Probe card detection and replacement device

Abstract

The utility model discloses a probe card detection and replacement device. The device comprises a slide rail; a moving mechanism and a first detection mechanism are mounted on the slide rail, and the moving mechanism and the first detection mechanism move in the same direction or opposite directions along the arrangement direction of the slide rail; a second detection mechanism is arranged above one side of the first detection mechanism; a probe card is placed on the moving mechanism, the first detection mechanism further reciprocates in the vertical direction, and the probe card is moved to the second detection mechanism through the first detection mechanism to be subjected to visual detection and current testing; visual inspection and current testing are carried out on the probe card through the first detection mechanism and the second detection mechanism, visual inspection on the probe card is rapidly and effectively completed, the probe card can be moved and conveyed through the moving mechanism, and rapid detection can be conveniently carried out after the probe card is replaced.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip detection replacement device field especially relates to a probe card detection replacement device. BACKGROUND

[0002] Traditional semiconductor chips are mainly made of silicon, and the third generation semiconductor is mainly composed of silicon carbide SIC and gallium nitride GAN. In the application field of high pressure, high temperature and high power, the third generation semiconductor has very obvious advantages. There are still many problems in the popularization of gallium nitride and silicon carbide, such as long single crystal growth time, high technical threshold, high cost and low yield, etc. Therefore, it is necessary to monitor through chip detection equipment (KGD test).

[0003] The chip detection equipment mainly realizes a series of combined test functions such as appearance AOI detection, chip high / low temperature DC test and chip high / low temperature AC test during chip feeding and discharging. It needs to be tested through a probe card. However, due to processing errors, the existing probe card has errors in contact with the chip during testing, which requires multiple replacement of corresponding probe cards during the testing process, affecting production efficiency. UTILITY MODEL CONTENT

[0004] The utility model aims at solving the shortcomings in the prior art and provides a probe card detection replacement device.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme: a probe card detection replacement device, comprising:

[0006] The slide rail is provided with a moving mechanism and a first detection mechanism, and the moving mechanism and the first detection mechanism move in the same direction or in the opposite direction along the setting direction of the slide rail.

[0007] The first detection mechanism is provided with a second detection mechanism on one side.

[0008] The first detection mechanism is provided with a second detection mechanism on one side.

[0009] The moving mechanism is provided with a probe card, and the first detection mechanism also moves reciprocally in the vertical direction to move the probe card to the second detection mechanism for testing.

[0010] As a further description of the above technical scheme: the moving mechanism comprises a first sliding seat, the first sliding seat is installed on the slide rail, the first sliding seat is provided with a first moving part moving in the vertical direction, and the first moving part is provided with a first jig.

[0011] As a further description of the above technical scheme: the first jig is provided with a positioning column, and the positioning column cooperates with the probe card.

[0012] As the further description of the above technical solution: the outer side of the first jig is provided with a plurality of first sensors vertically arranged in the horizontal direction, and the first sensors monitor the position of the probe card.

[0013] As the further description of the above technical solution: the first detection mechanism comprises a second sliding seat installed on the sliding rail, a second moving piece moving in the vertical direction and a visual detection device are arranged on the second sliding seat, and the second moving piece is provided with a second jig on the side close to the moving mechanism.

[0014] As the further description of the above technical solution: the second jig is provided with a vacuum port, and the second jig moves to the lower side of the first jig to adsorb and lift the probe card.

[0015] As the further description of the above technical solution: the detection end of the visual detection device is arranged on the upper side.

[0016] As the further description of the above technical solution: the second detection mechanism comprises a current detection device, one side of the current detection device is provided with a third moving piece moving in the vertical direction, and a third jig is arranged below the third moving piece.

[0017] As the further description of the above technical solution: the third jig is provided with a second sensor.

[0018] As the further description of the above technical solution: the visual detection device monitors the probe card on the third jig.

[0019] The above technical solution has the following advantages or beneficial effects:

[0020] The probe card is visually detected and electrically tested by the first detection mechanism and the second detection mechanism, the visual detection of the probe card is quickly and effectively completed, the probe card can be moved and conveyed by the moving mechanism, and the probe card can be quickly detected after being replaced. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a front view of the detection and replacement device provided by the utility model;

[0022] Figure 2 It is a side view of the detection and replacement device provided by the utility model;

[0023] Figure 3 It is a top view of the detection and replacement device provided by the utility model;

[0024] Figure 4 It is a perspective view of the first jig in the utility model;

[0025] Figure 5 is a perspective view of the second jig in the utility model;

[0026] Figure 6 is a perspective view of the second jig in the utility model;

[0027] Figure 7 is a perspective view of the third jig in the utility model;

[0028] Figure 8 is a top view of the third jig in the utility model.

[0029] Legend:

[0030] 1, slide rail; 2, moving mechanism; 21, first sliding seat; 22, first moving piece; 23, first jig; 24, positioning column; 25, first sensor; 3, first detection mechanism; 31, second sliding seat; 32, second moving piece; 33, visual detection device; 34, second jig; 35, vacuum port; 4, second detection mechanism; 41, current detection device; 42, third moving piece; 43, third jig; 44, second sensor; 5, probe card. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0032] With reference to Figures 1-8 The utility model provides an embodiment: a kind of probe card detection replacement device, comprising: slide rail 1;Slide rail 1 is equipped with moving mechanism 2 and first detection mechanism 3, moving mechanism 2 and first detection mechanism 3 are moved along the setting direction of slide rail 1 same direction or reverse direction;The upper side of first detection mechanism 3 is provided with second detection mechanism 4;Probe card 5 is placed on moving mechanism 2, first detection mechanism 3 is also reciprocatingly moved along vertical direction, probe card 5 is moved to second detection mechanism 4 and is tested.

[0033] In the embodiment, the moving mechanism 2 and the first detection mechanism 3 are installed on the slide rail 1, the probe card 5 to be detected is placed on the moving mechanism 2, the first detection mechanism 3 moves towards the moving mechanism 2, the probe card is adsorbed at the first detection mechanism 3, and then the first detection mechanism 3 moves to below the second detection mechanism 4, the probe card 5 is moved to the second detection mechanism 4, the current test of the probe card 5 is performed by the second detection mechanism 4, and the visual detection of the probe card 5 at the second detection mechanism 4 is performed by the first detection mechanism 3. The visual detection and current test of the probe card are performed by the first detection mechanism and the second detection mechanism, the visual detection of the probe card is quickly and effectively completed, the probe card can be moved and conveyed by the moving mechanism, and the detection after the probe card is replaced is facilitated.

[0034] The moving mechanism 2 comprises a first sliding seat 21, the first sliding seat 21 is installed on the slide rail 1, a first moving piece 22 moving in the vertical direction is arranged on the first sliding seat 21, and a first jig 23 is arranged on the first moving piece 22.

[0035] In the embodiment, the first sliding seat 21 reciprocally moves along the arrangement direction of the slide rail 1, the slide rail 1 is an electric sliding table, the first sliding seat 21 is controlled to move, the first moving piece 22 moving in the vertical direction is arranged on the first sliding seat 21, and the first jig 23 is arranged on the first moving piece 22, so that the first jig 23 is driven by the first moving piece 22 to move in the vertical direction.

[0036] The first jig 23 is provided with a positioning column 24, and the positioning column 24 cooperates with the probe card 5.

[0037] In the embodiment, a notch is arranged on the upper end face of the first jig 23, and the positioning column 24 is provided with two positioning columns, which cooperate with the probe card 5 when the probe card 5 is placed. The probe card 5 is placed, the position of the probe card 5 is coarsely positioned, and the direction of the probe card 5 is determined.

[0038] The outer side of the first jig 23 is provided with a plurality of first sensors 25 arranged perpendicularly in the horizontal direction, and the first sensors 25 monitor the position of the probe card 5.

[0039] In the embodiment, the first sensors 25 are arranged on the outer side of the upper end face of the first jig, the first sensors 25 are provided with two groups, the position of the probe card 5 is identified, whether the probe card 5 is on the first jig 23 is judged, and whether the pose of the probe card 5 on the first jig 23 is correct is judged, and the first sensors 25 are infrared sensors.

[0040] The first detection mechanism 3 comprises a second sliding seat 31 installed on the slide rail 1, a second moving piece 32 moving in the vertical direction and a visual detection device 33 arranged on the second sliding seat 31, and a second jig 34 arranged on the side close to the moving mechanism 2 of the second moving piece 32.

[0041] In the embodiment, the visual detection device 33 is a CCD camera, the detection end of the visual detection device 33 is arranged on the upper side, the upper side is photographed and recognized, the upper side of the second moving piece 32 is provided with the second jig 34, and the second jig 34 is driven to move reciprocatingly in the vertical direction.

[0042] Specifically, the second jig 34 is provided with a vacuum port 35, and the second jig 34 is moved to the lower side of the first jig 23 to adsorb and lift the probe card 5.

[0043] In the embodiment, a plurality of through holes are arranged on the second jig 34, the through holes are communicated with the vacuum port 35, the probe card 5 is adsorbed, the second jig 34 is controlled to move upward to lift, the probe card 5 is moved out of the first jig 23 and transferred to the second jig 34.

[0044] The second detection mechanism 4 comprises a current detection device 41, one side of the current detection device 41 is provided with a third moving piece 42 moving in the vertical direction, and a third jig 43 is arranged below the third moving piece 42.

[0045] In the embodiment, the current detection device 41 is used to test the probe card 5 in a low-temperature or high-temperature environment, the contact performance of the probe card 5 is detected, and the third moving piece 42 drives the third jig 43 to move in the vertical direction to move the probe card 5 out of the second jig 34.

[0046] The third jig 43 is provided with a second sensor 44.

[0047] In the embodiment, the second sensor 44 is provided with two, which are used to detect whether the probe card 5 is arranged on the third jig 43.

[0048] The visual detection device 33 monitors the probe card 5 on the third jig 43.

[0049] In the embodiment, the visual detection device 33 photographs the probe card 5 on the upper side to monitor whether the outer dimension of the probe card 5 is correct.

[0050] Working principle:

[0051] The probe card 5 to be replaced is placed on the first fixture 23; the first sliding seat 21 and the second sliding seat 31 move to the replacement position and align; the second moving part 32 rises and the first moving part 22 falls, so that the probe card 5 is transferred from the first fixture 23 to the second fixture 34, and the second sliding seat 31 moves along the slide rail 1 to the safe placement position; the second moving part 32 rises and the third moving part 42 falls; the second sliding seat 31 moves to the replacement position of the current detection device 41 of the second detection mechanism 4 and aligns; the second moving part 32 falls and places the probe card 5 on the third fixture 43; the third moving part 42 rises and inserts the probe card 5 into the corresponding position of the current detection device 41; the second moving part 32 moves to the position below the probe card 5 in the third fixture 43 of the current detection device 41 for visual inspection.

[0052] All standard parts used in this embodiment can be purchased from the market. Irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art. In addition, the circuit connection adopts conventional connection methods in the prior art, which will not be described in detail here. The contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0053] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A probe card detection and replacement device, characterized in that, include: Slide rail (1); A moving mechanism (2) and a first detection mechanism (3) are installed on the slide rail (1). The moving mechanism (2) and the first detection mechanism (3) move in the same direction or in opposite directions along the setting direction of the slide rail (1). A second testing mechanism (4) is provided above one side of the first testing mechanism (3); The probe card (5) is placed on the moving mechanism (2), and the first detection mechanism (3) also moves back and forth in the vertical direction. The probe card (5) is moved to the second detection mechanism (4) by the first detection mechanism (3) for visual inspection and current testing.

2. The detection and replacement device according to claim 1, characterized in that: The moving mechanism (2) includes a first sliding seat (21), which is mounted on the slide rail (1). A first moving member (22) that moves vertically is provided on the first sliding seat (21), and a first fixture (23) is provided on the first moving member (22).

3. The detection and replacement device according to claim 2, characterized in that: The first fixture (23) is provided with a positioning post (24), which cooperates with the probe card (5).

4. The detection and replacement device according to claim 2, characterized in that: The outer side of the first fixture (23) is provided with a plurality of first sensors (25) arranged vertically in the horizontal direction, and the first sensors (25) monitor the position of the probe card (5).

5. The detection and replacement device according to claim 2, characterized in that: The first detection mechanism (3) includes a second sliding seat (31), which is mounted on the slide rail (1). The second sliding seat (31) is provided with a second moving part (32) that moves in the vertical direction and a visual detection device (33). A second fixture (34) is provided on the side of the second moving part (32) near the moving mechanism (2).

6. The detection and replacement device according to claim 5, characterized in that: The second fixture (34) is provided with a vacuum port (35). The second fixture (34) moves to the bottom of the first fixture (23) to adsorb and lift the probe card (5).

7. The detection and replacement device according to claim 5, characterized in that: The detection end of the visual inspection device (33) is located at the top.

8. The detection and replacement device according to claim 7, characterized in that: The second detection mechanism (4) includes a current detection device (41), a third moving part (42) that moves vertically is provided on one side of the current detection device (41), and a third fixture (43) is provided below the third moving part (42).

9. The detection and replacement device according to claim 8, characterized in that: The third fixture (43) is equipped with a second sensor (44).

10. The detection and replacement device according to claim 8, characterized in that: The visual inspection device (33) monitors the probe card (5) on the third fixture (43).

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