Micro-channel structure for piezoelectric atomization device

Abstract

The utility model discloses a micro-channel structure for a piezoelectric atomization device, which relates to the technical field of atomization devices and comprises a channel plate, a spray orifice plate and a cover plate. A liquid inlet and a liquid outlet are formed in the two ends of the orifice plate respectively, a runner groove and an injection boss are arranged on the front face of the runner plate in the length direction, a pressure cavity liquid inlet hole is formed in the runner groove, and a pressure cavity liquid outlet hole is formed in the injection boss; pressure cavities are formed in the back face of the runner plate, each pressure cavity is correspondingly communicated with one pressure cavity liquid inlet hole and one pressure cavity liquid outlet hole, and liquid enters from the pressure cavity liquid inlet holes, passes through the pressure cavities and then is sprayed out from the pressure cavity liquid outlet holes; the spray orifice plate is arranged on the front surface of the runner plate, and spray orifices communicated with the pressure cavity liquid outlet holes are formed in the spray orifice plate; the cover plate is arranged on the back face of the runner plate and used for blocking the pressure cavity. The cover plate is further used for being connected with the piezoelectric ceramic driver. According to the micro-channel structure for the piezoelectric atomization device, the channel structure can be simplified, and the cost can be reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to atomization device technical field, especially a kind of micro-channel structure for piezoelectric atomization device. BACKGROUND

[0002] Industrial piezoelectric atomization technology application field is more and more widely, as industrial piezoelectric atomization cost is closely related to production cost.More and more functional coatings need to be sprayed by piezoelectric atomization device to realize, some special coatings contain some strong corrosive liquid, shorten the service life of atomizer.

[0003] Summarized above, provide a kind of piezoelectric atomization device with low cost and strong acid and alkali corrosion resistance micro-channel structure is the technical problem that the technical personnel in the field urgently need to solve. UTILITY MODEL CONTENT

[0004] The utility model discloses a kind of piezoelectric atomization device with micro-channel structure, to solve the problem existing in the prior art described above, can simplify flow channel structure, reduce cost, and have certain strong acid and alkali corrosion resistance, prolong service life.

[0005] To achieve the above object, the utility model provides the following scheme:

[0006] The utility model provides a kind of piezoelectric atomization device with micro-channel structure, including flow channel plate, spray orifice plate and cover plate;

[0007] The two ends of the spray orifice plate are respectively provided with liquid inlet and liquid outlet, the front surface of the flow channel plate is provided with flow channel groove and injection boss along the length direction, the flow channel groove and injection boss are located between the liquid inlet and the liquid outlet, the flow channel groove is opened downward from the top end surface of the flow channel plate and is communicated with the liquid inlet and the liquid outlet, the top end surface of the injection boss is flush with the top end surface of the flow channel plate, the flow channel groove is provided with pressure cavity liquid inlet hole, the injection boss is provided with pressure cavity liquid outlet hole;The back surface of the flow channel plate is provided with pressure cavity, the pressure cavity is opened downward from the back end surface of the flow channel plate, each pressure cavity is communicated with one pressure cavity liquid inlet hole and one pressure cavity liquid outlet hole, liquid is sprayed by the pressure cavity liquid outlet hole after entering the pressure cavity liquid inlet hole and passing through the pressure cavity;

[0008] The spray orifice plate is arranged on the front surface of the flow channel plate, and the spray orifice plate is provided with spray holes communicated with the pressure cavity liquid outlet hole.

[0009] The cover plate is arranged on the back surface of the flow channel plate and is used for plugging the pressure cavity, and the cover plate is also used for being connected with the piezoelectric ceramic driver.

[0010] Preferably, the flow channel plate is a rectangular silicon substrate.

[0011] Preferably, the orifice plate is a glass plate.

[0012] Preferably, the cover plate is a glass plate.

[0013] Preferably, the flow channel plate is connected with the orifice plate by anodic bonding.

[0014] Preferably, the flow channel plate is connected with the cover plate by anodic bonding.

[0015] Preferably, the flow channel grooves are provided in two and symmetrically arranged on both sides of the ejection boss.

[0016] Preferably, a row of pressure cavity liquid inlet holes is arranged in each flow channel groove along the length direction.

[0017] Preferably, two rows of pressure cavity liquid outlet holes are arranged on the ejection boss, each pressure cavity liquid outlet hole in the two rows of pressure cavity liquid outlet holes is arranged opposite to each pressure cavity liquid inlet hole in the adjacent row of pressure cavity liquid inlet holes in the transverse direction, and each two opposite pressure cavity liquid inlet holes and pressure cavity liquid outlet holes communicate one pressure cavity.

[0018] Preferably, the pressure cavity is a rectangular groove structure.

[0019] The utility model discloses the following technical effects are obtained relative to the prior art:

[0020] The piezoelectric atomization device micro-flow channel structure in the utility model realizes the simplification of flow channel structure through structure design, reduces cost through the simplification of flow channel structure, and the simplified structure is easy to produce, and product qualification rate can be improved.

[0021] Further, by using a glass plate and a silicon substrate and using anodic bonding, the use of adhesive bonding is avoided, which to some extent plays a role in resisting strong acid and alkali corrosion and prolongs the service life. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiments will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creating creative labor.

[0023] Figure 1 It is a front perspective view of the piezoelectric atomization device micro-flow channel structure in the utility model.

[0024] Figure 2 It is a back perspective view of the piezoelectric atomization device micro-flow channel structure in the utility model.

[0025] Figure 3 It is a front view angle three-dimensional structure schematic diagram of the runner plate in the utility model;

[0026] Figure 4 It is a back view angle three-dimensional structure schematic diagram of the runner plate in the utility model;

[0027] In the figure: 1, runner plate; 2, jet orifice plate; 3, cover plate; 4, liquid inlet; 5, liquid outlet; 6, runner groove; 7, jet boss; 8, pressure chamber liquid inlet hole; 9, pressure chamber liquid outlet hole; 10, pressure chamber; 11, jet orifice. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the utility model will be apparently and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0029] The utility model aims at providing a kind of micro flow channel structure for piezoelectric atomization device to solve the problems existing in prior art.

[0030] To make the above-mentioned purposes, features and advantages of the utility model more apparent and easy to understand, the utility model will be further described in detail below with reference to the drawings and specific embodiments.

[0031] The micro flow channel structure for piezoelectric atomization device in the embodiment, as shown in FIG. Figures 1-4 It includes runner plate 1, jet orifice plate 2 and cover plate 3;

[0032] The two ends of jet orifice plate 2 are respectively provided with liquid inlet 4 and liquid outlet 5, the front of runner plate 1 is provided with runner groove 6 and jet boss 7 along length direction, runner groove 6 and jet boss 7 are located between liquid inlet 4 and liquid outlet 5, runner groove 6 is opened downward from the top end face of runner plate 1 and is communicated with liquid inlet 4 and liquid outlet 5, the top end face of jet boss 7 is flush with the top end face of runner plate 1, pressure chamber liquid inlet hole 8 is arranged in runner groove 6, pressure chamber liquid outlet hole 9 is arranged on jet boss 7; The back of runner plate 1 is provided with pressure chamber 10, pressure chamber 10 is opened downward from the back end face of runner plate 1, each pressure chamber 10 corresponds to communicate one pressure chamber liquid inlet hole 8 and one pressure chamber liquid outlet hole 9, liquid enters from pressure chamber liquid inlet hole 8 and is sprayed from pressure chamber liquid outlet hole 9 after passing through pressure chamber 10;

[0033] Jet orifice plate 2 is arranged on the front of runner plate 1, and jet orifice 11 is arranged on jet orifice plate 2 and communicated with pressure chamber liquid outlet hole 9;

[0034] Cover plate 3 is arranged on the back of flow channel plate 1 for plugging pressure cavity, and cover plate 3 is also used for being connected with piezoelectric ceramic driver.

[0035] In the embodiment, flow channel plate 1 is a rectangular silicon substrate, jet orifice plate 2 is a glass plate, and cover plate 3 is a glass plate; flow channel plate 1 and jet orifice plate 2 are connected through anode bonding, and flow channel plate 1 and cover plate 3 are connected through anode bonding; glass and silicon-based materials are used, and anode bonding is used, so that the use of adhesive is avoided, and corrosion resistance to strong acid and alkali is achieved to a certain extent.

[0036] In the embodiment, two flow channel grooves 6 are symmetrically arranged on both sides of jet boss 7, one row of pressure cavity inlet holes 8 is arranged in each flow channel groove 6 along the length direction, two rows of pressure cavity outlet holes 9 are arranged on jet boss 7, each pressure cavity outlet hole 9 in the two rows of pressure cavity outlet holes 9 is arranged opposite to each pressure cavity inlet hole 8 in the adjacent row of pressure cavity inlet holes 8 in the transverse direction, and each two opposite pressure cavity inlet hole 8 and pressure cavity outlet hole 9 communicate one pressure cavity 10.

[0037] In the embodiment, pressure cavity 10 is a rectangular groove structure.

[0038] In the embodiment, liquid inlet 4, liquid outlet 5 and flow channel groove 6 are processed through a dry etching process, pressure cavity 10 is processed through wet etching or laser cutting, and pressure cavity inlet hole 8, pressure cavity outlet hole 9 and jet orifice 11 on jet orifice plate 2 are processed through laser induction combined with a wet etching process.

[0039] In the piezoelectric atomization device, the glass cover plate 3 on the side of the pressure cavity contacts the piezoelectric ceramic driver of the piezoelectric atomization device during use, the liquid needing to be atomized enters the micro-flow channel structure through liquid inlet 4, enters the back pressure cavity 10 through the pressure cavity inlet hole 8 on flow channel groove 6, atomizes the liquid in pressure cavity 10 under the high-frequency vibration of the piezoelectric ceramic, and is sprayed out through pressure cavity outlet hole 9 and jet orifice 11 on jet orifice plate 2.

[0040] The principle and implementation mode of the specific examples are described in the utility model, and the above embodiment is only used for helping to understand the method and core idea of the utility model; meanwhile, according to the idea of the utility model, the specific implementation mode and application range will be changed by the general technical personnel in the field. In conclusion, the content of the specification should not be understood as the limitation of the utility model.

Claims

1. A microfluidic structure for a piezoelectric atomization device, characterized by: The flow channel plate, the jet orifice plate and the cover plate are included. The flow channel plate is provided with flow channel grooves and jet bosses along the length direction on the front surface, the flow channel grooves and the jet bosses are located between the liquid inlet and the liquid outlet, the flow channel grooves are opened downward from the top surface of the flow channel plate and communicate with the liquid inlet and the liquid outlet, the top surface of the jet boss is flush with the top surface of the flow channel plate, the flow channel grooves are provided with pressure chamber liquid inlet holes, and the jet boss is provided with pressure chamber liquid outlet holes; the back surface of the flow channel plate is provided with pressure chambers, the pressure chambers are opened downward from the back surface of the flow channel plate, each pressure chamber corresponds to one pressure chamber liquid inlet hole and one pressure chamber liquid outlet hole, and liquid is sprayed out from the pressure chamber liquid outlet holes after entering the pressure chamber liquid inlet holes and passing through the pressure chambers. The jet orifice plate is arranged on the front surface of the flow channel plate, and the jet orifice plate is provided with jet orifices communicating with the pressure chamber liquid outlet holes. The cover plate is arranged on the back surface of the flow channel plate and is used for plugging the pressure chambers, and the cover plate is also used for connecting with the piezoelectric ceramic driver. 2.The microfluidic structure for a piezoelectric atomization device according to claim 1, wherein: The flow channel plate is a rectangular silicon substrate. 3.The microfluidic structure for a piezoelectric atomization device according to claim 2, characterized in that: The jet orifice plate is a glass plate. 4.The microfluidic structure for a piezoelectric atomization device according to claim 2, wherein: The cover plate is a glass plate. 5.The microfluidic structure for piezoelectric atomization device according to claim 3, characterized in that: The flow channel plate and the jet orifice plate are connected through anode bonding. 6.The microfluidic structure for piezoelectric atomization device according to claim 4, characterized in that: The flow channel plate and the cover plate are connected through anode bonding. 7.The microfluidic structure for a piezoelectric atomization device according to claim 1, wherein: The flow channel grooves are provided with two and are symmetrically arranged on both sides of the jet boss. 8.The microfluidic structure for a piezoelectric atomization device according to claim 1, wherein: Each flow channel groove is provided with a row of pressure chamber liquid inlet holes along the length direction. 9.The microfluidic structure for a piezoelectric atomization device according to claim 1, wherein: The jet boss is provided with two rows of pressure chamber liquid outlet holes, each pressure chamber liquid outlet hole in the two rows of pressure chamber liquid outlet holes is arranged opposite to each pressure chamber liquid inlet hole in the adjacent row of pressure chamber liquid inlet holes in the transverse direction, and each two opposite pressure chamber liquid inlet holes and pressure chamber liquid outlet holes communicate one pressure chamber. 10.The microfluidic structure for piezoelectric atomization device according to claim 9, wherein: The pressure chamber is a rectangular groove structure.

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