Blade coating mechanism and coating device

By designing a scraping mechanism and coating device, double-layer coating was achieved, solving the problem that small laboratory coating devices could only perform single-layer coating. This improved battery performance and met the requirements of multi-layer coating processes, making it suitable for small laboratory coating devices.

CN223669529UActive Publication Date: 2025-12-16FARASIS TECH (GANZHOU) CO LTD
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Patent Information

Application Number
CN202423191842.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-23
Publication Date
2025-12-16
Estimated Expiration
2034-12-23

AI Technical Summary

Technical Problem

Existing small-scale laboratory coating devices can only provide single-layer coating, which cannot meet the development needs of multi-layer coating processes.

Method used

A coating mechanism is designed, including first and second coating components. The height of the coating components is adjusted by an adjustment component to achieve double-layer coating. The coating device includes a housing, a support plate, a drive mechanism, and a coating mechanism. The coating process is optimized by using a vacuum and heating mechanism.

Benefits of technology

It fulfills the development requirements of multi-layer coating process, improves battery performance, and the coating device is small in size, occupies little area, is simple to operate, and is highly efficient, making it suitable for laboratory research and development.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a blade coating mechanism and a coating device. The blade coating mechanism comprises a main body, a first adjusting assembly, a first blade coating piece, a second adjusting assembly and a second blade coating piece. The first adjusting assembly is arranged on the body. The first blade coating part is used for blade coating of slurry on a battery pole piece base material, the first blade coating part is connected with the first adjusting assembly, and the first adjusting assembly can adjust the height of the first blade coating part. The second adjusting assembly is arranged on the body. The second blade coating part is used for blade coating of the slurry on the battery pole piece base material, the second blade coating part is connected with the second adjusting assembly, the second adjusting assembly can adjust the height of the second blade coating part, and the second blade coating part and the first blade coating part are oppositely arranged in the horizontal direction.
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Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of battery manufacturing, especially to the scraping mechanism and coating device. BACKGROUND

[0002] The pole piece is the core of the lithium ion battery. The preparation process of the pole piece is mixing solvent, binder, conductive agent and active material, and then preparing slurry after stirring and dispersing. The slurry is uniformly coated on the surface of the substrate by the coating device, and then dried and rolled to form the pole piece. In the actual production process, the coating device has the characteristics of high price, large size, large coating amount, large floor area and high energy consumption, and is not suitable for laboratory research and development stage. The small coating device in the laboratory needs to meet the requirements of small floor area, small coating amount, adjustable thickness, flexible operation and high efficiency. However, the existing small coating device in the laboratory can only provide single-layer coating mode, and cannot adapt to the development needs of multi-layer coating process. UTILITY MODEL CONTENT

[0003] The main purpose of the utility model is to provide a scraping mechanism and coating device, which aims to solve the technical problem that the existing small coating device in the laboratory can only provide single-layer coating mode and cannot adapt to the development needs of multi-layer coating process.

[0004] In order to realize the above-mentioned utility model purpose, the first aspect of the utility model provides a scraping mechanism.

[0005] A scraping mechanism comprises:

[0006] a main body;

[0007] a first adjusting assembly arranged on the main body;

[0008] a first scraping member for scraping the slurry on the battery pole piece substrate, the first scraping member is connected with the first adjusting assembly, and the first adjusting assembly can adjust the height of the first scraping member;

[0009] a second adjusting assembly arranged on the main body;

[0010] a second scraping member for scraping the slurry on the battery pole piece substrate, the second scraping member is connected with the second adjusting assembly, and the second adjusting assembly can adjust the height of the second scraping member, and the second scraping member and the first scraping member are arranged opposite to each other along the horizontal direction.

[0011] In one of the embodiments, the main body comprises a first support plate, a second support plate and a mounting plate, the first support plate and the second support plate are oppositely arranged, one end of the mounting plate is connected to the top of the first support plate, and the other end is connected to the top of the second support plate, and the first adjusting assembly and the second adjusting assembly are arranged on the mounting plate.

[0012] In one of the embodiments, the relative distance between the first support plate and the second support plate is matched with the length of the first scraping member; and / or

[0013] The relative distance between the first support plate and the second support plate is matched with the length of the second scraping member.

[0014] In one of the embodiments, a drop opening is formed on the mounting plate, and the drop opening is located above the first scraping member and the second scraping member.

[0015] In one of the embodiments, the scraping mechanism further comprises an elastic member, one end of the elastic member is connected to the mounting plate, the other end is connected to the first scraping member, and the elastic member is arranged in a vertical direction.

[0016] In one of the embodiments, the first adjusting assembly comprises a micrometer and a connecting rod, one end of the connecting rod is connected to the micrometer, the other end is connected to the first scraping member, the connecting rod is movably arranged in the main body, and the connecting rod is arranged in a vertical direction.

[0017] In one of the embodiments, a plurality of first adjusting assemblies are arranged on the main body; and / or

[0018] A plurality of second adjusting assemblies are arranged on the main body.

[0019] The utility model discloses a second aspect proposes a kind of coating device, including box, bearing plate, drive mechanism and above-mentioned scraping mechanism, the bearing plate is arranged at the top of the box, the scraping mechanism is placed on the bearing plate, and is connected with the drive mechanism, the bearing plate is used to carry the base material of battery pole piece, the drive mechanism is used to drive the scraping mechanism relative to the bearing plate moves, to enable the first scraping member and second scraping member of the scraping mechanism can be scraped to the slurry on the battery pole piece base material.

[0020] In one of the embodiments, a cavity is formed in the box, a vacuumizing mechanism is arranged in the cavity, the vacuumizing mechanism is used to extract gas in the cavity, a gap is formed on the bearing plate, and the gap is communicated with the cavity.

[0021] In one of the embodiments, the coating device comprises a heating mechanism arranged in the cavity, which is used to heat the carrier plate to dry the coated battery pole piece.

[0022] Advantages:

[0023] The first scraping member and the second scraping member are arranged opposite to each other in the horizontal direction. The first scraping member and the second scraping member can scrape the slurry on the battery pole piece substrate. During operation, the height of the first scraping member is adjusted by the first adjusting assembly, and the height of the second scraping member is adjusted by the second adjusting assembly, so that the height of the first scraping member is lower than the height of the second scraping member. That is, the first scraping member is closer to the battery pole piece substrate than the second scraping member. In the advancing direction of the scraping mechanism, the first scraping member is located in the front, and the second scraping member is located in the rear. The slurry is supplemented in front of the first scraping member, and after being scraped by the first scraping member, the slurry forms a lower layer area. The slurry is supplemented between the first scraping member and the second scraping member, and after being scraped by the second scraping member, the slurry forms an upper layer area, thereby forming double-layer coating, so as to improve the performance of the battery and meet the development needs of multi-layer coating process. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 FIG. 1 is a structural schematic view of a scraping mechanism according to an embodiment of the present application.

[0025] Figure 2 FIG. 2 is another angle of the structural schematic view of the scraping mechanism according to the embodiment of the present application.

[0026] Figure 3 FIG. 3 is a front view of the scraping mechanism according to the embodiment of the present application.

[0027] Figure 4 FIG. 4 is a structural schematic view of a coating device (hidden scraping mechanism) according to an embodiment of the present application.

[0028] Wherein:

[0029] 10, scraping mechanism;

[0030] 100, main body; 110, first support plate; 120, second support plate; 130, mounting plate; 131, feeding port; 140, fixed rod; 150, elastic member;

[0031] 200, first adjusting assembly; 210, micrometer; 220, connecting rod; 230, micrometer.

[0032] 300, first scraping member;

[0033] 400, second adjusting assembly;

[0034] 500, second doctor blade;

[0035] 600, box;

[0036] 700, carrier plate; 710, gap;

[0037] 800, driving mechanism;

[0038] 910, vacuumizing mechanism; 920, heating mechanism;

[0039] The implementation, functional features and advantages of the utility model will be further explained in combination with embodiments and with reference to the drawings. DETAILED DESCRIPTION

[0040] It should be understood that the specific embodiments described herein are merely intended to explain the utility model, and are not intended to limit the utility model.

[0041] In the description of the utility model, it should be understood that the orientation or position relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the utility model, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0042] In the description of the utility model, it should be noted that, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, it can be directly connected, or indirectly connected through an intermediate medium, it can be the communication between two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0043] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can include that the first and second features are in direct contact, or the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature is "on", "above" and "on the surface of" the second feature, which includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature is "under", "below" and "under" the second feature, which includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0044] As shown in Figures 1 to 4 In some embodiments, a doctoring mechanism 10 includes a main body 100, a first adjusting assembly 200, a first doctoring member 300, a second adjusting assembly 400 and a second doctoring member 500. The first adjusting assembly 200 is arranged on the main body 100. The first doctoring member 300 is used for doctoring slurry on a battery tab substrate, the first doctoring member 300 is connected with the first adjusting assembly 200, and the first adjusting assembly 200 can adjust the height of the first doctoring member 300. The second adjusting assembly 400 is arranged on the main body 100. The second doctoring member 500 is used for doctoring slurry on the battery tab substrate, the second doctoring member 500 is connected with the second adjusting assembly 400, and the second adjusting assembly 400 can adjust the height of the second doctoring member 500. The second doctoring member 500 is arranged opposite to the first doctoring member 300 in a horizontal direction. Specifically, the first doctoring member 300 and the second doctoring member 500 can be doctor blades.

[0045] The height of the first doctoring member 300 is adjusted by the first adjusting assembly 200, and the height of the second doctoring member 500 is adjusted by the second adjusting assembly 400, so as to adjust the thickness of the slurry on the battery tab substrate. When the height of the first doctoring member 300 and the second doctoring member 500 is higher, the thickness of the slurry on the battery tab substrate is thicker. When the height of the first doctoring member 300 and the second doctoring member 500 is lower, the thickness of the slurry on the battery tab substrate is thinner.

[0046] In operation, the height of the first doctor blade 300 is adjusted to be lower than the height of the second doctor blade 500 through the first adjusting assembly 200 and the second adjusting assembly 400. That is, the first doctor blade 300 is closer to the battery pole piece substrate than the second doctor blade 500. In the advancing direction of the doctor blade mechanism 10, the first doctor blade 300 is located in front, and the second doctor blade 500 is located in back. The slurry is replenished in front of the first doctor blade 300, and after being scraped by the first doctor blade 300, the slurry forms a lower layer area. The slurry is replenished between the first doctor blade 300 and the second doctor blade 500, and after being scraped by the second doctor blade 500, the slurry forms an upper layer area, thereby forming double-layer coating. The proportion of the slurry in the upper and lower layers in the coating process can be accurately controlled, the surface density of the upper and lower layers can be controlled, the performance of the battery can be improved, and the development demand of the multi-layer coating process can be met.

[0047] In some embodiments, the main body 100 includes a first support plate 110, a second support plate 120, and a mounting plate 130. The first support plate 110 and the second support plate 120 are oppositely arranged. One end of the mounting plate 130 is connected to the top of the first support plate 110, and the other end is connected to the top of the second support plate 120. The first adjusting assembly 200 and the second adjusting assembly 400 are arranged on the mounting plate 130. The first support plate 110, the second support plate 120, and the mounting plate 130 form a stable overall structure, providing a basic framework for the installation and operation of the first adjusting assembly 200, the second adjusting assembly 400, and the first doctor blade 300 and the second doctor blade 500.

[0048] It should be noted that the connection of the first adjusting assembly 200 and the second adjusting assembly 400 with the mounting plate 130 enables the adjusting assembly to adjust the height of the doctor blade on a stable basis. This connection method facilitates the integration of the adjusting function into the structure of the main body 100, facilitating operation and control.

[0049] Specifically, the main body 100 further includes a fixed rod 140. One end of the fixed rod 140 is connected to the first support plate 110, and the other end is connected to the second support plate 120. The fixed rod 140 can enhance the structural stability of the first support plate 110 and the second support plate 120. The fixed rod 140 can be arranged at the bottom of the first support plate 110 and the second support plate 120.

[0050] Specifically, the first support plate 110 and the second support plate 120 are arranged in parallel.

[0051] Specifically, the first support plate 110 and the second support plate 120 can both be right-angled trapezoidal. The length of the bottom of the first support plate 110 is greater than the length of the top of the second support plate 120. The length of the bottom of the second support plate 120 is greater than the length of the top of the second support plate 120.

[0052] In some embodiments, the relative distance between the first support plate 110 and the second support plate 120 is adapted to the length of the first doctor blade 300. The relative distance between the first support plate 110 and the second support plate 120 is adapted to the length of the second doctor blade 500. In this way, when the first doctor blade 300 and the second doctor blade 500 are used to doctor the slurry on the battery pole piece substrate, the shaking of the doctor blades in the horizontal direction can be reduced. During the doctoring process, the first doctor blade 300 and the second doctor blade 500 can be offset in the horizontal direction due to the resistance of the slurry, which can result in uneven doctoring. When the relative distance between the first support plate 110 and the second support plate 120 is adapted to the length of the first doctor blade 300, the first doctor blade 300 and the second doctor blade 500 can doctor the slurry more stably, and the doctoring precision can be ensured.

[0053] In some embodiments, the mounting plate 130 is provided with a feeding opening 131, and the feeding opening 131 is located above the first doctor blade 300 and the second doctor blade 500. The slurry can pass through the feeding opening 131 and enter the space between the first doctor blade 300 and the second doctor blade 500.

[0054] In some embodiments, the doctoring mechanism 10 further comprises an elastic member 150. One end of the elastic member 150 is connected to the mounting plate 130, and the other end of the elastic member 150 is connected to the first doctor blade 300. The elastic member 150 is arranged in the vertical direction. The elastic member 150 can reduce the swinging of the first doctor blade 300 in the doctoring direction.

[0055] Specifically, the elastic member 150 can be a spring.

[0056] In some embodiments, an elastic member 150 can be arranged between the second doctor blade 500 and the mounting plate 130 to reduce the swinging of the second doctor blade 500 in the doctoring direction.

[0057] In some embodiments, the first adjusting assembly 200 comprises a micrometer 210 and a connecting rod 220. One end of the connecting rod 220 is connected to the micrometer 210, and the other end of the connecting rod 220 is connected to the first doctor blade 300. The connecting rod 220 is movably arranged in the main body 100, and the connecting rod 220 is arranged in the vertical direction.

[0058] It should be noted that the micrometer 210 is a precise measuring and adjusting tool, which can realize high-precision length adjustment. The connecting rod 220 is connected to the micrometer 210 at one end and to the first scraping member 300 at the other end, so that the micrometer 210 can adjust the height of the first scraping member 300. The connecting rod 220 is movably arranged in the main body 100 and arranged in the vertical direction, so that the connecting rod 220 can freely move in the vertical direction in the structure of the main body 100, thereby realizing the position adjustment of the first scraping member 300 in the vertical direction. When the micrometer 210 is operated for adjustment, the precise screw structure inside the micrometer 210 will cause the connecting rod 220 to displace in the vertical direction. In the process of coating the battery pole piece, the thickness of the paste on the pole piece has an important influence on the performance of the battery, and the use of the micrometer 210 for adjustment can accurately adjust the height of the scraping member to the required position, ensure that the coating thickness meets the requirements, thereby improving the quality of the battery pole piece and improving the performance of the battery.

[0059] Specifically, the first adjusting assembly 200 further comprises a micrometer 230. The micrometer 230 is arranged on the main body 100, and the micrometer 230 can adjust the height of the first scraping member 300 together with the micrometer 210.

[0060] In other embodiments, the second adjusting assembly 400 has the same structure as the first adjusting assembly 200.

[0061] In some embodiments, a plurality of first adjusting assemblies 200 are arranged at intervals on the main body 100, and the plurality of first adjusting assemblies 200 finely adjust different positions of the first scraping member 300. A plurality of second adjusting assemblies 400 are arranged at intervals on the main body 100, and the plurality of second adjusting assemblies 400 finely adjust different positions of the second scraping member 500.

[0062] Please refer to Figure 4 In another embodiment, a coating device comprises a box body 600, a bearing plate 700, a driving mechanism 800, and the above-mentioned scraping mechanism 10. The bearing plate 700 is arranged on the top of the box body 600, the scraping mechanism 10 is placed on the bearing plate 700 and connected with the driving mechanism 800, the bearing plate 700 is used to bear the substrate of the battery pole piece, and the driving mechanism 800 is used to drive the scraping mechanism 10 to move relative to the bearing plate 700, so that the first scraping member 300 and the second scraping member 500 of the scraping mechanism 10 can scrape the paste on the substrate of the battery pole piece. The driving mechanism 800 drives the scraping mechanism 10 to move relative to the bearing plate 700, so that the scraping mechanism 10 can perform continuous scraping operation on the substrate of the battery pole piece. The coating device has the advantages of small size, small floor area, simple operation, high coating efficiency, low cost, etc., and is suitable for laboratory research and development stage.

[0063] Specifically, the speed at which the driving mechanism 800 drives the doctor blade coating mechanism 10 can be 10-20 m / min.

[0064] More specifically, the speed at which the driving mechanism 800 drives the doctor blade coating mechanism 10 can be 12-15 m / min.

[0065] Specifically, a cavity is formed in the box 600, and a vacuumizing mechanism 910 is arranged in the cavity. The vacuumizing mechanism 910 is used to extract the gas in the cavity. A gap 710 is formed in the carrier plate 700, and the gap 710 is in communication with the cavity. The substrate of the battery pole piece is placed on the carrier plate 700, and the gap 710 can be sealed so that the cavity becomes a closed space. The vacuumizing mechanism 910 extracts the gas in the cavity, and the battery pole piece substrate can be tightly attached to the carrier plate 700, which facilitates the doctor blade coating of the slurry on the battery pole piece substrate by the first doctor blade coating member 300 and the second doctor blade coating member 500.

[0066] Specifically, the battery pole piece substrate can be a copper foil, and the vacuumizing mechanism 910 can make the copper foil flat and avoid wrinkles.

[0067] It should be noted that too high a vacuum degree in the cavity can cause the copper foil to deform, and too low a vacuum degree can cause the copper foil to fail to be tightly attached to the carrier plate 700. The vacuum degree in the cavity is set to be in the range of -10 kpa to -70 kpa. More specifically, the vacuum degree in the cavity can also be set to be in the range of -20 kpa to -50 kpa.

[0068] The coating device comprises a heating mechanism 920 arranged in the cavity. The heating mechanism 920 is used to heat the carrier plate, and then dry the coated battery pole piece. After the coating process is completed, the heating mechanism 920 is used to dry the battery pole piece, so that the solvent in the slurry volatilizes to form a solid coating.

[0069] It should be noted that too low a heating temperature of the heating mechanism 920 can result in long heating time and low efficiency, and too high a heating temperature can easily cause the pole piece to crack. The heating temperature of the heating mechanism 920 is in the range of 50-150°C. More specifically, the heating temperature of the heating mechanism 920 is in the range of 80-120°C.

[0070] Coating process:

[0071] S100, turn on the power supply and start the heating mechanism of the coating device, and set the heating temperature to 100°C.

[0072] S200, after the heating temperature reaches, start the vacuumizing mechanism, and set the vacuum degree to -30 kpa.

[0073] S300, place a 30 cm long copper foil flat on the carrier plate, and use a dust-free paper to flatten the copper foil.

[0074] S400, place the adjustable doctor blade mechanism on the copper foil surface of the carrier plate, control the distance between the first doctor blade and the copper foil to be 100 μm and the distance between the second doctor blade and the copper foil to be 200 μm by adjusting the micrometer.

[0075] S500, add 30 g of corresponding slurry into the feeding port.

[0076] S600, start the driving mechanism of the small doctor blade machine, set the speed to 15 m / min, and drive the doctor blade mechanism to perform double-layer coating.

[0077] S700, after the coating is completed, take out the coating device, cover the doctor blade machine cover, heat and dry for 5 min, and then take out the battery pole piece after drying.

[0078] The above only describes the preferred embodiments of the present application, and does not limit the patent range of the present application, and any equivalent structure or equivalent process transformation obtained by using the content of the present application specification and drawings, or direct or indirect application in other related technical fields, are also included in the patent protection range of the present application.

Claims

1. A doctoring mechanism characterized by, The application relates to a coating device for battery pole pieces. The coating device comprises a main body, a first adjusting assembly arranged on the main body, a first coating piece for coating slurry on a battery pole piece substrate, the first coating piece being connected with the first adjusting assembly, and the first adjusting assembly being capable of adjusting the height of the first coating piece, a second adjusting assembly arranged on the main body, a second coating piece for coating slurry on the battery pole piece substrate, the second coating piece being connected with the second adjusting assembly, and the second adjusting assembly being capable of adjusting the height of the second coating piece, and the second coating piece being arranged opposite to the first coating piece in a horizontal direction. The main body comprises a first supporting plate, a second supporting plate and a mounting plate, the first supporting plate and the second supporting plate are arranged opposite to each other, one end of the mounting plate is connected with the top of the first supporting plate, the other end of the mounting plate is connected with the top of the second supporting plate, and the first adjusting assembly and the second adjusting assembly are arranged on the mounting plate. The relative distance between the first supporting plate and the second supporting plate is matched with the length of the first coating piece; and / or The relative distance between the first supporting plate and the second supporting plate is matched with the length of the second coating piece. A drop opening is arranged on the mounting plate, and the drop opening is located above the first coating piece and the second coating piece.

2. The doctoring mechanism of claim 1, wherein, The coating device further comprises an elastic piece, one end of the elastic piece is connected with the mounting plate, the other end of the elastic piece is connected with the first coating piece, and the elastic piece is arranged in a vertical direction.

3. The blade coating mechanism of claim 2, wherein, The first adjusting assembly comprises a micrometer and a connecting rod, one end of the connecting rod is connected with the micrometer, the other end of the connecting rod is connected with the first coating piece, the connecting rod is movably arranged in the main body, and the connecting rod is arranged in a vertical direction. A plurality of first adjusting assemblies are arranged on the main body in an interval manner; and / or 4. The blade coating mechanism of claim 2, wherein, A plurality of second adjusting assemblies are arranged on the main body in an interval manner.

5. The blade coating mechanism of claim 2, wherein, The coating device further comprises a box body, a bearing plate, a driving mechanism and the coating device, the bearing plate is arranged on the top of the box body, the coating device is arranged on the bearing plate and connected with the driving mechanism, the bearing plate is used for bearing the battery pole piece substrate, and the driving mechanism is used for driving the coating device to move relative to the bearing plate, so that the first coating piece and the second coating piece of the coating device can coat the slurry on the battery pole piece substrate.

6. The blade coating mechanism of claim 1, wherein, A cavity is arranged in the box body, a vacuumizing mechanism is arranged in the cavity, the vacuumizing mechanism is used for extracting gas in the cavity, and a gap is arranged on the bearing plate and communicates with the cavity.

7. The blade coating mechanism of claim 1, wherein, The coating device further comprises a heating mechanism, the heating mechanism is arranged in the cavity, and the heating mechanism is used for heating the bearing plate, so that the battery pole piece after coating can be dried. ​ 8. A coating apparatus characterized by comprising: ​ 9. The coating apparatus according to claim 8, wherein ​ 10. The coating apparatus of claim 9, wherein ​