Air curtain device

Abstract

The utility model discloses an air curtain device which comprises an air curtain body and a flow guide assembly. The flow guide assembly and the air curtain body form an airflow channel, and the airflow channel is defined with an air inlet end and an air outlet end. The flow guide assembly comprises an inner extending part, an inner rotating part, an outer extending part, an outer rotating part and at least one air inlet part. A blocking groove is formed in the inner edge of the inner rotating part; the outer extension part and the inner extension part are arranged at an interval to form a buffer groove together; and the outer rotating part surrounds the periphery of the inner rotating part to form a flow guide channel which is communicated with the airflow channel and the buffer groove. A guide air flow flows in from each air inlet part, fills the blocking groove and the buffer groove, and flows into the air flow channel at the air inlet end and the air outlet end through the flow guide channel, so that the air flow flows in from the air inlet end and flows out from the air outlet end along a preset direction. Therefore, the air curtain device utilizes small air flow to drive large air flow to achieve the purposes of multiplying the air flow and saving energy consumption.

Description

TECHNICAL FIELD

[0001] The utility model relates to a gas curtain device, especially a gas curtain device capable of guiding a large air flow by a small air flow. BACKGROUND

[0002] With the rise of environmental awareness, the existing gas curtain device cancels the design of the internal filter material in order to meet the environmental protection requirement. In addition, the existing gas curtain device without internal filter material generates a strong wind wall through the design of the air knife to achieve the effect of the gas curtain. However, the existing gas curtain device generates a wind wall with too strong wind force, so that the wafer is easily dropped and broken due to the too large wind speed during the taking and placing process.

[0003] Therefore, the applicant believes that the above defects can be improved, and after careful research and cooperation with the application of scientific principles, the utility model is finally proposed, which is reasonable in design and effectively improves the above defects. CONTENT OF THE UTILITY MODEL

[0004] The utility model embodiment is to provide a gas curtain device, which can effectively improve the defects that the existing gas curtain device may generate.

[0005] The utility model embodiment discloses a gas curtain device, which comprises a gas curtain body provided with a side edge in the shape of a ring, and a flow guide assembly connected to the side edge and forming an air flow channel with the gas curtain body, wherein one end of the air flow channel is defined as an air inlet end, and the other end of the air flow channel is defined as an air outlet end. The flow guide assembly comprises an inner extension part extending from the side edge, an inner rotary part having one end connected to the inner extension part and the other end outwardly rotated to form a blocking groove, an outer extension part extending from the side edge of the gas curtain body, the outer extension part being spaced apart from the inner extension part to jointly form a buffer groove, an outer rotary part having one end connected to the outer extension part, the outer rotary part surrounding the periphery of the inner rotary part to form a flow guide channel, the flow guide channel being connected to the buffer groove and the air flow channel, and at least one air inlet part connected to the outer extension part and facing the inner extension part, the air inlet part being located between the blocking groove and the buffer groove. An air flow is introduced from the air inlet part, fills the blocking groove and the buffer groove, and flows into the air flow channel between the air inlet end and the air outlet end through the flow guide channel, so that an air flow flows from the air inlet end and flows out from the air outlet end in a predetermined direction.

[0006] Optionally, the gas curtain device further comprises a uniform plate body provided with a plurality of perforations and arranged at the side edge and located at the air outlet end of the air flow channel, so as to homogenize the air flow flowing out of the air flow channel.

[0007] Optionally, the inner extension extends away from the side edge and gradually away from the outer extension.

[0008] Optionally, the inner extension is annular and comprises a first extension connected to the side edge and extending along the predetermined direction, and a second extension connected to the other end of the first extension, the second extension extending away from the first extension and gradually away from the outer extension.

[0009] Optionally, when the air inlet portions are two, the two air inlet portions are respectively separated from the center line of the outer extension by a first arrangement distance and a second arrangement distance along a length direction perpendicular to the predetermined direction; wherein the first arrangement distance is between 90% and 110% of the second arrangement distance.

[0010] Optionally, the plurality of perforations are arranged in a honeycomb shape, and each of the perforations has a diameter between 1 mm and 30 mm and a depth between 1 μm and 10 μm.

[0011] Optionally, the outer rotation portion and the inner rotation portion are both annular, and the inner rotation portion is located within the space surrounded by the outer rotation portion.

[0012] Optionally, the outer rotation portion is annular and comprises a straight segment connected to the outer extension and extending along the predetermined direction, a perpendicular segment connected perpendicularly to the straight segment and extending along a direction perpendicular to the predetermined direction, and a curved segment connected to the perpendicular segment, the curved segment being curved along the outer edge of the inner rotation portion and gradually approaching the inner rotation portion along the direction of the outlet of the flow guide channel.

[0013] Optionally, the outer extension is annular and comprises a bending segment extending perpendicularly from the side edge, and an outer extension segment connected to the bending segment and extending along the predetermined direction and connected to the outer rotation portion.

[0014] Optionally, the inner edges of the side edges are separated by a first inner diameter along a length direction, and the inner edges of the side edges are separated by a second inner diameter along a width direction; wherein the first inner diameter is greater than the second inner diameter, and the length direction, the width direction, and the predetermined direction are perpendicular to each other.

[0015] Optionally, the first inner diameter has a size range between 100 mm and 700 mm, the second inner diameter has a size range between 30 mm and 100 mm, and the air inlet portions are arranged along the length direction.

[0016] In summary, the air curtain device disclosed by the embodiments of the present application can achieve the purposes of air flow multiplication and energy saving by utilizing small air flow to drive large air flow through the technical solutions of "rotating outward at the other end of the inner rotating part, and forming a blocking groove at the inner edge of the inner rotating part", "spacedly arranging the outer extending part and the inner extending part to jointly form a buffer groove", and "forming a flow guide channel around the outer periphery of the inner rotating part by the outer rotating part, which is communicated with the air flow channel and the buffer groove".

[0017] For further understanding of the features and technical contents of the present application, please refer to the following detailed description and drawings of the present application. However, the description and drawings are only used to illustrate the present application, and do not limit the protection scope of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 Structure diagram of the air curtain device of the embodiments of the present application.

[0019] Figure 2 Structure diagram of the air curtain device of the embodiments of the present application. Figure 1 Structure diagram of the air curtain device of the embodiments of the present application.

[0020] Figure 3 Structure diagram of the air curtain device of the embodiments of the present application. Figure 1 Schematic diagram of the sectional view of the air curtain device.

[0021] Figure 4 Schematic diagram of the sectional view of the air curtain device. Figure 1 Schematic diagram of the sectional view of the air curtain device.

[0022] Figure 5 Schematic diagram of the sectional view of the air curtain device. Figure 4 Schematic diagram of the sectional view of the air curtain device.

[0023] Figure 6 Schematic diagram of the sectional view of the air curtain device. Figure 1 Schematic diagram of the sectional view of the air curtain device. DETAILED DESCRIPTION

[0024] The following is to illustrate the embodiments of the air curtain device disclosed by the present application through specific embodiments. The advantages and effects of the present application can be understood by the contents disclosed in the present description. The present application can be implemented or applied through other different embodiments, and each detail in the present description can be modified and changed based on different viewpoints and applications without departing from the concept of the present application. In addition, the drawings of the present application are only simple schematic illustrations, and are not the depiction of actual size. The following embodiments will further illustrate the related technical contents of the present application, but the disclosed contents are not used to limit the protection scope of the present application.

[0025] It should be understood that although the terms "first", "second", "third", etc. can be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one signal from another signal, or one end (side) from another end (side). In addition, the term "or" used herein can include any combination of one or more associated listed items as appropriate.

[0026] Referring to Figures 1 to 6 The embodiment is shown in the accompanying drawings. It should be noted that the relevant quantities and shapes mentioned in the accompanying drawings of the embodiment are only used to specifically illustrate the implementation of the present application, so as to facilitate the understanding of the content of the present application, and are not used to limit the protection scope of the present application.

[0027] The embodiment discloses a gas curtain device 100 which can be applied to a wafer production and processing equipment. The gas curtain device 100 can be used to receive clean dry air (CDA) to generate a uniform gas curtain barrier in the embodiment.

[0028] It should be noted that in order to facilitate the understanding of the embodiment, the accompanying drawings show the partial structure of the gas curtain device 100, so as to clearly show the component structure and connection relationship of the gas curtain device 100, but the present application is not limited by the accompanying drawings. The components of the gas curtain device 100 and their connection relationship will be introduced respectively.

[0029] As Figures 1 to 3 shown, the gas curtain device 100 comprises a gas curtain body 1, a flow guide assembly 2 arranged at the top of the gas curtain body 1, and in another embodiment, the gas curtain device 100 is similar to the foregoing embodiment, the main difference is that the side edge 11 of the gas curtain body 1 is additionally provided with a uniform plate body 3, and as Figures 3 to 5 shown, the state is first mentioned.

[0030] The air curtain body 1 is substantially annular in shape, and the air curtain device 100 is surrounded by an air flow passage Ar1. In detail, the side edge 11 of the air curtain device 100 and the flow guide assembly 2 surround the air flow passage Ar1. In this embodiment, the air flow passage Ar1 defines an air inlet end 41 at the flow guide assembly 2, and defines an air outlet end 42 at the air curtain body 1; that is, the air inlet end 41 and the air outlet end 42 are located at two sides of the air flow passage Ar1. The air flow passage Ar1 is used for an air flow Ai1 to enter from the air inlet end 41, and the air flow Ai1 after entering flows out from the air outlet end 42 of the air flow passage Ar1 along a predetermined direction D. Therefore, the air curtain device 100 of this embodiment can make the flow field of the air flow Ai1 stable and reduce turbulence by the annular design of the air curtain body 1.

[0031] It should be noted that the inner edge of the side edge 11 of the air curtain body 1 is separated by a first inner diameter R1 along a length direction L perpendicular to the predetermined direction D. In addition, the inner edge of the side edge 11 of the air curtain body 1 is separated by a second inner diameter R2 along a width direction W perpendicular to the length direction L and the predetermined direction D. Among them, the first inner diameter R1 is greater than the second inner diameter R2, and the size range of the first inner diameter R1 is 100 millimeters (mm) to 700 millimeters (mm), and the size range of the second inner diameter R2 is 30 millimeters (mm) to 100 millimeters (mm), but the present application is not limited to this. For example, in other embodiments not shown in the present application, the first inner diameter R1 is smaller than the second inner diameter R2.

[0032] In detail, the whole of the air curtain body 1 is a long and narrow three-dimensional structure, and in the perspective of the default direction D, it is similar to the shape of a playground, so that the air curtain device 100 can make the air flow Ai1 flow in from the air inlet end 41 and flow out from the air outlet end 42 through the air flow passage Ar1 of the air curtain body 1, thereby generating an air curtain barrier which is substantially a gas wall.

[0033] As Figure 4 , Figure 1 and Figure 3As shown, the flow guide assembly 2 is annular and annularly arranged on the side edge 11 of the air curtain body 1, specifically, the flow guide assembly 2 is arranged on the side edge 11 and located on the side of the air inlet end 41 of the air flow passage Ar1. In this embodiment, a guide air flow Ai2 enters the flow guide assembly 2, and after the flow guide effect of the internal structure of the flow guide assembly 2, the guide air flow Ai2 stably flows into the air flow passage Ar1 between the air inlet end 41 and the air outlet end 42, so that the guide air flow Ai2 guides the air flow Ai1 to flow into the air flow passage Ar1 from the air inlet end 41 and flow out from the air outlet end 42 in a preset direction D. Therefore, the air curtain device 100 is designed according to Bernoulli's principle and flow channel to make the flow guide assembly 2 use small air flow to drive large air flow to achieve the purpose of air flow multiplication and energy saving.

[0034] Specifically, the flow guide assembly 2 comprises an inner extension 21, an inner turning portion 22 connected to the inner extension 21, an outer extension 23 connected to the inner extension 21 and the side edge 11 of the air curtain body 1, and an outer turning portion 24 connected to the outer extension 23.

[0035] In this embodiment, the shape of the inner extension 21 corresponds to the shape of the air curtain body 1 and is annular. The inner extension 21 extends from the side edge 11 of the air curtain body 1; specifically, one end of the inner extension 21 is connected to the side edge 11 of the air curtain body 1, and the other end of the inner extension 21 extends from the side edge 11 of the air curtain body 1 and is connected to the inner turning portion 22.

[0036] In this embodiment, the inner extension 21 comprises a first extension segment 211 and a second extension segment 212 connected to the first extension segment 211. One end of the first extension segment 211 is connected to the side edge 11 of the air curtain body 1 and extends generally in the preset direction D. The second extension segment 212 is connected to the other end of the first extension segment 211, extends away from the first extension segment 211, and gradually moves away from the outer extension 23. Therefore, the second extension segment 212 is arc-shaped, so that a guide air flow Ai2 output by the flow guide assembly 2 can be output from the air outlet end 42 of the air curtain body 1 along the arc surface of the second extension segment 212, but the present application is not limited thereto. For example, in other embodiments not shown in the present application, the inner extension 21 can be changed according to actual design requirements.

[0037] The cross section of the inner turning portion 22 is generally inverted U-shaped or hook-shaped (as shown in FIG. 2B), and the cross section of the outer turning portion 24 is generally inverted U-shaped or hook-shaped (as shown in FIG. 2B). Figure 4One end of the inner rotation portion 22 is connected to the inner extension portion 21, and the other end of the inner rotation portion 22 is outwardly rotated, so that an inner edge of the inner rotation portion 22 is formed with a blocking groove BL. In the embodiment, an opening of the blocking groove BL of the inner rotation portion 22 faces the inner extension portion 21, so as to avoid the airflow directly flowing out and losing the guiding effect, and the stable flow effect can be promoted, but the utility model is not limited thereto. For example, in other embodiments not shown in the utility model, the shape of the inner rotation portion 22 can be adjusted and changed according to actual design requirements.

[0038] In the embodiment, the outer extension portion 23 is annular corresponding to the shape of the air curtain body 1. The outer extension portion 23 extends from the side edge 11 of the air curtain body 1, and the outer extension portion 23 is arranged in a spaced manner with the inner extension portion 21 to form a buffer groove BF together; in addition, the guide airflow Ai2 enters the buffer groove BF and the blocking groove BL from the guide assembly 2, and then converges into the airflow channel Ar1 through the guide channel Ar2, so that the airflow Ai1 flows from the air inlet end 41 and flows out from the air outlet end 42 along the preset direction D.

[0039] In the embodiment, the outer extension portion 23 comprises a bending segment 231 and an outer extension segment 232 connected to the bending segment 231. The bending segment 231 extends perpendicularly from the side edge 11 of the air curtain body 1. In detail, one end of the bending segment 231 is connected to the side edge 11 of the air curtain body 1 and the inner extension portion 21, and the other end of the bending segment 231 extends perpendicularly from the side edge 11 and is connected to the outer extension segment 232, but the utility model is not limited thereto. For example, in other embodiments not shown in the utility model, the bending segment 231 can be adjusted according to actual design requirements.

[0040] The outer extension segment 232 extends along the preset direction D and is connected to the outer rotation portion 24. In detail, one end of the outer extension segment 232 is connected to the bending segment 231, and the other end of the outer extension segment 232 is connected to the outer rotation portion 24 along the preset direction D, but the utility model is not limited thereto. The outer extension segment 232 can be changed according to actual design requirements.

[0041] In the embodiment, the outer rotation portion 24 is annular corresponding to the shape of the air curtain body 1. The cross section of the outer rotation portion 24 is in the shape of an inverted U or a hook, in detail, one end of the outer rotation portion 24 is connected to the outer extension portion 23, and the outer rotation portion 24 surrounds the periphery of the inner rotation portion 22 to form a guide channel Ar2. The guide channel Ar2 is communicated between the airflow channel Ar1 and the buffer groove BF.

[0042] In this embodiment, the outer rotating portion 24 includes a straight segment 241, a vertical segment 242 perpendicularly connected to the straight segment 241, and a curved segment 243 connected to the vertical segment 242. The straight segment 241 is connected to the outer extension portion 23 and extends along the preset direction D. One end of the vertical segment 242 is connected to the straight segment 241, and the other end of the vertical segment 242 is connected to the curved segment 243. The curved segment bends along the outer edge of the inner rotating portion 22 and gradually approaches the inner rotating portion 22 along the direction of the outlet of the guide channel Ar2, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the structure of the outer rotating portion 24 can be adjusted and varied according to actual design requirements.

[0043] As described above, the inner rotating part 22 is located within the space surrounded by the outer rotating part 24, and the flow guiding component 2 forms the flow guiding channel Ar2 through the gap between the inner rotating part 22 and the outer rotating part 24.

[0044] Two air intakes 25 are disposed at both ends of the outer extension 23, and the two air intakes 25 face the inner extension 21. Each air intake 25 allows the guiding airflow Ai2 to flow into it; in other words, the guiding airflow Ai2 flows into the flow guide assembly 2 through the air intake 25. In this embodiment, the two air intakes 25 are arranged along the length direction L. Specifically, the two air intakes 25 are respectively separated from the centerline C of the outer extension 23 by a first arrangement distance CD1 and a second arrangement distance CD2 (e.g., ...) along the length direction L. Figure 4 (As shown); wherein the first configuration distance CD1 is between 90% and 110% of the second configuration distance CD2. Therefore, each of the two air intakes 25 provides the guiding airflow Ai2 to enter and flows out evenly from the outlet of the guide channel Ar2, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the two air intakes 25 can be configured along the width direction W, or adjusted according to actual design requirements. In addition, in one embodiment, the number of air intakes 25 may be one, whose structure is the same as the aforementioned two air intakes 25 embodiments, and can provide the guiding airflow Ai2 to enter, achieving the same effect, which will not be repeated here.

[0045] like Figure 2 and Figure 2As shown, the uniform plate body 3 has a plurality of perforations 31. The uniform plate body 3 is disposed at the side edge 11 of the air curtain body 1 and at the air outlet end 42 of the air flow passage Ar1, so as to homogenize the air flow Ai1 flowing through the uniform plate body 3, that is, to homogenize the air flow Ai1 flowing out of the air flow passage Ar1. In the present embodiment, the uniform plate body 3 and the air curtain body 1 are integrally formed as a single-piece structure, but the present application is not limited thereto. For example, in other embodiments not shown in the present application, the uniform plate body 3 can also be disposed at the air outlet end 42 of the air curtain body 1 in an assembled manner.

[0046] It should be noted that in the present embodiment, the plurality of perforations 31 of the uniform plate body 3 are arranged in a honeycomb shape. In detail, each of the perforations 31 is hexagonal, and each side of each of the perforations 31 is connected to another perforation 31. Therefore, the plurality of perforations 31 of the uniform plate body 3 can be uniformly arranged in the uniform plate body 3 through the honeycomb arrangement, so that the uniform plate body can homogenize the air flow Ai1, and the overall flow field of the air curtain device 100 can be homogenized to avoid uneven wind speed distribution.

[0047] It should be noted that the diameter of each of the perforations 31 of the uniform plate body 3 is between 1 millimeter (mm) and 30 millimeters (mm), and the depth DP of each of the perforations 31 is between 1 millimeter (mm) and 10 millimeters (mm).

[0048] As described above, and as shown in Figure 3 As shown, the two air inlet portions 25 each supply the guide air flow Ai2 to flow in, so that the guide air flow Ai2 flows in the flow guide passage Ar2 through the blocking groove BL and the buffer groove BF, and flows out of the air flow passage Ar1. In detail, after the guide air flow Ai2 enters from the two air inlet portions 25, the guide air flow Ai2 generally flows into the blocking groove BL and is guided to flow to the buffer groove BF through the rotation design of the blocking groove BL. Then, the guide air flow Ai2 flows from the buffer groove BF into the flow guide passage Ar2 and flows out of the outlet of the flow guide passage Ar2.

[0049] As described above, the air curtain device 100 of the present embodiment utilizes Bernoulli's law in combination with the flow channel design of the flow guide assembly 2, and utilizes the flow guide passage Ar2 formed by the gap between the outer rotation portion 24 and the inner rotation portion 22 to output the guide air flow Ai2, so as to drive the large air flow Ai1 to flow, generate a soft and stable flow field, and achieve the purposes of air flow multiplication and energy saving.

[0050] As shown in Figures 3 to 5 Figure 6As shown, the air curtain device 100 of the embodiment generates the airflow Ai1 with a wide range of laminar flow, and when the air curtain device 100 of the embodiment is applied to the semiconductor field, the airflow Ai1 can effectively block the gas exchange between the front opening unified pod (FOUP) and the equipment front end module (EFEM).

[0051] [Technical effects of the embodiment of the utility model]

[0052] In summary, the air curtain device disclosed by the embodiment of the utility model can achieve the purposes of airflow multiplication and energy saving by utilizing small airflow to drive large airflow through the technical solutions of "rotating outward at the other end of the inner rotating part, and forming a blocking groove at the inner edge of the inner rotating part", "spaced apart between the outer extending part and the inner extending part to jointly form a buffer groove", and "forming a flow guide channel around the outer periphery of the inner rotating part by the outer rotating part, which is communicated with the airflow channel and the buffer groove".

[0053] The above disclosed content is only optional and feasible embodiments of the utility model, and does not limit the patent range of the utility model, so any equivalent technical changes made by applying the content of the utility model specification and drawings are included in the patent range of the utility model.

Claims

1. A gas curtain device, characterized by The air curtain device comprises: an air curtain body provided with a side edge in a ring shape; and a flow guide assembly connected to the side edge to form an air flow passage with the air curtain body, the air flow passage defining an air inlet end at one end where the flow guide assembly is located and an air outlet end at one end where the air curtain body is located, the flow guide assembly comprising: an inner extension extending from the side edge; an inner turning portion connected at one end to the inner extension and turned outward at the other end to form a blocking groove; an outer extension extending from the side edge of the air curtain body, the outer extension being spaced apart from the inner extension to jointly form a buffer groove; an outer turning portion connected at one end to the outer extension, the outer turning portion surrounding the outer periphery of the inner turning portion to form a flow guide passage, the flow guide passage connecting the buffer groove and the air flow passage; and at least one air inlet portion connected to the outer extension and facing the inner extension, the air inlet portion being located between the blocking groove and the buffer groove; wherein a guide air flow is introduced from the air inlet portion to fill the blocking groove and the buffer groove, and is merged into the air flow passage between the air inlet end and the air outlet end through the flow guide passage, so that an air flow is introduced from the air inlet end and flows out of the air outlet end in a predetermined direction.

2. The gas curtain device of claim 1, wherein, The air curtain device further comprises a uniform plate body provided with a plurality of perforations and arranged at the air outlet end of the air flow passage to homogenize the air flow flowing out of the air flow passage.

3. The gas curtain device of claim 1, wherein, The inner extension extends away from the side edge and gradually away from the outer extension.

4. The gas curtain apparatus of claim 1, wherein, The inner extension is in a ring shape and comprises: a first extension connected at one end to the side edge and extending in the predetermined direction; and a second extension connected at the other end to the first extension, the second extension extending away from the first extension and gradually away from the outer extension.

5. The gas curtain apparatus of claim 1, wherein, When the air inlet portion is two, the two air inlet portions are spaced apart from the center line of the outer extension in a length direction perpendicular to the predetermined direction by a first arrangement distance and a second arrangement distance; wherein the first arrangement distance is between 90% and 110% of the second arrangement distance.

6. The gas curtain apparatus of claim 2, wherein, The plurality of perforations are arranged in a honeycomb shape, each perforation has a diameter between 1mm and 30mm, and each perforation has a depth between 1μm and 10μm.

7. The gas curtain apparatus of claim 1, wherein, The outer turning portion and the inner turning portion are both in a ring shape, and the inner turning portion is located within the space surrounded by the outer turning portion.

8. The gas curtain apparatus of claim 1, wherein, The outer turning portion is in a ring shape and comprises: a straight section connected to the outer extension and extending in the predetermined direction; a perpendicular section connected perpendicularly to the straight section and extending in a direction perpendicular to the predetermined direction; and a curved section connected to the perpendicular section, the curved section being curved along the outer edge of the inner turning portion and gradually approaching the inner turning portion in the direction of the outlet of the flow guide passage.

9. The gas curtain apparatus of claim 1, wherein, The outer extension is in a ring shape and comprises: a bent section extending perpendicularly from the side edge; and An outer extension section is connected to the bending section and extends along the predetermined direction and is connected to the outer turning portion.

10. The gas curtain apparatus of claim 1, wherein, Inner edges of the side edges are spaced apart by a first inner diameter along a length direction, and the inner edges of the side edges are spaced apart by a second inner diameter along a width direction; wherein the first inner diameter is greater than the second inner diameter, and the length direction, the width direction, and the predetermined direction are perpendicular to each other, respectively.

11. The gas curtain device of claim 10, wherein, The first inner diameter ranges from 100 mm to 700 mm, the second inner diameter ranges from 30 mm to 100 mm, and the air inlet portion is arranged along the length direction.

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