Double-barrel adsorption type tail gas treatment equipment

Abstract

The utility model relates to the technical field of tail gas treatment, in particular to double-barrel adsorption type tail gas treatment equipment which can reduce response requirements, cannot stop and can continuously treat tail gas, and a first adsorption barrel and a second adsorption barrel are consistent in structure and capacity. A first air inlet and a second air inlet are formed in the lower portions of the side walls of the first adsorption barrel and the second adsorption barrel respectively, and a first air outlet and a second air outlet are formed in the tops of the first adsorption barrel and the second adsorption barrel, provided with air inlet control valves and connected with an air inlet header pipe through a first air inlet pipe and a second air inlet pipe respectively. The first air outlet and the second air outlet are provided with air outlet control valves and are connected with an air outlet header pipe through a first air outlet pipe and a second air outlet pipe correspondingly, supports are arranged at the bottoms in the first adsorption barrel and the second adsorption barrel correspondingly, and each support comprises a disc provided with meshes and an annular plate fixed to the bottom of the disc. The lower part of the annular plate is supported on the inner wall of the bottom of the adsorption barrel I, and an air inlet circular hole is formed in the side part; an adsorbent is arranged above the bracket to form an adsorption area.

Description

TECHNICAL FIELD

[0001] The utility model relates to tail gas treatment technical field, concretely is a double-barreled adsorption type tail gas treatment equipment. BACKGROUND

[0002] Environmental protection has become a hot topic, and governments around the world spare no effort to protect the environment. In order to keep up with the trend of the times and achieve sustainable development, the control of pollution sources in various industries is becoming more and more stringent, especially the emission control of industrial waste gas.

[0003] In the semiconductor industry, a variety of special gases, large amounts of acids, bases and other chemicals, as well as organic solvents and volatile liquids are required. These industrial raw materials will produce waste gas in the semiconductor manufacturing process. Currently, chemical formula adsorption is one of the main means of waste gas treatment. The equipment mainly uses adsorbents to adsorb and treat industrial raw materials into tail gas that meets the emission standards, and is discharged through the plant end.

[0004] The existing adsorption type tail gas treatment equipment is in the form of a main barrel plus a bypass adsorption barrel, as shown in Figure 1 The processing capacity of the bypass adsorption barrel is limited after the main barrel adsorbent is consumed, and the main barrel needs to be replaced in a very short time, which requires a high response from personnel and also poses a risk of main machine downtime. SUMMARY

[0005] To solve the above technical problems, the utility model provides a double-barreled adsorption type tail gas treatment equipment, which can reduce the response requirement, does not have the problem of main machine downtime, and can continuously treat tail gas.

[0006] The technical scheme is as follows: a double-barreled adsorption type tail gas treatment equipment, characterized in that it comprises an adsorption barrel one and an adsorption barrel two, the structure and capacity of the adsorption barrel one and the adsorption barrel two are consistent, the lower side wall of the adsorption barrel one and the adsorption barrel two is respectively provided with an air inlet one and an air inlet two, and the top is provided with an air outlet one and an air outlet two, the air inlet one and the air inlet two are provided with air inlet control valves and are respectively connected to an air inlet main pipe through an air inlet pipe one and an air inlet pipe two, the air outlet one and the air outlet two are provided with air outlet control valves and are respectively connected to an air outlet main pipe through an air outlet pipe one and an air outlet pipe two, the bottom of the adsorption barrel one and the adsorption barrel two is provided with a support, the support comprises a disc with mesh holes and a circular ring plate fixed to the bottom of the disc, the lower part of the circular ring plate is supported on the inner wall of the bottom of the adsorption barrel one, and the side part is provided with an air inlet circular hole, and the upper part of the support is provided with an adsorbent to form an adsorption zone.

[0007] Further, a pressure detection table and a nitrogen valve are installed on the air inlet manifold, and a thermocouple sensor, a pressure relief valve and a gas detection port are installed on the air outlet manifold;

[0008] The observation window is provided with an elbow insertion tube, and a plurality of small holes are formed in the lower portion of the elbow insertion tube;

[0009] The adsorption barrel one and the adsorption barrel two are supported on a mobile platform with rollers at the bottom, and the mobile platform is placed on a base with a slope.

[0010] The top of the adsorption barrel one and the adsorption barrel two is a detachable cover plate.

[0011] After the exhaust gas enters the adsorption barrel one from the air inlet pipe one, it is uniformly adsorbed in the upper adsorption area after passing through the mesh holes on the ring plate, and is finally discharged from the total air outlet pipe after passing through the air outlet pipe one. When the adsorbent in the adsorption barrel one is saturated, the exhaust gas can be switched to the adsorption barrel two for adsorption, and the adsorbent in the adsorption barrel one can be replaced without stopping the gas. The normal service life of the adsorbent in the adsorption barrel is several months, which can effectively reduce the personnel demand and improve the safety. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 It is a structural schematic diagram of the utility model;

[0013] Figure 2 It is a structural schematic diagram of the adsorption barrel one;

[0014] Figure 3 It is a structural schematic diagram of the adsorption barrel two; Figure 2 It is a sectional view along A-A direction;

[0015] Figure 4 It is a sectional view along B-B direction; Figure 2 It is an enlarged view of the sectional view along B-B direction;

[0016] Figure 5 It is a structural schematic diagram of the support;

[0017] Figure 6 It is a structural schematic diagram of the elbow insertion tube. DETAILED DESCRIPTION

[0018] See Figures 1 to 6As shown, a double-barrel adsorption type tail gas treatment device includes an adsorption barrel one 1 and an adsorption barrel two 2, the structure and capacity of the adsorption barrel one 1 and the adsorption barrel two 2 are consistent, the lower side wall of the adsorption barrel one 1 and the adsorption barrel two 2 is respectively provided with an air inlet one 11 and an air inlet two 21, the top is provided with an air outlet one 12 and an air outlet two 22, the air inlet one 11 and the air inlet two 21 are provided with air inlet control valves 112 and are respectively connected to an air inlet main pipe 4 through an air inlet pipe one 13 and an air inlet pipe two 23, the air inlet pipe one 13 and the air inlet pipe two 23 are connected to the air inlet main pipe 4 through a three-way valve 3, the air outlet one 12 and the air outlet two 22 are provided with air outlet control valves 114 and are respectively connected to an air outlet main pipe through an air outlet pipe one 15 and an air outlet pipe two 25, the air outlet pipe one 15 and the air outlet pipe two 25 are respectively provided with two-way valves 14 and two-way valves 24, the bottom of the adsorption barrel one 1 and the adsorption barrel two 2 is provided with a support 16, the support 16 includes a disc 161 with mesh holes and a circular ring plate 162 fixed to the bottom of the disc 161, the lower part of the circular ring plate 162 is supported on the inner wall of the bottom of the adsorption barrel one 1 and the side is provided with an air inlet circular hole 163, the upper part of the support 16 is provided with an adsorbent to form an adsorption zone 17, the adsorption zone 17 is placed in the adsorbent to adsorb the tail gas.

[0019] A pressure detector 41 and a nitrogen valve 42 are installed on the air inlet main pipe 4, the nitrogen valve 42 can be used to detect whether the gas leaks, the nitrogen gas is filled into the adsorption barrel one 1 to make the internal pressure positive, then the pressure is maintained to see whether the gas leaks; a thermocouple sensor 51, a pressure relief valve 52 and a gas detection port 53 are installed on the air outlet main pipe 5;

[0020] An observation window 18 is provided on the adsorption barrel one 1 and the adsorption barrel two 2, a bend insertion pipe 19 is provided in the observation window 18, a plurality of small holes are provided below the bend insertion pipe 19;

[0021] The adsorption barrel one 1 and the adsorption barrel two 2 are supported on a mobile platform 110 with rollers at the bottom, the mobile platform 110 is placed on a base 6 with a slope;

[0022] The top of the adsorption barrel one 1 and the adsorption barrel two 2 is a detachable cover plate 111, the inside of the adsorption barrel one 1 and the adsorption barrel two 2 can be cleaned and replaced by opening the cover plate 111.

[0023] The tail gas is sent from the intake manifold 4. Under normal circumstances, the three-way valve 3 connects the intake manifold 4 and the intake pipe 1 3, the intake pipe 2 3 is in a closed state, the intake control valve 1 12 at the intake port 1 1 is opened, all the tail gas is sent into the adsorption barrel 1, after passing through the disc 1 61 with a mesh, the gas is uniformly sent into the adsorption zone for adsorption, the clean tail gas after adsorption passes through the outlet 1 2, the two-way valve 1 4, the outlet pipe 1 5 to the outlet manifold 5 and is sent out; when the adsorbent in the adsorption zone is saturated, the three-way valve 3 is opened, and the tail gas is adsorbed through the adsorption barrel 2. At this time, the adsorbent in the adsorption barrel 1 can be replaced and treated.

[0024] Before replacing the adsorbent in the adsorption barrel 1, a nitrogen purge can be arranged through the intake pipe 1 3 to purge the adsorption barrel 1 and the corresponding pipeline, to ensure that the residual gas is completely discharged and the adsorbent is safely replaced; after the purge is completed, the intake control valve 1 12 and the outlet control valve 1 13 are closed, the pipeline is removed, the adsorption barrel 1 is removed through the base 6 of the equipment, then the cover plate 1 1 1 is removed to take out the saturated adsorbent inside, the new adsorbent is put in, the cover plate 1 1 1 is covered, the adsorption barrel 1 is moved back to the original position and connected with the pipeline, the intake control valve 1 12 and the outlet control valve 1 13 are opened, and the normal use state is restored.

[0025] Under normal working condition, when the adsorbent in the adsorption barrel 1 is saturated, the three-way valve 3 can be automatically controlled to switch through the set program, the equipment is still in normal working condition, and the equipment can also work normally when the adsorption barrel is replaced, without stopping the main machine.

[0026] The above only takes the normal working of the adsorption barrel 1 as an example, the adsorption barrel 1 and the adsorption barrel 2 have the same function, without switching back to the adsorption barrel 1 after replacing the adsorption barrel 1, when the adsorption barrel 2 works normally and the adsorbent is saturated, the three-way valve 3 can be automatically controlled to switch to the adsorption barrel 1 through the set program.

Claims

1. A twin-vessel adsorptive off-gas treatment apparatus characterized by comprising: It includes adsorption barrel one and adsorption barrel two, the structure and capacity of the adsorption barrel one and the adsorption barrel two are consistent, the lower side wall of the adsorption barrel one and the adsorption barrel two is respectively provided with air inlet one and air inlet two, the top is provided with air outlet one and air outlet two, the air inlet one and the air inlet two are provided with air inlet control valve and are connected with air inlet main pipe through air inlet pipe one and air inlet pipe two respectively, the air outlet one and the air outlet two are provided with air outlet control valve and are connected with air outlet main pipe through air outlet pipe one and air outlet pipe two respectively, the bottom of the adsorption barrel one and the adsorption barrel two is provided with support, the support includes disc with mesh and annular plate fixed to the bottom of the disc, the lower part of the annular plate is supported on the inner wall of the bottom of the adsorption barrel one and the side is provided with air inlet circular hole, the upper part of the support is provided with adsorbent to form adsorption zone.

2. The twin-vessel adsorptive off-gas treatment apparatus according to claim 1, wherein The air inlet main pipe is provided with pressure detection table and nitrogen valve, the air outlet main pipe is provided with thermocouple sensor, pressure relief valve and gas detection port.

3. The twin-vessel adsorptive off-gas treatment apparatus according to claim 1, wherein The adsorption barrel one and the adsorption barrel two are provided with observation window, the observation window is provided with elbow insertion tube, the lower part of the elbow insertion tube is provided with multiple small holes.

4. The twin-vessel adsorptive off-gas treatment apparatus according to claim 1, wherein The adsorption barrel one and the adsorption barrel two are supported on the mobile platform with roller at the bottom, the mobile platform is placed on the base with slope.

5. The twin-vessel adsorptive off-gas treatment device according to claim 1, wherein The top of the adsorption barrel one and the adsorption barrel two is detachable cover plate.

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