Electromagnetic generator

Abstract

The utility model relates to the field of micro-generators, and discloses an electromagnetic generator, which comprises a coil substrate module, a power supply module, a power supply module, a power supply module, a power supply module and a power supply module, and is characterized in that the coil substrate module comprises a coil and a magnet yoke; the magnet can slide in a reciprocating mode in the horizontal direction under the influence of external movement, the magnet is located above the coil base module, the magnetic flux in the coil is adjusted when the magnet moves, and current is generated in the coil; and attraction force facing the magnet yoke in the vertical direction exists between the magnet yoke and the magnet. The electromagnetic generator comprises the coil base module and the magnet, the magnet moves in the horizontal direction, and the magnetic flux in the coil can be adjusted when the magnet reciprocates, so that current is formed in the coil, kinetic energy is converted into electric energy, and power generation is achieved. Moreover, the magnets and the magnet yokes are distributed up and down in the vertical direction, and the magnet yokes are arranged below the magnets, so that when the magnets are subjected to vertically-downward attraction force, when the magnets move in the horizontal direction, the operation stability of the magnets can be improved under the action of the attraction force of the magnet yokes.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of micro power generator, in particular to an electromagnetic generator. BACKGROUND

[0002] Micro power supply is a key component of MEMS (Micro Electro-Mechanical System) device. The current micro power generator has magnetic yokes distributed at the opposite ends of a magnet, and coils are arranged around the magnetic yokes. The magnet oscillates in the vertical direction in the gap between the two magnetic yokes, cutting the magnetic induction lines in the coil, thereby realizing power generation. However, the magnetic yokes have an attractive force on the magnet, that is, the magnet is subjected to an attractive force directed to the magnetic yokes in the horizontal direction, which causes the magnet to easily sway in the horizontal direction when moving in the vertical direction, and the magnet is unstable in movement.

[0003] Therefore, how to solve the above technical problems should be the focus of the person skilled in the art. CONTENT OF THE INVENTION

[0004] The purpose of the present application is to provide an electromagnetic generator which converts kinetic energy into electrical energy and improves the stability of the magnet movement.

[0005] To solve the above technical problems, the present application provides an electromagnetic generator, comprising:

[0006] A coil base module comprising a coil and a magnetic yoke, wherein the coil is arranged around the magnetic yoke;

[0007] A magnet which is affected by external movement and can reciprocate in the horizontal direction, wherein the magnet is located above the coil base module, adjusts the magnetic flux in the coil when the magnet moves, and generates an electric current in the coil;

[0008] The magnetic yoke and the magnet have an attractive force in the vertical direction towards the magnetic yoke.

[0009] Optionally, it further comprises:

[0010] One or more super slippery sheets located between the magnet and the coil base module, wherein the super slippery sheets are fixed to the lower surface of an intermediate carrier plate, and the intermediate carrier plate is used to carry the magnet.

[0011] Optionally, the sliding area of the super slippery sheet covers the magnetic yoke.

[0012] Optionally, the coil base module is a MEMS structure module, the coil is a solenoid coil, and the coil base module further comprises a base and a dielectric layer located on the upper surface of the base.

[0013] The coil is partially exposed to the medium layer and partially embedded in the medium layer in the first target plane, and the first target plane is a cross section parallel to or perpendicular to the moving direction of the magnet;

[0014] The magnetic yoke is embedded in the medium layer.

[0015] Optionally, the magnetic yoke comprises a first magnetic yoke unit, a second magnetic yoke unit and a third magnetic yoke unit, and the third magnetic yoke unit connects the first magnetic yoke unit and the second magnetic yoke unit.

[0016] The first magnetic yoke unit and the second magnetic yoke unit are parallel and have an overlapping area in the projection on the second target plane, and the second target plane is a plane perpendicular to the moving direction of the magnet.

[0017] Optionally, the number of turns of the coil ranges from 300 to 600, and / or the diameter of the coil ranges from 30 microns to 100 microns.

[0018] Optionally, when the super-smooth sheet is arranged between the magnet and the coil substrate module, the sliding distance of the super-smooth sheet is equal to the sum of the width of the first magnetic yoke unit, the width of the second magnetic yoke unit and the distance between the first magnetic yoke unit and the second magnetic yoke unit.

[0019] Optionally, when the super-smooth sheet is arranged between the magnet and the coil substrate module, the distance between the first magnetic yoke unit and the second magnetic yoke unit is equal to the size of the super-smooth sheet.

[0020] Optionally, the coil substrate module is a planar coil module, the magnetic yoke is in a columnar shape, and the coil is wound around the outer surface of the magnetic yoke.

[0021] Optionally, the number of turns of the coil ranges from 2000 to 4000, and / or the diameter of the coil ranges from 30 microns to 100 microns.

[0022] Optionally, when the super-smooth sheet is arranged between the magnet and the coil substrate module, the sliding distance of the super-smooth sheet is equal to the cross-sectional size of the magnetic yoke.

[0023] Optionally, when the super-smooth sheet is arranged between the magnet and the coil substrate module, the cross-sectional size of the magnetic yoke is equal to the size of the super-smooth sheet.

[0024] Optionally, the method further comprises:

[0025] A limiting part located around the magnet;

[0026] An elastic connecting part connected to the limiting part and the magnet.

[0027] Optionally, the magnet comprises at least two groups of magnetic blocks arranged in sequence in the horizontal direction, each group of the magnetic blocks comprising an N-pole magnetic block unit and an S-pole magnetic block unit, the N-pole magnetic block unit and the S-pole magnetic block unit being arranged alternately in the horizontal direction.

[0028] Optionally, the method further comprises:

[0029] A separation sheet located between two adjacent groups of the magnetic blocks.

[0030] The electromagnetic generator provided in the application comprises a coil base module comprising a coil and a magnetic yoke, the coil being arranged around the magnetic yoke; a magnet capable of reciprocating sliding in the horizontal direction under the influence of external motion, the magnet being located above the coil base module, the magnetic flux in the coil being adjusted when the magnet moves, and an electric current being generated in the coil; and the magnetic yoke and the magnet having an attractive force in the vertical direction towards the magnetic yoke.

[0031] As can be seen, the electromagnetic generator in the application comprises a coil base module and a magnet, the magnet moving in the horizontal direction, the magnetic flux in the coil being adjusted when the magnet reciprocates, so that an electric current is formed in the coil, kinetic energy is converted into electric energy, and power generation is realized. Moreover, the magnet and the magnetic yoke are distributed in the vertical direction, the magnetic yoke being below the magnet, so that the magnet is subjected to a downward attractive force, and the stability of the magnet in operation can be improved under the action of the attractive force of the magnetic yoke when the magnet moves in the horizontal direction. BRIEF DESCRIPTION OF DRAWINGS

[0032] In order to more clearly illustrate the technical solutions of the embodiments of the application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only some embodiments of the application, and for those skilled in the art, other drawings can also be obtained without creative labor under the premise of the drawings.

[0033] Figure 1 A schematic diagram of an electromagnetic generator provided in the embodiment of the application;

[0034] Figure 2 A structural schematic diagram of a coil base module provided in the embodiment of the application Figure 1 ;

[0035] Figure 3 A structural schematic diagram of an electromagnetic generator provided in the embodiment of the application Figure 1 ;

[0036] Figure 4 A structural schematic diagram of a coil base module provided in the embodiment of the application Figure 2 ;

[0037] Figure 5 A structure diagram of an electromagnetic generator provided by an embodiment of the present application Figure 2

[0038] Figure 6 A structure diagram of an electromagnetic generator provided by an embodiment of the present application Figure 3

[0039] Figure 7 A structure diagram of a magnetic yoke provided by an embodiment of the present application

[0040] Figure 8 A structure diagram of an electromagnetic generator provided by an embodiment of the present application Figure 4

[0041] Figures 9 to 24 A preparation process flow chart of a coil substrate module provided by an embodiment of the present application

[0042] In the figure, 1 is a coil substrate module, 2 is a magnet, 3 is a sliding carrier plate, 4 is an elastic connecting part, 5 is an intermediate carrier plate, 6 is a limiting part, 7 is a super sliding sheet, 8 is a separation sheet, 9 is a bonding plating layer, 10 is a photoresist, 11 is a magnetic yoke, 12 is a coil, 13 is a substrate, 14 is a dielectric layer, 111 is a first magnetic yoke unit, 112 is a second magnetic yoke unit, 113 is a third magnetic yoke unit, 101 is a second hollowed-out area, 121 is a first seed layer, 122 is a metal groove, 123 is a second seed layer, 124 is a first metal layer, 125 is a second metal layer, 126 is a third seed layer, 141 is a first dielectric layer, 142 is a second dielectric layer, 21 is a magnetic block, 211 is an N-pole magnetic block unit, and 212 is an S-pole magnetic block unit. DETAILED DESCRIPTION

[0043] In order to make the personnel in the technical field better understand the present application scheme, the present application is further described in detail below in combination with the drawings and specific embodiments. Obviously, the described embodiments are only part of the embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the present application.

[0044] In the following description, many specific details are set forth in order to provide a thorough understanding of the present application, but the present application can also be implemented in other ways different from those described herein, and those skilled in the art can make similar generalizations without departing from the connotation of the present application, therefore the present application is not limited by the specific embodiments disclosed below.

[0045] ​​​As described in the background section, in the current micro generator, the oscillation direction of the magnet is vertical, and the magnetic yoke has an attraction to the magnet in the horizontal direction, which causes the magnet to easily shake in the horizontal direction when moving in the vertical direction, and the magnet movement is unstable.

[0046] Therefore, the present application provides an electromagnetic generator, which refers to Figure 1 which can include

[0047] The coil base module 1 includes a coil 12 and a magnetic yoke 11, and the coil 12 is arranged around the magnetic yoke 11.

[0048] The magnet 2, which is affected by external motion and can reciprocate in the horizontal direction, is located above the coil base module 1, adjusts the magnetic flux in the coil 12 when the magnet 2 moves, and generates an electric current in the coil 12.

[0049] The magnetic yoke 11 and the magnet 2 have an attraction in the vertical direction towards the magnetic yoke 11.

[0050] The coil 12 is a metal coil 12, and the specific material is not limited in the present embodiment and can be set by the user. For example, the material of the coil 12 can be copper.

[0051] The magnetic yoke 11 has a magnetic guiding effect, and for example, the material of the magnetic yoke 11 can be permalloy or other materials that can achieve magnetic guiding.

[0052] The magnet 2 and the magnetic yoke 11 are arranged in the vertical direction, with the magnet 2 above and the magnetic yoke 11 below. The magnetic yoke 11 has an attraction to the magnet 2 in the downward direction, and the direction of the attraction of the magnet 2 is perpendicular to the reciprocating direction. Since the magnet 2 always moves in a horizontal plane, the movement of the magnet 2 in the horizontal plane is more stable under the attraction of the magnetic yoke 11.

[0053] The magnet 2 has magnetism, and in order to maintain the magnetism of the magnet 2 for a long time and prolong the service life of the electromagnetic generator, the magnet 2 can be a permanent magnet 2, which also has the characteristics of not being easily demagnetized and not being easily magnetized.

[0054] The magnet 2 has two magnetic poles, N and S, and when the magnet 2 reciprocates, it can cut the magnetic induction lines in the coil 12, thereby realizing power generation.

[0055] The number of magnetic blocks in the magnet 2 is not limited in the present embodiment and can be set by the user.

[0056] As an implementation manner, the magnet 2 comprises at least two groups of magnetic blocks 21 arranged in sequence in the horizontal direction, each group of the magnetic blocks 21 comprising an N-pole magnetic block unit 211 and an S-pole magnetic block unit 212, and the N-pole magnetic block unit 211 and the S-pole magnetic block unit 212 are arranged alternately in the horizontal direction.

[0057] The N-pole magnetic block unit 211 and the S-pole magnetic block unit 212 in each group of the magnetic blocks 21 are distributed in the vertical direction.

[0058] When the magnet 2 comprises two or more groups of the magnetic blocks 21, the number of the groups of the magnetic blocks 21 can be two, three, four, etc., which is not limited in the embodiment. The two or more groups of the magnetic blocks 21 can simultaneously cut the magnetic induction lines, so that the current can be increased, thereby increasing the power generation efficiency.

[0059] The structure of the coil base module 1 is not limited in the embodiment, which can be set by itself.

[0060] The electromagnetic generator in the embodiment comprises the coil base module 1 and the magnet 2, the magnet 2 moves in the horizontal direction, the magnetic flux in the coil 12 can be adjusted when the magnet 2 reciprocates, so that the current is formed in the coil 12, the kinetic energy is converted into the electric energy, and the power generation is realized. In addition, the magnet 2 and the magnet yoke 11 are distributed in the vertical direction, the magnet yoke 11 is below the magnet 2, so that the magnet 2 is subjected to the downward attracting force in the vertical direction, and the stability of the magnet 2 in the horizontal direction can be improved under the action of the attracting force of the magnet yoke 11.

[0061] On the basis of the above embodiment, in an embodiment of the present application, referring to Figures 2 to 3 , the coil base module is a planar coil module, the magnet yoke 11 is in a columnar shape, and the coil 12 is wound around the outer surface of the magnet yoke 11.

[0062] The coil 12 is a planar coil 12, the magnet yoke 11 is located in the middle of the coil 12, and the magnetic lines are directly attracted by the magnet yoke 11 and pass through the coil 12. Since the magnetization directions of the adjacent two groups of the magnetic blocks 21 in the magnet 2 are opposite, the sign of the magnetic flux will change in the reciprocating process of the magnet 2, thereby causing the induced current and realizing the power generation.

[0063] The cross-sectional shape of the magnet yoke 11 can be circular. For example, the size (diameter or length) of the coil base module can be 1 centimeter.

[0064] The number of turns of the coil 12 on the outer surface of the magnet yoke 11 is not limited in the embodiment, which can be set by itself. For example, the number of turns of the coil 12 can be 2000 turns to 4000 turns. The more the number of turns of the coil, the higher the output of the electromagnetic generator.

[0065] It should be noted that the size of the coil 12 is not limited in the embodiment and can be selected by the user. As an implementable manner, the diameter of the coil 12 can range from 30 microns to 100 microns. For example, the diameter of the coil 12 can be 30 microns, 50 microns, 70 microns, 90 microns, 100 microns, etc.

[0066] In the embodiment, the effective magnetic flux Φ generated by the electromagnetic generator is Φ=B×N×S1, wherein B is the magnetic induction intensity, N is the number of turns of the coil 12, and S1 is the area of the horizontal section of the planar coil module.

[0067] Figure 3 In the embodiment, the magnet 2 includes two groups of magnetic blocks 21.

[0068] The coil 12 is wound on the outer surface of the yoke 11, and the coil 12 can be wound from the lower end of the yoke 11 to the top end of the yoke 11. There can be a gap between the coil 12 and the top end of the yoke 11 on the upper surface of the coil base module, which can cause the upper surface of the coil base module to be not very flat, thereby affecting the smoothness of the movement of the magnet 2. To solve this problem, a sliding carrier plate 3 can be arranged on the upper surface of the coil base module, and the magnet 2 reciprocates on the upper surface of the sliding carrier plate 3. The sliding carrier plate 3 does not adversely affect the magnetic field, and the material of the sliding carrier plate 3 can be silicon or the like.

[0069] On the basis of the above embodiment, in an embodiment of the present application, referring to Figure 4 , the coil base module 1 is a MEMS (Micro Electro Mechanical System) structure module, the coil 12 is a solenoid coil, and the coil base module 1 further includes a base 13 and a dielectric layer 14 on the upper surface of the base 13.

[0070] On the first target plane, the coil 12 is partially exposed to the dielectric layer 14 and the remaining part is embedded in the dielectric layer 14. The first target plane is a cross section parallel or perpendicular to the movement direction of the magnet 2.

[0071] The yoke 11 is embedded in the dielectric layer 14.

[0072] The first target plane is also the cross section of the MEMS structure module in the vertical direction.

[0073] The structure of the yoke 11 is not limited in the embodiment and can be set by the user.

[0074] As an implementable manner, the yoke 11 includes a first yoke unit 111, a second yoke unit 112, and a third yoke unit 113, and the third yoke unit 113 connects the first yoke unit 111 and the second yoke unit 112.

[0075] The first magnetic yoke unit 111 and the second magnetic yoke unit 112 have overlapping areas in the projection on the second target plane which is perpendicular to the moving direction of the magnet 2.

[0076] The substrate 13 can be a silicon wafer or the like.

[0077] The N-pole magnetic block unit 211 and the S-pole magnetic block unit 212 in each group of magnetic blocks 21 in the magnet 2 are distributed in the vertical direction, so the magnetization direction of the magnet 2 is vertical, the first magnetic yoke unit 111 and the second magnetic yoke unit 112 attract the magnetic force lines, one group of magnetic blocks 21 in the adjacent two groups of magnetic blocks 21 is magnetized in the vertical upward direction, and the other group of magnetic blocks 21 is magnetized in the vertical downward direction, so that the magnetic force lines can pass through the magnetic yoke 11, when the magnet 2 reciprocates in the horizontal direction, the magnetic flux in the magnetic yoke 11 will change, so that the current in the coil 12 around the magnetic yoke 11 appears, realizing power generation.

[0078] The magnet 2 can be directly located on the upper surface of the medium layer 14 and reciprocate on the upper surface of the medium layer 14. The material of the medium layer 14 can be resin, such as SU8 photoresist, which has low density and light mass, so as to reduce the weight of the electromagnetic generator.

[0079] The first magnetic yoke unit 111 and the second magnetic yoke unit 112 can be long strips, oppositely arranged with a certain gap in the middle. The third magnetic yoke unit 113 can be bent, one end of the third magnetic yoke unit 113 is connected with the first magnetic yoke unit 111, and the other end is connected with the second magnetic yoke unit 112.

[0080] The length extension direction of the first magnetic yoke unit 111 and the second magnetic yoke unit 112 is perpendicular to the moving direction of the magnet 2, and the magnet 2 reciprocates above the first magnetic yoke unit 111 and the second magnetic yoke unit 112.

[0081] As an implementable manner, the thickness of the first magnetic yoke unit 111 can be equal to the thickness of the second magnetic yoke unit 112, and the thickness of the first magnetic yoke unit 111 and the second magnetic yoke unit 112 can be greater than the thickness of the third magnetic yoke unit 113.

[0082] The effective magnetic flux Φ generated by the electromagnetic generator in the embodiment is Φ=B×N×S2, wherein B is the magnetic induction intensity, N is the number of turns of the coil 12, and S2 is the sum of the area of the upper surface of the partial first magnetic yoke unit 111 and the area of the upper surface of the partial second magnetic yoke unit 112, wherein the area of the upper surface of the partial first magnetic yoke unit 111 is equal to the product of the length of the overlapping part of the first magnetic yoke unit 111 and the second magnetic yoke unit 112 in the second target horizontal plane and the width of the first magnetic yoke unit 111, and the area of the upper surface of the partial second magnetic yoke unit 112 is equal to the product of the length of the overlapping part of the first magnetic yoke unit 111 and the second magnetic yoke unit 112 in the second target horizontal plane and the width of the second magnetic yoke unit 112.

[0083] In an embodiment of the present application, the number of turns of the coil 12 ranges from 300 turns to 600 turns, that is, the sum of the number of turns of all the coils 12 on the first magnetic yoke unit 111, the second magnetic yoke unit 112, and the third magnetic yoke unit 113 ranges from 300 turns to 600 turns. For example, the number of turns of the coil 12 can be 300 turns, 400 turns, 500 turns, 600 turns, etc. The more the number of coils 12, the higher the output of the electromagnetic generator.

[0084] The super-smooth sheet 7 can be a two-dimensional material such as highly oriented pyrolytic graphite or graphite, which is not limited in the embodiment.

[0085] The super-smooth sheet 7 can be bonded to the lower surface of the intermediate bearing substrate 5 through the bonding plating layer 9, for example, the bonding plating layer 9 can be a SAC (Sn-Ag-Cu) plating layer.

[0086] When the coil base module 1 is a MEMS structure module, the super-smooth sheet 7 can be in contact with the upper surface of the dielectric layer in the MEMS structure module, so that the reciprocating motion of the magnet 2 realizes super-smooth sliding, further improving the stability of the motion of the magnet 2.

[0087] When the coil base module 1 is a planar coil 12 module, the super-smooth sheet 7 can be in contact with the upper surface of the sliding bearing plate 3, so that the reciprocating motion of the magnet 2 realizes super-smooth sliding, further improving the stability of the motion of the magnet 2.

[0088] The sliding area of the super-smooth sheet 7 is not limited in the embodiment, which is determined according to the situation.

[0089] As an implementable manner, the sliding area of the super-smooth sheet 7 covers the magnetic yoke 11, which can realize the attraction of the magnet 2 in the vertical direction without increasing the friction, and the motion of the magnet 2 is more stable.

[0090] On the basis of any of the above embodiments, in an embodiment of the present application, when the coil base module 1 is a planar coil base module, the super slide piece 7 has a sliding distance equal to the cross-sectional dimension of the magnetic yoke 11, so that the magnet 2 can effectively cut the magnetic induction lines when moving.

[0091] The sliding distance of the super slide piece 7 is the sliding distance of the magnet 2 in the one-way sliding direction.

[0092] For example, when the magnetic yoke 11 is a cylinder, the cross-sectional dimension of the magnetic yoke 11 is the diameter of the magnetic yoke 11.

[0093] On the basis of any of the above embodiments, in an embodiment of the present application, when the coil base module 1 is a planar coil base module, the super slide piece 7 has a sliding distance equal to the cross-sectional dimension of the magnetic yoke 11, so that the magnet 2 can effectively cut the magnetic induction lines when moving.

[0094] On the basis of any of the above embodiments, in an embodiment of the present application, as shown in Figure 7 On the basis of any of the above embodiments, in an embodiment of the present application, when the coil base module 1 is a planar coil base module, the super slide piece 7 has a sliding distance equal to the cross-sectional dimension of the magnetic yoke 11, so that the magnet 2 can effectively cut the magnetic induction lines when moving.

[0095] The sliding distance of the super slide piece 7 is the sliding distance of the magnet 2 in the one-way sliding direction.

[0096] On the basis of any of the above embodiments, in an embodiment of the present application, when the coil base module 1 is a planar coil base module, the super slide piece 7 has a sliding distance equal to the cross-sectional dimension of the magnetic yoke 11, so that the magnet 2 can effectively cut the magnetic induction lines when moving.

[0097] On the basis of any of the above embodiments, in an embodiment of the present application, as shown in Figures 5 to 6 and Figure 8 The electromagnetic generator can further include:

[0098] The limiting part 6 located around the magnet 2;

[0099] The elastic connecting part 4 connected with the limiting part 6 and the magnet 2.

[0100] The limiting part 6 can be a circular ring or a square frame, which surrounds the magnet 2. One end of the elastic connecting part 4 is fixedly connected to the limiting part 6, and the other end is fixedly connected to the magnet 2. After the magnet 2 starts to move under the force, the magnet 2 can reciprocate in the horizontal direction stably under the action of the elastic connecting part 4, without the need to continue to rely on external force to slide.

[0101] The magnet 2 includes two or more groups of magnetic blocks 21. In order to facilitate the connection of the elastic connecting part 4 with all the magnetic blocks 21, the magnet 2 can be fixed as a whole on an intermediate bearing plate 5. The elastic connecting part 4 is fixedly connected to the intermediate bearing plate 5, thereby indirectly achieving fixed connection with the magnet 2.

[0102] The elastic connecting part 4, the intermediate bearing plate 5, and the limiting part 6 can be of an integrated structure, which is convenient for manufacturing together.

[0103] As an implementable manner, the number of the elastic connecting part 4 can be two, which are arranged in parallel to the movement direction of the magnet 2.

[0104] As another implementable manner, the number of the elastic connecting part 4 can be four, two of which are arranged in parallel to the movement direction of the magnet 2, and the other two are arranged in the direction perpendicular to the movement direction of the magnet 2. The elastic connecting part 4 arranged in the direction perpendicular to the movement direction of the magnet 2 can improve the stability of the movement of the magnet 2 and reduce the shaking of the magnet 2 in the direction perpendicular to the movement direction of the magnet 2.

[0105] The elastic connecting part 4 can be a spring or other elastic component with scalability, which is not limited in the embodiment.

[0106] When the coil base module 1 is a MEMS structure module, the limiting part 6 can be fixed on the upper surface of the dielectric layer of the coil base module 1. When the coil base module 1 is a planar coil module, the limiting part 6 can be fixed on the sliding bearing plate 3.

[0107] It should be noted that the elastic connecting part 4 does not contact the dielectric layer or the sliding bearing plate 3 during the movement of the magnet 2.

[0108] On the basis of any of the above embodiments, in an embodiment of the present application, the electromagnetic generator can further include a separation sheet 8 located between adjacent two groups of the magnetic blocks 21.

[0109] The separation sheet 8 arranged between adjacent two groups of the magnetic blocks 21 can make the number of magnetic lines passing through the yoke 11 more, thereby further improving the power generation efficiency.

[0110] The present application also provides a manufacturing method of an electromagnetic generator, which includes:

[0111] Step S101: manufacturing a coil base module, which includes a coil and a yoke. The coil surrounds the yoke.

[0112] The manufacturing process of the coil base module is determined according to the type of the coil base module.

[0113] As an implementation manner, when the coil base module is a planar coil module, the coil can be directly wound on the outer surface of the magnetic yoke to form the planar coil module.

[0114] When the coil base module is a MEMS structure module, the manufacturing process of the coil base module is described in the following embodiment.

[0115] Step S102: A magnet is arranged above the coil base module, the magnet reciprocates in the horizontal direction, the magnetic flux in the coil is adjusted when the magnet moves, and an electric current is generated in the coil; the magnetic yoke and the magnet have an attractive force in the vertical direction towards the magnetic yoke.

[0116] The electromagnetic generator in the embodiment includes a coil base module and a magnet, the magnet moves in the horizontal direction, and the magnetic flux in the coil can be adjusted when the magnet reciprocates, so as to form an electric current in the coil, convert kinetic energy into electric energy, and realize power generation. Moreover, the magnet and the magnetic yoke are distributed in the vertical direction, the magnetic yoke is below the magnet, so the magnet is subjected to a vertical downward attractive force, and the stability of the magnet in the horizontal direction can be improved under the action of the attractive force of the magnetic yoke.

[0117] On the basis of the above embodiment, in an embodiment of the present application, when the coil base module is a MEMS structure module, the manufacturing process of the coil base module can include:

[0118] Step S201: A first seed layer is grown on the upper surface of the substrate.

[0119] As shown in Figure 9 , the first seed layer 121 is located on the upper surface of the substrate 13, and the first seed layer 121 can enhance the bonding force between the coil and the substrate 13.

[0120] The growth method of the first seed layer can be a magnetron sputtering method or other methods, which is not limited in the embodiment.

[0121] Step S202: A metal groove is made on the first seed layer, and the first seed layer not covered by the metal groove is removed.

[0122] As shown in Figure 10 , photoresist 10 is first coated on the first seed layer 121, then the photoresist 10 is exposed and developed, and then metal is grown, which can be copper, and the growth method can be electroplating or other methods. As shown in Figure 11As shown, photoresist 10 is further coated on the upper surface of the first seed layer 121, then the photoresist 10 is exposed and developed, and then metal is grown, connecting with the metal grown in the previous step to form a metal groove 122. Figure 12 As shown, the photoresist 10 and the first seed layer 121 not covered by the metal groove 122 are removed.

[0123] Step S203: A first dielectric layer is formed on the substrate, the upper surface of the first dielectric layer being flush with the upper surface of the metal groove.

[0124] like Figures 13 to 14 As shown, the first medium layer 141 is first spin-coated, and then the first medium layer 141 is chemically and mechanically polished so that the upper surface of the first medium layer 141 is flush with the upper surface of the metal groove 122.

[0125] Step S204: Grow a second seed layer on the upper surface of the first medium layer.

[0126] like Figure 15 As shown, the second seed layer 123 is located on the upper surface of the first dielectric layer 141. The second seed layer 123 can enhance the bonding force between the metal groove 122 and the first metal layer 124, as well as the bonding force between the magnetic yoke and the first dielectric layer 141.

[0127] The second seed layer can be grown by magnetron sputtering or other methods, which are not limited in this embodiment.

[0128] Step S205: A patterned photoresist is formed on the second seed layer, and the first cutout area of ​​the patterned photoresist is connected to the sidewall of the metal groove.

[0129] Step S206: A first metal layer is formed in the first hollow area, and the first metal layer is connected to the metal groove through the second seed layer.

[0130] like Figure 16 As shown, the first metal layer 124 is connected to the second seed layer 123.

[0131] Step S207: Perform photolithography on the patterned photoresist to form the second hollow area.

[0132] like Figure 17 As shown, the second hollowed-out area 101 corresponds to the area where the magnetic yoke is formed.

[0133] Step S208: growing metal material in the second hollowed region to form a magnetic yoke; the magnetic yoke comprises a first magnetic yoke unit, a second magnetic yoke unit and a third magnetic yoke unit, the third magnetic yoke unit connects the first magnetic yoke unit and the second magnetic yoke unit; the first magnetic yoke unit and the second magnetic yoke unit are parallel and have overlapping area in the projection on the second target plane; the second target plane is a plane perpendicular to the direction of magnet movement.

[0134] As shown in Figure 18 , the first magnetic yoke unit 111 is parallel to the second magnetic yoke unit 112, and the third magnetic yoke unit 113 connects the first magnetic yoke unit 111 and the second magnetic yoke unit 112 to form a magnetic yoke. The metal material of the magnetic yoke can be permalloy, and the growth method can be electroplating or other methods.

[0135] As an implementation manner, after the first magnetic yoke unit, the second magnetic yoke unit and the third magnetic yoke unit are grown, the thickness of the first magnetic yoke unit and the second magnetic yoke unit can be increased. The process is as shown in Figures 19 to 20 , the photoresist 10 is continued to be coated in the second hollowed region 101, then photoetching is performed, the photoresist 10 above the first magnetic yoke unit 111 and the second magnetic yoke unit 112 is removed, then the metal is continued to be grown, so that the thickness of the first magnetic yoke unit 111 and the second magnetic yoke unit 112 is greater than that of the third magnetic yoke unit 113.

[0136] Step S209: removing the patterned photoresist and the second seed layer covered by the patterned photoresist.

[0137] As shown in Figure 21 , the first metal layer 124, the first magnetic yoke unit 111, the second magnetic yoke unit 112 and the third magnetic yoke unit 113 are combined with the upper surface of the first dielectric layer 141 through the second seed layer 123.

[0138] Step S210: making a second dielectric layer on the upper surface of the first dielectric layer to form a dielectric layer, the upper surface of the dielectric layer is flush with the upper surface of the first metal layer, and higher than the upper surface of the magnetic yoke.

[0139] As shown in Figures 22 to 23 , the upper surface of the second dielectric layer 142 is higher than the upper surface of the first metal layer 124, the second dielectric layer 124 and the first dielectric layer 141 form a dielectric layer 14, and then optical mechanical polishing is performed so that the upper surface of the dielectric layer 14 is flush with the upper surface of the first metal layer 124.

[0140] The material of the second dielectric layer can be the same as that of the first dielectric layer to simplify the manufacturing process.

[0141] Step S211: making a third seed layer on the upper surface of the dielectric layer.

[0142] Step S212: forming a patterned photoresist on the third seed layer, the hollowed-out area of the patterned photoresist corresponding to the position above the metal groove.

[0143] Step S213: growing a second metal layer on the hollowed-out area of the patterned photoresist, the second metal layer being connected to the first metal layer through the third seed layer; the second metal layer, the third seed layer, the first metal layer, the second seed layer and the metal groove forming a solenoid coil.

[0144] As shown in FIG. 12, the second metal layer 125 is connected to the first metal layer 124 through the third seed layer 126, thereby forming a solenoid coil surrounding the magnetic yoke. The coil and the magnetic yoke are distributed with the dielectric layer 14. Figure 24

[0145] Step S214: removing the patterned photoresist and the third seed layer not covered by the patterned photoresist, thereby forming a MEMS structure module.

[0146] As shown in FIG. 13, the MEMS structure module is obtained. Figure 4

[0147] In any of the above embodiments, in an embodiment of the present application, the manufacturing method of the electromagnetic generator can further include:

[0148] manufacturing an intermediate carrier plate;

[0149] manufacturing a bonding plating layer on the lower surface of the intermediate carrier plate;

[0150] fixing the super-smooth sheet to the lower surface of the intermediate carrier plate through the bonding plating layer;

[0151] Correspondingly, the magnet disposed above the coil base module includes:

[0152] placing the magnet on the upper surface of the intermediate carrier plate, and placing the intermediate carrier plate carrying the magnet above the coil base module.

[0153] By disposing the super-smooth sheet, the magnet slides to achieve super-smooth sliding, thereby improving the stability of the magnet sliding.

[0154] The various embodiments in the specification are described in a progressive manner, and each embodiment focuses on the difference from other embodiments. The same or similar parts of each embodiment can be referred to each other.

[0155] ​​The electromagnetic generator provided by the application is described in detail above. The principle and implementation mode of the application are described by using specific examples in this paper, and the above description of the examples is only used to help understand the scheme of the application and its core idea. It should be pointed out that, for ordinary skilled persons in the technical field, some improvements and modifications can be made to the application without departing from the principle of the application, and these improvements and modifications also fall within the protection scope of the application.

Claims

1. An electromagnetic generator, characterized by The application relates to a coil base module, a magnet and a super-smooth sheet. The coil base module comprises a coil and a magnetic yoke, and the coil is arranged around the magnetic yoke. The magnet is arranged above the coil base module and can reciprocate in a horizontal direction under the influence of external motion, and the magnet adjusts the magnetic flux in the coil and generates an electric current in the coil when the magnet moves. The magnetic yoke and the magnet have an attracting force in a vertical direction towards the magnetic yoke.

2. The electromagnetic generator of claim 1, wherein, The application further comprises one or more super-smooth sheets arranged between the magnet and the coil base module, and the super-smooth sheets are fixed to the lower surface of an intermediate bearing plate used for bearing the magnet. The sliding area of the super-smooth sheet covers the magnetic yoke.

3. The electromagnetic generator of claim 2, wherein, The coil base module is a MEMS structure module, the coil is a solenoid coil, the coil base module further comprises a base and a dielectric layer arranged on the upper surface of the base.

4. The electromagnetic generator of claim 1, wherein, In a first target plane, the coil is partially exposed to the dielectric layer and partially embedded in the dielectric layer, and the first target plane is a cross section parallel or perpendicular to the moving direction of the magnet. The magnetic yoke is embedded in the dielectric layer. The magnetic yoke comprises a first magnetic yoke unit, a second magnetic yoke unit and a third magnetic yoke unit, and the third magnetic yoke unit connects the first magnetic yoke unit and the second magnetic yoke unit.

5. The electromagnetic generator of claim 4, wherein, The first magnetic yoke unit and the second magnetic yoke unit are parallel and have an overlapping area in the projection on a second target plane, and the second target plane is a plane perpendicular to the moving direction of the magnet. The number of turns of the coil ranges from 300 to 600, and / or the diameter of the coil ranges from 30 microns to 100 microns.

6. The electromagnetic generator of claim 4, wherein, When the super-smooth sheet is arranged between the magnet and the coil base module, the sliding distance of the super-smooth sheet is equal to the sum of the width of the first magnetic yoke unit, the width of the second magnetic yoke unit and the distance between the first magnetic yoke unit and the second magnetic yoke unit.

7. The electromagnetic generator of claim 5, wherein, When the super-smooth sheet is arranged between the magnet and the coil base module, the distance between the first magnetic yoke unit and the second magnetic yoke unit is equal to the size of the super-smooth sheet.

8. The electromagnetic generator of claim 5, wherein, The coil base module is a planar coil module, the magnetic yoke is in a columnar shape, and the coil is wound around the outer surface of the magnetic yoke.

9. The electromagnetic generator of claim 1, wherein, The number of turns of the coil ranges from 2000 to 4000, and / or the diameter of the coil ranges from 30 microns to 100 microns.

10. The electromagnetic generator of claim 9, wherein, When the super-smooth sheet is arranged between the magnet and the coil base module, the sliding distance of the super-smooth sheet is equal to the cross-sectional size of the magnetic yoke.

11. The electromagnetic generator of claim 9, wherein, When the super-smooth sheet is arranged between the magnet and the coil base module, the cross-sectional size of the magnetic yoke is equal to the size of the super-smooth sheet.

12. The electromagnetic generator of claim 9, wherein, The application further comprises a limiting part arranged around the magnet.

13. The electromagnetic generator of claim 1, wherein, An elastic connecting part is connected to the limiting part and the magnet. The magnet comprises at least two groups of magnetic blocks arranged in sequence in a horizontal direction, each group of the magnetic blocks comprises an N-pole magnetic block unit and an S-pole magnetic block unit, and the N-pole magnetic block unit and the S-pole magnetic block unit are arranged alternately in the horizontal direction. The application further comprises an isolation sheet arranged between two adjacent groups of the magnetic blocks.

14. An electromagnetic generator as claimed in any one of claims 1 to 13, wherein, ​ 15. The electromagnetic generator of claim 14, wherein, ​ ​

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