Sealing device, reacting furnace and photovoltaic material processing equipment

Abstract

The utility model discloses a sealing device, a reaction furnace and photovoltaic material processing equipment. The sealing device comprises an outer flange, an inner flange, a first sealing piece, a first connecting piece and a second connecting piece. And the outer flange and the inner flange are oppositely arranged. The first sealing piece is arranged between the outer flange and the inner flange. One end of the first connecting piece is fixedly connected with a rack of the heat furnace, the other end of the first connecting piece penetrates through the inner flange and is fixedly connected with the outer flange, and the inner flange and the first connecting piece are movably arranged relatively. The second connecting piece is connected with the inner flange and the outer flange, exerts acting force on the inner flange and drives the inner flange to move close to the outer flange relative to the first connecting piece. According to the sealing device, the inner flange is movably arranged relative to the outer flange and the first connecting piece, the distance between the inner flange and the outer flange is adjusted through the second connecting piece, the interaction force between the first sealing piece and the outer flange and the interaction force between the first sealing piece and the inner flange are kept, and therefore the sealing performance of the sealing device is kept.

Description

Technical Field

[0001] This application relates to the field of photovoltaic manufacturing equipment, and more particularly to a sealing device, a reactor, and photovoltaic material processing equipment. Background Technology

[0002] The processing of semiconductor or photovoltaic materials usually involves feeding sheet materials into a reactor and reacting them under certain temperature and low pressure conditions. The reactor must form a closed low-pressure chamber, and the sealing state of the reactor plays a crucial role.

[0003] Conventional reactors use flanges to seal the furnace door. However, the seals on the flanges are prone to softening when heated, which reduces the sealing performance of the flanges and causes gas leakage in the reactor. Utility Model Content

[0004] In view of this, this application provides a sealing device that solves the problem of reduced sealing performance caused by the softening of the sealing element due to heat.

[0005] This application provides a sealing device, comprising: an outer flange, an inner flange, a first sealing element, a first connecting element, and a second connecting element. The outer flange has a first end and a second end opposite to each other, the first end being configured to contact a furnace door. The inner flange is located on one side of the second end of the outer flange. The first sealing element is disposed between the outer flange and the inner flange, and contacts both the inner and outer flanges. The first connecting element extends axially along the outer flange, and has two opposite ends. One end of the first connecting element is configured to be fixedly connected to the frame of the furnace, and the other end of the first connecting element is configured to pass through the inner flange and be fixedly connected to the outer flange. The inner flange and the first connecting element are movably disposed relative to each other along the extending direction of the first connecting element. The second connecting element extends from the first end to the second end, and is connected to both the inner and outer flanges. The second connecting element is configured to apply a force to the inner flange and drive the inner flange to move relative to the first connecting element closer to the outer flange.

[0006] In the above embodiments, the inner flange is movably disposed relative to the outer flange and the first connecting member. The distance between the inner flange and the outer flange is adjusted by the second connecting member to maintain the interaction force between the first sealing member and the outer flange and the inner flange, thereby maintaining the sealing performance of the sealing device.

[0007] In some embodiments, the second connector includes a screw and a nut. The screw extends from a first end to a second end, one end of the screw is connected to the nut, and the other end of the screw has threads. The screw is configured to pass through the outer flange from the first end to the second end and be threadedly connected to the inner flange. The screw is movably disposed relative to the outer flange. The nut is configured to contact the side of the outer flange away from the inner flange. The screw is configured to move the inner flange closer to the outer flange through threaded action. And / or the screw is configured to pass through the inner flange from the second end to the first end and be threadedly connected to the outer flange. The screw is movably disposed relative to the inner flange. The nut is configured to apply a force to the side of the inner flange away from the outer flange and move the inner flange closer to the outer flange.

[0008] In some embodiments, the sealing device further includes an elastic element located between the nut and the inner flange, the elastic element contacting both the nut and the inner flange respectively. Alternatively, the elastic element is located between the nut and the outer flange, the elastic element contacting both the nut and the outer flange respectively.

[0009] In some embodiments, the first connector includes a threaded hole located at one end of the first connector facing the outer flange, the outer flange being configured to be connected to the first connector by a connecting bolt that mates with the threaded hole.

[0010] In some embodiments, the first connector includes a boss configured to contact the side of the inner flange away from the outer flange.

[0011] In some embodiments, the inner flange and / or the outer flange are respectively provided with a first cooling channel, and a first cooling medium flows through the first cooling channel.

[0012] A reactor includes a furnace tube, a furnace door, and a sealing device as described above. The axis of the furnace tube is parallel to the direction from a first end to a second end. The furnace tube includes a furnace tail, a furnace mouth, and a fixing part arranged opposite each other along the axis of the furnace tube. The fixing part is located on the outer side of the furnace tube in the radial direction and is closer to the furnace mouth than the furnace tail. A first sealing element can be fitted onto the outer side of the furnace tube. An inner flange has a first receiving space, a second receiving space, and a slope. Both the first and second receiving spaces are used to receive a portion of the furnace tube. Along the axial direction of the furnace tube, the second receiving space is closer to the outer flange than the first receiving space. The second receiving space is also used to receive at least a portion of the first sealing element. The second receiving space is connected to the outer flange and the furnace tube. The slope is connected to the side wall of the second receiving space and the side wall of the first receiving space, respectively, and faces both the outer flange and the furnace tube. The slope supports the first sealing element towards the furnace tube and the outer flange. The furnace door is configured to cover the furnace mouth and contact the side of the outer flange away from the inner flange.

[0013] In some embodiments, the outer flange has a protrusion extending toward the second receiving space, the protrusion being configured to act toward the first seal toward the ramp.

[0014] In some embodiments, the reactor further includes a second seal located between the furnace door and the outer flange. The furnace door has a mounting groove facing the outer flange for accommodating the second seal. The outer flange has a second cooling channel containing a second cooling medium.

[0015] A photovoltaic material processing device includes a frame and a reaction furnace as described above, wherein the furnace tube and a first connector are respectively connected to the frame. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of a portion of the structure of a photovoltaic material processing equipment provided in an embodiment of this application.

[0017] Figure 2 for Figure 1 A schematic diagram after being cut along section line II-II.

[0018] Figure 3 for Figure 2 A schematic diagram of its breakdown.

[0019] Figure 4 for Figure 2 An enlarged schematic diagram of point A.

[0020] Figure 5 for Figure 3 A schematic diagram of the second connector.

[0021] Explanation of main component symbols

[0022] 10. Reactor; 11. Furnace tube; 111. Furnace opening; 112. Furnace tail; 113. Fixing part; 12. Sealing device; 121. Inner flange; 1211. First cooling channel; 1212. First receiving space; 1213. Second receiving space; 1214. Inclined surface; 122. Outer flange; 1221. Protrusion; 1222. Second cooling channel; 123. First connecting piece; 1231. Threaded hole; 1232. Boss; 124. Second connecting piece; 1241. Screw; 1242. Nut; 125. First sealing element; 13. Furnace door; 131. Mounting groove; 14. Second sealing element; 20. Frame. Detailed Implementation

[0023] The technical solutions of the embodiments of this application will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0024] It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or may also have an intervening component. When a component is considered to be "placed" on another component, it can be directly placed on the other component or may also have an intervening component. The terms "top," "above," "below," "front," "back," and similar expressions used in this article are for illustrative purposes only.

[0025] The terms “first”, “second”, etc., are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implying the quantity, specific order, or primary and secondary relationship of the indicated technical features.

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0027] Some embodiments of this application will now be described with reference to the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0028] In some embodiments, please refer to Figure 1 This application discloses a photovoltaic material processing equipment (not labeled), including a frame 20 and a reactor 10. The reactor 10 is fixedly mounted on the frame 20, and semiconductor or photovoltaic materials are processed by reaction in the reactor 10, thereby realizing the function of this photovoltaic material processing equipment in processing photovoltaic materials.

[0029] In some embodiments, the number of reactors 10 is two or more, and all reactors 10 are fixedly connected to the frame 20, so that each reactor 10 performs reaction processing on semiconductor or photovoltaic materials, thereby improving the production efficiency of photovoltaic material processing equipment.

[0030] In some embodiments, please refer to Figure 2 and Figure 3 The reactor 10 includes a furnace tube 11, a sealing device 12, and a furnace door 13. The furnace tube 11 is fixedly connected to the frame 20. Along the axial direction of the furnace tube 11, the furnace tube 11 has a furnace opening 111 and a furnace tail 112. The sealing device 12 is located on the part of the furnace tube 11 near the furnace opening 111. The furnace door 13 is covered by the sealing device 12 to seal the furnace opening 111, thereby achieving the effect of sealing the furnace tube 11.

[0031] In addition, the furnace door 13 contacts the sealing device 12 to reduce the risk of damage to the furnace tube 11 due to repeated opening and closing of the furnace door 13.

[0032] In some embodiments, please refer to Figure 3 and Figure 4 The sealing device 12 includes an outer flange 122, an inner flange 121, and a first sealing element 125. The inner flange 121 is sleeved on the outside of the furnace tube 11. In the axial direction of the furnace tube 11, the outer flange 122 has a first end (unmarked) and a second end (unmarked) opposite each other. The outer flange 122 is fixed relative to the furnace tube 11. The first end of the outer flange 122 contacts the furnace door 13 to achieve the furnace door 13 covering the furnace tube 11. The first sealing element 125 is provided between the second end of the outer flange 122 and the inner flange 121. The outer flange 122 and the inner flange 121 jointly apply pressure to the first sealing element 125 to improve the sealing performance between the outer flange 122 and the inner flange 121.

[0033] When the reactor 10 is heated, the heat is transferred to the first seal 125, causing the temperature of the first seal 125 to rise and soften. At this time, the pressure between the outer flange 122 and the inner flange 121 decreases, and the sealing effect of the first seal 125 decreases.

[0034] In some embodiments, please refer to Figure 3 and Figure 4 The sealing device 12 also includes a first connecting member 123 and a second connecting member 124. The first connecting member 123 has two opposing ends along the axial direction of the furnace tube 11. One end of the first connecting member 123 is fixedly connected to the frame 20, and the other end of the first connecting member 123 movably passes through the inner flange 121 and is fixedly connected to the second end of the outer flange 122. The inner flange 121 is fixedly connected to the outer flange 122 through the second connecting member 124. During installation, since the outer flange 122 is connected to the first connecting member 123 and the inner flange 121 is connected to the outer flange 122, the second connecting member 124 pushes the inner flange 121 toward the outer flange 122, and when the inner flange 121 and the outer flange 122 jointly clamp the first sealing member 125, the inner flange 121, the first sealing member 125, and the outer flange 122 are all fixed relative to the furnace tube 11. After the reactor 10 has been working for a certain period of time, the inner flange 121 is moved by the second connecting member 124 to adjust the distance between the inner flange 121 and the outer flange 122, so as to maintain the force exerted by the outer flange 122 and the inner flange 121 on the first sealing member 125, thereby maintaining the sealing performance of the first sealing member 125 and helping to reduce the risk of leakage of the sealing device 12 due to the first sealing member 125 softening due to heat.

[0035] In addition, compared to the method that requires disassembling the furnace door 13 to move the outer flange 122 closer to the inner flange 121 so that the outer flange 122 and the inner flange 121 together clamp the first sealing member 125, by operating the second connecting member 124, not only can the sealing device 12 be kept sealed, but the furnace door 13 can also be kept sealed to the furnace tube 11 without operating the outer flange 122 and the furnace door 13.

[0036] In some embodiments, the inner flange 121 is provided with a first through hole (not identified) along the axial direction of the furnace tube 11, the first through hole being used to accommodate a portion of the first connector 123.

[0037] In some embodiments, please refer to Figure 5 The second connecting member 124 includes a screw 1241 and a nut 1242. The screw 1241 extends axially along the furnace tube 11. One end of the screw 1241 is fixedly connected to the nut 1242, and the other end of the screw 1241 is threaded. When installing the screw 1241, the threaded end of the screw 1241 passes through the inner flange 121 and is threadedly connected to the outer flange 122. The nut 1242 contacts the side of the inner flange 121 away from the outer flange 122. By tightening the screw 1241 and applying the nut 1242 to the inner flange 121, the inner flange 121 is pushed towards the outer flange 122, thereby achieving the joint clamping of the first sealing member 125 by the inner flange 121 and the outer flange 122. After the reactor 10 has been working for a certain period of time, the first sealing element 125 softens due to heat. Continue to tighten the screw 1241 so that the nut 1242 continues to push the inner flange 121 toward the outer flange 122, thereby reducing the distance between the inner flange 121 and the outer flange 122. This helps to maintain the state in which the inner flange 121 and the outer flange 122 jointly clamp the first sealing element 125, which helps to maintain the sealing effect of the first sealing element 125.

[0038] In other embodiments, when installing the screw 1241, the threaded end of the screw 1241 passes through the outer flange 122 and is threadedly connected to the inner flange 121. The nut 1242 contacts the side of the outer flange 122 away from the inner flange 121. By tightening the screw 1241, the screw 1241 pulls the inner flange 121 towards the outer flange 122 through the thread action, thereby achieving the inner flange 121 and the outer flange 122 jointly clamping the first sealing element 125. After the reactor 10 has been operating for a certain period, the first sealing element 125 softens due to heat. Continuing to tighten the screw 1241 further pulls the inner flange 121 towards the outer flange 122, reducing the distance between the inner flange 121 and the outer flange 122, and maintaining the state where the inner flange 121 and the outer flange 122 jointly clamp the first sealing element 125.

[0039] In some embodiments, there are multiple second connectors 124, and all the second connectors 124 are distributed in a ring along the circumferential direction of the furnace tube 11 to improve the uniformity of the second connectors 124 acting on the inner flange 121.

[0040] Similarly, there are multiple first connectors 123, which are distributed in a ring along the circumference of the furnace tube 11.

[0041] In some embodiments, the first connector 123 and the second connector 124 are distributed alternately along the circumferential direction of the furnace tube 11.

[0042] In some embodiments, the screws 1241 of all the second connectors 124 pass through the inner flange 121, or the screws 1241 of all the second connectors 124 pass through the outer flange 122, or at least one screw 1241 of the second connectors 124 passes through the inner flange 121, and the remaining screws 1241 of the second connectors 124 pass through the outer flange 122.

[0043] In some embodiments, the inner flange 121 and / or the outer flange 122 are respectively provided with a second through hole (not marked) along the axial direction of the furnace tube 11. The second through hole is used to accommodate a portion of the screw 1241.

[0044] In some embodiments, along the axial direction of the furnace tube 11, the end face of the nut 1242 away from the screw 1241 is provided with a slotted groove or a cross groove (not identified). A third through hole (not identified) is provided on the frame 20 along the axial direction of the furnace tube 11. The third through hole is aligned with the second through hole on the inner flange 121, thereby facilitating the complete passage of the second connector 124 through the third through hole through the frame 20, allowing the screw 1241 of the second connector 124 to pass through the inner flange 121, and allowing a screwdriver corresponding to the nut 1242 to pass through the frame 20 and act on the nut 1242, causing the screwdriver to rotate the nut 1242, thereby connecting the inner flange 121 to the outer flange 122 via the second connector 124.

[0045] In some embodiments, the sealing device 12 further includes an elastic element (not shown), which is disposed between the nut 1242 and the inner flange 121. When the nut 1242 pushes the inner flange 121 toward the outer flange 122, the nut 1242 also compresses the elastic element. When the first sealing element 125 softens due to heat, the elastic element generates an elastic force on the inner flange 121, so that the inner flange 121 continues to push the first sealing element 125 toward the outer flange 122, thereby maintaining the sealing effect of the first sealing element 125. Alternatively, an elastic element may be disposed between the nut 1242 and the outer flange 122. When the screw 1241 pulls the inner flange 121 toward the outer flange 122, the screw 1241 also drives the nut 1242 to compress the elastic element. When the first sealing element 125 softens due to heat, the elastic element generates an elastic force on the nut 1242, so that the nut 1242 moves away from the outer flange 122, and the nut 1242 synchronously drives the screw 1241 to move, so that the screw 1241 continues to pull the inner flange 121 toward the outer flange 122.

[0046] In some embodiments, the elastic element is a spring or a heat-resistant elastic material such as rubber. The screw 1241 may also pass through the elastic element.

[0047] In other embodiments, the second connector 124 is a first thread (not shown) on the inner flange 121 facing the outer flange 122. The outer flange 122 has a second thread (not shown) that mates with the first thread on the side facing the inner flange 121. Both the first and second threads pass through the first seal 125. By rotating the inner flange 121, the first and second threads are connected to each other until the inner flange 121 and outer flange 122 are interlocked and tightened, at which point the inner flange 121 and outer flange 122 together clamp the first seal 125. After the reactor 10 has reacted for a certain period of time, the inner flange 121 is tightened further, so that the inner flange 121 and outer flange 122 continue to clamp the first seal 125.

[0048] In other embodiments, the second connector 124 is a multi-claw puller or a multi-stage snap-fit ​​structure (not shown). The second connector 124 is fixed to the frame 20 and is located outside the inner flange 121 along the radial direction of the furnace tube 11. By pulling (or pushing) the inner flange 121 towards the outer flange 122 through the second connector 124, or by using external force to push the inner flange 121 towards the outer flange 122 and causing the second connector 124 to lock the inner flange 121, the inner flange 121 can push the first sealing element 125 towards the outer flange 122, and the inner flange 121 and the outer flange 122 can jointly clamp the first sealing element 125.

[0049] In some embodiments, the inner flange 121 is slidably connected to the first connector 123.

[0050] In other embodiments, there is a gap between the inner flange 121 and the first connector 123 (i.e., the inner flange 121 and the first connector 123 do not contact each other), and the inner flange 121 is connected to the first connector 123 through the second connector 124 and the outer flange 122 to reduce the heat transfer along the first connector 123 to the inner flange 121.

[0051] In some embodiments, the inner flange 121 is provided with a first cooling channel 1211, in which a first cooling medium (not shown) flows. The first cooling medium absorbs the heat of the first seal 125, thereby cooling the first seal 125, reducing the risk of the first seal 125 softening due to heat, and helping to extend the service life of the first seal 125.

[0052] In some embodiments, the first connector 123 includes a threaded hole 1231, which is located on the side of the first connector 123 facing the outer flange 122 along the axial direction of the furnace tube 11. During installation, a connecting bolt (not shown) is threaded through the outer flange 122 and connected to the first connector 123. When it is necessary to disassemble the outer flange 122, the connecting bolt is unscrewed from the first connector 123, thereby achieving the effect of detachable connection between the outer flange 122 and the first connector 123.

[0053] In some embodiments, from the tail of the furnace 112 to the furnace opening 111, the first connector 123 extends to the outside of the furnace opening 111 on the side facing the outer flange 122. The first connector 123 limits the outer flange 122 so that there is a gap between the outer flange 122 and the furnace opening 111 in the axial direction of the furnace tube 11. This helps to reduce the risk of the outer flange 122 contacting the end face of the furnace opening 111 and damaging the furnace tube 11.

[0054] In some embodiments, please refer to Figure 4The furnace tube 11 also includes a fixing part 113, which is located on the outer side of the furnace tube 11 along the radial direction. The fixing part 113 is closer to the furnace opening 111 than the furnace tail 112. The inner flange 121 and the outer flange 122 are located on both sides of the fixing part 113 along the axial direction of the furnace tube 11. The inner flange 121 is provided with a first receiving space 1212, a second receiving space 1213 and an inclined surface 1214. The first receiving space 1212 and the second receiving space 1213 are both used to receive a part of the tube body of the furnace tube 11 and the fixing part 113. Along the axial direction of the furnace tube 11, the second receiving space 1213 is closer to the outer flange 122 than the first receiving space 1212. The second receiving space 1213 is also used to receive at least a part of the first sealing element 125. The inclined surface 1214 is connected to the side wall of the second receiving space 1213 and the side wall of the first receiving space 1212 respectively. The inclined surface 1214 faces both the outer flange 122 and the furnace tube 11. During installation, the first seal 125 is fitted onto the outside of the fixing part 113, and at least a portion of the first seal 125 is disposed within the second receiving space 1213, so that the first seal 125 is limited by the second receiving space 1213, thereby improving the stability of the first seal 125 between the outer flange 122 and the inner flange 121. During the connection between the outer flange 122 and the inner flange 121, the outer flange 122 and the inner flange 121 move relative to each other along the axial direction of the furnace tube 11, and the gap between the outer flange 122 and the inner flange 121 gradually decreases until the outer flange 122 acts on the first sealing element 125 along the axial direction of the furnace tube 11, and the first sealing element 125 is pressed against the inclined surface 1214. Under the reaction action of the inclined surface 1214, the first sealing element 125 is pressed against the surface of the fixed part 113 along the radial direction of the furnace tube 11, thereby realizing that the first sealing element 125 simultaneously seals the inner flange 121, the outer flange 122 and the furnace tube 11, improving the sealing performance between the inner flange 121, the outer flange 122 and the furnace tube 11.

[0055] In some embodiments, please refer to Figure 4The outer flange 122 has a protrusion 1221 extending towards the inner flange 121. During installation, the outer flange 122 and the inner flange 121 approach each other, and the protrusion 1221 extends into the first receiving space 1212 and acts on the first seal 125 towards the inclined surface 1214. When the first seal 125 is completely located within the first receiving space 1212, the inner flange 121 and the furnace tube 11 limit the first seal 125, thereby improving the accuracy of the installation of the first seal 125. Meanwhile, the protrusion 1221 extends into the first receiving space 1212 to improve the accuracy of the outer flange 122 acting on the first seal 125 towards the inclined surface 1214, and also helps to reduce the contact area between the outer flange 122 and the first seal 125, thereby helping to increase the pressure between the outer flange 122 and the first seal 125, and further reducing the gap between the outer flange 122 and the first seal 125, and improving the fit between the outer flange 122 and the first seal 125.

[0056] In other embodiments, when the furnace tube 11 does not have a fixing part 113, the reactor 10 also includes a third sealing element (not shown), which is located inside the inner flange 121 and between the inner flange 121 and the furnace tube 11, so as to achieve the effect of sealing the sealing device 12 with the furnace tube 11.

[0057] In some embodiments, the first connector 123 includes a boss 1232 located on the side of the inner flange 121 away from the outer flange 122. During installation, the inner flange 121 is movably fitted onto the first connector 123, and the inner flange 121 contacts the end face of the boss 1232, thereby limiting the inner flange 121 by the boss 1232, thus reducing the risk of the inner flange 121 being damaged due to contact with the frame 20.

[0058] In addition, when the inner flange 121 is provided with a first receiving space 1212, the inner flange 121 is positioned by the boss 1232 so that the fixing part 113 and the first sealing member 125 can both be located in the first receiving space 1212, and the first sealing member 125 is located between the inner flange 121 and the fixing part 113, thereby reducing the risk of the first sealing member 125 falling outward from the outer flange 122 towards the inner flange 121 in the first receiving space 1212.

[0059] In some embodiments, the second connector 124 is a bolt. The boss 1232 is provided to create a gap between the inner flange 121 and the frame 20, so that when the nut 1242 contacts the side of the inner flange 121 away from the outer flange 122, the nut 1242 can be operated through the gap to drive the screw 1241 to rotate.

[0060] In some embodiments, please refer to Figure 4The reactor 10 also includes a second seal 14, which is located between the furnace door 13 and the outer flange 122. The furnace door 13 has a mounting groove 131 facing the outer flange 122, which is used to accommodate the second seal 14. When the furnace door 13 closes the furnace opening 111, the second seal 14 seals the furnace door 13 and the outer flange 122, thereby improving the sealing performance between the furnace door 13 and the sealing device 12.

[0061] In some embodiments, please refer to Figure 4 The outer flange 122 is provided with a second cooling channel 1222, and a second cooling medium is provided in the second cooling channel 1222. The second cooling medium absorbs the heat of the first seal 125 and the second seal 14 on both sides of the outer flange 122, thereby helping to extend the service life of the first seal 125 and the second seal 14.

[0062] In some embodiments, along the axial direction of the furnace tube 11, the second cooling channel 1222 at least partially overlaps with the first seal 125 and / or the second seal 14, thereby helping to improve the cooling effect of the second cooling medium on the first seal 125 and / or the second seal 14.

[0063] In some embodiments, both the first cooling medium and the second cooling medium are cooling water, cooling oil, etc.

[0064] In some embodiments, the first seal 125, the second seal 14, and / or the third seal are sealing rings.

[0065] In other embodiments, the second seal 14 and / or the third seal are sealing gaskets, respectively.

[0066] In some embodiments, the reactor 10 further includes a buffer (not shown), which is located between the end face of the furnace opening 111 and the outer flange 122 along the axial direction of the furnace tube 11. Specifically, the buffer is a high-temperature resistant elastic member. When the outer flange 122 is connected to the first connecting member 123, the buffer cushions the outer flange 122, thereby reducing the risk of damage to the furnace tube 11 caused by collision between the outer flange 122 and the furnace tube 11.

[0067] Furthermore, those skilled in the art should recognize that the above embodiments are merely illustrative of this application and are not intended to limit this application. Any appropriate changes and variations made to the above embodiments within the substantive scope of this application fall within the scope of this application.

Claims

1. A sealing device for sealing the furnace door of a hot furnace, characterized in that, The sealing device includes: An outer flange having opposing first and second ends, the first end being configured to contact the furnace door; An inner flange, located on one side of the second end of the outer flange; A first sealing element is disposed between the outer flange and the inner flange, and the first sealing element contacts the inner flange and the outer flange respectively; A first connector extends along the axial direction of the outer flange. The first connector has two opposing ends. One end of the first connector is configured to be fixedly connected to the frame of the furnace. The other end of the first connector is configured to pass through the inner flange and connect to the outer flange. The inner flange is movably disposed relative to the first connector along the extension direction of the first connector. A second connector is connected to the inner flange and is configured to apply a force to the inner flange and move the inner flange relative to the first connector toward the outer flange.

2. The sealing device according to claim 1, characterized in that, The second connector includes a screw and a nut. The screw extends from the first end to the second end. One end of the screw is connected to the nut, and the surface of the other end of the screw is threaded. The screw is configured to pass through the outer flange from the first end to the second end and be threadedly connected to the inner flange. The screw is movably disposed relative to the outer flange. The nut is configured to contact the side of the outer flange away from the inner flange. The screw is configured to drive the inner flange closer to the outer flange through threaded action; and / or The screw is configured to pass through the inner flange from the second end to the first end and be threadedly connected to the outer flange. The screw is movably disposed relative to the inner flange. The nut is configured to apply a force to the side of the inner flange away from the outer flange and drive the inner flange to move closer to the outer flange.

3. The sealing device according to claim 2, characterized in that, The sealing device further includes an elastic element located between the nut and the inner flange, the elastic element contacting both the nut and the inner flange; or The elastic element is located between the nut and the outer flange, and the elastic element contacts both the nut and the outer flange.

4. The sealing device according to claim 1, characterized in that, The first connector includes a threaded hole located at one end of the first connector facing the outer flange, the outer flange being configured to be connected to the first connector by a connecting bolt that mates with the threaded hole.

5. The sealing device according to claim 1, characterized in that, The first connector includes a boss configured to contact the side of the inner flange away from the outer flange.

6. The sealing device according to claim 1, characterized in that, The inner flange and / or the outer flange are respectively provided with a first cooling channel, and a first cooling medium flows in the first cooling channel.

7. A reactor, characterized in that, The furnace tube includes a furnace tube, a furnace door, and a sealing device as described in claim 1 above. The axis of the furnace tube is parallel to the direction from the first end to the second end. The furnace tube includes a furnace tail, a furnace mouth, and a fixing part arranged opposite to each other along the axis of the furnace tube. The fixing part is located on the outside of the furnace tube in the longitudinal direction of the furnace tube, and the fixing part is close to the furnace mouth relative to the furnace tail. The first sealing element can be sleeved on the outside of the furnace tube. The inner flange is provided with a first receiving space, a second receiving space and an inclined surface. The first receiving space and the second receiving space are both used to receive a part of the furnace tube. Along the axial direction of the furnace tube, the second receiving space is closer to the outer flange than the first receiving space. The second receiving space is also used to receive at least a part of the first sealing element. The second receiving space is connected to the outer flange and the furnace tube. The inclined surface is connected to the side wall of the second receiving space and the side wall of the first receiving space, respectively. The inclined surface faces both the outer flange and the furnace tube. The inclined surface is used to support the first sealing element towards the furnace tube and the outer flange. The furnace door is configured to cover the furnace opening and contact the side of the outer flange away from the inner flange.

8. The reactor according to claim 7, characterized in that, The outer flange has a protrusion extending toward the second receiving space, the protrusion being configured to act toward the inclined surface against the first seal.

9. The reactor according to claim 7, characterized in that, The reactor also includes a second sealing element, which is located between the furnace door and the outer flange. The furnace door is provided with a mounting groove facing the outer flange, and the mounting groove is used to accommodate the second sealing element. The outer flange is provided with a second cooling channel, and the second cooling channel contains a second cooling medium.

10. A photovoltaic material processing equipment, characterized in that, It includes a frame and a reactor as described in any one of claims 7 to 9, wherein the furnace tube and the first connector are respectively connected to the frame.

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