Novel nozzle with flange

By designing a new flange nozzle and optimizing the structure of the air outlet and mounting ring, the problem of uneven air output from the nozzle leading to product quality differences was solved, achieving uniform gas output and impurity filtration, thus improving the nozzle's performance and product quality stability.

CN223669419UActive Publication Date: 2025-12-16SHANGHAI JINGMENG SILICON CORP
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Patent Information

Application Number
CN202423078266.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-13
Publication Date
2025-12-16
Estimated Expiration
2034-12-13

AI Technical Summary

Technical Problem

The existing 12-inch epitaxial wafer's reaction gas pipeline has a design flaw that causes thermal expansion and contraction deformation, resulting in uneven gas output from the nozzles and leading to product quality differences.

Method used

A novel flange nozzle is designed, comprising a flange, a nozzle body, and a nozzle head. The nozzle body has an air outlet groove and an air outlet hole, while the flange has a vent hole and a mounting ring. The integrated molding process improves strength and sealing performance, and the snap-fit ​​assembly facilitates the disassembly and replacement of the mounting ring and the filter screen.

Benefits of technology

The optimized air outlet design reduces product quality variations, and the filter screen removes impurities, preventing clogging and improving the nozzle's usability and product quality stability.

✦ Generated by Eureka AI based on patent content.

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    Figure CN223669419U_ABST
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Abstract

The utility model belongs to the technical field of nozzles, and particularly relates to a novel flange nozzle which comprises a flange plate, the top of the flange plate is fixedly connected with a nozzle body, the nozzle body comprises a connecting body and a spray head, the spray head is fixedly connected to the top of the connecting body, and the connecting body is fixedly connected to the top of the flange plate. An air outlet groove is formed in the connecting body, the interior of the air outlet groove communicates with the interior of the spray head, and a plurality of through air outlet holes are sequentially formed in the lower surface of the interior of the air outlet groove from left to right; the nozzle and an external pipeline are fixedly installed through the flange plate, then three air outlet holes are selected from the multiple air outlet holes to conduct auxiliary gas combination with the other three air outlet holes, and therefore the ten air outlet holes are arranged to be seven air outlet holes for air outlet, the design of the air outlet holes is optimized, flow distribution is facilitated, and the service life of the nozzle is prolonged. And then the air is sprayed out through the air outlet groove and the nozzle, so that the product quality difference is reduced.
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Description

TECHNICAL FIELD

[0001] The utility model relates to nozzle technical field, concretely is a flange new type nozzle. BACKGROUND

[0002] Flange nozzle is a kind of connecting piece commonly used for conveying gas, smoke and other media, is usually installed on pipeline or equipment, is used to realize the conveying and discharge of medium. Flange nozzle passes through its special structure design, so that medium can be sprayed by built-in throat pipe, forms nozzle effect, satisfies the specific process flow requirement. Flange nozzle is a kind of equipment assembly that is improved and innovated on the basis of ordinary flange, increases nozzle function. Flange new type nozzle is widely used in chemical industry, pharmacy, metallurgy, electronics, environmental protection and many other fields.

[0003] However, the existing 12-inch epitaxial machine reaction gas pipeline is deformed due to design defects and thermal expansion and contraction for a long time, and the nozzle gas is not uniform, which causes turbulence, so that the quality of the product is different, therefore, a flange new type nozzle is provided for the above problems. UTILITY MODEL CONTENT

[0004] In order to make up for the deficiencies of the prior art, solve the problem that the nozzle gas is not uniform, which causes turbulence, so that the quality of the product is different, the utility model provides a flange new type nozzle.

[0005] The utility model solves the technical scheme that the utility model discloses a flange new type nozzle, including flange plate, the flange plate top fixedly connected with nozzle body,

[0006] The nozzle body includes a connecting body and a spray head, the spray head is fixedly connected to the top of the connecting body, the connecting body is fixedly connected to the top of the flange plate, a gas outlet groove is formed in the connecting body, the gas outlet groove is in communication with the interior of the spray head, a plurality of gas outlet holes are formed in the lower surface of the gas outlet groove from left to right, a through hole is formed in the center of the flange plate, and the through hole is in communication with the gas outlet hole.

[0007] Preferably, the flange plate, the connecting body and the spray head are integrally formed.

[0008] Preferably, the through hole is provided with a mounting ring, the mounting ring is fixedly connected with a filter screen, the flange plate is provided with a clamping assembly, and the mounting ring is mounted on the flange plate through the clamping assembly.

[0009] Preferably, the clamping assembly comprises a plurality of sliding grooves evenly distributed in the flange plate, the sliding grooves are communicated with the air holes, sliding blocks are slidably connected in the sliding grooves, springs are fixedly connected between the sliding blocks and the sliding grooves, a plurality of clamping grooves are evenly distributed on the outer surface of the mounting ring, the clamping blocks are fixedly connected on one side of the sliding blocks, and the clamping blocks are clamped in the clamping grooves.

[0010] Preferably, the outer surface of the clamping block and the inner side wall of the clamping groove are both arc-shaped.

[0011] Preferably, a plurality of mounting holes are evenly distributed and penetratingly arranged in the flange plate.

[0012] Preferably, the plurality of mounting holes and the plurality of sliding grooves are staggered.

[0013] The utility model discloses the beneficial effect lies in:

[0014] 1. The utility model discloses a flange plate is fixed to the nozzle and external pipeline, and then selects three gas outlet holes in a plurality of gas outlet holes to carry out auxiliary gas combination with another three gas outlet holes, so that ten gas outlet holes are set to seven gas outlet holes, and the gas outlet hole design is optimized, and the flow distribution is convenient, then the gas is sprayed out through the gas groove and the spray head, thereby reducing product quality difference.

[0015] 2. The utility model discloses the filter screen in the mounting ring interior can filter the impurity in the gas that the nozzle body sprays, and avoids causing the nozzle body to be blocked, and simultaneously through the clamping assembly, the dismounting and reinstallation between the mounting ring and the filter screen and the flange plate are convenient, and the filter screen is convenient to dismount, clean and replace, thereby making the nozzle can satisfy more use demand, and the practicality is stronger. ACCURACY

[0016] In order to more clearly illustrate the technical scheme in the embodiment of the utility model or prior art, the following will be briefly introduced the drawing needed to be used in the embodiment or prior art description, obviously, the drawing in the following description only some embodiments of the utility model, for those skilled in the art, under the premise of not paying the creative labor, still can obtain other drawings according to these drawings.

[0017] Figure 1 It is the three-dimensional structure schematic diagram in embodiment one;

[0018] Figure 2 It is the bottom structure schematic diagram in embodiment one;

[0019] Figure 3 It is the local right section structure schematic diagram in embodiment one;

[0020] Figure 4 for example one Figure 3 enlarged schematic view of the structure at A in example one;

[0021] Figure 5 partial cross-sectional schematic view of example one.

[0022] In the figure: 1, flange; 2, mounting hole; 3, nozzle body; 31, nozzle; 32, connecting body; 33, gas outlet groove; 34, gas outlet hole; 4, filter screen; 5, clamping assembly; 51, clamping groove; 52, clamping block; 53, sliding block; 54, sliding groove; 55, spring; 6, air hole; 7, mounting ring. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0024] Example one

[0025] Please refer to Figures 1-5 A new type of flange nozzle is shown, which comprises a flange 1, and the flange 1 is fixedly connected with a nozzle body 3 at the top;

[0026] The nozzle body 3 comprises a connecting body 32 and a nozzle 31, the nozzle 31 is fixedly connected at the top of the connecting body 32, the connecting body 32 is fixedly connected at the top of the flange 1, the connecting body 32 is internally provided with a gas outlet groove 33, the gas outlet groove 33 is internally communicated with the nozzle 31, a plurality of gas outlet holes 34 are sequentially provided in the gas outlet groove 33 from left to right, a through air hole 6 is provided in the center of the flange 1, the air hole 6 is internally communicated with the gas outlet hole 34; during work, the nozzle is first fixedly installed with the external pipeline through the flange 1, and after installation, the gas is made to enter the inside of the flange 1 through the air hole 6 of the flange 1, then the gas is made to enter the inside of the nozzle body 3 through the air hole 6, and the gas is discharged through the gas outlet hole 34, three gas outlet holes 34 are selected in the plurality of gas outlet holes 34 to be combined with another three gas outlet holes 34 for auxiliary gas, so that ten gas outlet holes 34 are set to seven gas outlet holes 34 for gas discharge, the design of the gas outlet hole 34 is optimized, and the flow distribution is facilitated, and then the gas is sprayed through the gas outlet groove 33 and the nozzle 31, thereby reducing the product quality difference.

[0027] The flange plate 1 is integrally formed with the connecting body 32 and the nozzle head 31; during operation, the integrally formed nozzle head has high strength and good overall sealing performance, thereby improving the use effect of the nozzle head.

[0028] The mounting ring 7 is internally fixedly connected with the filter screen 4, the flange plate 1 is internally provided with the clamping assembly 5, and the mounting ring 7 is mounted with the flange plate 1 through the clamping assembly 5; during operation, the impurities in the gas sprayed by the nozzle body 3 can be filtered through the filter screen 4 in the mounting ring 7, and the nozzle body 3 is prevented from being blocked, and meanwhile, the mounting ring 7, the filter screen 4 and the flange plate 1 can be disassembled and reassembled through the clamping assembly 5, and the filter screen 4 can be disassembled, cleaned and replaced.

[0029] The clamping assembly 5 comprises a plurality of sliding grooves 54 which are evenly distributed in the flange plate 1 and are in communication with the air holes 6, the sliding grooves 54 are internally and slidably connected with sliding blocks 53, the sliding blocks 53 and the sliding grooves 54 are fixedly connected with springs 55, the mounting ring 7 is externally provided with a plurality of clamping grooves 51 which are evenly distributed, the sliding blocks 53 are fixedly connected with clamping blocks 52 on one side, and the clamping blocks 52 are clamped in the clamping grooves 51; during operation, the clamping blocks 52 in the clamping grooves 51 are extruded by moving the mounting ring 7, the clamping blocks 52 are extruded to contract the sliding blocks 53 and the springs 55, and then the mounting ring 7 can be removed from the air holes 6 in the flange plate 1 after the clamping blocks 52 are completely contracted in the sliding grooves 54, the filter screen 4 in the mounting ring 7 can be disassembled, cleaned and replaced, thereby meeting more use requirements of the nozzle and having high practicability.

[0030] The outer surface of the clamping block 52 and the inner side wall of the clamping groove 51 are both arc-shaped; during operation, the clamping block 52 and the clamping groove 51 can be conveniently clamped and separated.

[0031] Embodiment two

[0032] Please refer to Figure 5 As another embodiment of the present application, compared with embodiment one, the flange plate 1 is internally provided with a plurality of mounting holes 2 which are evenly distributed and are in penetration; during operation, the mounting holes 2 are penetrated by external bolts to fix and mount the nozzle.

[0033] The mounting holes 2 and the sliding grooves 54 are staggered; during operation, the mounting holes 2 and the sliding grooves 54 are prevented from being disordered to affect their respective functions.

[0034] In the description of the specification, the description of the terms "one embodiment", "an example", "a specific example" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the utility model. In the specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0035] The basic principle, main features and advantages of the utility model are shown and described above. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and the description in the specification are only to illustrate the principle of the utility model, and various changes and improvements of the utility model can be made without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model claimed.

Claims

1. A flange new type nozzle, comprising a flange plate (1), the top of which is fixedly connected with a nozzle body (3); characterized in that; The nozzle body (3) comprises a connecting body (32) and a spray head (31), the top of which is fixedly connected with the connecting body (32), the top of which is fixedly connected with the flange plate (1), the inside of which is provided with an air outlet groove (33), the inside of which communicates with the inside of the spray head (31), the inside of the air outlet groove (33) is provided with a plurality of air outlet holes (34) from left to right, the inside of the flange plate (1) is provided with a through air hole (6), the inside of which communicates with the inside of the air outlet hole (34).

2. A flangeless nozzle according to claim 1, characterized in that: The flange plate (1), the connecting body (32) and the spray head (31) are integrally formed.

3. A flangeless nozzle according to claim 2, characterized in that: The inside of the air hole (6) is provided with a mounting ring (7), the inside of which is fixedly connected with a filter screen (4), the inside of the flange plate (1) is provided with a clamping assembly (5), the mounting ring (7) is mounted with the flange plate (1) through the clamping assembly (5).

4. A flangeless nozzle according to claim 3, characterized in that: The clamping assembly (5) comprises a plurality of sliding grooves (54) provided in the inside of the flange plate (1) and uniformly distributed, the inside of which communicates with the inside of the air hole (6), the inside of the sliding groove (54) is slidably connected with a sliding block (53), the sliding block (53) and the sliding groove (54) are fixedly connected with a spring (55), the outer surface of the mounting ring (7) is provided with a plurality of uniformly distributed clamping grooves (51), one side of the sliding block (53) is fixedly connected with a clamping block (52), the outer surface of the clamping block (52) is clamped in the inside of the clamping groove (51).

5. A flangeless nozzle according to claim 4, characterized in that: The outer surface of the clamping block (52) and the inner side wall of the clamping groove (51) are both provided in arc shape.

6. A flangeless nozzle according to claim 5, characterized in that: The inside of the flange plate (1) is provided with a plurality of uniformly distributed and through mounting holes (2).

7. A flangeless nozzle according to claim 6, characterized in that: A plurality of mounting holes (2) and a plurality of sliding grooves (54) are staggered.