Ceramic plate double-sided cleaning tank

Abstract

The utility model belongs to the technical field of ceramic plate cleaning machines, and particularly relates to a double-sided cleaning tank for a ceramic plate. The tank body comprises an upper spraying part, a middle cleaning part and a lower liquid collecting part; the upper spraying part is provided with at least one spraying pipe; the middle cleaning part is provided with a ceramic disc driving assembly and a cleaning assembly, and the ceramic disc driving assembly is used for placing and driving a ceramic disc to rotate; the cleaning assembly comprises a first driving motor, the first driving motor is fixed on the outer side of the tank body, and the first driving motor is provided with double output shafts; the cleaning parts are arranged on the two sides of the ceramic disc driving assembly correspondingly; and double output shafts of the first driving motor are in transmission connection with the cleaning parts on the two sides through chains. The cleaning assembly is used for solving the technical problems that in the prior art, a cleaning assembly of ceramic plate cleaning equipment is complex in structure, a plurality of power sources are needed for driving, synchronism is poor, the cleaning effect is poor, and ceramic plates are prone to deviating.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of ceramic plate cleaning machine, and particularly relates to a ceramic plate double-sided cleaning tank. BACKGROUND

[0002] In the semiconductor industry, ceramic plates are used as carriers in the production process, and are widely used in polishing, detection and other links in the semiconductor production process due to their good heat conduction performance, chemical resistance, wear resistance and sufficient mechanical strength.

[0003] As a carrier, the ceramic plate can be reused in the production link, but before reuse, the adhesive, powder and other impurities remaining on the surface of the ceramic plate need to be cleaned. The existing ceramic plate cleaning equipment has a complex transmission structure of the cleaning assembly for realizing the cleaning function, needs multiple power sources for driving, and thus has poor synchronism, which not only leads to poor cleaning effect, but also easily causes the ceramic plate to deviate. UTILITY MODEL CONTENTS

[0004] The utility model wants to overcome the prior art's insufficient, provides a ceramic plate double-sided cleaning tank for solving the technical problems of the prior art, such as the complex structure of the cleaning assembly of the ceramic plate cleaning equipment, the need for multiple power sources for driving, poor synchronism, poor cleaning effect, and the ceramic plate deviation.

[0005] The technical scheme for solving the above technical problems is as follows: a ceramic plate double-sided cleaning tank, comprising:

[0006] The tank body comprises an upper spraying part, a middle cleaning part and a lower liquid collecting part;

[0007] The upper spraying part is provided with at least one spraying pipe;

[0008] The middle cleaning part is provided with a ceramic plate driving assembly and a cleaning assembly, and the ceramic plate driving assembly is used for placing and driving the ceramic plate to rotate;

[0009] The cleaning assembly comprises:

[0010] A first driving motor is fixed outside the tank body, and the first driving motor is provided with double output shafts;

[0011] The cleaning parts are respectively arranged on both sides of the ceramic plate driving assembly;

[0012] The double output shafts of the first driving motor are respectively connected to the cleaning parts on both sides through chain transmission.

[0013] The utility model discloses a first drive motor drives both sides cleaning part to clean ceramic dish, simplify the drive structure, can also guarantee the synchronization of both sides cleaning part, improve the cleaning effect to ceramic dish.

[0014] Further: the ceramic dish drive assembly includes:

[0015] Main drive rod, the main drive rod traverses the middle cleaning part, one end of the main drive rod is connected with the second drive motor shaft, and the main drive rod is equipped with first transmission wheel, second transmission wheel and first limit wheel;

[0016] First transmission rod, the first transmission rod also traverses the middle cleaning part, and the first transmission rod is equipped with first driven wheel and second limit wheel;

[0017] Second transmission rod, the second transmission rod also traverses the middle cleaning part, and the second transmission rod is equipped with second driven wheel and cleaning wheel;

[0018] The main drive rod and the first transmission rod are in the same horizontal plane, and the second transmission rod is lower than the horizontal plane, the first transmission wheel is connected through belt drive with the first driven wheel, and the second transmission wheel is connected through belt drive with the second driven wheel;

[0019] The first limit wheel, the second limit wheel and the cleaning wheel are located in the same vertical plane.

[0020] The beneficial effects of the present step are: the first transmission rod and the second transmission rod can be rotated simultaneously by the main drive rod, so that the first limit wheel and the second limit wheel can hold the ceramic dish, and the cleaning wheel can clean the circumference of the ceramic, so that the cleaning is more clean.

[0021] Further: the circumference of the first limit wheel and the second limit wheel is provided with a groove, and the width of the groove is matched with the ceramic dish.

[0022] The beneficial effects of the present step are: the groove assists in limiting the ceramic dish.

[0023] Further: the cleaning part is a round brush;

[0024] The center of the round brush is located within the radius range of the ceramic dish, and the diameter of the round brush is greater than the radius of the ceramic dish.

[0025] The beneficial effects of the present step are: to ensure the cleaning effect.

[0026] Further: the chain transmission of the two round brushes is positive rotation structure and reverse rotation structure respectively.

[0027] The beneficial effects of the present step are: to balance the force on both sides of the ceramic dish and keep stable.

[0028] Further, the lower liquid collecting part is provided with a chamber, and the chamber is provided with a liquid level sensor.

[0029] The beneficial effect of the present step is to collect and monitor the liquid level of the cleaning wastewater.

[0030] Further, the bottom of the upper spraying part is inserted into the top of the middle cleaning part.

[0031] The upper spraying part and the middle cleaning part are fastened by buckles.

[0032] The beneficial effect of the present step is to facilitate maintenance.

[0033] The beneficial effect of the present utility model is:

[0034] 1. The driving structure of the cleaning assembly is simpler than the existing structure, and a driving motor can synchronously drive the cleaning parts on both sides of the ceramic disc to clean, so that the cleaning effect is better.

[0035] 2. The lower liquid collecting part is additionally installed, which is easier to collect cleaning wastewater, so that the cleaning wastewater can be settled in the lower liquid collecting part to preliminarily separate impurities. BRIEF DESCRIPTION OF DRAWINGS

[0036] In order to more clearly illustrate the specific embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or the prior art description. Obviously, the drawings described below are some embodiments of the present utility model, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0037] Figure 1 It is a perspective view of a ceramic disc double-sided cleaning tank provided by the present utility model;

[0038] Figure 2 It is a structural schematic view of a ceramic disc double-sided cleaning tank provided by the present utility model;

[0039] Figure 3 It is a rear view of Figure 1

[0040] It is a left view of Figure 4 Figure 1 It is a right view of

[0041] Figure 5 Figure 1

[0042] Figure 6 It is a sectional view of A-A in Figure 5 ​​​​

[0043] Figure 7 A three-dimensional view of a ceramic plate double-sided cleaning tank removing a middle cleaning part shell is provided in the utility model;

[0044] Figure 8 A structure schematic view of a ceramic plate double-sided cleaning tank removing a middle cleaning part shell is provided in the utility model;

[0045] Figure 9 For Figure 8 The rear view is shown in the figure.

[0046] Figure 10 For Figure 7 The local enlarged view of B part.

[0047] Reference signs:

[0048] 1-tank body; 2-shower pipe; 3-ceramic plate driving assembly; 4-cleaning assembly; 5-liquid level sensor; 6-buckle; 7-ceramic plate;

[0049] 11-upper shower part; 12-middle cleaning part; 13-lower liquid collecting part; 31-second driving motor; 32-main driving rod; 33-first transmission rod; 34-second transmission rod; 41-first driving motor; 42-cleaning part;

[0050] 321-first transmission wheel; 322-second transmission wheel; 323-first limit wheel; 331-first driven wheel. DETAILED DESCRIPTION

[0051] The embodiments of the technical scheme of the utility model will be described in detail below with reference to the drawings. The following embodiments are only used to more clearly illustrate the technical scheme of the utility model, therefore only as an example, and cannot limit the protection scope of the utility model.

[0052] It should be noted that, unless otherwise specified, the technical terms or scientific terms used in the present application should be understood as the usual meaning understood by the technical personnel in the field to which the utility model belongs.

[0053] In the description of the present application, it should be understood that the orientation or position relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation on the utility model.

[0054] In addition, the terms "first", "second" and the like are used only for descriptive purposes and do not imply or imply relative importance or imply the number of the indicated technical features. In the description of the utility model, the meaning of "multiple" is more than two, unless otherwise specifically limited.

[0055] In this application, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be broadly understood, for example, it can be fixed connection, or detachable connection, or integrated; it can be directly connected, or indirectly connected through intermediate medium, it can be the internal communication of two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0056] In this application, unless otherwise specifically defined and limited, the first feature is "on" or "under" the second feature. The first and second features can be in direct contact, or the first and second features can be indirectly contacted through intermediate medium. Moreover, the first feature "on", "above" and "above" the second feature can be the first feature directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "under", "below" and "below" the second feature can be the first feature directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0057] Embodiment

[0058] As shown in Figures 1-10 The utility model provides a kind of double-sided cleaning tank of ceramic plate, including:

[0059] The tank body 1, the tank body 1 includes upper shower portion 11, middle cleaning portion 12 and lower liquid collecting portion 13;

[0060] The upper shower portion 11 is equipped with at least one shower pipe 2;

[0061] The middle cleaning portion 12 is equipped with ceramic plate driving assembly 3 and cleaning assembly 4, and the ceramic plate driving assembly 3 is used to place, drive ceramic plate 7 rotation;

[0062] The cleaning assembly 4 includes:

[0063] First drive motor 41, the first drive motor 41 is fixed on the outside of the tank body 1, and the first drive motor 41 is equipped with double output shafts;

[0064] Cleaning portion 42, the cleaning portion 42 is respectively arranged on the two sides of the ceramic plate driving assembly 3;

[0065] The double output shafts of the first driving motor 41 are connected with the cleaning parts 42 on both sides through chain transmission respectively.

[0066] The first driving motor 41 drives the cleaning parts 42 on both sides to clean the ceramic plate 7, the driving structure is simplified, the synchronization of the cleaning parts 42 on both sides is ensured, and the cleaning effect on the ceramic plate 7 is improved.

[0067] On the basis of the above technical scheme, the ceramic plate driving assembly 3 comprises:

[0068] The main driving rod 32 crosses the middle cleaning part 12, one end of the main driving rod 32 is connected with the second driving motor 31 in a shaft mode, and the main driving rod 32 is provided with a first transmission wheel 321, a second transmission wheel 322 and a first limiting wheel 323.

[0069] The first transmission rod 33 also crosses the middle cleaning part 12, and the first transmission rod 33 is provided with a first driven wheel 331 and a second limiting wheel.

[0070] The second transmission rod 34 also crosses the middle cleaning part 12, and the second transmission rod 34 is provided with a second driven wheel and a cleaning wheel.

[0071] The main driving rod 32 and the first transmission rod 33 are located in the same horizontal plane, the second transmission rod 34 is lower than the horizontal plane, the first transmission wheel 321 is connected with the first driven wheel 331 through belt transmission, and the second transmission wheel 322 is connected with the second driven wheel through belt transmission.

[0072] The first limiting wheel 323, the second limiting wheel and the cleaning wheel are located in the same vertical plane, the main driving rod 32 drives the first transmission rod 33 and the second transmission rod 34 to rotate at the same time, the first limiting wheel 323 and the second limiting wheel can hold the ceramic plate 7 and drive the ceramic plate 7 to rotate, the cleaning wheel can rotate, the ceramic plate 7 can be cleaned on the circumference in combination with the rotation of the ceramic plate 7, and the ceramic plate 7 can be cleaned in all directions.

[0073] In addition, the first limiting wheel 323 and the second limiting wheel are made of flexible materials such as polyurethane, which can increase the contact area with the ceramic plate 7 and the friction force between the two.

[0074] On the basis of the above technical scheme, the circumference of the first limiting wheel 323 and the second limiting wheel is provided with a groove, and the width of the groove is matched with the ceramic plate 7.

[0075] The ceramic disc 7 is mainly limited by the two cleaning parts 42, and the first limiting wheel 323 and the second limiting wheel upper groove assist in limiting the ceramic disc 7.

[0076] On the basis of the above technical scheme, the cleaning part 42 is a round brush.

[0077] The center of the round brush is located in the radius range of the ceramic disc 7, and the diameter of the round brush is greater than the radius of the ceramic disc 7.

[0078] The cleaning part can be a brush disc or a brush roller, and in the embodiment, a round brush is preferred. By setting the installation position and diameter of the round brush, it is ensured that the rotation area of the round brush exceeds the radius range of the ceramic disc 7, and in combination with the self-rotation of the ceramic disc 7, it is ensured that the round brush can contact every position of the ceramic disc 7, thereby improving the cleaning effect.

[0079] On the basis of the above technical scheme, the chain transmission of the two round brushes is respectively a forward rotation structure and a reverse rotation structure.

[0080] In combination with Figure 8 and Figure 9 It can be seen that the first driving motor 41 and the round brush adopt chain transmission, one side of which is composed of two sprockets and a chain, so as to ensure that the rotation directions of the round brush and the first driving motor 41 are consistent, and the other side is additionally provided with two sprockets, so that the rotation directions of the round brush and the first driving motor 41 are opposite, thereby enabling the forces on both sides of the ceramic disc 7 to be balanced and stable.

[0081] On the basis of the above technical scheme, the lower liquid collecting part 13 is provided with a chamber, and the chamber is provided with a liquid level sensor 5.

[0082] The cleaning wastewater is collected and the liquid level of the cleaning wastewater is monitored. In addition, the chamber can also preliminarily perform sedimentation treatment on the cleaning wastewater, the bottom of the chamber is provided with a sewage outlet, and the upper part of the chamber is also provided with an overflow port and the like.

[0083] On the basis of the above technical scheme, the bottom of the upper spraying part 11 is inserted into the top of the middle cleaning part 12.

[0084] The upper spraying part 11 and the middle cleaning part 12 are fastened by the buckle 6.

[0085] When the internal ceramic disc driving assembly 3 or the cleaning assembly 4 needs to be repaired or replaced with accessories, the depth of the groove body 1 is deep, which increases the construction difficulty. Therefore, the upper spraying part 11 and the middle cleaning part 12 are designed as a movable structure, when construction is needed, the upper spraying part 11 is temporarily disassembled, so as to reduce the depth of the groove body 1, thereby facilitating daily maintenance or repair.

[0086] Finally, it should be noted that: the above embodiments are used to illustrate the technical solutions of the present application, but not limited to them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A double-sided cleaning tank for ceramic discs, characterized in that, include: The tank body includes an upper spray section, a middle cleaning section, and a lower liquid collection section; The upper spray section is provided with at least one spray pipe; The cleaning section is equipped with a ceramic disc drive assembly and a cleaning assembly. The ceramic disc drive assembly is used to place and drive the ceramic disc to rotate. The cleaning assembly includes: A first drive motor is fixed to the outside of the tank and has dual output shafts. A cleaning section is provided on both sides of the ceramic disk drive assembly; The dual output shafts of the first drive motor are respectively connected to the cleaning sections on both sides via chain drive.

2. The double-sided cleaning tank for ceramic discs according to claim 1, characterized in that, The ceramic disk drive assembly includes: The main drive rod passes through the middle cleaning section, one end of which is connected to the shaft of the second drive motor. The main drive rod is provided with a first transmission wheel, a second transmission wheel, and a first limiting wheel. A first transmission rod, which also traverses the central cleaning section, is provided with a first driven wheel and a second limiting wheel; The second transmission rod also traverses the middle cleaning section, and the second transmission rod is provided with a second driven wheel and a cleaning wheel; The main drive rod and the first transmission rod are on the same horizontal plane, the second transmission rod is lower than the horizontal plane, the first transmission wheel is connected to the first driven wheel by belt drive, and the second transmission wheel is connected to the second driven wheel by belt drive. The first limiting wheel, the second limiting wheel, and the cleaning wheel are located in the same vertical plane.

3. The double-sided cleaning tank for ceramic discs according to claim 2, characterized in that, Both the first limiting wheel and the second limiting wheel have grooves on their circumferential surfaces, and the width of the grooves is adapted to the ceramic disc.

4. The double-sided cleaning tank for ceramic discs according to claim 1, characterized in that, The cleaning section is a round brush; The center of the circular brush is located within the radius of the ceramic disc, and the diameter of the circular brush is larger than the radius of the ceramic disc.

5. The double-sided cleaning tank for ceramic discs according to claim 4, characterized in that, The chain drives of the two circular brushes are respectively a forward rotation structure and a reverse rotation structure.

6. The double-sided cleaning tank for ceramic discs according to claim 1, characterized in that, The lower liquid collection section is provided with a chamber, and a liquid level sensor is provided in the chamber.

7. The double-sided cleaning tank for ceramic discs according to claim 1, characterized in that, The bottom of the upper spray section is inserted into the top of the middle cleaning section; The upper spray section and the middle cleaning section are fastened by fasteners.

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