slowing down the sliding speed. Furthermore, in the multiple blocking components 60, adjacent blocking components 60 are staggered in the first direction X. Each blocking component 60 includes multiple blocking parts 61 arranged at intervals along the second direction Y (which can be regarded as multiple blocking parts 61 being spaced apart along the length direction of the first plate 20). This arrangement increases the probability of foreign objects contacting the blocking parts 61 when they slide on the first plate 20, thereby blocking the sliding foreign objects, reducing their kinetic energy, and thus reducing their sliding speed. This prevents them from being too fast and rushing out of the receiving space 40, which is beneficial for the receiving space 40 to collect these foreign objects and facilitate unified processing.

[0047] Please see Figure 4 and Figure 5 In conjunction with the above embodiments, in some embodiments, the blocking part 61 is a protruding structure or a groove structure.

[0048] Understandably, the blocking part 61 can be configured as a protruding structure, which can block the falling foreign object during its sliding process and reduce its sliding speed. The blocking part 61 can also be configured as a groove structure. During the sliding process, the foreign object may fall into the groove structure. It also needs to consume kinetic energy to rush out of the groove structure, which will also reduce the speed of the foreign object and prevent it from rushing out of the receiving space 40.

[0049] Please see Figure 1 and Figure 3 In conjunction with the above embodiments, in some embodiments, the first plate 20 includes a flat portion 21 and a curved portion 22.

[0050] The flat portion 21 is located on one side of the connector 10 and is connected to the connector 10. The flat portion 21 extends in the horizontal direction. The curved portion 22 is located on the side of the flat portion 21 opposite to the connector 10 and is connected to the flat portion 21. It can be understood that the flat portion 21 on the first plate 20 may extend in the horizontal direction, and the flat portion 21 is connected to the connector 10, which is located in... Figure 1Upstream of the flow channel 71, since the upstream position is relatively flat and flows roughly horizontally, the flat portion 21 can be designed as a flat plate and placed horizontally to shield the upstream position of the flow channel 71. Downstream of the flow channel 71 is curved, so the curved portion 22 of the first plate 20 is also designed as a curved structure to better match the downstream of the flow channel 71. This ensures that the first plate 20 and the flow channel 71 are at a suitable distance, preventing the first plate 20 from occupying too much space above the flow channel 71 and affecting the installation of other structures, thus ensuring the rational use of space.

[0051] Please see Figure 6 and Figure 7 In conjunction with the above embodiments, in some embodiments, the first plate 20 includes a flange 23. The flange 23 is located on the side of the curved surface 22 opposite to the flat surface 21 and is connected to the curved surface 22. The extending direction of the flange 23 is the same as the extending direction of the second plate 30, and the second plate 30 is detachably connected to the flange.

[0052] Understandably, a flange 23 is also provided on the first plate 20. The flange 23 is located on the side of the curved surface 22 near the second plate 30. The flange 23 can be bent towards the flow channel 71 or away from the flow channel 71, as long as it is convenient to connect the flange 23 to the second plate 30. The flange 23 and the second plate 30 are detachably connected, such as by a snap-fit ​​connection, bolt connection, or other detachable structure, which makes it easy to disassemble the second plate 30 for maintenance and cleaning (after long-term use of the device, a lot of impurities and foreign objects will accumulate in the accommodating space 40, and the corner space of the accommodating space 40 is small and inconvenient to clean). The detachable design of the second plate 30 makes it easy to separate the second plate 30 from the first plate 20 for cleaning.

[0053] Please see Figure 6 and Figure 8 In conjunction with the above embodiments, in some embodiments, the first plate 20 further includes an assembly portion 24. The assembly portion 24 is located on the side of the flange portion 23 away from the curved surface portion 22 and is connected to the flange portion 23. The assembly portion 24 has an assembly groove 241 in which a portion of the second plate 30 is embedded.

[0054] Understandably, the mounting portion 24 can be connected to the side of the flanged portion 23 away from the curved portion 22, thereby increasing the overall length of the shielding device and shielding a larger area on the flow channel 71. A mounting groove 241 is provided on the mounting portion 24, the internal structural dimensions of which are adapted to the bottom structural dimensions of the second plate 30, allowing the bottom of the second plate 30 to be embedded into the mounting groove 241, thus completing the installation of the second plate 30. This structure facilitates the removal of the second plate 30 from the first plate 20 for cleaning.

[0055] Please see Figure 6 and Figure 8 In conjunction with the above embodiments, in some embodiments, the first plate 20 further includes a magnetic suction part 25, which is located in the assembly groove 241 and connected to the bottom wall or side wall of the assembly groove 241. The magnetic suction part 25 is magnetically connected to the second plate 30.

[0056] It is understandable that a magnetic suction part 25 can be provided inside the assembly slot 241. The magnetic suction part 25 can be a magnet, and the second plate 30 can be an iron component. After the bottom of the second plate 30 is embedded into the assembly slot 241, the magnetic suction part 25 is magnetically connected to the second plate 30, so that the second plate 30 and the first plate 20 can be detachably connected. At the same time, it can also improve the stability of the installation of the second plate 30 and prevent it from easily sliding out of the assembly slot 241.

[0057] Please see Figure 1 and Figure 2 In conjunction with the above embodiments, in some embodiments, the cutting device 70 has a snap-fit ​​member 72, and the connector 10 has a slot 11 that mates with the snap-fit ​​member 72.

[0058] It is understandable that snap-fit ​​parts 72 (which can be thin metal plate structures) can be provided on both sides of the liquid flow direction inside the flow channel 71. A slot 11 that mates with the snap-fit ​​parts 72 is provided on the connector 10. When installing the shielding device, the shielding device can be placed above the flow channel 71 so that the snap-fit ​​parts 72 on the cutting equipment 70 can be embedded into the slot 11. Through the supporting effect of the snap-fit ​​parts 72, the shielding device can be quickly installed on the cutting equipment 70, saving installation time and facilitating disassembly, thus improving disassembly and assembly efficiency.

[0059] A cutting device 70 includes the aforementioned shielding device. All the technical features and beneficial effects of the shielding device in the cutting device 70 will not be repeated here.

[0060] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0061] The shielding device and cutting equipment provided in the embodiments of this application have been described in detail above, and specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the technical solutions and core ideas of this application. Those skilled in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A shielding device, characterized in that, The shielding device is used to block the flow channel (71) of the cutting device (70), the shielding device comprising: Connector (10), detachably connected to the device; The first plate (20) is located on one side of the connector (10) and connected to the connector (10) for shielding the flow channel (71); The second plate (30) is located on the side of the first plate (20) away from the connector (10) and is connected to the first plate (20). The second plate (30) and the first plate (20) enclose and form an accommodating space (40).

2. The shielding device according to claim 1, characterized in that, The shielding device includes: The third plate (50) is located on the side of the second plate (30) away from the first plate (20) and is connected to the second plate (30). The included angle between the third plate (50) and the second plate (30) is α, which satisfies 90°≤α≤180°.

3. The shielding device according to claim 1, characterized in that, The shielding device includes a plurality of blocking components (60), which are disposed on the side of the first plate (20) away from the flow channel (71). The plurality of blocking components (60) are arranged at intervals along a first direction (X), and two adjacent blocking components (60) are staggered along the first direction (X). The blocking assembly (60) includes a plurality of blocking portions (61), which are spaced apart along a second direction (Y). The first direction (X) intersects with the second direction (Y).

4. The shielding device according to claim 3, characterized in that, The blocking part (61) is a protruding structure or a groove structure.

5. The shielding device according to claim 1, characterized in that, The first plate (20) includes: A planar portion (21) is located on one side of the connector (10) and connected to the connector (10), the planar portion (21) extending in the horizontal direction; The curved part (22) is located on the side of the flat part (21) away from the connector (10) and is connected to the flat part (21).

6. The shielding device according to claim 5, characterized in that, The first plate (20) includes: The flange (23) is located on the side of the curved surface (22) away from the flat surface (21) and is connected to the curved surface (22). The extension direction of the flange (23) is the same as the extension direction of the second plate (30). The second plate (30) is detachably connected to the flange.

7. The shielding device according to claim 6, characterized in that, The first plate (20) also includes: Assembly part (24) is located on the side of the flanged part (23) away from the curved part (22) and is connected to the flanged part (23). Assembly part (24) has an assembly groove (241) in which part of the second plate (30) is embedded.

8. The shielding device according to claim 7, characterized in that, The first plate (20) also includes: The magnetic part (25) is located in the assembly groove (241) and is connected to the bottom wall of the assembly groove (241). The magnetic part (25) is magnetically connected to the second plate (30).

9. The shielding device according to claim 1, characterized in that, The cutting device (70) has a snap-fit ​​member (72), and the connector (10) has a slot (11) that mates with the snap-fit ​​member (72).

10. A cutting device (70), characterized in that, Includes the shielding device as described in any one of claims 1 to 9.

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